Abstract:
We have developed an improved vapor-phase deposition method and apparatus for the application of layers and coatings on various substrates. The method and apparatus are useful in the fabrication of biotechnologically functional devices, Bio-MEMS devices, and in the fabrication of microfluidic devices for biological applications. In one important embodiment, oxide coatings providing hydrophilicity or oxide/polyethylene glycol coatings providing hydrophilicity can be deposited by the present method, over the interior surfaces of small wells in a plastic micro-plate in order to increase the hydrophilicity of these wells. Filling these channels with a precise amount of liquid consistently can be very difficult. This prevents a water-based sample from beading up and creating bubbles, so that well can fill accurately and completely, and alleviates spillage into other wells which causes contamination.
Abstract:
A method and apparatus for fabricating a submicrometer structure. The method incorporates a sputtering process to deposit an electromagnetic material from a seedlayer onto a vertical sidewall. The vertical sidewall is subsequently removed, leaving a free-standing pole-tip. The resulting structure formed can have a a width of less than 0.3 micrometers, if desired. This structure can be used as a magnetic pole of a thin film head (“TFH”) for a data storage device.
Abstract:
Very long linear large diameter rotational, and arbitrary shape conformal fiber encoders are suggested. These devices are based on detection of non-zeroth diffraction order or interference pattern of selected diffraction orders from the fiber grating. Relative and absolute position detection or movement detection can be realized. Depending on the variety of disclosed configurations of fiber encoders, fiber grating could be either a fiber Bragg grating (refractive index modulation grating), a fiber surface-relief phase grating, or fiber amplitude or amplitude phase grating. Each of these fiber gratings may have a uniform or chirped period, and the fiber grating encoders may be implemented using transmission, reflection, or Bragg angle reflection schemes. An optical fiber may be manufactured on a continuous basis by drawing it from preform. Consequently, there is really no limitation to the length of the linear fiber based encoders. In addition, since fiber grating can be mounted on a circularly symmetric figure of arbitrary diameter, there is therefore no limitation on the manufacturable size of a rotary encoder. Due to flexibility of fibers, the proposed gratings can be mounted on a surface of arbitrary shape, thereby enabling optical motion encoders to be fabricated for conformal surfaces. Some manufacturing techniques are disclosed.