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公开(公告)号:US20210167201A1
公开(公告)日:2021-06-03
申请号:US17176146
申请日:2021-02-15
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach
IPC: H01L29/78 , H01L27/11 , H01L27/11578 , G11C16/02 , G11C11/404 , H01L27/24 , G11C11/4097 , H01L27/108 , H01L27/115 , G11C16/04 , G11C11/412
Abstract: A 3D semiconductor device including: a first level including a first single-crystal layer, a plurality of first transistors, and at least one metal layer, the metal layer overlaying the first single crystal layer with interconnects between the first transistors forming control circuits; a second level overlaying the metal layer, a plurality of second transistors, and a plurality of first memory cells including at least one of the second transistors; a third level overlaying the second level and including a plurality of third transistors, including second memory cells each including at least one third transistor, where at least one of the second memory cells is at least partially atop of the control circuits, where the control circuits are connected so to control second transistors and third transistors, where the second level is bonded to the third level, where the bonded includes oxide to oxide bonds; and a fourth level above the third level, including a second single-crystal layer.
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公开(公告)号:US20210167131A1
公开(公告)日:2021-06-03
申请号:US17121731
申请日:2020-12-14
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Deepak C. Sekar , Brian Cronquist
IPC: H01L27/24 , H01L21/268 , H01L21/683 , H01L21/762 , H01L21/822 , H01L21/84 , H01L27/06 , H01L27/108 , H01L27/11 , H01L27/11529 , H01L27/11551 , H01L27/11578 , H01L27/12 , H01L29/78 , H01L29/423 , H01L27/22
Abstract: A method for producing a 3D memory device, the method comprising: providing a first level comprising a single crystal layer; forming at least one second level above said first level; performing a first etch step comprising etching holes within said second level; forming at least one third level above said at least one second level; performing a second etch step comprising etching holes within said third level; performing additional processing steps to form a plurality of first memory cells within said second level and a plurality of second memory cells within said third level, wherein each of said first memory cells comprise one first transistor, wherein each of said second memory cells comprise one second transistor, wherein at least one of said first or second transistors has a channel, a source and a drain having the same doping type, and wherein said forming at least one third level comprises forming a window within said third level to allow lithography alignment through said third level to an alignment mark underneath.
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公开(公告)号:US20210159276A1
公开(公告)日:2021-05-27
申请号:US17114155
申请日:2020-12-07
Applicant: Monolithic 3D Inc.
Inventor: Deepak C. Sekar , Zvi Or-Bach
IPC: H01L27/24 , H01L21/268 , H01L21/683 , H01L21/762 , H01L21/822 , H01L21/84 , H01L27/06 , H01L27/108 , H01L27/11 , H01L27/11529 , H01L27/11551 , H01L27/11578 , H01L27/12 , H01L29/78 , H01L29/423 , H01L27/22
Abstract: A 3D semiconductor device, the device including: a first level including a first single crystal layer and first transistors, where the first transistors each include a single crystal channel; first metal layers interconnecting at least the first transistors; and a second level including a second single crystal layer and second transistors, where the second level overlays the first level, where the second transistors are horizontally oriented and include replacement gate, where the second level is bonded to the first level, and where the bonded includes oxide to oxide bonds.
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公开(公告)号:US20210159110A1
公开(公告)日:2021-05-27
申请号:US17140972
申请日:2021-01-04
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Brian Cronquist , Deepak C. Sekar
IPC: H01L21/683 , H01L21/74 , H01L21/762 , H01L21/768 , H01L21/822 , H01L21/8238 , H01L21/84 , H01L23/48 , H01L23/525 , H01L27/02 , H01L27/06 , H01L27/092 , H01L27/10 , H01L27/105 , H01L27/108 , H01L27/11 , H01L27/112 , H01L27/11526 , H01L27/11529 , H01L27/11551 , H01L27/11573 , H01L27/11578 , H01L27/118 , H01L27/12 , H01L29/423 , H01L29/66 , H01L29/78 , H01L29/788 , H01L29/792 , G11C8/16
Abstract: A 3D semiconductor device, the device including: a first level including a first single crystal layer, the first level including first transistors, where the first transistors each include a single crystal channel; first metal layers interconnecting at least the first transistors; and a second level including a second single crystal layer, the second level including second transistors, where the second level overlays the first level, where the second transistors are horizontally oriented, where the second transistors are raised source drain extension transistors, where the second level includes a memory array, where the first level includes control circuits to control data written to the memory array, where the second level is bonded to the first level, and where the bonded includes oxide to oxide bonds.
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公开(公告)号:US20210151450A1
公开(公告)日:2021-05-20
申请号:US16649660
申请日:2018-09-23
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Jin-Woo Han , Brian Cronquist , Eli Lusky
IPC: H01L27/11556 , H01L23/66 , H01L23/538 , H01L27/11582 , G11C5/02 , G11C5/06
Abstract: A 3D device, the device including: at least a first level including logic circuits; at least a second level including an array of memory cells; at least a third level including special circuits; and at least a fourth level including special connectivity structures, where the special connectivity structures include one of the following: a. waveguides, or b. differential signaling, or c. radio frequency transmission lines, or d. Surface Waves Interconnect (SWI) lines, and where the third level includes Radio Frequency (“RF”) circuits to drive the special connectivity structures, where the second level overlays the first level, where the third level overlays the second level, and where the fourth level overlays the third level.
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公开(公告)号:US20210143217A1
公开(公告)日:2021-05-13
申请号:US17121741
申请日:2020-12-14
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Deepak C. Sekar , Brian Cronquist
IPC: H01L27/24 , H01L21/268 , H01L21/683 , H01L21/762 , H01L21/822 , H01L21/84 , H01L27/06 , H01L27/108 , H01L27/11 , H01L27/11529 , H01L27/11551 , H01L27/11578 , H01L27/12 , H01L29/78 , H01L29/423 , H01L27/22
Abstract: A 3D semiconductor device, the device including: a first level including a single crystal layer, a first metal layer, a second metal layer above the first metal layer, and a third metal layer above the second metal layer, where the second metal layer is significantly thicker than either the third metal layer or the first metal layer, where the third metal layer is precisely aligned to the first metal layer with less than 20 nm misalignment; a second level including a first array of first memory cells, each of the first memory cells include first transistors; a third level including a second array of second memory cells, each of the second memory cells include second transistors, where the second level is above the third level, where the second transistors are self-aligned to the first transistors, being processed following the same lithography step; and periphery circuits connected by the second metal to control the memory cells, where the periphery circuits are either underneath or atop the memory cells.
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公开(公告)号:US11004719B1
公开(公告)日:2021-05-11
申请号:US17147320
申请日:2021-01-12
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Brian Cronquist , Deepak C. Sekar
IPC: H01L21/82 , H01L21/683 , H01L21/74 , H01L21/762 , H01L21/768 , H01L21/822 , H01L21/8238 , H01L21/84 , H01L23/48 , H01L23/525 , H01L27/02 , H01L27/06 , H01L27/092 , H01L27/10 , H01L27/105 , H01L27/108 , H01L27/11 , H01L27/112 , H01L27/11526 , H01L27/11529 , H01L27/11551 , H01L27/11573 , H01L27/11578 , H01L27/118 , H01L27/12 , H01L29/423 , H01L29/66 , H01L29/78 , H01L29/788 , H01L29/792 , G11C8/16 , H01L23/00 , H01L23/367 , H01L25/065 , H01L25/00
Abstract: A method for producing a 3D memory device, the method including: providing a first level including a first single crystal layer; forming at least one second level above the first level; performing a first etch step including etching holes within the second level; forming at least one third level above the at least one second level; performing a second etch step including etching holes within the third level; performing additional processing steps to form a plurality of first memory cells within the second level and a plurality of second memory cells within the third level; and performing a bonding of a fourth level above the third level, where the fourth level includes a second single crystal layer, where each of the first memory cells include one first transistor, where each of the second memory cells include one second transistor, where at least one of the first or second transistors has a channel, a source and a drain having a same doping type.
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公开(公告)号:US11004694B1
公开(公告)日:2021-05-11
申请号:US17115766
申请日:2020-12-08
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Brian Cronquist , Deepak Sekar
IPC: H01L23/498 , H01L21/48 , H01L23/34 , H01L27/02 , H01L21/8234 , H01L27/06 , H01L27/098 , H01L23/522 , H01L23/367 , H01L27/092 , H01L25/00 , H01L23/60 , H01L25/065 , H01L23/373
Abstract: A 3D semiconductor device, the device including: a first level, where the first level includes a first layer, the first layer including first transistors, and where the first level includes a second layer, the second layer including first interconnections; a second level overlaying the first level, where the second level includes a third layer, the third layer including second transistors, and where the second level includes a fourth layer, the fourth layer including second interconnections; and a plurality of connection paths, where the plurality of connection paths provides connections from a plurality of the first transistors to a plurality of the second transistors, where the second level is bonded to the first level, where the bonded includes oxide to oxide bond regions, where the bonded includes metal to metal bond regions, where the second level includes at least one memory array, and where the third layer includes material other than silicon.
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公开(公告)号:US20210134654A1
公开(公告)日:2021-05-06
申请号:US17121726
申请日:2020-12-14
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Deepak C. Sekar , Brian Cronquist
IPC: H01L21/762 , H01L23/00 , H01L21/84 , H01L25/16 , H01L25/065 , G02F1/017 , G02B6/12
Abstract: A multi-level semiconductor device, the device including: a first level including integrated circuits; a second level including an electromagnetic waveguide, where the second level is disposed above the first level, where the first level includes crystalline silicon; and an oxide layer disposed between the first level and the second level, where the second level is bonded to the oxide layer, and where the bonded includes oxide to oxide bonds.
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公开(公告)号:US20210134646A1
公开(公告)日:2021-05-06
申请号:US17147320
申请日:2021-01-12
Applicant: Monolithic 3D Inc.
Inventor: Zvi Or-Bach , Brian Cronquist , Deepak C. Sekar
IPC: H01L21/683 , H01L21/74 , H01L21/762 , H01L21/768 , H01L21/822 , H01L21/8238 , H01L21/84 , H01L23/48 , H01L23/525 , H01L27/02 , H01L27/06 , H01L27/092 , H01L27/10 , H01L27/105 , H01L27/108 , H01L27/11 , H01L27/112 , H01L27/11526 , H01L27/11529 , H01L27/11551 , H01L27/11573 , H01L27/11578 , H01L27/118 , H01L27/12 , H01L29/423 , H01L29/66 , H01L29/78 , H01L29/788 , H01L29/792 , G11C8/16
Abstract: A method for producing a 3D memory device, the method including: providing a first level including a first single crystal layer; forming at least one second level above the first level; performing a first etch step including etching holes within the second level; forming at least one third level above the at least one second level; performing a second etch step including etching holes within the third level; performing additional processing steps to form a plurality of first memory cells within the second level and a plurality of second memory cells within the third level; and performing a bonding of a fourth level above the third level, where the fourth level includes a second single crystal layer, where each of the first memory cells include one first transistor, where each of the second memory cells include one second transistor, where at least one of the first or second transistors has a channel, a source and a drain having a same doping type.
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