公开(公告)号：US20030134449A1

公开(公告)日：2003-07-17

申请号：US10338561

申请日：2003-01-07

Applicant: REFLECTIVITY, INC., a California Corporation

Inventor： Andrew G. Huibers

IPC: H01L021/00

CPC classification number: B81C3/002

Abstract: A method for making a MEMS device comprises forming a plurality of micromechanical elements on a first substrate; forming circuitry and electrodes on a second substrate, the first and second substrates extending in a plane in X and Y directions; aligning the first and second substrates in the X and Y directions and moving the substrates toward each other in a Z direction and bonding the first and second substrates with a gap therebetween in the Z direction to form an assembly; singulating the assembly into assembly portions; and altering the gap for each assembly portion. Another embodiment involves aligning the first and second substrates in the X and Y directions and moving the substrates toward each other in a Z direction and bonding the first and second substrates with a gap therebetween in the Z direction to form an assembly; actuating and testing the micromechanical elements of the assembly; and altering the gap for each assembly. A further embodiment involves aligning the first and second substrates in the X and Y directions and moving the substrates toward each other in a Z direction and bonding the first and second substrates with a gap therebetween in the Z direction to form an assembly; wherein the micromechanical elements are actuated while bonding of the substrates.

Abstract translation: 制造MEMS器件的方法包括在第一衬底上形成多个微机械元件; 在第二基板上形成电路和电极，所述第一和第二基板在X和Y方向上的平面中延伸; 使第一和第二基板沿X方向和Y方向对齐，并且沿Z方向彼此移动基板，并且在Z方向上将第一和第二基板之间的间隙接合以形成组件; 将组件分成组装部分; 并改变每个组装部分的间隙。 另一实施例涉及使第一和第二基板沿X方向和Y方向对准，并使基板沿Z方向彼此相对移动，并且在Z方向上将第一和第二基板之间的间隙接合以形成组件; 启动和测试组件的微机械元件; 并改变每个装配的间隙。 另一实施例涉及在第一和第二基板之间沿X方向和Y方向对准并沿Z方向彼此移动基板，并且在Z方向上将第一和第二基板之间的间隙接合以形成组件; 其中所述微机械元件在所述基板的接合的同时被致动。

公开(公告)号：US20020176150A1

公开(公告)日：2002-11-28

申请号：US10153138

申请日：2002-05-20

Applicant: REFLECTIVITY, INC.

Inventor： Andrew G. Huibers

IPC: G02B026/00

CPC classification number: G02B26/0833 ,  G02B26/08 ,  G02B26/0841 ,  Y10S359/904

Abstract: A spatial light modulator includes an upper optically transmissive substrate held above a lower substrate containing addressing circuitry. One or more electrostatically deflectable elements are suspended by hinges from the upper substrate. In operation, individual mirrors are selectively deflected and serve to spatially modulate light that is incident to, and then reflected back through, the upper substrate. Motion stops may be attached to the reflective deflectable elements so that the mirror does not snap to the bottom substrate. Instead, the motion stop rests against the upper substrate thus limiting the deflection angle of the reflective deflectable elements.

Abstract translation: 空间光调制器包括保持在包含寻址电路的下基板上的上透光基板。 一个或多个静电可偏转元件通过铰链从上基板悬挂。 在操作中，单独的反射镜被选择性地偏转并且用于空间调制入射到上基板上并随后被上反射回的光。 运动止挡件可以附接到反射偏转元件，使得反射镜不卡扣到底部基板。 相反，运动停止件靠在上基板上，从而限制反射可偏转元件的偏转角。

公开(公告)号：US20020109821A1

公开(公告)日：2002-08-15

申请号：US10052012

申请日：2002-01-16

Applicant: REFLECTIVITY, INC., a California Corporation

Inventor： Andrew G. Huibers ,  Peter W. Richards

IPC: G03B021/14

CPC classification number: H04N9/3114 ,  G02B26/008 ,  G02B26/023

Abstract: A projection system is disclosed that has a light source of multiple wavelengths, a spatial light modulator and projection optics for projecting an image to be viewed by a viewer or to be displayed on a target. Also provided are one or more color sequencing devices which filter the light multiple times. Whether a single or plural color sequencing elements are provided, a single light beam passes at least twice through a sequence of light filters. In one embodiment, two color wheels provide the ability to filter the light multiple times. By changing the physical position or phase of one series of filters relative to another, the brightness and color saturation of the image projected through the projection optics can be changed. The changes in brightness and color saturation can be performed manually by mechanically changing the phase (or position) of the color sequencing device(s) relative to the light beam. Such changes can be performed step-wise of gradually through a continuum of brightness vs. color saturation points.

Abstract translation: 公开了具有多个波长的光源的投影系统，空间光调制器和用于投影由观看者观看或要显示在目标上的图像的投影光学器件。 还提供了一种或多种多次过滤光的颜色排序装置。 是否提供单个或多个颜色排序元件，单个光束通过一系列滤光器至少通过两次。 在一个实施例中，两个色轮提供多次过滤光的能力。 通过改变一系列滤光镜相对于另一系列的物理位置或相位，可以改变通过投影光学器件投影的图像的亮度和色彩饱和度。 亮度和色彩饱和度的变化可以通过机械地改变颜色排序装置相对于光束的相位（或位置）来手动执行。 这样的变化可以逐步地通过连续的亮度与色彩饱和度点逐步地执行。

公开(公告)号：US07215459B2

公开(公告)日：2007-05-08

申请号：US11056732

申请日：2005-02-11

Applicant: Andrew Huibers ,  Satyadev Patel ,  Jonathan Doan ,  James Dunphy ,  Dmitri Simonian ,  Hongqin Shi ,  Jianglong Zhang

Inventor： Andrew Huibers ,  Satyadev Patel ,  Jonathan Doan ,  James Dunphy ,  Dmitri Simonian ,  Hongqin Shi ,  Jianglong Zhang

IPC: G02B26/00

CPC classification number: G02B26/0841 ,  G02B27/1033 ,  Y10S359/904

Abstract: Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.

Abstract translation: 本文公开了一种具有面向可变形铰链的微反射镜装置，可偏转和反射的反射镜板附接到该反射镜。 响应于在镜板和与镜板相关联的寻址电极之间建立的静电场，镜板旋转到不同的角度。

公开(公告)号：US07167297B2

公开(公告)日：2007-01-23

申请号：US10857059

申请日：2004-05-28

Applicant: Andrew G. Huibers

Inventor： Andrew G. Huibers

IPC: G02B26/00 ,  G02B26/08 ,  G02F1/00

CPC classification number: G03B21/28 ,  G02B26/0841 ,  Y10S359/904

Abstract: In order to minimize light diffraction along the direction of switching and more particularly light diffraction into the acceptance cone of the collection optics, in the present invention, micromirrors are provided which are not rectangular. Also, in order to minimize the cost of the illumination optics and the size of the display unit of the present invention, the light source is placed orthogonal to the rows (or columns) of the array, and/or the light source is placed orthogonal to a side of the frame defining the active area of the array. The incident light beam, though orthogonal to the sides of the active area, is not however, orthogonal to any substantial portion of sides of the individual micromirrors in the array. Orthogonal sides cause incident light to diffract along the direction of micromirror switching, and result in light ‘leakage’ into the ‘on’ state even if the micromirror is in the ‘off’ state. This light diffraction decreases the contrast ratio of the micromirror. The micromirrors of the present invention result in an improved contrast ratio, and the arrangement of the light source to micromirror array in the present invention results in a more compact system. Another feature of the invention is the ability of the micromirrors to pivot in opposite direction to on and off positions (the on position directing light to collection optics), where the movement to the on position is greater than movement to the off position. A further feature of the invention is a package for the micromirror array, the package having a window that is not parallel to the substrate upon which the micromirrors are formed. One example of the invention includes all the above features.

Abstract translation: 为了最小化沿着切换方向的光衍射，并且更特别地，将光衍射最小化到收集光学器件的接收锥体中，在本发明中，提供了不是矩形的微镜。 此外，为了最小化本发明的照明光学器件的成本和显示单元的尺寸，将光源与阵列的行（或列）正交放置，和/或将光源正交 到帧的定义阵列的有效区域的一侧。 然而，入射光束虽然正交于有源区域的侧面，但是不是与阵列中的各个微镜的任何相当大部分的侧面正交。 正交侧使得入射光沿着微镜切换的方向衍射，并且即使微镜处于“关闭”状态，也导致光“泄漏”进入“打开”状态。 该光衍射降低了微镜的对比度。 本发明的微反射镜导致对比度提高，并且在本发明中光源到微镜阵列的布置导致更紧凑的系统。 本发明的另一个特征是微镜能够相对于打开和关闭位置（将光引导到收集光学器件）的相对方向枢转，其中到打开位置的移动大于移动到关闭位置。 本发明的另一个特征是用于微镜阵列的封装，该封装具有不与形成微反射镜的基板平行的窗口。 本发明的一个实例包括所有上述特征。

公开(公告)号：US07099065B2

公开(公告)日：2006-08-29

申请号：US10437776

申请日：2003-05-13

Applicant: Satyadev Patel ,  Andrew G. Huibers ,  Christopher J. Spindt ,  Peter J. Heureux

Inventor： Satyadev Patel ,  Andrew G. Huibers ,  Christopher J. Spindt ,  Peter J. Heureux

IPC: G02B26/00

CPC classification number: B81B3/0051 ,  B81B2201/042 ,  B81B2203/058 ,  C10L1/026 ,  G02B26/0841

Abstract: A spatial light modulator is disclosed, along with methods for making such a modulator that comprises an array of mirror devices each having at least a first electrode and a second electrode. The first electrode is designated for driving the mirror plate of the micromirror device to an ON state, and the second electrode is designated for driving the mirror plate to an OFF state. The two electrodes can be disposed on the same side of the mirror plate but on opposite sides of the rotation axis of the mirror plate for driving the mirror plate to rotate in opposite directions. Alternatively, the two electrodes can be disposed on the opposite sides of the mirror plate, but on the same side of the rotation axis of the mirror plate for driving the mirror plate to rotate in opposite directions. The ON state and OFF state of the mirror plate can be defined by stops. The stops may be formed on substrate(s), hinge structures holding the mirror plates of the micromirror device and/or a desired location within the micromirror device. Alternatively, the electrodes for the ON state and the OFF state can be used as stops, either individually or in combination, or in combination with other component(s), such as substrate(s) of the micromirror device. The OFF state angle and the ON state angle are preferably different.

公开(公告)号：US07071520B2

公开(公告)日：2006-07-04

申请号：US10176478

申请日：2002-06-21

Applicant: Jason S. Reid

Inventor： Jason S. Reid

IPC: G01L1/12

CPC classification number: B81B3/0078 ,  B81B2201/045 ,  B81B2203/0118

Abstract: MEMS devices are provided that are capable of movement due to a flexible portion formed of unique materials for this purpose. The MEMS device can have a flexible portion formed of a nitride or oxynitride of at least one transition metal, and formed of a nitride or oxynitride of at least one metalloid or near metalloid; a flexible portion formed of a single transition metal nitride or oxynitride and in the absence of any other metal or metalloid nitrides; a flexible portion formed of one or more late transition metal nitrides or oxynitrides; a flexible portion formed of a single transition metal in nitride form, and an additional metal substantially in elemental form; or a flexible portion formed of at least one metalloid nitride or oxynitride. The MEMS devices can be any device, though preferably one with a flexible portion such as an accelerometer, DC relay or RF switch, optical cross connect or optical switch, or micromirror arrays for direct view and projection displays. The flexible portion (e.g. the hinge of the micromirror) is preferably formed by sputtering a metal and/or metalloid target in nitrogen ambient so as to result in a sputtered hinge. It is also possible to form other parts of the MEMS device (e.g structural parts that do not flex).

公开(公告)号：US07055961B2

公开(公告)日：2006-06-06

申请号：US11169545

申请日：2005-06-28

Applicant: Andrew G. Huibers

Inventor： Andrew G. Huibers

IPC: G03B21/14 ,  G03B21/28 ,  G03B21/00 ,  F21V7/00 ,  G02B5/22

CPC classification number: H04N9/315 ,  G02B26/008 ,  G03B11/00 ,  G03B21/14 ,  G03B33/08 ,  H04N9/3114

Abstract: A projection system is disclosed comprising a light source, a first reflector proximate the light source, a second reflector proximate the light source, a light pipe, a color sequencing device a spatial light modulator and a target. The color sequencing device preferably directs three or more colors onto the spatial light modulator at a time. Some light is reflected from the color sequencing device back through the light pipe and is again reflected at the reflector at the light source before returning to the light pipe and color sequencing device. The brightness of the projection system is thereby increased.

公开(公告)号：US07042623B1

公开(公告)日：2006-05-09

申请号：US10969258

申请日：2004-10-19

Applicant: Andrew Huibers ,  Satyadev Patel ,  Terry Tarn

Inventor： Andrew Huibers ,  Satyadev Patel ,  Terry Tarn

IPC: G02B26/00

CPC classification number: G02B26/0833

Abstract: Disclosed herein is a micromirror array device package having a light absorbing material disposed within the package for reducing undesired light scattering. The light absorbing material can be deposited as a thin film (or strip, frame, segments or a combination thereof), or as a vertical wall insert between the micromirror array device and a cover substrate of the package.

Abstract translation: 本文公开了一种微镜阵列器件封装，其具有设置在封装内的光吸收材料，用于减少不期望的光散射。 光吸收材料可以作为薄膜（或条，框架，段或其组合）沉积，或者作为微镜阵列器件和封装的覆盖衬底之间的垂直壁插入物沉积。

公开(公告)号：US07034982B2

公开(公告)日：2006-04-25

申请号：US10823823

申请日：2004-04-13

Applicant: Jonathan Doan

Inventor： Jonathan Doan

IPC: G02B26/00 ,  G01J1/42

CPC classification number: G02B26/0833

Abstract: A plastically deformable element of a microelectromechanical device is strained so as to improve the lifetime of the microelectromechanical device. The element of the device can be strained by deforming the element into a deformed state and holding the element at the deformed state for a particular time period so as to acquire an amount of plastic deformation. The operation states of the device are calibrated according to the states before straining and the acquired plastic deformation. After then, the device is operated in the calibrated states.

Abstract translation: 微机电装置的塑性变形元件变形，以便改善微机电装置的寿命。 通过将元件变形成变形状态并将元件保持在变形状态一段特定的时间段，以便获得一定量的塑性变形，可以使器件的元件变形。 根据变形前的状态和采集的塑性变形，对装置的运行状态进行校准。 然后，设备以校准状态运行。