Deposition of silicon oxide films using alkylsilane liquid sources
    1.
    发明授权
    Deposition of silicon oxide films using alkylsilane liquid sources 失效
    使用烷基硅烷液体源沉积氧化硅膜

    公开(公告)号:US4981724A

    公开(公告)日:1991-01-01

    申请号:US263487

    申请日:1977-10-28

    IPC分类号: C23C16/40 H01L21/316

    CPC分类号: C23C16/402

    摘要: A chemical vapor deposition process for depositing silicon dioxide comprising the steps of heating a substrate upon which deposition is desired to a temperature of from about 325.degree. C. to about 700.degree. C. in a vacuum having a pressure of from about 0.1 to about 1.5 torr, and introducing a silane selected from the group consisting of alkylsilane, arylsilane and araylkylsilane wherein the alkyl-, aryl- or aralkyl- moiety comprises from 2-6 carbons, and oxygen or carbon dioxide into the vacuum.

    摘要翻译: 一种用于沉积二氧化硅的化学气相沉积方法,包括以下步骤:在约0.1至约1.5的压力的真空中将需要沉积的基底加热至约325℃至约700℃的温度 并引入选自烷基硅烷,芳基硅烷和芳烷基硅烷的硅烷,其中烷基,芳基或芳烷基部分包含2-6个碳,氧和二氧化碳进入真空。

    HYDROGEN STORAGE AND DISPENSING APPARATUS AND METHOD

    公开(公告)号:US20230137335A1

    公开(公告)日:2023-05-04

    申请号:US17514053

    申请日:2021-10-29

    IPC分类号: F17C5/06 F17C13/02

    摘要: A hydrogen generator can adjust production as necessary depending on station usage. When the generator is running at a high output and there isn't enough usage from a dispenser, then excess hydrogen can be fed to storage in at least one trailer. As the generator attempts to match usage rates, it may slow down. If the production rate is slowed and the dispensing need for hydrogen subsequently increases, then the required additional supply can be provided from the at least one trailer until the generator ramps up output to meet the increased demand. The trailer storage can allow for matching of usage with production. At least one trailer can be maintained at each pressure level at a station to enable trailers to be removed as they become full or to be replaced as they become empty to match station demand and provide import and export capability.

    Method and apparatus for controlling an industrial gas plant complex

    公开(公告)号:US11625020B2

    公开(公告)日:2023-04-11

    申请号:US17193052

    申请日:2021-03-05

    IPC分类号: G05B19/4155

    摘要: There is provided a method of controlling an industrial gas plant complex comprising a plurality of industrial gas plants powered by one or more renewable power sources, the method being executed by at least one hardware processor, the method comprising receiving time-dependent predicted power data for a pre-determined future time period from the one or more renewable power sources; receiving time-dependent predicted operational characteristic data for each industrial gas plant; utilizing the predicted power data and predicted characteristic data in an optimization model to generate a set of state variables for the plurality of industrial gas plants; utilizing the generated state variables to generate a set of control set points for the plurality of industrial gas plants; and sending the control set points to a control system to control the industrial gas plant complex by adjusting one or more control set points of the industrial gas plants.

    METHOD AND APPARATUS FOR COMPRESSING A GAS FEED WITH A VARIABLE FLOW RATE

    公开(公告)号:US20220397119A1

    公开(公告)日:2022-12-15

    申请号:US17346856

    申请日:2021-06-14

    IPC分类号: F04D17/12 C25B1/04 C25B15/08

    摘要: Energy efficiency and/or operational stability of a multistage compression system comprising a plurality (N) of centrifugal compressors that is compressing a gas feed having a variable flow rate is improved by adjusting reversibly the load on each compressor in response to changes in the flow rate of the gas feed using a main recycle system to enable operation of the centrifugal compressors at turndown capacity during periods when the flow rate is below total turndown capacity for all of the compressors, and if necessary, using the local recycle systems in order to avoid activation of anti-surge control, and switching one or more centrifugal compressors into low power mode or shutdown mode as required.

    FLUID RECOVERY PROCESS AND APPARATUS FOR XENON AND OR KRYPTON RECOVERY

    公开(公告)号:US20220357104A1

    公开(公告)日:2022-11-10

    申请号:US17313251

    申请日:2021-05-06

    IPC分类号: F25J3/04

    摘要: A process for recovering at least one fluid (e.g. xenon gas and/or krypton gas, etc.) from a feed gas can include utilization of a compression system, primary heat exchanger unit, a pre-purification unit (PPU), and other units to separate and recover at least one desired fluid. In some embodiments, fluid flows output from a first heat exchanger or separation system of the plant can be split so that a portion of a stream is output for downstream processing to purify xenon (Xe) and/or krypton (Kr) product flow(s) while another portion of the stream is recycled to a compression system or the PPU to undergo further purification and heat exchange so that the product output for downstream processing has a higher concentration of Xe or Kr. Some embodiments can be configured to provide an improved recovery of Xe and/or Kr as well as an improvement in operational efficiency.

    Radial flow adsorption vessel with an integrated loading device

    公开(公告)号:US11471818B2

    公开(公告)日:2022-10-18

    申请号:US16910524

    申请日:2020-06-24

    IPC分类号: B01D53/04 B01J8/00

    摘要: A radial flow adsorption vessel comprising a cylindrical outer shell having a top end and a bottom end, the top end is enclosed by a vessel head that provides a centrical opening usable as a port to introduce or remove adsorbent particles into or from the vessel; at least one annular adsorption space disposed inside the shell, the at least one annular adsorption space defined by an outer and inner cylindrical porous wall, both co-axially disposed inside the shell; and a loading device for the adsorbent particles positioned above the at least one annular adsorption space at the top end of the vessel, the loading device comprises at least one conical element that extends radially to the outer cylindrical porous wall, the at least one conical element provides a plurality of orifices arranged at least in a region sitting above the at least one annular adsorption space.

    PROCESS AND APPARATUS FOR COMPRESSING HYDROGEN GAS IN A CENTRIFUGAL COMPRESSOR

    公开(公告)号:US20220290691A1

    公开(公告)日:2022-09-15

    申请号:US17201399

    申请日:2021-03-15

    摘要: A process for producing compressed hydrogen gas including: electrolysing water to produce hydrogen gas, and compressing the hydrogen gas in a multistage compression system including: a centrifugal compression stage and a recycle system for recycling a portion of the hydrogen gas from a product end to a feed end of the centrifugal compression stage; wherein hydrogen gas feed is fed to the feed end at a pre-determined feed temperature and pressure and mole fraction of water; wherein a portion of the hydrogen gas is removed from the product end, reduced in pressure in the recycle system to the pre-determined feed pressure and is then recycled to form at least part of the hydrogen gas feed to the centrifugal compression stage; and further including cooling hydrogen gas comprising the reduced pressure hydrogen gas such that the water mole fraction in the hydrogen gas feed is at the pre-determined water mole fraction.