公开(公告)号：US07998839B2

公开(公告)日：2011-08-16

申请号：US12821703

申请日：2010-06-23

申请人： Hiroyuki Chibahara ,  Atsushi Ishii ,  Naoki Izumi ,  Masahiro Matsumoto

发明人： Hiroyuki Chibahara ,  Atsushi Ishii ,  Naoki Izumi ,  Masahiro Matsumoto

IPC分类号： H01L21/46

CPC分类号： H01L23/02 ,  H01L23/522 ,  H01L23/585 ,  H01L2924/0002 ,  H01L2924/00

摘要： A semiconductor device wherein destruction of a sealing ring caused by cracking of an interlayer dielectric film is difficult to occur, as well as a method for manufacturing the semiconductor device, are provided. A first laminate comprises first interlayer dielectric films having a first mechanical strength. A second laminate comprises second interlayer dielectric films having a mechanical strength higher than the first mechanical strength. A first region includes first metallic layers and vias provided within the first laminate. A second region includes second metallic layers and vias provided within the second laminate. When seen in plan, the second region overlaps at least a part of the first region, is not coupled with the first region by vias, and sandwiches the second interlayer dielectric film between it and the first region.

摘要翻译： 提供了难以发生由层间电介质膜的破裂引起的密封环破坏的半导体装置，以及半导体装置的制造方法。 第一层压板包括具有第一机械强度的第一层间绝缘膜。 第二层压体包括具有高于第一机械强度的机械强度的第二层间介电膜。 第一区域包括设置在第一层压体内的第一金属层和通孔。 第二区域包括设置在第二层压体内的第二金属层和通孔。 当在平面图中看到时，第二区域与第一区域的至少一部分重叠，不通过通孔与第一区域耦合，并且在其与第一区域之间夹住第二层间电介质膜。

公开(公告)号：US07967961B2

公开(公告)日：2011-06-28

申请号：US11661084

申请日：2005-08-29

申请人： Minoru Dogi ,  Hideyuki Odagi ,  Tetsuya Shimada ,  Masahiro Matsumoto

发明人： Minoru Dogi ,  Hideyuki Odagi ,  Tetsuya Shimada ,  Masahiro Matsumoto

IPC分类号： C23C14/34

CPC分类号： H01J37/34 ,  C23C14/3464 ,  C23C14/505 ,  C23C14/541 ,  H01J37/32752

摘要： There is provided a film forming apparatus which is capable of forming a film on both surfaces of a substrate by sputtering continuously with high efficiency by restraining a rise in temperature of the substrate to a predetermined value or higher.In a film forming chamber 2 the pressure of which is controlled, while a rotating drum 7 is rotated by the driving of a drive motor 8, a film is formed on the top surface of a substrate 12 on a substrate tray 13 held on a substrate holder 10 by cathodes 17a and 17b for outer surface to which a d.c. voltage or an a.c. voltage or a high-frequency voltage is applied, and also a film is formed on the back surface of the substrate 12 on the substrate tray 13 held on the substrate holder 10 by cathodes 14a and 14b for inner surface to which a d.c. voltage or an a.c. voltage or a high-frequency voltage is applied, by which a high-quality film is formed on both surfaces of the substrate 12 by sputtering continuously with high efficiency by restraining a rise in temperature of the substrate to a predetermined value or higher.

摘要翻译： 提供一种成膜装置，其能够通过将衬底的温度上升抑制到预定值以上而以高效率连续溅射在衬底的两个表面上形成膜。 在通过驱动电动机8的驱动使旋转鼓7旋转的同时控制压力的成膜室2中，在保持在基板上的基板托盘13上的基板12的顶面上形成有膜 通过用于外部表面的阴极17a和17b的保持器10 电压或电流 施加电压或高频电压，并且通过用于内部表面的阴极14a和14b在保持在衬底保持器10上的衬底托盘13上的衬底12的背面上形成膜。 电压或电流 施加电压或高频电压，通过将基板的温度上升抑制到规定值以上，通过高效率地连续溅射，在基板12的两面形成高质量的膜。

公开(公告)号：US20100210458A1

公开(公告)日：2010-08-19

申请号：US12702046

申请日：2010-02-08

申请人： Tomoko Katsuhara ,  Masahiro Matsumoto ,  Kazuhiko Ishihara

发明人： Tomoko Katsuhara ,  Masahiro Matsumoto ,  Kazuhiko Ishihara

IPC分类号： B01J20/26

CPC分类号： B01J20/286 ,  B01J20/28042 ,  B01J20/28097 ,  B01J20/3204 ,  B01J20/327 ,  B01J20/328 ,  B01J2220/52 ,  B01J2220/54 ,  B01J2220/58 ,  B01J2220/82

摘要： A biomicromolecule-separating, monolithic silica column having a silica matrix and pores formed in the silica matrix, the silica matrix and pores have been modified at surfaces thereof with a polymer, which is obtainable by polymerization of a monomer composition including a phosphorylcholine-analogous-group-containing monomer represented by the following formula (1): R1, R2 and R3 are the same or different and each represent a hydrogen atom, C1-6 alkyl group or C1-6 hydroxyalkyl group, R4 represents a C1-6 alkylene group, R5 represents a hydrogen atom or methyl group, and n stands for an integer of from 1 to 4, such that the surface-modified pores are provided with a pore size comparable to a molecular size of biomicromolecules to be separated.

摘要翻译： 具有二氧化硅基质和在二氧化硅基质中形成的孔，二氧化硅基质和孔的生物分子分离的整体硅石柱已经在其表面上用聚合物改性，聚合物可通过聚合包含磷酸胆碱类似物的单体组合物获得， 由下式（1）表示的含有基团的单体：R1，R2和R3相同或不同，各自表示氢原子，C1-6烷基或C1-6羟烷基，R4表示C1-6亚烷基 R 5表示氢原子或甲基，n表示1〜4的整数，使得表面改性孔的孔径与分离的生物分子的分子大小相当。

公开(公告)号：US07775104B2

公开(公告)日：2010-08-17

申请号：US12020025

申请日：2008-01-25

申请人： Hiroshi Nakano ,  Masahiro Matsumoto ,  Keiji Hanzawa

发明人： Hiroshi Nakano ,  Masahiro Matsumoto ,  Keiji Hanzawa

IPC分类号： G01F1/68

CPC分类号： G01F1/6845 ,  G01F1/688

摘要： To reduce power consumption by a thermal flowmeter while good flow-rate detection sensitivity is maintained, it is only necessary to reduce power consumption by a heat resistor under predetermined conditions. Specifically, provided that a width Wh of the heat resistor is between 100 micrometers and 400 micrometers inclusive (100≦Wh≦400), it is only necessary that a relationship among the length Lh of the heat resistor, a temperature increase ΔTh for the heat resistor, and a maximum permissible power Phmax to be supplied to the heat resistor be set so as to satisfy a formula 1.4≦ΔTh·Lh/Ph max≦2.8 in order to maintain good flow-rate detection sensitivity. Accordingly, the length of the heat resistor and the temperature increase in the heat resistor are set so that the maximum power consumption can be reduced within a range in which the formula is satisfied.

摘要翻译： 为了在保持良好的流量检测灵敏度的同时通过热式流量计降低功耗，仅需要在预定条件下降低热电阻器的功耗。 具体而言，只要热电阻器的宽度Wh为100微米至400微米（100＆lt; 1; Wh＆nlE; 400），则仅需要将热电阻器的长度Lh，温度升高＆Dgr; Th之间的关系 为了保持良好的流量检测灵敏度，要设置供热电阻器的最大允许功率Phmax以满足公式1.4＆nlE;＆Dgr; Th·Lh / Ph max＆nlE; 2.8。 因此，热电阻器的长度和热电阻器的温度上升被设定为能够在满足公式的范围内降低最大功耗。

公开(公告)号：US07759798B2

公开(公告)日：2010-07-20

申请号：US12426588

申请日：2009-04-20

申请人： Hiroyuki Chibahara ,  Atsushi Ishii ,  Naoki Izumi ,  Masahiro Matsumoto

发明人： Hiroyuki Chibahara ,  Atsushi Ishii ,  Naoki Izumi ,  Masahiro Matsumoto

IPC分类号： H01L23/48 ,  H01L23/52 ,  H01L29/40 ,  H01L27/10 ,  H01L29/74

CPC分类号： H01L23/02 ,  H01L23/522 ,  H01L23/585 ,  H01L2924/0002 ,  H01L2924/00

摘要： A semiconductor device wherein destruction of a sealing ring caused by cracking of an interlayer dielectric film is difficult to occur, as well as a method for manufacturing the semiconductor device, are provided. A first laminate comprises first interlayer dielectric films having a first mechanical strength. A second laminate comprises second interlayer dielectric films having a mechanical strength higher than the first mechanical strength. A first region includes first metallic layers and vias provided within the first laminate. A second region includes second metallic layers and vias provided within the second laminate. When seen in plan, the second region overlaps at least a part of the first region, is not coupled with the first region by vias, and sandwiches the second interlayer dielectric film between it and the first region.

摘要翻译： 提供了难以发生由层间电介质膜的破裂引起的密封环破坏的半导体装置，以及半导体装置的制造方法。 第一层压板包括具有第一机械强度的第一层间绝缘膜。 第二层压体包括具有高于第一机械强度的机械强度的第二层间介电膜。 第一区域包括设置在第一层压体内的第一金属层和通孔。 第二区域包括设置在第二层压体内的第二金属层和通孔。 当在平面图中看到时，第二区域与第一区域的至少一部分重叠，不通过通孔与第一区域耦合，并且在其与第一区域之间夹住第二层间电介质膜。

公开(公告)号：US07721599B2

公开(公告)日：2010-05-25

申请号：US11814308

申请日：2006-02-20

申请人： Masahiro Matsumoto ,  Hiroshi Nakano ,  Masamichi Yamada ,  Keiji Hanzawa ,  Izumi Watanabe ,  Keiichi Nakada ,  Yasuhiro Kanamaru

发明人： Masahiro Matsumoto ,  Hiroshi Nakano ,  Masamichi Yamada ,  Keiji Hanzawa ,  Izumi Watanabe ,  Keiichi Nakada ,  Yasuhiro Kanamaru

IPC分类号： G01F1/68

CPC分类号： G01F15/006 ,  G01F1/6845 ,  G01F1/692

摘要： Conventional thermal flow measurement devices lack consideration for automobiles in severe environments. A detection element of the thermal flow measurement device according to the present invention is structured by the provision of a planar substrate made of a material having good thermal conductivity, such as silicon or ceramic, with a thin-walled portion (diaphragm). On the surface of the thin-walled portion, the detection element comprises a heat element as a heater heated to a temperature being different to a predetermined extent from the temperature of the air flow to be measured, temperature-detecting resistors as temperature-detecting means on both sides of the heat element, wiring portions formed of electrical conductors that draw signal lines from the heat element and the temperature-detecting resistors and that have a melting point of 2000° C. or higher, and pads.

摘要翻译： 传统的热流测量装置在恶劣环境中缺乏汽车的考虑。 根据本发明的热流测量装置的检测元件通过提供由具有良好导热性的材料（例如硅或陶瓷）制成的具有薄壁部分（隔膜）的平面基板构成。 在薄壁部分的表面上，检测元件包括作为加热器的加热元件加热到与待测量的空气流的温度不同的温度，作为温度检测装置的温度检测电阻器 在加热元件的两侧，由从导热元件和温度检测电阻器吸引信号线并且具有2000℃或更高熔点的电导体形成的布线部分和焊盘。

公开(公告)号：US20090241660A1

公开(公告)日：2009-10-01

申请号：US12339485

申请日：2008-12-19

申请人： Hiroshi NAKANO ,  Masahiro Matsumoto ,  Keiji Hanzawa

发明人： Hiroshi NAKANO ,  Masahiro Matsumoto ,  Keiji Hanzawa

IPC分类号： G01F1/68

CPC分类号： G01F1/6845 ,  G01F1/6842 ,  G01F1/688 ,  G01F1/692 ,  G01F1/696 ,  G01F5/00

摘要： In the thermal type flowmeter for measuring the flow rate by a measuring element with an exothermic resistor and a temperature measuring resistor being shaped in the side of the surface of a substrate, a facing wall facing the surface of the measuring element is arranged, cantilever plate parts protruding from the facing wall toward the measuring element side are arranged, a gap is provided between the tip of the cantilever plate parts and the measuring element, and the cantilever plate parts are extended from the upper stream to the down stream of the measuring element.

摘要翻译： 在用于测量具有放热电阻器的测量元件和在基板表面侧形成的温度测量电阻器的流量的热式流量计中，布置了面向测量元件表面的面向壁，悬臂板 布置有从面向壁向测量元件侧突出的部分，在悬臂板部分的顶端和测量元件之间设置有间隙，并且悬臂板部分从测量元件的上游向下游延伸 。

公开(公告)号：US07360415B2

公开(公告)日：2008-04-22

申请号：US11202017

申请日：2005-08-12

申请人： Hiroshi Nakano ,  Izumi Watanabe ,  Masamichi Yamada ,  Masahiro Matsumoto

发明人： Hiroshi Nakano ,  Izumi Watanabe ,  Masamichi Yamada ,  Masahiro Matsumoto

IPC分类号： G01F1/68

CPC分类号： G01F1/6845 ,  G01F25/0007

摘要： A thermal type air flow meter that makes it possible to precisely and easily determine whether a sensor element is a non-defective or a defective by screening is provided. First and second diaphragm sections composed of an electrical insulating film are formed in a semiconductor substrate. A heating resistor and a resistor for intake air temperature sensor are disposed on them to obtain a sensor element for thermal type air flow meters. The length of the short sides W1 of the rectangular first diaphragm section is made substantially equal to the length of the short sides of the second diaphragm section rectangular as well. Thus, the pressures applied to each of the diaphragm sections are substantially identical with each other in pressurization during screening.

摘要翻译： 提供一种热式空气流量计，其能够精确且容易地确定传感器元件是否为缺陷或通过筛选的缺陷。 在半导体衬底中形成由电绝缘膜构成的第一和第二隔膜部分。 在其上设置加热电阻器和进气温度传感器用电阻器，以获得用于热式空气流量计的传感器元件。 矩形第一隔膜部分的短边W 1的长度也与第二隔膜部分的短边长度基本相等。 因此，施加到每个隔膜部分的压力在筛选期间的加压中基本相同。

公开(公告)号：US20080069724A1

公开(公告)日：2008-03-20

申请号：US11896124

申请日：2007-08-29

申请人： Atsushi Ota ,  Isao Sugiura ,  Noriaki Tani ,  Masahiro Matsumoto ,  Hiroaki Katagiri ,  Tadashi Masuda ,  Satorui Ishibashi ,  Takaharu Ito

发明人： Atsushi Ota ,  Isao Sugiura ,  Noriaki Tani ,  Masahiro Matsumoto ,  Hiroaki Katagiri ,  Tadashi Masuda ,  Satorui Ishibashi ,  Takaharu Ito

IPC分类号： C22C1/00

CPC分类号： C22C1/026 ,  C23C14/3414

摘要： A target is produced inexpensively by safely incorporating an additive which is inflammable in the atmosphere. A primary alloy in a molten state is formed by adding an additive into a principal material in a low-level oxygen atmosphere, and a secondary alloy is produced by increasing the volume of the primary alloy through adding the principal material to the molten primary alloy in the atmospheric atmosphere. Since the primary alloys in the molten or solid condition are stable, it does not ignite in the atmosphere. Since the volume of the primary alloy is smaller than that of the secondary alloy, a smaller size of a vacuum chamber 11 for the formation of the first atmosphere suffices.

摘要翻译： 通过安全地并入在大气中易燃的添加剂，廉价地生产目标。 熔融状态下的初级合金是通过在低级氧气氛中的主要材料中添加添加剂而形成的，通过将主要原料添加到熔融一次合金中来增加一次合金的体积来制造二次合金 大气层。 由于熔融或固态条件下的主要合金是稳定的，因此在大气中不会点燃。 由于一次合金的体积小于二次合金的体积，所以形成第一气氛的真空室11的尺寸较小。

公开(公告)号：US20080016958A1

公开(公告)日：2008-01-24

申请号：US11765736

申请日：2007-06-20

申请人： Masahiro Matsumoto ,  Masamichi Yamada ,  Hiroshi Nakano ,  Keiji Hanzawa ,  Yasuhiro Kanamaru

发明人： Masahiro Matsumoto ,  Masamichi Yamada ,  Hiroshi Nakano ,  Keiji Hanzawa ,  Yasuhiro Kanamaru

IPC分类号： G01F1/68

CPC分类号： G01F1/6845 ,  G01F1/692 ,  G01F1/6986

摘要： The coupling capacitance of the wiring portions of a thermal type flow rate measuring apparatus is reduced so as to prevent a drop in the response characteristics. A detection element of the thermal type flow rate measuring apparatus includes a planar substrate made of silicon, ceramic, or the like, in which a diaphragm is formed. On the surface of the diaphragm, there are disposed a heat-generating resistor as a heat-generating element that is heated to a predetermined temperature difference from the temperature of air flow to be measured, a heat-generating element temperature-detecting resistor for detecting the temperature of the heat-generating resistor, and temperature-detecting resistors disposed on both sides of the heat-generating resistor. The detection element also includes wiring portions which have connecting terminals electrically connected to the heat-generating resistor and a wiring pattern electrically connected with the surface of the planar substrate.

摘要翻译： 热式流量测量装置的布线部分的耦合电容减小，以防止响应特性的下降。 热式流量测量装置的检测元件包括其中形成有隔膜的由硅，陶瓷等制成的平面基板。 在隔膜的表面上设置有发热电阻器作为发热元件，其被加热到与要测量的空气流的温度的预定温度差，用于检测的发热元件温度检测电阻器 发热电阻器的温度和设置在发热电阻器两侧的温度检测电阻器。 检测元件还包括具有与发热电阻器电连接的连接端子的布线部分和与平面基板的表面电连接的布线图案。