公开(公告)号：US06980627B2

公开(公告)日：2005-12-27

申请号：US10614787

申请日：2003-07-09

申请人： Qi Qiu ,  Jianping Lu ,  Otto Z. Zhou

发明人： Qi Qiu ,  Jianping Lu ,  Otto Z. Zhou

IPC分类号： H01J35/00 ,  H01J35/06

CPC分类号： B82Y10/00 ,  H01J35/065 ,  H01J2201/30469 ,  H01J2235/062 ,  H01J2235/068 ,  Y10S977/95

摘要： An x-ray generating device includes at least one field-emission cold cathode having a substrate and incorporating nanostructure-containing material including carbon nanotubes. The device further includes at least one anode target. Associated methods are also described.

摘要翻译： X射线产生装置包括至少一个具有衬底的场致发射冷阴极，并且包括含纳米结构的材料，包括碳纳米管。 该装置还包括至少一个阳极靶。 还描述了相关方法。

公开(公告)号：US20050274912A1

公开(公告)日：2005-12-15

申请号：US11149916

申请日：2005-06-10

申请人： Guido Hergenhan ,  Christian Ziener ,  Kai Gaebel

发明人： Guido Hergenhan ,  Christian Ziener ,  Kai Gaebel

IPC分类号： G01C21/02 ,  G01C21/24 ,  G01J1/20 ,  G03F7/20 ,  G21G4/00 ,  H01J35/00 ,  H05G2/00 ,  H05H1/00

CPC分类号： G03F7/70033 ,  B82Y10/00 ,  H05G2/003 ,  H05G2/008

摘要： The invention is directed to an apparatus for generating soft x-radiation, particularly EUV radiation, by laser-induced plasma. The object of the invention, to find a novel possibility for generating EUV radiation by means of a laser-induced plasma by which a temporally stable radiation emission in the desired wavelength region is ensured when interacting with the target without active regulation of the laser beam, is met according to the invention in that at least one laser is directed to the target, wherein the laser has at least one defined plane with a highly stable spatial distribution of the power density of the laser, and this defined plane is imaged on the target by an optical imaging system so as to be reduced so that the optical image of the defined plane is active for the plasma generation instead of the laser focus. The invention is applied in exposure machines for semiconductor lithography for spatially stable generation of radiation.

摘要翻译： 本发明涉及一种用于通过激光诱导等离子体产生软x辐射，特别是EUV辐射的装置。 本发明的目的是为了找到通过激光诱导等离子体产生EUV辐射的新颖可能性，通过该等离子体，当与靶相互作用而确保在期望波长区域中的时间上稳定的辐射发射而无需主动调节激光束时， 根据本发明满足的是，至少一个激光被引导到目标，其中激光器具有至少一个具有激光功率密度的高度稳定的空间分布的限定平面，并且该定义的平面被成像在目标 通过光学成像系统被减少，使得限定平面的光学图像对于等离子体产生而不是激光焦点是有效的。 本发明应用于用于半导体光刻的曝光机，用于在空间上稳定地产生辐射。

公开(公告)号：US20050243969A1

公开(公告)日：2005-11-03

申请号：US10833696

申请日：2004-04-28

申请人： Gregory Andrews

发明人： Gregory Andrews

IPC分类号： G21G4/00 ,  H01J35/00 ,  H05G1/02 ,  H05G1/52 ,  H05H1/00

CPC分类号： H05G1/52 ,  H05G1/025

摘要： Systems, methods and devices for implementing automatic control of focal spot Z axis positioning are disclosed for use with an x-ray device having an x-ray tube positioned within a housing and configured for thermal communication with a temperature control system. Control circuitry, and a position sensing device configured to determine the distance between the focal spot and a reference point related to the x-ray device, are coupled with a control module. The position sensing device sends information concerning the relative distance between the focal spot and the reference point to the control module which compares the received information with a predetermined desired distance. If the received information varies by an unacceptably large margin from the desired distance, the control module sends a corresponding signal to the control circuitry which causes the temperature control system to implement an appropriate change to a heat transfer parameter associated with the x-ray device.

摘要翻译： 公开了用于实现焦点Z轴定位的自动控制的系统，方法和装置，其与具有位于壳体内的x射线管的X射线装置一起使用，并被配置为与温度控制系统进行热通信。 控制电路和配置成确定焦斑与与x射线装置相关的参考点之间的距离的位置感测装置与控制模块耦合。 位置检测装置将关于焦点和参考点之间的相对距离的信息发送到控制模块，该控制模块将接收到的信息与预定的期望距离进行比较。 如果接收到的信息从期望的距离变化不可接受的大余量，则控制模块向控制电路发送相应的信号，该控制电路使温度控制系统对与x射线设备相关联的传热参数进行适当的改变。

公开(公告)号：US20050226383A1

公开(公告)日：2005-10-13

申请号：US11077524

申请日：2005-03-09

申请人： Jeffrey Rifkin ,  Roderick Loewen ,  Ronald Ruth

发明人： Jeffrey Rifkin ,  Roderick Loewen ,  Ronald Ruth

IPC分类号： G01J1/00 ,  G01T1/24 ,  G21G4/00 ,  G21K1/06 ,  H01J35/00 ,  H01L25/00 ,  H01L27/00 ,  H01S3/00 ,  H01S3/13 ,  H05G2/00 ,  H05H1/00 ,  H05H7/06

CPC分类号： G02B5/10 ,  G21K1/02 ,  G21K1/06 ,  H05G2/00 ,  H05H7/06

摘要： A Compton backscattering x-ray source includes an electron storage ring for storing electron bunches. A timing system refreshes an orbiting electron bunch according to a schedule selected to improve at least one attribute of x-ray emission. In one implementation, the electron bunch is periodically refreshed with a period of at least about 10 Hz.

摘要翻译： 康普顿反向散射X射线源包括用于存储电子束的电子存储环。 定时系统根据选定的改进X射线发射的至少一个属性的时间表来刷新轨道电子束。 在一个实施方案中，电子束以至少约10Hz的周期周期性地刷新。

公开(公告)号：US20050213708A1

公开(公告)日：2005-09-29

申请号：US10812339

申请日：2004-03-29

申请人： Brian Lawrence ,  Robert Filkins ,  Peter Lorraine

发明人： Brian Lawrence ,  Robert Filkins ,  Peter Lorraine

IPC分类号： G21K1/00 ,  G21G4/00 ,  H01J35/00 ,  H01S3/00 ,  H01S4/00 ,  H05G2/00 ,  H05H1/00 ,  H05H13/04

CPC分类号： H01S3/083 ,  H01S3/1109 ,  H05G2/00

摘要： The invention provides a system for generating X-rays via the process of inverse Compton scattering. The system includes a high repetition rate laser adapted to direct high-energy optical pulses in a first direction in a laser cavity and a source of pulsed electron beam adapted to direct electron beam in a second direction opposite to the first direction in the laser cavity. The electron beam interacts with photons in the optical pulses in the laser cavity to produce X-rays in the second direction.

摘要翻译： 本发明提供一种通过反康普顿散射过程产生X射线的系统。 该系统包括高激光器，其适于在激光腔中沿第一方向引导高能光脉冲，以及适于在与激光腔中的第一方向相反的第二方向上引导电子束的脉冲电子束源。 电子束与激光腔中的光脉冲中的光子相互作用以在第二方向产生X射线。

公开(公告)号：US20050178979A1

公开(公告)日：2005-08-18

申请号：US11060198

申请日：2005-02-17

申请人： Fumitaro Masaki ,  Akira Miyake

发明人： Fumitaro Masaki ,  Akira Miyake

IPC分类号： G21K5/00 ,  A61N5/00 ,  G03F7/20 ,  G21G4/00 ,  G21G5/00 ,  G21K5/02 ,  G21K5/08 ,  H01J35/00 ,  H01L21/027 ,  H05G2/00 ,  H05H1/00 ,  H05H1/24

CPC分类号： H05G2/001 ,  G03F7/70916 ,  G03F7/70925

摘要： A light generator for irradiating a laser onto a target, for generating plasma, and for producing light from the plasma, includes a first optical system for introducing the light to the target, a second optical system for introducing the light, and a unit for irradiating the laser onto debris that attaches to at least one of the first and second optical systems by changing an irradiation condition of the laser differently from that used to generate the plasma.

摘要翻译： 一种用于将激光照射到靶上用于产生等离子体并用于从等离子体产生光的光发生器包括：用于将光引入靶的第一光学系统，用于引入光的第二光学系统和用于照射的单元 通过改变激光的照射条件与用于产生等离子体的照射条件不同，将激光附着到第一和第二光学系统中的至少一个的碎片上。

公开(公告)号：US20050175151A1

公开(公告)日：2005-08-11

申请号：US10708048

申请日：2004-02-05

申请人： Bruce Dunham ,  Colin Wilson ,  John Price

发明人： Bruce Dunham ,  Colin Wilson ,  John Price

IPC分类号： G21K5/02 ,  A61B6/03 ,  G21K5/04 ,  H01J35/00 ,  H01J35/06 ,  H01J35/14 ,  H01J35/22 ,  H01J35/32 ,  H05G1/60

CPC分类号： A61B6/032 ,  A61B6/4028 ,  A61B6/4488 ,  H01J35/065 ,  H01J35/14 ,  H01J2235/02 ,  H01J2235/06

摘要： An field emitter array system (10) includes a housing (50). An emitter array (80) generates an electron beam and has multiple emitter elements (81) that are disposed within the housing (50). Each of the emitter elements has multiple activation connections (92).

摘要翻译： 场发射器阵列系统（10）包括壳体（50）。 发射极阵列（80）产生电子束并具有设置在壳体（50）内的多个发射极元件（81）。 每个发射器元件具有多个激活连接（92）。

公开(公告)号：US20050175150A1

公开(公告)日：2005-08-11

申请号：US10774899

申请日：2004-02-09

申请人： Craig Smith ,  Christopher Artig

发明人： Craig Smith ,  Christopher Artig

IPC分类号： G21G4/00 ,  H01J35/00 ,  H01J35/10 ,  H01J35/12 ,  H01J35/18 ,  H05G1/02 ,  H05G1/04 ,  H05H1/00

CPC分类号： H05G1/02

摘要： A mounting assembly for supporting an evacuated enclosure within an outer housing of an x-ray tube is disclosed. The mounting assembly comprises a clamp portion having a C-shaped configuration, and a bracket portion having a circular recess that receives at least a portion of the clamp portion therein. The clamp portion includes an aperture that frictionally attaches to a window assembly of the evacuated enclosure. The clamp portion is in turn mechanically attached to the bracket portion such that an aperture in the bracket portion is aligned both with the clamp portion aperture and a window disposed in the window assembly. The bracket portion further includes a concave surface that is shaped to mechanically mate with an exterior portion of the outer housing, thereby securably supporting the evacuated enclosure within the outer housing. The mounting assembly further includes structures for securing the x-ray tube within an x-ray generating device.

摘要翻译： 公开了一种用于将真空的外壳支撑在X射线管外壳内的安装组件。 安装组件包括具有C形构造的夹紧部分和具有圆形凹部的托架部分，该圆形凹部容纳夹具部分的至少一部分。 夹紧部分包括摩擦地连接到抽空的外壳的窗口组件的孔。 夹紧部分又机械地附接到支架部分，使得托架部分中的孔与夹紧部分孔和设置在窗组件中的窗口对准。 支架部分还包括凹形表面，其被成形为与外壳体的外部部分机械地配合，从而可靠地将外壳中的抽真空的外壳支撑。 安装组件还包括用于将X射线管固定在X射线产生装置内的结构。

公开(公告)号：US06922463B2

公开(公告)日：2005-07-26

申请号：US10294102

申请日：2002-11-14

申请人： Liang Tang ,  Madhusudhana Talneru Subraya ,  Paul Neitzke

发明人： Liang Tang ,  Madhusudhana Talneru Subraya ,  Paul Neitzke

IPC分类号： H05G1/08 ,  A61B6/00 ,  G21G4/00 ,  H01J35/00 ,  H01J35/02 ,  H01J35/10 ,  H01R13/46 ,  H05G1/02 ,  H05G1/10 ,  H05G1/12

CPC分类号： H01J35/025 ,  H01J2235/0233

摘要： An HV connector for high power X-ray device consists of thermally conductive epoxy, cable terminal, faraday cup, spring-loaded contact, and lead lined housing. The thermally conductive epoxy includes fillers. The epoxy can also be loaded with gravels of similar materials. A Faraday cup is included in the center area to offer electric field relief. Spring-loaded contacts are included for the easiness of pin alignment and robustness of handling. An efficient thermal management solution is accomplished through proper selection of thermal conductivities of gasket and epoxy.

摘要翻译： 用于高功率X射线装置的HV连接器由导热环氧树脂，电缆端子，法拉第杯，弹簧接触和引线衬套组成。 导热环氧树脂包括填料。 环氧树脂还可以加载类似材料的砾石。 中心区设有法拉第杯，提供电场救援。 包括弹簧加载的触点，以便于引脚对准的容易性和处理的鲁棒性。 通过适当选择垫圈和环氧树脂的导热性，可实现高效的热管理解决方案。

公开(公告)号：US20050123095A1

公开(公告)日：2005-06-09

申请号：US10727768

申请日：2003-12-04

申请人： Daniel Marshall

发明人： Daniel Marshall

IPC分类号： G21K1/087 ,  G21K1/093 ,  G21K5/02 ,  G21K5/04 ,  H01J3/14 ,  H01J35/02 ,  H01J35/04 ,  H01J35/06 ,  H01J35/14 ,  H05G1/00 ,  H05H1/00 ,  G21G4/00 ,  H01J35/00

CPC分类号： H01J35/14 ,  H01J35/025 ,  H01J35/065

摘要： An X-ray generating apparatus comprises a semiconductor structure, an emitter formed on the semiconductor structure, with the emitter to emit electrons. The apparatus further comprises an element to generate X-rays in response to impact by the electrons on the element.

摘要翻译： X射线产生装置包括半导体结构，在半导体结构上形成的发射极，发射极发射电子。 该装置还包括响应于元件上的电子的冲击而产生X射线的元件。