公开(公告)号：US06466308B1

公开(公告)日：2002-10-15

申请号：US09547849

申请日：2000-04-12

Applicant: Cheng-Chung Jaing ,  Cheng-Chung Lee ,  Chuen-Lin Tien ,  Ing-Jer Ho

Inventor： Cheng-Chung Jaing ,  Cheng-Chung Lee ,  Chuen-Lin Tien ,  Ing-Jer Ho

IPC: G01L124

CPC classification number: G01L1/241 ,  G01N25/16

Abstract: The present invention disclose a method for measuring a thermal expansion coefficient of a thin film, in which the thin film is first deposited on two substrates having different thermal expansion coefficients under the same conditions. For each of the two deposited substrates, a relationship between the thin film stresses and the measuring temperatures is established by using a phase shifting interferometry technique, in which the stresses in the thin films are derived by comparing the deflections of the substrates prior to and after the deposition. Based on the two relationships the thermal expansion coefficient, and elastic modulus, E f ( 1 - v f ) , can be calculated, wherein Ef and &ngr;f are the Young's modulus and Poisson's ratio of the thin film, respectively.

Abstract translation: 本发明公开了一种测量薄膜的热膨胀系数的方法，其中薄膜首先在相同条件下沉积在具有不同热膨胀系数的两个基板上。 对于两个沉积的衬底中的每一个，通过使用相移干涉测量技术来建立薄膜应力和测量温度之间的关系，其中薄膜中的应力通过比较在之前和之后的衬底的偏转而导出 沉积。 基于这两个关系，可以计算热膨胀系数和弹性模量，其中Ef和＆ngr; f分别是薄膜的杨氏模量和泊松比。

公开(公告)号：US20020048024A1

公开(公告)日：2002-04-25

申请号：US09903999

申请日：2001-07-12

Inventor： Tomiichi Hasegawa

IPC: G01B009/02

CPC classification number: G01L1/241 ,  G01N21/21 ,  G01N21/45

Abstract: A light beam from a laser source is divided into two light beams at a half mirror, and the plane of polarization of one of the two divided light beams is rotated by 90 degrees at a half-wave plate so as to be orthogonal to that of the other of the two divided light beams. The two divided light beams are superimposed and introduced into a sample to be measured in anisotropy. After passing through the sample, the superimposed light beam is split at a polarized light beam splitter into the above two light beams, and the plane of polarization of the other of the two light beam is rotated by 90 degrees at a half-wave plate so as to correspond to that of the one of the two light beams. Then, the two light beams is superimposed again at a half mirror, and an interference pattern of the superimposed light beam is projected on a screen.

Abstract translation: 来自激光源的光束被分成半反射镜的两个光束，两个分开的光束中的一个的偏振平面在半波片上旋转90度，以与 另外两个分开的光束。 将两个分开的光束叠加并引入到各向异性测量的样品中。 在通过样本之后，将叠加的光束在偏振光分束器处分裂成上述两个光束，并且两个光束中另一个的另一个的偏振面在半波片处旋转90度，因此 对应于两个光束中的一个。 然后，两个光束再次叠加在半反射镜上，并且叠加的光束的干涉图案被投影在屏幕上。

公开(公告)号：US6055053A

公开(公告)日：2000-04-25

申请号：US867475

申请日：1997-06-02

Applicant: Jon R. Lesniak

Inventor： Jon R. Lesniak

IPC: G01L1/24 ,  G01J4/00 ,  G01B11/18

CPC classification number: G01L1/241

Abstract: A structural specimen coated with or constructed of photoelastic material, when illuminated with circularly polarized light will, when stressed; reflect or transmit elliptically polarized light, the direction of the axes of the ellipse and variation of the elliptically light from illuminating circular light will correspond to and indicate the direction and magnitude of the shear stresses for each illuminated point on the specimen. The principles of this invention allow for several embodiments of stress analyzing apparatus, ranging from those involving multiple rotating optical elements, to those which require no moving parts at all. A simple polariscope may be constructed having two polarizing filters with a single one-quarter waveplate placed between the polarizing filters. Light is projected through the first polarizing filter and the one-quarter waveplate and is reflected from a sub-fringe birefringent coating on a structure under load. Reflected light from the structure is analyzed with a polarizing filter. The two polarizing filters and the one-quarter waveplate may be rotated together or the analyzer alone may be rotated. Computer analysis of the variation in light intensity yields shear stress magnitude and direction.

Abstract translation: 用光弹性材料涂覆或构造的结构试样，当用圆偏振光照射时，会受到压力; 反射或透射椭圆偏振光，椭圆轴的方向和照明圆形光的椭圆偏振将对应于并指示样品上每个照明点的剪切应力的方向和大小。 本发明的原理允许应力分析装置的几个实施例，从涉及多个旋转光学元件的那些到完全不需要移动部件的那些。 可以构造简单的偏振器，其具有两个偏振滤光器，其中放置有偏振滤光片之间的单个四分之一波片。 光通过第一偏振滤光器和四分之一波片投影，并且在负载下的结构上的副边缘双折射涂层反射。 用偏振滤光片分析来自结构的反射光。 两个偏振滤光器和四分之一波片可以一起旋转，或者单独的分析仪可以旋转。 光强变化的计算机分析产生剪切应力的大小和方向。

公开(公告)号：US5864393A

公开(公告)日：1999-01-26

申请号：US902695

申请日：1997-07-30

Applicant: Humphrey J. Maris

Inventor： Humphrey J. Maris

IPC: G01L1/24 ,  G01P3/36 ,  G01B11/16

CPC classification number: G01L1/241

Abstract: A method and optical system is disclosed for measuring an amount of stress in a film layer disposed over a substrate. The method includes steps of: (A) applying a sequence of optical pump pulses to the film layer, individual ones of said optical pump pulses inducing a propagating strain pulse in the film layer, and for each of the optical pump pulses, applying at least one optical probe pulse, the optical probe pulses being applied with different time delays after the application of the corresponding optical probe pulses; (B) detecting variations in an intensity of a reflection of portions of the optical probe pulses, the variations being due at least in part to the propagation of the strain pulse in the film layer; (C) determining, from the detected intensity variations, a sound velocity in the film layer; and (D) calculating, using the determined sound velocity, the amount of stress in the film layer. In one embodiment of this invention the step of detecting measures a period of an oscillation in the intensity of the reflection of portions of the optical probe pulses, while in another embodiment the step of detecting measures a change in intensity of the reflection of portions of the optical probe pulses and determines a time at which the propagating strain pulse reflects from a boundary of the film layer.

Abstract translation: 公开了一种用于测量在衬底上设置的膜层中的应力量的方法和光学系统。 该方法包括以下步骤：（A）将一系列光泵浦脉冲施加到膜层，各个所述光泵浦脉冲在膜层中引起传播应变脉冲，并且对于每个光泵浦脉冲，施加至少 一个光探针脉冲，在施加相应的光探针脉冲之后，光探针脉冲被施加不同的时间延迟; （B）检测光学探针脉冲的部分的反射强度的变化，所述变化至少部分地由于应变脉冲在膜层中的传播而引起; （C）根据检测到的强度变化确定膜层中的声速; 和（D）使用确定的声速计算膜层中的应力量。 在本发明的一个实施例中，检测测量光探针脉冲的部分的反射强度的振荡周期的步骤，而在另一个实施例中，检测步骤测量反射部分的反射强度的变化 光探针脉冲并确定传播的应变脉冲从膜层的边界反射的时间。

公开(公告)号：US5694205A

公开(公告)日：1997-12-02

申请号：US545455

申请日：1995-10-19

Applicant: Devlin M. Gualtieri ,  Janpu Hou ,  William R. Rapoport ,  Herman Van de Vaart

Inventor： Devlin M. Gualtieri ,  Janpu Hou ,  William R. Rapoport ,  Herman Van de Vaart

IPC: G01L1/24

CPC classification number: G01L1/241

Abstract: A birefringent bias is provided to an optical sensor by the addition of one or more single birefringent elements where the total birefringence-length product remains within the accepted tolerances of current devices. The bias provided by two or more elements is such that where each element has a birefringence, a dB/dT and a coefficient of thermal expansion term, the elements are arranged in tandem so that the combined birefringence terms equal the required birefringence bias and the dB/dT and coefficient of thermal expansion terms effectively cancel.

Abstract translation: 通过添加一个或多个单双折射元件向光学传感器提供双折射偏置，其中总双折射长度乘积保持在当前器件的公认误差范围内。 由两个或更多个元件提供的偏压使得当每个元件具有双折射，dB / dT和热膨胀项的系数时，元件串联布置，使得组合双折射项等于所需的双折射偏差和dB / dT和热膨胀系数有效地消除。

公开(公告)号：US4712004A

公开(公告)日：1987-12-08

申请号：US898318

申请日：1986-08-20

Applicant: William B. Spillman, Jr.

Inventor： William B. Spillman, Jr.

IPC: G01M11/02 ,  G01L1/24 ,  G02B6/00 ,  G02B27/28 ,  H01J5/16

CPC classification number: G01L1/241

Abstract: Method and apparatus for compensating a phototransducer system for fiber optic transmission losses and optical source power fluctuations includes generating a broadband source light beam having a plurality of spectral components. The source light beam is transmitted to a polarizer which polarizes the light beam and directs it to a multiple wave retardation device. The retardation device retards the spectral components of the polarized light beam. The retarded light beam is injected into a photoelastic transducer which modulates the polarizations of the retarded light beam in accordance with pressure applied to the transducer. Each spectral component of the retarded light beam will be modulated by the transducer. However, the broadband light beam will remain, in sum, relatively invariant to the applied pressure. The modulated light beam is then passed through an analyzer, injected into a fiber optic cable, and transmitted to a beam splitter. The beam splitter provides a first light beam to a photodetector which detects the light intensity of all spectral components, which intensity is only affected by transmission losses and power fluctuations within the system. A second portion of the split light beam is passed through a narrow passband filter which passes only certain portions of the spectral components which do vary with the applied pressure and transmission losses and power fluctuations. The filtered signal is detected by a second photodetector. The photodetectors provide electrical signals to a processor which outputs an electrical signal corresponding to a ratio of the first and second electrical signals.

Abstract translation: 用于补偿用于光纤传输损耗和光源功率波动的光电传感器系统的方法和装置包括产生具有多个光谱分量的宽带光源光束。 源光束被透射到偏振器，偏振器使光束偏振并将其引导到多波延迟器件。 延迟装置延迟偏振光束的光谱分量。 延迟光束被注入到光弹性传感器中，光变换器根据施加到换能器的压力来调制延迟光束的偏振。 延迟光束的每个光谱分量将由传感器调制。 然而，总之，宽带光束将保持与施加的压力相对不变。 然后将调制的光束通过分析器，注入光纤电缆并传输到分束器。 分束器向检测所有光谱分量的光强度的光电检测器提供第一光束，该强度仅受系统内的传输损耗和功率波动的影响。 分束光束的第二部分通过窄通带滤波器，该窄通带滤波器仅通过随施加的压力和传输损耗和功率波动而变化的频谱分量的某些部分。 经滤波的信号由第二光电检测器检测。 光电检测器向处理器提供电信号，该处理器输出对应于第一和第二电信号的比率的电信号。

公开(公告)号：US4679933A

公开(公告)日：1987-07-14

申请号：US397921

申请日：1983-02-28

Applicant: Jerzy T. Pindera

Inventor： Jerzy T. Pindera

IPC: G01L1/24 ,  G01N21/23 ,  G01N21/47 ,  G01B11/18

CPC classification number: G01N21/23 ,  G01L1/241 ,  G01N21/47

Abstract: A new method and device has been developed to determine experimentally the state and amount of birefringence along any arbitrary direction through a birefringent body. Such information can be used to determine the optical anisotropy of solid and liquid bodies, the residual and induced stress fields, etc. Essentially, this method and device separates, from the light scattered in all directions along an arbitrary path of laser light in a body, three sheets of light which are subsequently collimated; each of these light sheets contains parallel light rays carrying information of interest. The middle light sheet indicates the line of measurements, which is identical with the path or position of laser beam in a body. The two outer light sheets carry two complementary and independent pieces of information on the state and amount of birefringence along the line of measurements. Thus, both outer sheets of light can be used simultaneously to increase the reliability and accuracy of the birefringence measurements.

Abstract translation: 已经开发了一种新的方法和装置，用于通过双折射体实验地确定沿着任意方向的双折射的状态和量。 这种信息可用于确定固体和液体的光学各向异性，残余和诱导应力场等。本质上，该方法和装置与在体内的任意的激光路径沿着各个方向散射的光分离 随后准备三张光; 这些光片中的每一个包含携带感兴趣的信息的平行光线。 中间的光照片表示测量线，其与激光束在体内的路径或位置相同。 两个外部光照片沿着测量线携带两个互补和独立的双折射状态和数量信息。 因此，可以同时使用两个外部光片来提高双折射测量的可靠性和精度。

公开(公告)号：US4668085A

公开(公告)日：1987-05-26

申请号：US726972

申请日：1985-04-25

Applicant: Gilles D. Pitt ,  Philip Extance ,  Rosamund C. Neat ,  Roger E. Jones

Inventor： Gilles D. Pitt ,  Philip Extance ,  Rosamund C. Neat ,  Roger E. Jones

IPC: G01D5/26 ,  G01L1/24 ,  G01R15/24 ,  G01R33/032 ,  G02F1/01 ,  G01B11/16 ,  G02B5/30

CPC classification number: G01R15/248 ,  G01D5/268 ,  G01L1/241 ,  G01R33/032 ,  G02F1/0131

Abstract: Certain materials (e.g. polymers, glasses) exhibit the photo-elastic effect, whereby when they are subject to stress become birefringent, which influences a light beam passing through the glass. This beam, e.g. from a laser is collimated and circularly polarized as it approaches the glass and is again polarized as it leaves the glass. This stress is applied, according to this invention, by magnetostrictive strips on the glass which are influenced, by the magnetic field to be measured or the AC bias field. A miniaturized arrangement using this principle is described.

Abstract translation: 某些材料（例如聚合物，玻璃）表现出光弹效应，当受到应力时，会产生双折射，这影响穿过玻璃的光束。 该光束，例如 来自激光的是准直和圆偏振，因为它接近玻璃，并再次偏振，因为它离开玻璃。 根据本发明，这种应力是通过被测量的磁场或AC偏压场影响的玻璃上的磁致伸缩条应用的。 描述使用该原理的小型化布置。

公开(公告)号：US4655589A

公开(公告)日：1987-04-07

申请号：US698598

申请日：1985-02-05

Applicant: Massimo Cestaro ,  Ciro Paudice

Inventor： Massimo Cestaro ,  Ciro Paudice

IPC: G01L1/24 ,  G01N21/23

CPC classification number: G01L1/241

Abstract: An apparatus used directly on a flat sheet of transparent material, especially tempered glass, for simultaneous measurement of sign and amplitude of stress across the section of said glass sheet using scattered light. The apparatus allows reliable and repetitive measurements independently of the operator's subjective observations, since the data is read through an automatic system. The apparatus has a Helium-Neon (He-Ne) laser source of 1 to 5 mW, whose light beam is linearly polarized, then modulated with a series of wave plates (2,2', 2"), then passed through a collimator (3) and subsequently made to strike a prism (4) optically coupled with the glass sheet (V) being tested. Variation in intensity of the interference fringes is revealed by a TV camera (5) having a macrophotographic lens system (5') which focusses the scattered light on a solid-state array photodetector (5'). The photosensitive zone of the detector is positioned to detect intensity of the scattered light along path (BC) of the laser beam through the section of the glass sheet (V). An electronic circuit can thus convert the video signals transmitted by TV camera ( 5).

Abstract translation: 直接使用在透明材料的平板材料（特别是钢化玻璃）上的装置，用于使用散射光同时测量穿过所述玻璃板的部分的应力的符号和幅度。 该装置允许可靠和重复的测量，独立于操作者的主观观察，因为数据通过自动系统读取。 该装置具有1至5mW的氦 - 氖（He-Ne）激光源，其光束被线偏振，然后用一系列波片（2,2'，2“）进行调制，然后通过 准直器（3），随后制成与被测试的玻璃板（V）光学耦合的棱镜（4）。 通过具有将散射光聚焦在固态阵列光电检测器（5'）上的摄影透镜系统（5'）的电视摄像机（5），显示干涉条纹的强度变化。 检测器的感光区域被定位成检测通过玻璃板（V）的部分的沿着激光束的路径（BC）的散射光的强度。 因此，电子电路可以转换由电视摄像机（5）发送的视频信号。

公开(公告)号：US4634858A

公开(公告)日：1987-01-06

申请号：US661630

申请日：1984-10-17

Applicant: David W. Gerdt ,  Lawrence H. Gilligan

Inventor： David W. Gerdt ,  Lawrence H. Gilligan

IPC: G02B6/00 ,  G01D5/353 ,  G01L1/24 ,  G01P15/093 ,  G02B6/28 ,  G02B6/287 ,  G02F1/01 ,  G02F1/19 ,  G02F1/313 ,  H01J5/16 ,  H01J40/14

CPC classification number: G02B6/2835 ,  G01D5/35345 ,  G01D5/35377 ,  G01L1/241 ,  G01P15/093 ,  G02B6/283 ,  G02F1/0134 ,  G02F1/3131

Abstract: A variable coupler fiberoptic sensor in which a fused, tapered, biconical directional fiberoptic coupler is encapsulated in a stress birefringent medium whose index of refraction changes with applied stress.The ratio of power in the output fibers of the directional coupler varies with the change of index of refraction of the encapsulating medium as stress is applied to the medium.

Abstract translation: 可变耦合器光纤传感器，其中熔融的，锥形的双锥定向光纤耦合器被封装在应力双折射介质中，其折射率随施加的应力而变化。 定向耦合器的输出光纤中的功率比随密封介质的应力变化而随封装介质的折射率变化而变化。