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    SUBSTRATE TRANSFER APPARATUS AND VERTICAL HEAT PROCESSING APPARATUS
    1.
    发明申请
    SUBSTRATE TRANSFER APPARATUS AND VERTICAL HEAT PROCESSING APPARATUS 有权
    基板传送装置和垂直加热装置

    公开(公告)号：US20090175705A1

    公开(公告)日：2009-07-09

    申请号：US12225920

    申请日：2007-04-23

    申请人： Ken Nakao ,  Hitoshi Kato ,  Junichi Hagihara

    发明人： Ken Nakao ,  Hitoshi Kato ,  Junichi Hagihara

    IPC分类号： H01L21/677 ,  B25B11/00 ,  H01L21/673 ,  H01L21/68

    CPC分类号： H01L21/67098 ,  H01L21/6838 ,  H01L21/68707

    摘要： The present invention restrains, during a transfer of a substrate, a central portion of the substrate from being warped by its own weight, which might be caused by a super-enlargement of a diameter of the substrate. A substrate transfer apparatus 18 includes: a support part 17 which is moved above a substrate w of a large diameter; and an upside grip mechanism 28 disposed on the support part 17, the upside grip mechanism 28 capable of supporting a peripheral portion of the substrate w from above. The support part 17 is provided with a non-contact sucking and holding part 30 having a suction hole 31 and a blow hole 32. The non-contact sucking and holding part 30 sucks and holds the substrate w in a non-contact manner, by blowing a gas onto the central portion of the upper surface of the substrate w and sucking the central portion to form an air layer 50 such that the central portion of the wafer w is not warped.

    摘要翻译： 本发明在衬底的转移期间抑制衬底的中心部分被自身的重量扭曲，这可能是由于衬底的直径的过度扩大引起的。 基板转印装置18包括：支撑部17，其在大直径的基板w上方移动; 以及设置在支撑部17上的上侧夹持机构28，能够从上方支撑基板w的周边部的上侧夹持机构28。 支撑部17设置有具有吸入孔31和气孔32的非接触式吸持保持部30.非接触吸引保持部30以非接触的方式吸附并保持基板w，通过 将气体吹送到基板w的上表面的中心部分并吸附中心部分以形成空气层50，使得晶片w的中心部分不翘曲。

    Contactor and production method for contractor
    3.
    发明授权
    Contactor and production method for contractor 有权
    承包商的接触器和生产方法

    公开(公告)号：US06344752B1

    公开(公告)日：2002-02-05

    申请号：US09509546

    申请日：2000-04-12

    申请人： Junichi Hagihara ,  Shinji Iino

    发明人： Junichi Hagihara ,  Shinji Iino

    IPC分类号： G01R3102

    CPC分类号： G01R3/00 ,  G01R1/06711 ,  G01R1/06716 ,  G01R1/06727 ,  G01R1/07342

    摘要： A conventional probe card is very complex in a support structure of probe terminals and it has been difficult to change an array of the probe terminals correspondingly to various arrays of electrode pads of an object to be checked. A contactor (1) of the present invention simultaneously sets its probe terminals in contact with a plurality of electrode pads of an object to be checked and electrical checking of the object is made once or a plurality of times. It has a plurality of first electrodes (3) arranged on a first substrate (silicon substrate) (2) and probe terminals (4) respectively provided on these electrodes (3). The probe terminal (4) has a conductive support (7) provided on the first electrode, elastic support plate (8) whose one end is fixed to the upper end of the conductive support column (7), and probe terminal (bump) 9 fixed to the free end portion of the elastic support plate (8).

    摘要翻译： 常规探针卡在探针端子的支撑结构中非常复杂，并且难以根据要检查的对象的各种电极焊盘阵列改变探针端子的阵列。 本发明的接触器（1）同时将其探针端子与待检查物体的多个电极焊盘接触，并且对物体的电气检查进行一次或多次。 它具有布置在分别设置在这些电极（3）上的第一衬底（硅衬底）（2）和探针端子（4）上的多个第一电极（3）。 探针端子（4）具有设置在第一电极上的导电支撑（7），其一端固定在导电支柱（7）的上端的弹性支撑板（8）和探针端子（凸块）9 固定到弹性支撑板（8）的自由端部。

    Inspection apparatus, transportation apparatus, and temperature control apparatus
    4.
    发明授权
    Inspection apparatus, transportation apparatus, and temperature control apparatus 失效
    检查装置，运输装置和温度控制装置

    公开(公告)号：US5708222A

    公开(公告)日：1998-01-13

    申请号：US509284

    申请日：1995-07-31

    申请人： Toshihiro Yonezawa ,  Tsuyoshi Argua ,  Kunihiro Furuya ,  Junichi Hagihara

    发明人： Toshihiro Yonezawa ,  Tsuyoshi Argua ,  Kunihiro Furuya ,  Junichi Hagihara

    IPC分类号： G01R31/28 ,  G01M19/00 ,  H02P1/42

    CPC分类号： G01R31/2887 ,  Y10S414/141

    摘要： There is provided an inspection apparatus comprises, a transportation unit for transporting the object of inspection to a position opposite to the contact portion, a sucking holder movable toward and away from the contact portion and adapted to hold the object of inspection by suction; and a pressure contact mechanism provided separately from the transportation unit and adapted to press the sucking holder, thereby pressing the object of inspection against the contact portion. Thus the tranportation mechanism is separated from the pressure contact mechanism, the transportation mechanism can be reduced in weight, and the pressure contact mechanism can ensure setting of appropriate pressing. The operation time can be shortened, moreover, since the object of inspection is kept attached to the contact portion by the transportation mechanism as it is pressed against the contact portion. There is provided a transportation apparatus in which objects of transportation or inspection can be stably attracted or released without the possibility of their being broken by static electricity and without being influenced by their attitude. There is provided a temperature control apparatus used in an inspection apparatus and capable of efficiently heating or cooling an object of inspection, further, wherein a carrier plate section can be used in common for objects of inspection of different descriptions.

    摘要翻译： 提供了一种检查装置，包括：用于将检查对象传送到与接触部相对的位置的传送单元，能够朝向和远离接触部分移动并适于通过抽吸来保持检查对象的吸持保持器; 以及压力接触机构，与所述输送单元分开设置并且适于按压所述吸持保持器，从而将所述检查对象压靠在所述接触部分上。 因此，运送机构与压力接触机构分离，输送机构的重量可以减轻，压力接触机构可以确保适当的按压设定。 此外，由于当按压被接触部分时检查对象被传送机构保持在接触部分上，所以可以缩短操作时间。 提供了一种运输装置，其中可以稳定地吸引或释放运输或检查对象，而不会被静电破坏的可能性，而不受其姿态的影响。 提供了一种在检查装置中使用并且能够有效地加热或冷却检查对象的温度控制装置，此外，其中可以共同使用承载板部分用于不同描述的检查对象。

    Contactor and production method for contactor
    5.
    再颁专利
    Contactor and production method for contactor 有权
    接触器接触器和接触器的生产方法

    公开(公告)号：USRE41515E1

    公开(公告)日：2010-08-17

    申请号：US10772174

    申请日：1999-07-29

    申请人： Junichi Hagihara ,  Shinji Iino

    发明人： Junichi Hagihara ,  Shinji Iino

    IPC分类号： G01R31/02

    CPC分类号： G01R3/00 ,  G01R1/06711 ,  G01R1/06716 ,  G01R1/06727 ,  G01R1/07342

    摘要： A conventional probe card is very complex in a support structure of probe terminals and it has been difficult to change an array of the probe terminals correspondingly to various arrays of electrode pads of an object to be checked. A contactor (1) of the present invention simultaneously sets its probe terminals in contact with a plurality of electrode pads of an object to be checked and electrical checking of the object is made once or a plurality of times. It has a plurality of first electrodes (3) arranged on a first substrate (silicon substrate) (2) and probe terminals (4) respectively provided on these electrodes (3). The probe terminal (4) has a conductive support (7) provided on the first electrode, elastic support plate (8) whose one end is fixed to the upper end of the conductive support column (7), and probe terminal (bump) 9 fixed to the free end portion of the elastic support plate (8).

    摘要翻译： 常规探针卡在探针端子的支撑结构中非常复杂，并且难以根据要检查的对象的各种电极焊盘阵列改变探针端子的阵列。 本发明的接触器（1）同时将其探针端子与待检查物体的多个电极焊盘接触，并且对物体的电气检查进行一次或多次。 它具有布置在分别设置在这些电极（3）上的第一衬底（硅衬底）（2）和探针端子（4）上的多个第一电极（3）。 探针端子（4）具有设置在第一电极上的导电支撑（7），其一端固定在导电支柱（7）的上端的弹性支撑板（8）和探针端子（凸块）9 固定到弹性支撑板（8）的自由端部。

    INSPECTION APPARATUS
    6.
    发明申请
    INSPECTION APPARATUS 有权
    检查装置

    公开(公告)号：US20090153170A1

    公开(公告)日：2009-06-18

    申请号：US12333644

    申请日：2008-12-12

    申请人： Junichi HAGIHARA

    发明人： Junichi HAGIHARA

    IPC分类号： G01R31/02

    CPC分类号： G01R31/2891 ,  G01R1/44

    摘要： An inspection apparatus includes a movable mounting table having a temperature control device, an elevation drive unit for vertically moving the mounting table, a controller for controlling the elevation drive unit and a probe card having probes arranged above the mounting table. The elevation drive unit includes first and second driving shafts connected to each other through coupling members to drive the mounting table, a motor for driving the first and second driving shafts, and a torque detection unit for detecting a torque between the first and second driving shafts based on a contact load between the probes and the at least one device. The controller includes a torque controller for controlling the torque based on detection results of the torque detection unit when the probe card expands or contracts due to temperature variation.

    摘要翻译： 检查装置包括具有温度控制装置的移动安装台，用于垂直移动安装台的升降驱动单元，用于控制升降驱动单元的控制器和具有布置在安装台上方的探头的探针卡。 升降驱动单元包括通过联接构件相互连接以驱动安装台的第一和第二驱动轴，用于驱动第一和第二驱动轴的马达，以及用于检测第一和第二驱动轴之间的转矩的转矩检测单元 基于所述探针和所述至少一个装置之间的接触负载。 控制器包括一个转矩控制器，用于当探针卡由于温度变化而膨胀或收缩时，基于扭矩检测单元的检测结果来控制转矩。

    INSPECTION APPARATUS
    7.
    发明申请
    INSPECTION APPARATUS 有权
    检查装置

    公开(公告)号：US20090134894A1

    公开(公告)日：2009-05-28

    申请号：US12274454

    申请日：2008-11-20

    申请人： Junichi HAGIHARA

    发明人： Junichi HAGIHARA

    IPC分类号： G01R31/3181

    CPC分类号： G01R31/2891

    摘要： An inspection apparatus includes a movable mounting table for mounting thereon a target object, a probe card disposed above the mounting table and a control unit for controlling the mounting table. The target object is inspected by bringing a plurality of electrode pads of the target object mounted on the mounting table into contact with a plurality of probes of the probe card with a predetermined contact load by overdriving the mounting table. Further, the mounting table includes a mounting body whose temperature is controllable, a support body for supporting the mounting body, an elevation driving mechanism provided in the support body and pressure sensors provided between the mounting body and the support body to thereby detect the contact load. The control unit controls the elevation driving mechanism in accordance with detection signals from the pressure sensors.

    摘要翻译： 检查装置包括用于安装目标物体的可移动安装台，设置在安装台上方的探针卡和用于控制安装台的控制单元。 通过使安装台上安装的目标物体的多个电极焊盘通过过载驱动安装台而以预定的接触负载与探针卡的多个探针接触来检查目标物体。 此外，安装台包括温度可控的安装体，用于支撑安装体的支撑体，设置在支撑体中的升降驱动机构和设置在安装体和支撑体之间的压力传感器，从而检测接触负载 。 控制单元根据来自压力传感器的检测信号来控制升降驱动机构。

    Pasting method and pasting apparatus
    9.
    发明申请
    Pasting method and pasting apparatus 审中-公开
    粘贴方法和粘贴装置

    公开(公告)号：US20070187868A1

    公开(公告)日：2007-08-16

    申请号：US10566217

    申请日：2004-07-14

    申请人： Tsuyoshi Aruga ,  Junichi Hagihara ,  Wataru Okase ,  Eiji Yamaguchi

    发明人： Tsuyoshi Aruga ,  Junichi Hagihara ,  Wataru Okase ,  Eiji Yamaguchi

    IPC分类号： B29C39/10

    CPC分类号： B32B38/1833 ,  B32B37/1284 ,  B32B2038/1891 ,  H01L21/67092 ,  H01L27/14634

    摘要： A pasting method and a pasting apparatus hold a thin plate 1 and a planar member 2 in high flatness respectively on a first holding member 44 and a second holding member 44, a main controller 40a controls a moving mechanism 45 and a parallelism adjusting mechanism 52 on the basis of information provided by position recognizing mechanisms 33 and 34 to align the thin plate 1 and the carrying member 2 with each other in a predetermined positional relation. The main controller 40a controls a moving mechanism 45 so as to move the thin plate 1 and the carrying member 2 relative to each other in a state where a liquid-phase liquid crystal wax heated by a heater 49 is held between the thin plate 1 and the carrying member 2 to spread the liquid-phase liquid crystal wax over the entire surfaces of the thin plate 1 and the carrying member 2. Thus the thin plate 1, such as a semiconductor wafer or a metal foil, can be accurately, surely and efficiently pasted to the carrying member 2, and the thin plate 1 pasted to the carrying member 2 can be readily separated from the carrying member 2.

    摘要翻译： 粘贴方法和粘贴装置将第一保持构件44和第二保持构件44上的薄板1和平面构件2分别保持在高平面度，主控制器40a控制移动机构45和平行度调节机构52 基于由位置识别机构33和34提供的信息，以使薄板1和承载构件2以预定的位置关系彼此对准。 主控制器40a控制移动机构45，以便在由加热器49加热的液相蜡保持在薄板1之间的状态下相对于彼此移动薄板1和承载构件2 和携带部件2将液相液晶蜡扩散到薄板1和承载部件2的整个表面上。 因此，可以将准确可靠且有效地粘贴到承载构件2上的诸如半导体晶片或金属箔的薄板1粘贴到承载构件2上的薄板1能够容易地从承载构件2分离 。