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公开(公告)号：US20170363530A1
公开(公告)日：2017-12-21
申请号：US15539534
申请日：2015-12-23
发明人： Tim ASMUS , Karlheinz WIENAND , Stefan DIETMANN , Martin KUNZ
CPC分类号： G01N15/0656 , B32B37/18 , B32B38/10 , B32B2457/00 , F01N11/007 , F01N13/008 , F01N2560/05 , F01N2560/20 , F02B1/04 , F02B3/06 , F02D41/1466 , F02D41/1494 , F02D41/222 , G01N27/043 , G01N27/07 , G01N27/226 , G01N2015/0046
摘要： A sensor for detecting electrically conductive and/or polarizable particles, in particular for detecting soot particles, includes a substrate and at least two electrode layers, a first electrode layer and at least one second electrode layer. Which is arranged between the substrate and the first electrode layer. At least one insulation layer is formed between the first electrode layer and the at least one second electrode layer and at least one opening is formed in both the first electrode layer and the at least one insulation layer. At least some sections of the opening in the first electrode layer and of the opening in the insulation layer are arranged one above the other, such that at least one passage is formed to the second electrode layer.
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公开(公告)号：US09829390B2
公开(公告)日：2017-11-28
申请号：US14438064
申请日：2013-09-23
CPC分类号： G01K7/18 , F02D41/1446 , G01K1/08 , G01K13/02 , G01K2013/024 , G01K2205/04
摘要： The invention relates to temperature sensors, in particular high-temperature sensors, having an optionally coated substrate, at least one resistor structure, and at least two connection contacts. The connection contacts electrically contact the resistor structure, and the substrate is made of zirconium oxide or a zirconium oxide ceramic stabilized with oxides of a trivalent metal and a pentavalent metal. The substrate is coated with an insulation layer and the resistor structure and the free regions of the insulation layer, on which no resistor structure is disposed, are at least partially coated with a ceramic intermediate layer. A protective layer and/or a cover is disposed on the ceramic intermediate layer. At least one electrode may be disposed, at least at one connection contact, alongside the resistor structure on the substrate. The invention also relates an exhaust-gas system for controlling and/or regulating an engine, particularly a motor vehicle engine, containing these temperature sensors.
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3.发明申请SENSOR ELEMENT, SENSOR MODULE, MEASURING ASSEMBLY AND EXHAUST-GAS RE-CIRCULATION SYSTEM COMPRISING A SENSOR ELEMENT OF THIS TYPE, AND PRODUCTION METHOD 审中-公开传感器元件，传感器模块，包括本类传感器元件的测量装置和排气再循环系统以及生产方法公开(公告)号：US20170030753A1
公开(公告)日：2017-02-02
申请号：US15302877
申请日：2015-04-14
发明人： Karlheinz WIENAND , Tim ASMUS , Peter PITZIUS
CPC分类号： G01F1/692 , G01F1/6842 , G01F1/6845
摘要： A sensor element with a thin-film structure is made of platinum or a platinum alloy. The structure being applied to a ceramic substrate, in particular an Al2O3 substrate and being covered by a glass-ceramic coating. The glass-ceramic coating has an outer surface with surface profiling. A sensor module, a measuring assembly, and an exhaust-gas re-circulation system include the sensor element.
摘要翻译： 具有薄膜结构的传感器元件由铂或铂合金制成。 该结构被应用于陶瓷衬底，特别是Al 2 O 3衬底并被玻璃 - 陶瓷涂层覆盖。 玻璃陶瓷涂层具有外表面，具有表面轮廓。 传感器模块，测量组件和废气再循环系统包括传感器元件。
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公开(公告)号：US09068913B2
公开(公告)日：2015-06-30
申请号：US13319767
申请日：2010-05-06
申请人： Karlheinz Wienand , Tim Asmus , Angela Maier , Karlheinz Ullrich
发明人： Karlheinz Wienand , Tim Asmus , Angela Maier , Karlheinz Ullrich
CPC分类号： G01N15/0656 , Y10T29/49002
摘要： A sensor, particularly an impedance sensor, for example a soot sensor, is provided which has two mutually electrically insulated electrodes, wherein at least one external electrode is formed from a composite of metal and inorganic oxide as a film pattern having a film thickness of 0.5 to 20 μm. The trace width of the film pattern and the spacing between the traces is 5 to 70 μm and the border region around the conductor trace edge varies less than 10 μm. Both electrodes can be arranged adjacent to each other as a film pattern in a plane. Preferably, the sensor has a heater. For mass production, electrodes are produced as a film pattern having a film thickness of 0.5 to 20 μm on electrically insulating oxide bases and, following full-surface imprinting of a metal powder and oxide-containing paste, the electrodes are structured particularly accurately as traces from the printed film. In particular, the film thickness of the printed film is reduced.
摘要翻译： 提供了一种传感器，特别是阻抗传感器，例如烟灰传感器，其具有两个相互电绝缘的电极，其中至少一个外部电极由金属和无机氧化物的复合物形成，膜厚度为0.5 至20μm。 膜图案的迹线宽度和迹线之间的间距为5〜70μm，导体迹线边缘周围的边界区域变化小于10μm。 两个电极可以彼此相邻地布置为平面中的膜图案。 优选地，传感器具有加热器。 为了大规模生产，电极在电绝缘氧化物基底上作为膜厚度为0.5至20μm的膜图案生产，并且在金属粉末和含氧化物浆料的全表面压印之后，电极被特别精确地构造为痕迹 从印刷电影。 特别地，印刷膜的膜厚减小。
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公开(公告)号：US08730002B2
公开(公告)日：2014-05-20
申请号：US13146529
申请日：2010-01-20
CPC分类号： H01C7/02 , G01K7/183 , G01K2205/04 , H01C7/008 , H01C7/06 , Y10T29/49085
摘要： A resistance thermometer is provided having a measuring resistor in a form of a 0.1 to 10 μm thick structured platinum layer applied to an electrically insulated surface of a substrate and an electrically insulating coating layer covering the platinum layer. The substrate or its surface contains zirconium dioxide, which is stabilized with oxides of a trivalent and a pentavalent metal. Preferably, the trivalent metal is yttrium and the pentavalent metal is tantalum or niobium. The characteristic curve of the measuring resistor preferably conforms to DIN-IEC 751. For mass production of resistance thermometers having high and reproducible measurement accuracy, a structured platinum layer having a thickness of 0.1 to 10 μm is applied to an electrically insulating substrate having a thermal expansion coefficient in the range of 8.5 to 10.5×10−6/° K and a roughness less than 1 μm, and the structured platinum layer is covered by an electrical insulator. The resistance thermometers allow precise temperature measurement between −200° C. and +850° C., preferably as a sensor in an exhaust gas treatment system. In a substance-sensitive sensor having a circuit path structure on a substrate, the circuit path structure has an epitaxially applied base layer, and a substance-sensitive metal layer attached to the epitaxially applied base layer.
摘要翻译： 提供一种电阻温度计，其具有施加到基板的电绝缘表面上的0.1至10μm厚的结构化铂层形式的测量电阻器和覆盖铂层的电绝缘涂层。 基材或其表面含有二氧化锆，其用三价和五价金属的氧化物稳定。 优选地，三价金属是钇，五价金属是钽或铌。 测量电阻器的特性曲线优选符合DIN-IEC 751.对于具有高可重复测量精度的电阻温度计的批量生产，将具有0.1至10μm厚度的结构化铂层施加到具有热 膨胀系数在8.5至10.5×10-6 /°K的范围内，粗糙度小于1μm，并且结构化的铂层被电绝缘体覆盖。 电阻温度计允许在-200℃和+ 850℃之间的精确温度测量，优选地作为废气处理系统中的传感器。 在具有基板上的电路路径结构的物质敏感传感器中，电路路径结构具有外延施加的基极层和附着在外延涂覆的基底层上的物质敏感金属层。
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6.发明申请Flow Sensors Having a Flow Duct in the Cover, and Sensor Tip as Intermediate Product 有权流量传感器在盖子中具有流道，传感器尖端作为中间产品公开(公告)号：US20120192619A1
公开(公告)日：2012-08-02
申请号：US13356967
申请日：2012-01-24
申请人： Matthias MUZIOL , Karlheinz WIENAND
发明人： Matthias MUZIOL , Karlheinz WIENAND
CPC分类号： G01F1/684 , G01F1/692 , Y10T29/49124
摘要： For mass production of anemometers for EGR systems with hot exhaust gas streams having temperatures up to 200° C. or 300° C., conductors and film resistors are placed onto a bed, and are covered on this bed, e.g. A sensor tip of the flow sensor of the anemometer is made of inorganic materials up to the housing cover. A cable is led into a housing and self-supporting electrical conductors are led through the housing cover. In the housing, leads of the cable are connected to the self-supporting electrical conductors. Using bed profiles passing through the cover, the film resistors are spaced from the housing sufficiently far that the film resistors and the housing are largely thermally decoupled. As an intermediate product, a measurement tip or a sensor bar as part of a sensor tip is made of purely inorganic components, in order to make the mass production efficient.
摘要翻译： 对于具有温度高达200℃或300℃的热废气流的EGR系统的大规模生产，将导体和薄膜电阻器放置在床上，并且覆盖在该床上，例如， 风速计的流量传感器的传感器尖端由无机材料制成，直到外壳盖。 电缆被引入壳体，并且自支撑电导体被引导通过壳体盖。 在外壳中，电缆的引线连接到自支撑电导体。 使用通过盖子的床型材，薄膜电阻器与外壳隔开足够远，膜电阻器和壳体在很大程度上被热分离。 作为中间产品，作为传感器尖端的一部分的测量尖端或传感器棒由纯无机组分制成，以使批量生产效率高。
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公开(公告)号：US20120062254A1
公开(公告)日：2012-03-15
申请号：US13319767
申请日：2010-05-06
申请人： Karlheinz Wienand , Tim Asmus , Angela Maier , Karlheinz Ullrich
发明人： Karlheinz Wienand , Tim Asmus , Angela Maier , Karlheinz Ullrich
CPC分类号： G01N15/0656 , Y10T29/49002
摘要： A sensor, particularly an impedance sensor, for example a soot sensor, is provided which has two mutually electrically insulated electrodes, wherein at least one external electrode is formed from a composite of metal and inorganic oxide as a film pattern having a film thickness of 0.5 to 20 μm. The trace width of the film pattern and the spacing between the traces is 5 to 70 μm and the border region around the conductor trace edge varies less than 10 μm. Both electrodes can be arranged adjacent to each other as a film pattern in a plane. Preferably, the sensor has a heater. For mass production, electrodes are produced as a film pattern having a film thickness of 0.5 to 20 μm on electrically insulating oxide bases and, following full-surface imprinting of a metal powder and oxide-containing paste, the electrodes are structured particularly accurately as traces from the printed film. In particular, the film thickness of the printed film is reduced.
摘要翻译： 提供了一种传感器，特别是阻抗传感器，例如烟灰传感器，其具有两个相互电绝缘的电极，其中至少一个外部电极由金属和无机氧化物的复合物形成，膜厚度为0.5 至20μm。 膜图案的迹线宽度和迹线之间的间距为5〜70μm，导体迹线边缘周围的边界区域变化小于10μm。 两个电极可以彼此相邻地布置为平面中的膜图案。 优选地，传感器具有加热器。 为了大规模生产，电极在电绝缘氧化物基底上作为膜厚度为0.5至20μm的膜图案生产，并且在金属粉末和含氧化物浆料的全表面压印之后，电极被特别精确地构造为痕迹 从印刷电影。 特别地，印刷膜的膜厚减小。
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公开(公告)号：US20110305259A1
公开(公告)日：2011-12-15
申请号：US13146529
申请日：2010-01-20
CPC分类号： H01C7/02 , G01K7/183 , G01K2205/04 , H01C7/008 , H01C7/06 , Y10T29/49085
摘要： A resistance thermometer is provided having a measuring resistor in a form of a 0.1 to 10 μm thick structured platinum layer applied to an electrically insulated surface of a substrate and an electrically insulating coating layer covering the platinum layer. The substrate or its surface contains zirconium dioxide, which is stabilized with oxides of a trivalent and a pentavalent metal. Preferably, the trivalent metal is yttrium and the pentavalent metal is tantalum or niobium. The characteristic curve of the measuring resistor preferably conforms to DIN-IEC 751. For mass production of resistance thermometers having high and reproducible measurement accuracy, a structured platinum layer having a thickness of 0.1 to 10 μm is applied to an electrically insulating substrate having a thermal expansion coefficient in the range of 8.5 to 10.5×10−6/° K and a roughness less than 1 μm, and the structured platinum layer is covered by an electrical insulator. The resistance thermometers allow precise temperature measurement between −200° C. and +850° C., preferably as a sensor in an exhaust gas treatment system. In a substance-sensitive sensor having a circuit path structure on a substrate, the circuit path structure has an epitaxially applied base layer, and a substance-sensitive metal layer attached to the epitaxially applied base layer.
摘要翻译： 提供一种电阻温度计，其具有施加到基板的电绝缘表面上的0.1至10μm厚的结构化铂层形式的测量电阻器和覆盖铂层的电绝缘涂层。 基材或其表面含有二氧化锆，其用三价和五价金属的氧化物稳定。 优选地，三价金属是钇，五价金属是钽或铌。 测量电阻器的特性曲线优选符合DIN-IEC 751.对于具有高可重复测量精度的电阻温度计的批量生产，将具有0.1至10μm厚度的结构化铂层施加到具有热 膨胀系数在8.5至10.5×10-6 /°K的范围内，粗糙度小于1μm，并且结构化的铂层被电绝缘体覆盖。 电阻温度计允许在-200℃和+ 850℃之间进行精确的温度测量，优选地作为废气处理系统中的传感器。 在具有基板上的电路路径结构的物质敏感传感器中，电路路径结构具有外延施加的基极层和附着在外延涂覆的基底层上的物质敏感金属层。
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公开(公告)号：US07739908B2
公开(公告)日：2010-06-22
申请号：US12108878
申请日：2008-04-24
IPC分类号： G01F1/68
CPC分类号： G01F1/6983 , G01F1/6845 , G01F1/692
摘要： A flow sensor element and a method for self-cleaning of the flow sensor element are provided, in which a temperature-measuring element and a heating element are arranged on a carrier element, and these elements can form a multiple-part ceramic component. The temperature-measuring element has a platinum thin-film resistor on a ceramic substrate for the temperature measurement and is heated with an additional platinum thin-film resistor. A measurement device, in particular an anemometric measurement device of a flow sensor, contains film resistors mounted in at least one opening of a cover or a hollow body. Two of the film resistors have resistance values differing by one to three orders of magnitude. The anemometric measurement device has a temperature sensor and a heat output sensor set in a carrier element. The temperature sensor has a temperature-measuring resistor and a heat conductor, as platinum thin-film or thick-film resistors, on a ceramic substrate.
摘要翻译： 提供了流量传感器元件和流量传感器元件的自清洁方法，其中温度测量元件和加热元件布置在载体元件上，并且这些元件可以形成多部件陶瓷部件。 温度测量元件在陶瓷基板上具有用于温度测量的铂薄膜电阻器，并用附加的铂薄膜电阻器加热。 测量装置，特别是流量传感器的气流测量装置包含安装在盖子或中空体的至少一个开口中的薄膜电阻器。 两个薄膜电阻器的电阻值相差一到三个数量级。 风速测量装置具有设置在载体元件中的温度传感器和热输出传感器。 温度传感器在陶瓷基板上具有温度测量电阻和作为铂薄膜或厚膜电阻的导热体。
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公开(公告)号：US20100066388A1
公开(公告)日：2010-03-18
申请号：US12558829
申请日：2009-09-14
CPC分类号： G01N15/0656 , Y10T156/10
摘要： A soot sensor has a soot-sensitive noble-metal structure formed as strip conductor sections on an electrically insulating carrier, whose strip conductor sections are between 5 and 100 μm wide and are spaced apart from each other between 5 and 100 μm. The electrically insulating carrier may be a single crystal and the noble metal crystallized out on a surface of the single crystal, or the electrically insulating carrier may be polycrystalline and the noble metal crystallized out on the polycrystalline, electrically insulating carrier.
摘要翻译： 煤烟传感器具有烟电敏感的贵金属结构，其形成为电绝缘载体上的带状导体部分，其带状导体部分的宽度在5和100μm之间，并且在5和100μm之间彼此间隔开。 电绝缘载体可以是单晶，并且在单晶表面上结晶出贵金属，或者电绝缘载体可以是多晶的，并且贵金属在多晶电绝缘载体上结晶出来。
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