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公开(公告)号:US4981724A
公开(公告)日:1991-01-01
申请号:US263487
申请日:1977-10-28
IPC分类号: C23C16/40 , H01L21/316
CPC分类号: C23C16/402
摘要: A chemical vapor deposition process for depositing silicon dioxide comprising the steps of heating a substrate upon which deposition is desired to a temperature of from about 325.degree. C. to about 700.degree. C. in a vacuum having a pressure of from about 0.1 to about 1.5 torr, and introducing a silane selected from the group consisting of alkylsilane, arylsilane and araylkylsilane wherein the alkyl-, aryl- or aralkyl- moiety comprises from 2-6 carbons, and oxygen or carbon dioxide into the vacuum.
摘要翻译: 一种用于沉积二氧化硅的化学气相沉积方法,包括以下步骤:在约0.1至约1.5的压力的真空中将需要沉积的基底加热至约325℃至约700℃的温度 并引入选自烷基硅烷,芳基硅烷和芳烷基硅烷的硅烷,其中烷基,芳基或芳烷基部分包含2-6个碳,氧和二氧化碳进入真空。
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公开(公告)号:US20230137335A1
公开(公告)日:2023-05-04
申请号:US17514053
申请日:2021-10-29
摘要: A hydrogen generator can adjust production as necessary depending on station usage. When the generator is running at a high output and there isn't enough usage from a dispenser, then excess hydrogen can be fed to storage in at least one trailer. As the generator attempts to match usage rates, it may slow down. If the production rate is slowed and the dispensing need for hydrogen subsequently increases, then the required additional supply can be provided from the at least one trailer until the generator ramps up output to meet the increased demand. The trailer storage can allow for matching of usage with production. At least one trailer can be maintained at each pressure level at a station to enable trailers to be removed as they become full or to be replaced as they become empty to match station demand and provide import and export capability.
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公开(公告)号:US11625020B2
公开(公告)日:2023-04-11
申请号:US17193052
申请日:2021-03-05
发明人: Sanjay Mehta , Pratik Misra
IPC分类号: G05B19/4155
摘要: There is provided a method of controlling an industrial gas plant complex comprising a plurality of industrial gas plants powered by one or more renewable power sources, the method being executed by at least one hardware processor, the method comprising receiving time-dependent predicted power data for a pre-determined future time period from the one or more renewable power sources; receiving time-dependent predicted operational characteristic data for each industrial gas plant; utilizing the predicted power data and predicted characteristic data in an optimization model to generate a set of state variables for the plurality of industrial gas plants; utilizing the generated state variables to generate a set of control set points for the plurality of industrial gas plants; and sending the control set points to a control system to control the industrial gas plant complex by adjusting one or more control set points of the industrial gas plants.
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公开(公告)号:US11598520B2
公开(公告)日:2023-03-07
申请号:US16884418
申请日:2020-05-27
摘要: A burner gas supply apparatus for increasing flame turbulence, the apparatus comprising a conduit having a characteristic width, W, defined by an inner surface having a circumferential direction and an axial direction, the axial direction terminating in a nozzle defining a nozzle exit plane and having a characteristic dimension, d, where d
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公开(公告)号:US11596895B2
公开(公告)日:2023-03-07
申请号:US16931507
申请日:2020-07-17
IPC分类号: B01D53/04 , B01D53/047
摘要: A radial adsorber can be configured to facilitate utilization of different layers of material. The radial adsorber, system using at least one radial adsorber, and methods of utilizing embodiments of the radial adsorber can help permit improved efficient operation of fluid purification processing while also being configured to minimize, if not fully avoid, being susceptible to the effect of fluidization.
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公开(公告)号:US20230053522A1
公开(公告)日:2023-02-23
申请号:US17407434
申请日:2021-08-20
发明人: XIANG-DONG PENG , Henry Choisun Chan , Kelly Danielle Aguilar , Shihong Yan , Qiong Zhou , Shylaja Gowda
摘要: A process for producing syngas that uses the syngas product from a partial oxidation reactor to provide all necessary heating duties, which eliminates the need for a fired heater. Soot is removed from the syngas using a dry filter to avoid a wet scrubber quenching the syngas stream and wasting the high-quality heat. Without the flue gas stream leaving a fired heater, all of the carbon dioxide produced by the reforming process is concentrated in the high-pressure syngas stream, allowing essentially complete carbon dioxide capture.
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公开(公告)号:US20220397119A1
公开(公告)日:2022-12-15
申请号:US17346856
申请日:2021-06-14
摘要: Energy efficiency and/or operational stability of a multistage compression system comprising a plurality (N) of centrifugal compressors that is compressing a gas feed having a variable flow rate is improved by adjusting reversibly the load on each compressor in response to changes in the flow rate of the gas feed using a main recycle system to enable operation of the centrifugal compressors at turndown capacity during periods when the flow rate is below total turndown capacity for all of the compressors, and if necessary, using the local recycle systems in order to avoid activation of anti-surge control, and switching one or more centrifugal compressors into low power mode or shutdown mode as required.
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公开(公告)号:US20220357104A1
公开(公告)日:2022-11-10
申请号:US17313251
申请日:2021-05-06
IPC分类号: F25J3/04
摘要: A process for recovering at least one fluid (e.g. xenon gas and/or krypton gas, etc.) from a feed gas can include utilization of a compression system, primary heat exchanger unit, a pre-purification unit (PPU), and other units to separate and recover at least one desired fluid. In some embodiments, fluid flows output from a first heat exchanger or separation system of the plant can be split so that a portion of a stream is output for downstream processing to purify xenon (Xe) and/or krypton (Kr) product flow(s) while another portion of the stream is recycled to a compression system or the PPU to undergo further purification and heat exchange so that the product output for downstream processing has a higher concentration of Xe or Kr. Some embodiments can be configured to provide an improved recovery of Xe and/or Kr as well as an improvement in operational efficiency.
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公开(公告)号:US11471818B2
公开(公告)日:2022-10-18
申请号:US16910524
申请日:2020-06-24
摘要: A radial flow adsorption vessel comprising a cylindrical outer shell having a top end and a bottom end, the top end is enclosed by a vessel head that provides a centrical opening usable as a port to introduce or remove adsorbent particles into or from the vessel; at least one annular adsorption space disposed inside the shell, the at least one annular adsorption space defined by an outer and inner cylindrical porous wall, both co-axially disposed inside the shell; and a loading device for the adsorbent particles positioned above the at least one annular adsorption space at the top end of the vessel, the loading device comprises at least one conical element that extends radially to the outer cylindrical porous wall, the at least one conical element provides a plurality of orifices arranged at least in a region sitting above the at least one annular adsorption space.
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公开(公告)号:US20220290691A1
公开(公告)日:2022-09-15
申请号:US17201399
申请日:2021-03-15
摘要: A process for producing compressed hydrogen gas including: electrolysing water to produce hydrogen gas, and compressing the hydrogen gas in a multistage compression system including: a centrifugal compression stage and a recycle system for recycling a portion of the hydrogen gas from a product end to a feed end of the centrifugal compression stage; wherein hydrogen gas feed is fed to the feed end at a pre-determined feed temperature and pressure and mole fraction of water; wherein a portion of the hydrogen gas is removed from the product end, reduced in pressure in the recycle system to the pre-determined feed pressure and is then recycled to form at least part of the hydrogen gas feed to the centrifugal compression stage; and further including cooling hydrogen gas comprising the reduced pressure hydrogen gas such that the water mole fraction in the hydrogen gas feed is at the pre-determined water mole fraction.
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