公开(公告)号：US20090175705A1

公开(公告)日：2009-07-09

申请号：US12225920

申请日：2007-04-23

申请人： Ken Nakao ,  Hitoshi Kato ,  Junichi Hagihara

发明人： Ken Nakao ,  Hitoshi Kato ,  Junichi Hagihara

IPC分类号： H01L21/677 ,  B25B11/00 ,  H01L21/673 ,  H01L21/68

CPC分类号： H01L21/67098 ,  H01L21/6838 ,  H01L21/68707

摘要： The present invention restrains, during a transfer of a substrate, a central portion of the substrate from being warped by its own weight, which might be caused by a super-enlargement of a diameter of the substrate. A substrate transfer apparatus 18 includes: a support part 17 which is moved above a substrate w of a large diameter; and an upside grip mechanism 28 disposed on the support part 17, the upside grip mechanism 28 capable of supporting a peripheral portion of the substrate w from above. The support part 17 is provided with a non-contact sucking and holding part 30 having a suction hole 31 and a blow hole 32. The non-contact sucking and holding part 30 sucks and holds the substrate w in a non-contact manner, by blowing a gas onto the central portion of the upper surface of the substrate w and sucking the central portion to form an air layer 50 such that the central portion of the wafer w is not warped.

摘要翻译： 本发明在衬底的转移期间抑制衬底的中心部分被自身的重量扭曲，这可能是由于衬底的直径的过度扩大引起的。 基板转印装置18包括：支撑部17，其在大直径的基板w上方移动; 以及设置在支撑部17上的上侧夹持机构28，能够从上方支撑基板w的周边部的上侧夹持机构28。 支撑部17设置有具有吸入孔31和气孔32的非接触式吸持保持部30.非接触吸引保持部30以非接触的方式吸附并保持基板w，通过 将气体吹送到基板w的上表面的中心部分并吸附中心部分以形成空气层50，使得晶片w的中心部分不翘曲。

公开(公告)号：US20090166960A1

公开(公告)日：2009-07-02

申请号：US12340808

申请日：2008-12-22

申请人： Naoki Ishikawa ,  Yasuo Fukatsu ,  Tsuyoshi Moriyama ,  Hitoshi Kato

发明人： Naoki Ishikawa ,  Yasuo Fukatsu ,  Tsuyoshi Moriyama ,  Hitoshi Kato

IPC分类号： B65H7/06

CPC分类号： B65H9/106 ,  B65H2404/1422 ,  B65H2511/20 ,  B65H2511/222 ,  B65H2553/416 ,  B65H2553/81 ,  B65H2801/06 ,  B65H2220/03 ,  B65H2220/11

摘要： A sheet conveyance apparatus capable of detecting a sheet end portion in a short time period even if sheets are conveyed at a narrow interval and at high speed, thus making it possible to expedite the start timing of a subsequent sheet alignment operation. In accordance with results of detection by lateral registration detection sensors performed when a sheet reaches a lateral registration detection sensor unit, the sensor unit is moved in a width direction for sheet end detection. Based on a moving distance of the sensor unit from a standby position to a position where the sheet end is detected, a shift amount to be shifted the sheet in the width direction, i.e., a lateral registration error, is computed.

摘要翻译： 即使片材以窄的间隔和高速输送，能够在短时间内检测纸张端部的纸张输送装置，从而能够加快后续的纸张对齐操作的开始定时。 根据当片材到达侧向对位检测传感器单元时执行的横向对准检测传感器的检测结果，传感器单元沿宽度方向移动以进行片材端部检测。 基于传感器单元从待机位置到检测到纸张端的位置的移动距离，计算要在宽度方向上移动纸张的移动量，即横向对准误差。

公开(公告)号：US07473443B2

公开(公告)日：2009-01-06

申请号：US10515728

申请日：2003-08-15

申请人： Yasuo Matsuki ,  Haruo Iwasawa ,  Hitoshi Kato

发明人： Yasuo Matsuki ,  Haruo Iwasawa ,  Hitoshi Kato

IPC分类号： B05D3/06 ,  B05D3/02

CPC分类号： C23C24/10 ,  C23C26/02 ,  C30B7/005 ,  H01L21/02422 ,  H01L21/02532 ,  H01L21/02601 ,  H01L21/02628 ,  H01L21/02667 ,  H01L21/02686

摘要： There are provided a silicon-film-forming composition containing silicon particles and a dispersion medium and a method for forming a silicon film by forming a coating film of the silicon-film-forming composition on a substrate and subjecting the coating film to instantaneous fusion, a heat treatment or a light treatment. According to the composition and the method, a polysilicon film with a desired thickness which may be used as a silicon film for a solar battery can be formed efficiently and easily.

摘要翻译： 提供一种含有硅颗粒和分散介质的硅膜形成组合物，以及通过在基片上形成硅膜形成组合物的涂膜并对涂膜进行即时熔合而形成硅膜的方法， 热处理或光处理。 根据组成和方法，可以有效且容易地形成可用作太阳能电池的硅膜的具有期望厚度的多晶硅膜。

公开(公告)号：US20080245306A1

公开(公告)日：2008-10-09

申请号：US12076765

申请日：2008-03-21

申请人： Ken Nakao ,  Hitoshi Kato ,  Tsuneyuki Okabe ,  Shigeyuki Okura

发明人： Ken Nakao ,  Hitoshi Kato ,  Tsuneyuki Okabe ,  Shigeyuki Okura

IPC分类号： C23C16/00

CPC分类号： C23C16/4486

摘要： A vaporizer for generating a process gas from a liquid material includes a heat-exchange lower block having a hollow internal space and disposed below the spray port of an injector inside the container. A run-up space for the atomized liquid material is defined between the spray port and the heat-exchange lower block, and an annular space continuous to the run-up space is defined between an inner surface of the container and the heat-exchange lower block. An internal heater is disposed in the internal space of the heat-exchange lower block and includes a carbon wire formed of woven bundles of carbon fibers and sealed in a ceramic envelope. The internal heater is configured to heat the atomized liquid material flowing through the annular space to generate the process gas.

摘要翻译： 用于从液体材料产生处理气体的蒸发器包括具有中空内部空间并设置在容器内的喷射器的喷雾口下方的热交换下部块。 雾化的液体材料的起始空间被限定在喷射口和热交换下部块之间，并且在容器的内表面和热交换器下部之间限定与起动空间连续的环形空间 块。 内部加热器设置在热交换下部块的内部空间中，并且包括由编织的碳纤维束形成并密封在陶瓷外壳中的碳线。 内部加热器被配置为加热流过环形空间的雾化液体材料以产生处理气体。

公开(公告)号：US20080237965A1

公开(公告)日：2008-10-02

申请号：US12055026

申请日：2008-03-25

申请人： Tsuyoshi Moriyama ,  Hitoshi Kato ,  Yasuo Fukatsu ,  Naoki Ishikawa

发明人： Tsuyoshi Moriyama ,  Hitoshi Kato ,  Yasuo Fukatsu ,  Naoki Ishikawa

IPC分类号： B65H39/00

CPC分类号： B65H31/34 ,  B42C1/125 ,  B65H2301/3621 ,  B65H2301/4213 ,  B65H2511/20 ,  B65H2801/06 ,  B65H2220/01 ,  B65H2220/02 ,  B65H2220/11

摘要： An image forming system which is capable of preventing paper jam from occurring in a sheet processing apparatus to thereby maintain the stability of the system. An alignment plates of an alignment unit movable in a lateral direction each sheet are brought into abutment with opposite side edges of sheets stacked on the sheet stack unit to laterally align the sheets. A lateral registration sensor unit detects a lateral position of the sheet being conveyed. When the detected lateral position of the sheet is beyond a predetermined position, the CPU of the apparatus changes the standby positions of the alignment plates such that spacing therebetween in the lateral direction the sheet is widened by a predetermined amount, and extends the conveying interval of sheets in the image forming apparatus by a predetermined time period.

摘要翻译： 一种图像形成系统，其能够防止在片材处理装置中发生卡纸，从而保持系统的稳定性。 每个片材沿横向可移动的对准单元的对准板与堆叠在片材堆叠单元上的片材的相对侧边缘邻接，以横向对准片材。 横向对位传感器单元检测被传送的片材的横向位置。 当检测到的片材的横向位置超过预定位置时，设备的CPU改变对准板的待机位置，使得在片材的横向方向上的间隔被加宽了预定量，并且延长了传送间隔 片材在图像形成装置中预定的时间段。

公开(公告)号：US07389084B2

公开(公告)日：2008-06-17

申请号：US11378476

申请日：2006-03-20

申请人： Naoto Watanabe ,  Hitoshi Kato ,  Takahiro Watanabe ,  Keita Takahashi ,  Masahiro Serizawa ,  Ichiro Sasaki ,  Takuya Kawamura

发明人： Naoto Watanabe ,  Hitoshi Kato ,  Takahiro Watanabe ,  Keita Takahashi ,  Masahiro Serizawa ,  Ichiro Sasaki ,  Takuya Kawamura

IPC分类号： G03G15/00 ,  B65H5/00

CPC分类号： G03G15/6558 ,  B65H2402/10 ,  G03G15/235

摘要： An image forming system has a sheet deck assembly, an image forming apparatus, and a feeding buffering apparatus with plural feeding buffer trays for temporarily storing sheets of printing paper fed from plural printing paper decks of the sheet deck assembly. The feeding buffering apparatus feeds the temporarily stored sheets to the image forming apparatus.

摘要翻译： 图像形成系统具有片材组合件，图像形成装置和具有多个供给缓冲托盘的进料缓冲装置，用于临时存储从片材甲板组件的多个打印纸张片材供给的打印纸张。 进给缓冲装置将临时存储的纸张馈送到图像形成装置。

公开(公告)号：USD548275S1

公开(公告)日：2007-08-07

申请号：US29243075

申请日：2005-11-21

申请人： Hisaya Ishio ,  Hitoshi Kato

设计人： Hisaya Ishio ,  Hitoshi Kato

公开(公告)号：US20070102964A1

公开(公告)日：2007-05-10

申请号：US11556252

申请日：2006-11-03

申请人： Takeshi Yoshimoto ,  Hitoshi Kato ,  Kosaku Tomozawa ,  Kazuo Arai

发明人： Takeshi Yoshimoto ,  Hitoshi Kato ,  Kosaku Tomozawa ,  Kazuo Arai

IPC分类号： B60N2/00

CPC分类号： B62D25/02 ,  B60J5/0425 ,  B60J5/044 ,  B60J5/0448 ,  B62D21/157 ,  B62D25/04

摘要： In an automotive vehicle body including a first annular frame (29) formed by front pillars (11, 12), a second annular frame (34) formed by center pillars (13, 14) and a front door (7) internally provided with a front door beam (51) and fitted between the front pillar and center pillar one each side of the vehicle body, the front door beam overlaps the first annular frame and second annular frame as seen from sideways, and includes a door beam main body (61) providing a channel member having an open side facing inboard and a tension wire (71) extending along an inboard side of the door beam main body. Thereby, when another vehicle hits the front door from sideways, because the front door beam overlaps the first annular frame and second annular frame as seen from sideways, the impact energy can be effectively transmitted to the vehicle body. Furthermore, because the door beam main body supports a compressive load while the tension wire supports a tensile load, deformation of the door beam is minimized.

摘要翻译： 在包括由前柱（11,12）形成的第一环形框架（29）的机动车体中，由中心柱（13,14）和前门（7）形成的第二环形框架（34） 前门梁（51），并且安装在车身的每一侧的前柱和中心柱之间，从侧面观察，前门梁与第一环形框架和第二环形框架重叠，并且包括门梁主体（61 ）提供具有面向内侧的敞开侧的通道构件和沿着门梁主体的内侧延伸的张力线（71）。 因此，当另一车辆从侧面撞击前门时，由于从侧面观察，前门梁与第一环形框架和第二环形框架重叠，因此能够有效地将冲击能量传递到车体。 此外，由于门梁主体在张力线支撑拉伸载荷的同时承受压缩载荷，所以门梁的变形被最小化。

公开(公告)号：US07185883B2

公开(公告)日：2007-03-06

申请号：US10928194

申请日：2004-08-30

申请人： Hitoshi Kato ,  Tetsuya Terada ,  Yasutaka Iwasa ,  Masahiro Yonenuma

发明人： Hitoshi Kato ,  Tetsuya Terada ,  Yasutaka Iwasa ,  Masahiro Yonenuma

IPC分类号： B65H39/00

CPC分类号： B65H29/22 ,  B65H2513/514

摘要： A sheet treating apparatus including, a conveying device for conveying sheets, a sheet stack tray for stacking the sheets conveyed by the conveying device, a sensor detecting the sheets conveyed to the sheet stack tray, a pressure-contact conveying device for conveying the sheets on the sheet stack tray in pressure contact with the sheets, a pressure-contact device for bringing the pressure-contact conveying device into pressure-contact with the sheets, and a controlling device for varying a time from when the sensor detects the sheets to when the pressure-contact device starts operating according to a sheet conveyance speed of the conveying device.

摘要翻译： 一种纸张处理装置，包括：用于输送纸张的输送装置，用于堆叠由输送装置输送的纸张的纸摞托盘，检测输送到纸摞托盘的纸张的传感器，用于将纸张传送到的压力接触输送装置 与片材压力接触的片材堆叠托盘，用于使压力接触传送装置与片材压力接触的压力接触装置，以及用于改变从传感器检测到片材到何时的时间的控制装置 压力接触装置根据输送装置的纸张输送速度开始操作。

公开(公告)号：US07156923B2

公开(公告)日：2007-01-02

申请号：US10986282

申请日：2004-11-12

申请人： Hitoshi Kato ,  Kohei Fukushima ,  Atsushi Endo ,  Tatsuo Nishita ,  Takeshi Kumagai

发明人： Hitoshi Kato ,  Kohei Fukushima ,  Atsushi Endo ,  Tatsuo Nishita ,  Takeshi Kumagai

IPC分类号： C23C16/00 ,  C23C16/34 ,  C23C16/52 ,  H01L21/31 ,  H01L21/469

CPC分类号： H01L21/02271 ,  C23C16/345 ,  C23C16/4405 ,  C23C16/4412 ,  H01L21/0217 ,  H01L21/3185 ,  Y10S438/905

摘要： A thermal processing system (1) includes a reaction vessel (2) capable of forming a silicon nitride film on semiconductor wafers (10) through interaction between hexachlorodisilane and ammonia, and an exhaust pipe (16) connected to the reaction vessel (2). The reaction vessel 2 is heated at a temperature in the range of 500 to 900° C. and the exhaust pipe (16) is heated at 100° C. before disassembling and cleaning the exhaust pipe 16. Ammonia is supplied through a process gas supply pipe (13) into the reaction vessel (2), and the ammonia is discharged from the reaction vessel (2) into the exhaust pipe (16).

摘要翻译： 热处理系统（1）包括能够通过六氯二硅烷和氨之间的相互作用在半导体晶片（10）上形成氮化硅膜的反应容器（2）和连接到反应容器（2）的排气管（16）。 反应容器2在500-900℃范围内的温度下被加热，排气管（16）在分解和清洁排气管16之前被加热到100℃。 氨通过工艺气体供给管（13）供给到反应容器（2）中，氨从反应容器（2）排出到排气管（16）中。