Method for making triarylsulfonium hexafluorometal or metalloid salts
    82.
    发明授权
    Method for making triarylsulfonium hexafluorometal or metalloid salts 失效
    三芳基锍六氟金属或准金属盐的制备方法

    公开(公告)号:US5446172A

    公开(公告)日:1995-08-29

    申请号:US769520

    申请日:1991-10-02

    CPC classification number: C07C381/12

    Abstract: A method for making a triarylsulfonium hexafluoro metal or metalloid salt is provided by effecting reaction between a diarylsulfoxide and an aromatic substrate, such as an arylalkylether in the presence of a solution of phosphorus pentoxide and methanesulfonic acid to produce a triarylsulfonium complex. A metathesis of the resulting triarylsulfonium complex is effected with an alkali metal hexafluoro metal or metalloid salt.

    Abstract translation: 制备三芳基锍六氟金属或准金属盐的方法是通过在五氧化二磷和甲磺酸溶液的存在下,通过在二芳基亚砜和芳基底物(如芳基烷基醚)之间的反应产生三芳基锍络合物而提供的。 所得三芳基锍络合物的复分解是用碱金属六氟金属或准金属盐进行的。

    Method for making a patterned resist substrate composite
    83.
    发明授权
    Method for making a patterned resist substrate composite 失效
    图案化抗蚀剂基板复合材料的制造方法

    公开(公告)号:US5362607A

    公开(公告)日:1994-11-08

    申请号:US195275

    申请日:1994-02-14

    CPC classification number: G03F7/0045

    Abstract: A method for preparing a positive photoresist substrate composite is provided which can be used in the presence or absence of atmospheric moisture. There is used a major amount of a commercially available resin, such as a novolak, a dissolution inhibitor with thermally labile t-butyl ether or ester groups, and an aryl onium salt.

    Abstract translation: 提供一种制备正性光致抗蚀剂基材复合材料的方法,其可用于存在或不存在大气湿气。 使用主要量的市售树脂,例如酚醛清漆,具有热不稳定的叔丁基醚或酯基的溶解抑制剂和芳基鎓盐。

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