摘要:
A developing apparatus and method is provided in which the use amount of a developing solution can be reduced without deteriorating the accuracy of development. The developing apparatus comprises a new solution tank for storing an unused developing solution and a used solution tank for storing a used developing solution which is withdrawn from a material to be treated. A new solution feeding nozzle extends from the new solution tank, and the tip end of the nozzle faces toward the upper portion of the cup of each developing unit. A used solution feeding nozzle extends from the used solution tank, and the tip end of the nozzle faces toward the upper portion of the cup of each developing unit.
摘要:
A method for attaching a supporting plate which makes it possible to prevent the groove pattern of the supporting plate from being transferred to the substrate, and to prevent non-uniformity from occurring when the surface of the substrate is ground. One surface of the supporting plate is attached to the substrate with an adhesive, and the opposite surface of the supporting plate to which a transfer preventing sheet is attached is mounted and fixed by attraction onto the top surface of an attracting head, and the top surface (no circuit is formed) of the semiconductor wafer is ground by a grinder in this state.
摘要:
A stripping apparatus has a simplified structure for stripping a supporting plate from a layered structure, occupies less space, and strips a supporting plate in a shorter period of time. The stripping apparatus comprises a transfer robot, a cassette, a stripping device and a cleaning device which surround the transfer robot. The stripping device comprises a chucking plate for attracting and retaining a layered structure, and a stripping plate for stripping the supporting plate from the layered structure. The chucking plate is constructed so as to be rotated by 180° within a vertical plane, elevated and lowered in a vertical direction in a state of retaining the layered structure.
摘要:
A security management device includes: an at-home determination section (18b) for determining whether or not a member is present in a security management region; a member information obtaining section (19) for obtaining member attribute information of the member determined to be present in the security management region by the at-home determination section; and an external processing decision section (21) for changing the security management mode in the security management region in such a way where the external processing corresponds to the member attribute information obtained by the member information obtaining section (19) when no unauthorized invasion is detected by an unauthorized invasion detection section (18a).
摘要:
A coating apparatus is provided in which a coating liquid supplied onto a surface of a substrate such as a semiconductor wafer and a glass substrate can be easily leveled so as to have a uniform thickness without any edge bead. The coating apparatus comprises a tray, a nozzle for supplying a coating liquid, and a squeegee which serves as an applicator for spreading a coating liquid. The tray has a recessed portion into which a substrate is placed, and a spinner chuck is provided in the recessed portion. In the spinner chuck, a chuck for attracting the substrate is attached to the upper end of a spinner shaft which can be lifted and lowered, and the upper surface of the chuck and the bottom surface of the recessed portion are arranged to be in the same plane in a state where the spinner shaft is lowered to the lowest position.
摘要:
The objective of the present invention is to detect, using a universal method, any “movement” inside of the object being monitored, while maintaining the security of a container. The movement inside of the object to be monitored includes 1) a human movement when a human enters into a container to be monitored, 2) a movement to bring a foreign article in, 3) a movement to take cargo out. To achieve the objective, this invention uses the concept of a so-called “inside-seal”. In actual configuration, a plurality of communication units (communication nodes) are installed on the walls of the container. These communication units have a predetermined powered communication capability and form a communication network communicating with each other. A communication status between each node and all of the other nodes provided in the network, and a network graph matrix is generated which defines the nodal relationship between the nodes. Since the matrix is determined not only by the property of the object to be monitored, but also by the spatial condition within the container, it is possible to detect even a small change in the space. According to the first preferred embodiment, each node transmits a low power electric wave which can reach only neighboring nodes, and each node can transmit data to remote nodes only by relaying the data to the neighboring nodes. The relaying counts (HOP counts) of each node to communicate with all of the other nodes are obtained, and based on these relaying counts, a network graph matrix is generated which defines the relaying counts to communicate between all nodes. According to the second preferred embodiment, each node transmits UWB waves to all of the other nodes, which can reach to all of the other nodes, and the distances between all the nodes are measured and a network graph matrix between all the nodes is generated.
摘要:
A complex electromagnetic relay including a plurality of relay structures configured respectively as relays independent of each other, each relay structure including an electromagnet assembly and a contact section acting to open or close in accordance with an operation of the electromagnet assembly; and a housing accommodating the relay structures in a mutually inverted orientation with contact sections of the relay structures being located alternately at opposing sides. The electromagnet assemblies in the relay structures are provided individually with bobbins supporting coils. The housing includes an enclosing wall enclosing the relay structures in an envelope-like manner and a partition wall arranged between the relay structures disposed side-by-side to separate the relay structures from each other. The bobbins of the electromagnet assemblies are fixedly attached to the enclosing wall as well as to the partition wall.
摘要:
A method for detecting decrease in tire air-pressure on the basis of rotational information obtained from tires attached to a vehicle. The method includes the steps of: detecting rotational information of the respective tires; storing the rotational information of the respective tires; obtaining an acceleration/deceleration of the vehicle; obtaining a slip rate when the acceleration/deceleration of the vehicle is within a specified range proximate to zero; comparing the slip rate with a slip rate which has been preliminarily obtained when the tire is under normal air pressure; and judging simultaneous decompression of both front wheel tires or simultaneous decompression of both rear wheel tires on the basis of a relationship between a value obtained through comparison of the two slip rates and a specified threshold. It is possible to judge simultaneous decompression of both front wheel tires or both rear wheel tires when employing the present invention.
摘要:
The present invention provides an ethylene-aromatic vinyl compound copolymer having an aromatic vinyl compound content of from 1 to less than 55% by molar fraction, and otherwise defined in the claims, and compositions and molded products containing same.
摘要:
A multiple electromagnetic relay is disclosed which comprises at least three electromagnetic relays including electromagnetic relays of the same type or two electromagnetic relays of different types selected from electromagnetic relays of various types each including a coil and a contact unit of a different type and which is mounted in a single assembly frame adapted to be attached to a board. Those terminals of the electromagnetic relays for connection with the external conductors which are connectable with a common external conductor are coupled to each other by a coupling conductor in the area of the assembly frame, and the common external conductor is connected to one of the terminals thus coupled.