摘要:
A combustion pressure sensor suitable for a highly precise combustion control system of an automobile engine and a sensing system using the sensor. The combustion pressure sensor includes a SOI substrate having a three-layered structure of a first silicon plate, a thermal oxide film, and a second silicon plate, wherein a combustion pressure is sensed on the basis of a pressure or a force applied to the first silicon plate.
摘要:
A physical quantity detecting apparatus comprises at least one optical fiber, at least one light emitting means for emitting an incident light beam on the optical fiber, at least one light receiving means for detecting an outgoing light beam from the optical fiber, physical quantity applied position information generating means for providing information indicative of a position of a portion at which a physical quantity is applied to the optical fiber, and operation means for receiving signals from the light receiving means and physical quantities applied position information generating means and calculating a change with time in physical quantity at respective positions on the optical fiber.
摘要:
A picture display device includes, as picture projecting components, a light source unit 3 for radiating a light beam, a liquid crystal device 4 for splitting and distributing the light beam in accordance with picture signals, that is fractional picture signals associated with respective fractional pictures, a reflecting plate 6 for reflecting the light beam for guiding the reflected light beam towards the rear surface of the liquid crystal device 4, and a projection lens 5 for forming an image of each fractional picture produced by radiating the reflected light beam from the rear surface of the liquid crystal device 4. A plurality of sets of the above-described picture projecting components are provided in association with respective fractional pictures making up a full screen size picture. With the picture display device, high-quality picture display may be made with a display screen of a large size and a reduced thickness.
摘要:
A sensor for detecting physical amount in which a gauge resistance value is made not to change even when a wiring material presents a yield phenomenon by wiring a wiring material Such as aluminum presenting a yield phenomenon by thermal stress in a stress insensitive direction of a piezogauge.
摘要:
A differential pressure transmitter is an improvement over the drawbacks of conventional apparatuses and provides a differential pressure transmitter which compensates for adverse effects of a static pressure by using a static pressure detecting piezoresistive gauge. The transmitter includes a highly sensitive static pressure sensor with high outputs, and a composite sensor with small crosstalk between the static pressure sensor and a differential pressure sensor. The differential pressure transmitter is constructed of semiconductor sensor substrate and a fixed mount on which the sensor substrate is securely mounted; whereby the differential pressure of a fluid is detected by utilizing the difference in Young's modulus between the sensor substrate and the mount. The sensor substrate is processed on one side or on both sides to make a part of the sensor substrate thinner than the surrounding parts and thereby cause a peak stress due to a static pressure load to occur at the thin part, and a change in resistance of a semiconductor piezoresistive gauge formed at that thin portion is detected.
摘要:
Multi-functional sensor comprises a support base made from borosilicate, a diaphragm with a E-shaped section secured to the base, the diaphragm being made from single crystalline silicon, principal plane thereof being oriented to be a crystalline plane (110), a differential pressure sensor having p-doped piezoresistor elements formed in the principal plane of the diaphragm at a thin wall portion of the E-shaped sectional diaphragm, each element being arranged along a crystal axis , a static pressure sensor having p-doped piezoresistor elements formed in the principal plane at an outer peripheral thick wall portion of the E-shaped sectional diaphragm, each element being arranged along the crystal axis , and a temperature sensor having a p-doped piezoresistor element formed in the principal plane at the outer peripheral thick wall portion of the E-shaped sectional diaphragm, the element being arranged along the crystal axis . In the multi-functional sensor thus constructed, deviation of the output signal from the differential pressure sensor due to the influence of the temperature and static pressure can be removed easily to obtain the correct signal.
摘要:
An optical head including a substrate, an optical waveguide formed on the substrate, a light source formed on a portion of the substrate, a collimator lens for converting light from the light source into parallel light rays, an objective lens for focusing light from the collimator lens onto a recording medium and for converting reflected light from the recording medium into parallel light rays, a beam splitter for dividing light from the objective lens into two parts to send out one of the parts in a predetermined direction, a coupling lens for focusing light from the beam splitter on a position, and a photodetector for detecting light from the coupling lens, is disclosed, in which the collimator lens, the objective lens, the beam splitter, the coupling lens and the photodetector are integrated on the substrate, and the collimator lens or an objective lens supporting part is made flexible to vary the position of the focus of the collimator lens or objective lens by piezo-electric elements.
摘要:
A method for generating X-rays in an X-ray tube, comprises the steps of: rotating an X-ray target of a rotating anode, the X-ray target having a metal coated layer thereon; applying electron beams emitted from a cathode onto the metal coated layer of the X-ray target; and offsetting thermal deformation of the X-ray target due to the application of the electron beams by deformation of the X-ray target due to centrifugal force, thereby maintaining a position of the X-ray target in a direction of the application of the electron beams, at a room temperature of the X-ray target, thus generating the X-rays.
摘要:
An optical head is disclosed, in which a plate-shaped optical wave guide comprises an optical system including a collimator lens, a beam splitter and an objective lens; a laser light source for emitting a laser light in the form of a light beam which is to be impinged on an optical recording medium; and electro-acoustic transducers are disposed between the beam splitter and the objective lens, the transducers being adapted to be driven by the outer electrical signal for producing surface acoustic waves in the optical wave guide, thereby establishing a condensation and rarefaction distribution in refractive index in the optical wave guide which distribution influences the direction of transmission and the degree of focusing of the light beam passing therethrough so that regulation of the tracking and the focal length can be effected without any mechanical movements.
摘要:
In an integrated pressure sensor, a silicon chip for pressure detection and a substrate for supporting the silicon chip are made of the same material, the silicon chip has a thin diaphragm portion and a peripheral fixed portion thicker than the diaphragm portion, and the silicon chip is bonded to the substrate through a thin insulating film.