Developing apparatus and method
    81.
    发明授权
    Developing apparatus and method 失效
    开发设备和方法

    公开(公告)号:US07237967B2

    公开(公告)日:2007-07-03

    申请号:US10997816

    申请日:2004-11-24

    IPC分类号: G03D5/00

    CPC分类号: G03D3/08

    摘要: A developing apparatus and method is provided in which the use amount of a developing solution can be reduced without deteriorating the accuracy of development. The developing apparatus comprises a new solution tank for storing an unused developing solution and a used solution tank for storing a used developing solution which is withdrawn from a material to be treated. A new solution feeding nozzle extends from the new solution tank, and the tip end of the nozzle faces toward the upper portion of the cup of each developing unit. A used solution feeding nozzle extends from the used solution tank, and the tip end of the nozzle faces toward the upper portion of the cup of each developing unit.

    摘要翻译: 提供一种显影装置和方法,其中可以降低显影液的使用量,而不会降低显影精度。 显影装置包括用于储存未使用的显影液的新溶液罐和用于储存从待处理材料中取出的使用的显影液的用过的溶液罐。 新的溶液供给喷嘴从新的溶液罐延伸,并且喷嘴的尖端面向每个显影单元的杯的上部。 使用的溶液供给喷嘴从使用的溶液罐延伸,并且喷嘴的前端朝向每个显影单元的杯的上部。

    Supporting plate, and method for attaching supporting plate
    82.
    发明申请
    Supporting plate, and method for attaching supporting plate 审中-公开
    支撑板及附着支撑板的方法

    公开(公告)号:US20070128832A1

    公开(公告)日:2007-06-07

    申请号:US11607401

    申请日:2006-12-01

    IPC分类号: H01L21/30 H01L21/46

    摘要: A method for attaching a supporting plate which makes it possible to prevent the groove pattern of the supporting plate from being transferred to the substrate, and to prevent non-uniformity from occurring when the surface of the substrate is ground. One surface of the supporting plate is attached to the substrate with an adhesive, and the opposite surface of the supporting plate to which a transfer preventing sheet is attached is mounted and fixed by attraction onto the top surface of an attracting head, and the top surface (no circuit is formed) of the semiconductor wafer is ground by a grinder in this state.

    摘要翻译: 一种用于安装支撑板的方法,其使得可以防止支撑板的凹槽图案被转移到基板,并且当基板的表面被研磨时防止发生不均匀。 支撑板的一个表面用粘合剂附接到基底,并且附着有防转移片的支撑板的相对表面通过吸引安装并固定到吸引头的顶表面上,并且顶表面 在该状态下,通过研磨机研磨半导体晶片的无电路(无电路形成)。

    Stripping device and stripping apparatus
    83.
    发明申请
    Stripping device and stripping apparatus 有权
    剥离装置和剥离装置

    公开(公告)号:US20070125751A1

    公开(公告)日:2007-06-07

    申请号:US11633499

    申请日:2006-12-04

    摘要: A stripping apparatus has a simplified structure for stripping a supporting plate from a layered structure, occupies less space, and strips a supporting plate in a shorter period of time. The stripping apparatus comprises a transfer robot, a cassette, a stripping device and a cleaning device which surround the transfer robot. The stripping device comprises a chucking plate for attracting and retaining a layered structure, and a stripping plate for stripping the supporting plate from the layered structure. The chucking plate is constructed so as to be rotated by 180° within a vertical plane, elevated and lowered in a vertical direction in a state of retaining the layered structure.

    摘要翻译: 剥离装置具有用于从分层结构剥离支撑板的简化结构,占用更少的空间,并且在更短的时间段内剥离支撑板。 剥离装置包括传送机器人,盒,剥离装置和围绕传送机器人的清洁装置。 剥离装置包括用于吸引和保持层状结构的夹持板,以及用于从分层结构剥离支撑板的剥离板。 夹持板被构造成在保持层状结构的状态下在垂直平面内旋转180°,在垂直方向上升高和降低。

    Security management device, security management method, security management program, and computer-readable recording medium
    84.
    发明申请
    Security management device, security management method, security management program, and computer-readable recording medium 审中-公开
    安全管理装置,安全管理方法,安全管理程序和计算机可读记录介质

    公开(公告)号:US20070052518A1

    公开(公告)日:2007-03-08

    申请号:US10557484

    申请日:2004-09-07

    申请人: Akihiko Nakamura

    发明人: Akihiko Nakamura

    IPC分类号: G05B19/00

    CPC分类号: G08B25/00 G08B25/008

    摘要: A security management device includes: an at-home determination section (18b) for determining whether or not a member is present in a security management region; a member information obtaining section (19) for obtaining member attribute information of the member determined to be present in the security management region by the at-home determination section; and an external processing decision section (21) for changing the security management mode in the security management region in such a way where the external processing corresponds to the member attribute information obtained by the member information obtaining section (19) when no unauthorized invasion is detected by an unauthorized invasion detection section (18a).

    摘要翻译: 安全管理装置包括:用于确定成员是否存在于安全管理区域中的归属确定部分(18b); 成员信息获取部分,用于通过在家确定部分获得确定存在于安全管理区域中的成员的成员属性信息; 以及外部处理决定部(21),用于在外部处理对应于当检测到未经授权的入侵时由成员信息获取部(19)获得的成员属性信息的方式改变安全管理区域中的安全管理模式 通过未经授权的入侵检测部分(18A)。

    Coating apparatus, coating method and coating-film forming apparatus

    公开(公告)号:US20060115992A1

    公开(公告)日:2006-06-01

    申请号:US11288991

    申请日:2005-11-29

    IPC分类号: H01L21/31 B05D3/12 H01L21/469

    摘要: A coating apparatus is provided in which a coating liquid supplied onto a surface of a substrate such as a semiconductor wafer and a glass substrate can be easily leveled so as to have a uniform thickness without any edge bead. The coating apparatus comprises a tray, a nozzle for supplying a coating liquid, and a squeegee which serves as an applicator for spreading a coating liquid. The tray has a recessed portion into which a substrate is placed, and a spinner chuck is provided in the recessed portion. In the spinner chuck, a chuck for attracting the substrate is attached to the upper end of a spinner shaft which can be lifted and lowered, and the upper surface of the chuck and the bottom surface of the recessed portion are arranged to be in the same plane in a state where the spinner shaft is lowered to the lowest position.

    State surveillance system and method for an object and the adjacent space, and a surveillance system for freight containers

    公开(公告)号:US06879257B2

    公开(公告)日:2005-04-12

    申请号:US10200552

    申请日:2002-07-23

    摘要: The objective of the present invention is to detect, using a universal method, any “movement” inside of the object being monitored, while maintaining the security of a container. The movement inside of the object to be monitored includes 1) a human movement when a human enters into a container to be monitored, 2) a movement to bring a foreign article in, 3) a movement to take cargo out. To achieve the objective, this invention uses the concept of a so-called “inside-seal”. In actual configuration, a plurality of communication units (communication nodes) are installed on the walls of the container. These communication units have a predetermined powered communication capability and form a communication network communicating with each other. A communication status between each node and all of the other nodes provided in the network, and a network graph matrix is generated which defines the nodal relationship between the nodes. Since the matrix is determined not only by the property of the object to be monitored, but also by the spatial condition within the container, it is possible to detect even a small change in the space. According to the first preferred embodiment, each node transmits a low power electric wave which can reach only neighboring nodes, and each node can transmit data to remote nodes only by relaying the data to the neighboring nodes. The relaying counts (HOP counts) of each node to communicate with all of the other nodes are obtained, and based on these relaying counts, a network graph matrix is generated which defines the relaying counts to communicate between all nodes. According to the second preferred embodiment, each node transmits UWB waves to all of the other nodes, which can reach to all of the other nodes, and the distances between all the nodes are measured and a network graph matrix between all the nodes is generated.

    Complex electromagnetic relay
    87.
    发明申请

    公开(公告)号:US20050057332A1

    公开(公告)日:2005-03-17

    申请号:US10936581

    申请日:2004-09-09

    摘要: A complex electromagnetic relay including a plurality of relay structures configured respectively as relays independent of each other, each relay structure including an electromagnet assembly and a contact section acting to open or close in accordance with an operation of the electromagnet assembly; and a housing accommodating the relay structures in a mutually inverted orientation with contact sections of the relay structures being located alternately at opposing sides. The electromagnet assemblies in the relay structures are provided individually with bobbins supporting coils. The housing includes an enclosing wall enclosing the relay structures in an envelope-like manner and a partition wall arranged between the relay structures disposed side-by-side to separate the relay structures from each other. The bobbins of the electromagnet assemblies are fixedly attached to the enclosing wall as well as to the partition wall.

    Method and apparatus for detecting decrease in tire air-pressure and program for judging decompression of tire
    88.
    发明授权
    Method and apparatus for detecting decrease in tire air-pressure and program for judging decompression of tire 有权
    用于检测轮胎气压降低的方法和装置以及用于判断轮胎减压的程序

    公开(公告)号:US06836709B2

    公开(公告)日:2004-12-28

    申请号:US10334901

    申请日:2003-01-02

    IPC分类号: B60C2300

    CPC分类号: B60C23/061

    摘要: A method for detecting decrease in tire air-pressure on the basis of rotational information obtained from tires attached to a vehicle. The method includes the steps of: detecting rotational information of the respective tires; storing the rotational information of the respective tires; obtaining an acceleration/deceleration of the vehicle; obtaining a slip rate when the acceleration/deceleration of the vehicle is within a specified range proximate to zero; comparing the slip rate with a slip rate which has been preliminarily obtained when the tire is under normal air pressure; and judging simultaneous decompression of both front wheel tires or simultaneous decompression of both rear wheel tires on the basis of a relationship between a value obtained through comparison of the two slip rates and a specified threshold. It is possible to judge simultaneous decompression of both front wheel tires or both rear wheel tires when employing the present invention.

    摘要翻译: 根据从车辆附带的轮胎得到的旋转信息,检测轮胎气压的下降的方法。 该方法包括以下步骤:检测各轮胎的旋转信息; 存储各轮胎的旋转信息; 获得车辆的加速/减速; 当车辆的加速/减速在接近于零的规定范围内时获得滑移率; 将滑移率与当轮胎处于正常气压时预先获得的滑移率进行比较; 基于通过比较两个滑移率获得的值与规定的阈值之间的关系,判断两个前轮轮胎的同时减压或两个后轮轮胎的同时减压。 当采用本发明时,可以判断前轮轮胎或两个后轮轮胎的同时减压。

    Multiple electromagnetic relay
    90.
    发明授权
    Multiple electromagnetic relay 失效
    多个电磁继电器

    公开(公告)号:US06414576B1

    公开(公告)日:2002-07-02

    申请号:US09588235

    申请日:2000-06-06

    IPC分类号: H01H5122

    摘要: A multiple electromagnetic relay is disclosed which comprises at least three electromagnetic relays including electromagnetic relays of the same type or two electromagnetic relays of different types selected from electromagnetic relays of various types each including a coil and a contact unit of a different type and which is mounted in a single assembly frame adapted to be attached to a board. Those terminals of the electromagnetic relays for connection with the external conductors which are connectable with a common external conductor are coupled to each other by a coupling conductor in the area of the assembly frame, and the common external conductor is connected to one of the terminals thus coupled.

    摘要翻译: 公开了一种多重电磁继电器,其包括至少三个电磁继电器,包括相同类型的电磁继电器或不同类型的两个电磁继电器,所述电磁继电器选自各种类型的电磁继电器,每个电磁继电器包括线圈和不同类型的接触单元, 在适于附接到板的单个组装框架中。 用于与可与公共外部导体连接的外部导体连接的电磁继电器的端子通过组装框架区域中的耦合导体彼此耦合,并且公共外部导体连接到其中一个端子 耦合。