公开(公告)号：US06483585B1

公开(公告)日：2002-11-19

申请号：US09633036

申请日：2000-08-04

Applicant: Shao Yang

Inventor： Shao Yang

IPC: G01J400

CPC classification number: G01B11/065 ,  G01N21/211

Abstract: A modified and improved polarizier ellipsometer allows for improved signal quality and signal to noise performance. This improvement is based on rotating one polarizer relative to the other fixed polarizer to generate AC mode signals related to a thin film under analysis. The AC mode signal may be compared to a background signal and the ratio of sample signal to background signal used to provide a more accurate assessment of film thickness. The normalized AC signal for an unknown thickness may be compared to a standard curve generated for a film of similar optical properties for an exact thickness determination or may be used directly to report a relative thickness value. Other modifications of the improved polarizer ellipsometer of the invention are also described where one or both of the fixed polarizers are removed to improve the signal intensity through reduction of the number of optical components. These modifications are designed to address specific thin film and substrate combinations.

Abstract translation: 改进和改进的偏振椭偏仪允许改善信号质量和信噪比性能。 这种改进是基于相对于另一个固定的偏振器旋转一个偏振器而产生与分析的薄膜相关的AC模式信号。 AC模式信号可以与背景信号进行比较，并且采样信号与背景信号的比率用于提供更准确的膜厚度评估。 可以将未知厚度的归一化AC信号与用于精确厚度确定的类似光学性质的膜产生的标准曲线进行比较，或者可以直接用于报告相对厚度值。 还描述了本发明的改进的偏振器椭偏仪的其它修改，其中一个或两个固定偏振器被去除以通过减少光学部件的数量来改善信号强度。 这些修改旨在解决特定的薄膜和基板组合。

公开(公告)号：US06483584B1

公开(公告)日：2002-11-19

申请号：US09549738

申请日：2000-04-14

Applicant: Solomon J. H. Lee ,  Chih-Kung Lee ,  Shu-Sheng Lee ,  Yang Yun-Chang ,  Lin Chan-Ching ,  Shuen-Chen Shiue

Inventor： Solomon J. H. Lee ,  Chih-Kung Lee ,  Shu-Sheng Lee ,  Yang Yun-Chang ,  Lin Chan-Ching ,  Shuen-Chen Shiue

IPC: G01J400

CPC classification number: G01N21/21 ,  G01N21/41 ,  G01N21/8422

Abstract: An ellipsometer for measuring the complex refractive index of a sample and thin film thickness according to the invention. The ellipsometer includes a linear polarized light source, a reference analyzer, a polarization analyzer and a light direction controller. The linear polarized light source used to generate a measuring beam for detecting the sample. The phase modulator used to control the phase of the measuring beam thereby to generate a sampling beam. The reference analyzer used to generate a reference beam according to part of the sampling beam thereby to adjust the intensity of the sampling beam. The polarization analyzer used to analyze the phase, polarization and intensity of the sampling beam after the sampling beam is reflected by the sample. The light direction controller used to control the angle and direction of the sampling beam with respect to the sample, wherein the sampling beam is reflected by the sample to enter the light direction controller, and thereafter the sampling beam is reflected by the light direction controller and re-reflected by the sample to enter the polarization analyzer along an original optical path, but toward an opposite direction.

Abstract translation: 用于测量样品的复合折射率的椭偏仪和根据本发明的薄膜厚度。 椭偏仪包括线偏振光源，参考分析仪，偏振分析仪和光方向控制器。 用于产生用于检测样品的测量光束的线偏振光源。 相位调制器用于控制测量光束的相位，从而产生采样光束。 参考分析仪用于根据采样束的一部分产生参考光束，从而调整采样光束的强度。 用于分析采样光束后的采样光束的相位，极化和强度的偏振分析器被样品反射。 用于控制采样光束相对于样本的角度和方向的光方向控制器，其中采样光束被样本反射以进入光方向控制器，此后采样光束被光方向控制器反射， 由样品重新反射，沿着原始光路进入偏振分析器，但朝向相反的方向。

公开(公告)号：US06476912B1

公开(公告)日：2002-11-05

申请号：US09652264

申请日：2000-08-30

Applicant: Makoto Nakazawa

Inventor： Makoto Nakazawa

IPC: G01J400

CPC classification number: G01N21/211 ,  G01B11/0641 ,  G01N21/8422

Abstract: The surface form of a semiconductor thin film such as a polysilicon film 13 formed on a semiconductor substrate 11 is measured through spectro-ellipsometry or measured by performing an IPA quantitative analysis through GC. Mass (gas chromatography) after exposing the semiconductor thin film to IPA (isopropyl alcohol) vapor and drying the semiconductor thin film. Through either of these methods the surface form of the polysilicon film easily and quickly measured.

Abstract translation: 半导体衬底11上形成的多晶硅膜13的半导体薄膜的表面形状通过分光椭偏仪测定，或者通过GC进行IPA定量分析来测定。 将半导体薄膜暴露于IPA（异丙醇）蒸气并干燥半导体薄膜后的质谱（气相色谱）。 通过这些方法中的任一种，多晶硅膜的表面形式容易且快速地测量。

公开(公告)号：US06466320B1

公开(公告)日：2002-10-15

申请号：US09678796

申请日：2000-10-04

Applicant: Tatsurou Kawamura ,  Hiroshi Onishi ,  Nobuo Sonoda

Inventor： Tatsurou Kawamura ,  Hiroshi Onishi ,  Nobuo Sonoda

IPC: G01J400

CPC classification number: G01J4/00 ,  G01N21/21 ,  G01N33/493

Abstract: The present invention provides a urinalysis apparatus easy to maintain and manage without using any supplies such as the test paper, in which the concentration of an optically active substance in urine is determined by measuring the angle of rotation of the urine. Also, a polarimeter and a urinalysis apparatus which are reliable, compact and inexpensive are provided by using a polarimeter including means for transmitting the polarized light through a specimen, applying a magnetic field to the specimen and detecting the change in the direction of light polarization due to the application of the magnetic field.

Abstract translation: 本发明提供一种便于维护和管理的尿液分析装置，而不需要使用任何诸如试纸的供应品，其中尿液中的光学活性物质的浓度通过测量尿液的旋转角来确定。 此外，通过使用包括通过样本透射偏振光的装置的偏振计提供可靠，紧凑且便宜的偏振计和尿分析装置，向样本施加磁场，并且检测光的偏振方向的变化 适用于磁场。

公开(公告)号：US06348966B1

公开(公告)日：2002-02-19

申请号：US09201822

申请日：1998-12-01

Applicant: Ichiro Hirosawa

Inventor： Ichiro Hirosawa

IPC: G01J400

CPC classification number: G01J4/00 ,  G01N21/21

Abstract: A linearly polarized light is condensed by a lens 4 and set incident on a liquid crystal sample 5 with the incident angle being distributed continuously. The incident angle dependence of the polarization of the transmitted light is measured by a method of rotating an analyzer and the like, and thereby a pretilt angle of the liquid crystal sample is determined.

Abstract translation: 线偏振光由透镜4会聚，并入射到液晶样品5上，入射角度连续分布。 通过旋转分析仪等的方法测量透射光的偏振的入射角度依赖性，由此确定液晶样品的预倾角。

公开(公告)号：US06331890B1

公开(公告)日：2001-12-18

申请号：US09474126

申请日：1999-12-29

Applicant: Yoshinori Marumo ,  Teruyuki Hayashi

Inventor： Yoshinori Marumo ,  Teruyuki Hayashi

IPC: G01J400

CPC classification number: G01B11/0683

Abstract: A film thickness measuring apparatus is provided with a housing which is made up of a base plate and outer cases, and which substantially shuts off the internal region thereof from the outside air, an introduction stage on which a cassette C is mounted, the cassette containing a plurality of substrates which have thin films formed thereon, a measurement stage which is arranged inside the housing and on which the substrate is placed for measuring the film thickness of the thin film, and a conveyance mechanism, arranged inside the housing, for moving the substrates between the inside of the cassette and the measurement stage. A film thickness measuring mechanism is arranged inside the housing. The film thickness measuring mechanism comprises a light emitting mechanism and a detector. The light emitting mechanism includes a laser light source for emitting a laser beam to the thin film on a wafer placed on the measurement stage. The detector detects light reflected from the thin film. On the basis of the information detected by the detector, the film thickness measuring mechanism measures the thickness of the thin film in a non-contact manner. A filter unit is arranged in the housing and located above the measurement stage. Through this filter unit, pure air free of gaseous organic matter is supplied and guided to the region above the measurement stage.

Abstract translation: 薄膜厚度测量装置设置有由基板和外壳组成的壳体，其基本上从外部空气中切断其内部区域，安装盒C的导入台，所述盒体包含 在其上形成有薄膜的多个基板，布置在壳体内部并且放置基板以测量薄膜的膜厚度的测量台，以及布置在壳体内部的用于移动 盒子内部和测量台之间的衬底。 膜厚测量机构设置在壳体内。 膜厚测量机构包括发光机构和检测器。 发光机构包括用于在放置在测量台上的晶片上向激光束发射激光的激光光源。 检测器检测从薄膜反射的光。 基于由检测器检测到的信息，膜厚测量机构以非接触的方式测量薄膜的厚度。 过滤器单元布置在壳体中并位于测量台的上方。 通过该过滤器单元，将不含气态有机物的纯空气供给并引导到测量台上方的区域。

公开(公告)号：US06278519B1

公开(公告)日：2001-08-21

申请号：US09015839

申请日：1998-01-29

Applicant: Allan Rosencwaig ,  Jon Opsal

Inventor： Allan Rosencwaig ,  Jon Opsal

IPC: G01J400

CPC classification number: G01B11/0641

Abstract: An optical measurement system is disclosed for evaluating samples with multi-layer thin film stacks. The optical measurement system includes a reference ellipsometer and one or more non-contact optical measurement devices. The reference ellipsometer is used to calibrate the other optical measurement devices. Once calibration is completed, the system can be used to analyze multi-layer thin film stacks. In particular, the reference ellipsometer provides a measurement which can be used to determine the total optical thickness of the stack. Using that information coupled with the measurements made by the other optical measurement devices, more accurate information about individual layers can be obtained.

公开(公告)号：US06211957B1

公开(公告)日：2001-04-03

申请号：US09517865

申请日：2000-03-03

Applicant: Turan Erdogan ,  Thomas Andrew Strasser ,  Paul Stephen Westbrook

Inventor： Turan Erdogan ,  Thomas Andrew Strasser ,  Paul Stephen Westbrook

IPC: G01J400

CPC classification number: G02B6/2706 ,  G01J4/04 ,  G01N21/21 ,  G02B6/2766 ,  G02B6/29319 ,  G02B6/4215

Abstract: An in-line optical fiber polarimeter comprises a plurality of fiber gratings and a single wave plate, disposed sequentially along a length of optical fiber. The fiber gratings are precisely oriented and have a predetermined grating period such that each grating functions to out-couple a predetermined portion of the optical signal passing through the polarimeter. A separate detector is associated with each grating to measure the out-coupled signal. The four Stokes parameters can be determined from the set of measurements and then used to determine to state of polarization of an optical signal passing through the polarimeter.

Abstract translation: 一种在线光纤偏振计包括沿光纤长度依次设置的多个光纤光栅和单波片。 光纤光栅被精确定向并且具有预定的光栅周期，使得每个光栅用于将耦合通过偏振计的光信号的预定部分。 单独的检测器与每个光栅相关联以测量输出耦合信号。 可以从该组测量中确定四个斯托克斯参数，然后用于确定通过偏振计的光信号的偏振状态。

公开(公告)号：US06177995B1

公开(公告)日：2001-01-23

申请号：US09297202

申请日：1999-10-07

Applicant: Eric Compain ,  Bernard Drevillon

Inventor： Eric Compain ,  Bernard Drevillon

IPC: G01J400

CPC classification number: G01J4/00

Abstract: A polarimeter includes a prism (32) for separating the incident light beam (21) having a Stokes vector (S) into a reflected beam (22) and a transmitted beam (23), the prism not inducing any interferential effect and the transmitted beam being subjected to at least a reflection internal to the prism. The polarimeter also include two final separators (3, 4) for separating respectively each of the reflected beam and the transmitted beam into at least two final beams (25-28), detecting means (5-8) for measuring the intensity levels of the final beams and a processing unit (9) producing the Stokes vector of the light to be measured. Preferably, the reflections internal to the prism (32) are either total reflections, or reflections on a thick absorbing layer. The invention also includes a method for measuring light beam polarization states.

Abstract translation: 偏振计包括用于将具有斯托克斯矢量（S）的入射光束（21）分离成反射光束（22）和透射光束（23）的棱镜（32），棱镜不产生任何干涉效应，而透射光束 至少经受棱镜内部的反射。 偏振计还包括两个最终分离器（3,4），用于分别将每个反射光束和透射光束分离成至少两个最终光束（25-28）;检测装置（5-8），用于测量 最终光束和产生待测光的斯托克斯矢量的处理单元（9）。 优选地，棱镜（32）内部的反射是全反射或在厚吸收层上的反射。 本发明还包括一种测量光束偏振状态的方法。

公开(公告)号：US06836327B1

公开(公告)日：2004-12-28

申请号：US10101515

申请日：2002-03-18

Applicant: Xiaotian Steve Yao

Inventor： Xiaotian Steve Yao

IPC: G01J400

CPC classification number: G01J4/00

Abstract: In-line optical polarimeters and techniques for calibrating such polarimeters are described. In one implementation a polarimeter integrates components in free space to enhance device performance.

Abstract translation: 描述了用于校准这种偏振计的直列光学偏振计和技术。 在一个实现中，偏振计将组件集成在自由空间中以增强设备性能。