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公开(公告)号：US09895707B2
公开(公告)日：2018-02-20
申请号：US14699451
申请日：2015-04-29
申请人： MSP Corporation
CPC分类号： B05B7/066 , B05B5/03 , B05B7/0012 , B05B7/0075 , B05B17/06 , B05B17/0615 , B05B17/0646
摘要： A method and apparatus for generating aerosol particles that are substantially uniform in size said apparatus includes a droplet generator comprised of a metal capillary for a liquid to flow through to form a liquid stream flowing into a gas stream. The metal capillary is vibrated by a piezoelectric ceramic at a substantially constant frequency to cause the liquid stream to breakup into droplets that are substantially uniform in size in the gas stream, the gas stream being maintained at a velocity in the range between approximately 10% to 100% of the speed of sound.
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公开(公告)号：US08728240B2
公开(公告)日：2014-05-20
申请号：US13680331
申请日：2012-11-19
申请人： Benjamin Y. H. Liu , Thuc M. Dinh , Yamin Ma
发明人： Benjamin Y. H. Liu , Thuc M. Dinh , Yamin Ma
CPC分类号： H01L21/02617 , B01D5/0042 , C23C16/4412 , F25B21/02 , F25B39/04 , F25J1/00 , H01L21/0228
摘要： Methods and apparatus for recovery of precursor vapor from a gas and precursor vapor mixture used in a deposition process. The gas and precursor vapor mixture is passed through a multitude of heat transfer surfaces in a heat conducting housing causing the precursor vapor to condense. The precursor vapor in liquid form is then collected after condensation.
摘要翻译： 用于从沉积过程中使用的气体和前体蒸汽混合物中回收前体蒸气的方法和装置。 气体和前体蒸气混合物通过导热壳体中的大量传热表面，导致前体蒸汽冷凝。 然后在冷凝后收集液体形式的前体蒸气。
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3.发明申请公开(公告)号：US20140096715A1
公开(公告)日：2014-04-10
申请号：US14107718
申请日：2013-12-16
申请人： MSP Corporation
发明人： Benjamin Y.H. Liu , Yamin Ma , Thuc Dinh
CPC分类号： B01D46/0027 , C23C16/4402 , F22B1/28
摘要： An apparatus removes particles from a gas/vapor mixture while at the same time improves the uniformity of gas/vapor mixture to create a more uniformly-mixed mixture stream for thin film deposition and semiconductor device fabrication.
摘要翻译： 一种装置从气体/蒸汽混合物中除去颗粒，同时改善气体/蒸气混合物的均匀性，以产生用于薄膜沉积和半导体器件制造的更均匀混合的混合物流。
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公开(公告)号：US08511583B2
公开(公告)日：2013-08-20
申请号：US13018689
申请日：2011-02-01
申请人： Benjamin Y. H. Liu , Thuc M. Dinh , Yamin Ma
发明人： Benjamin Y. H. Liu , Thuc M. Dinh , Yamin Ma
CPC分类号： B05B17/04 , C23C16/4486
摘要： The present disclosure relates to an apparatus and a method for forming a droplet aerosol for vaporization and subsequent thin film deposition on a substrate. The apparatus includes a mechanism to control the rate of liquid flow through the apparatus, the mechanism including a piezoelectric actuator to adjust the rate of liquid flow and an atomizing mechanism drawing gas from a compressed gas source such that when the gas source conjoins with the liquid, the liquid is atomized to form droplets suspended in the gas thereby forming a droplet aerosol suitable for subsequent thin film deposition on a substrate. The method includes drawing a gas from a compressed gas source and drawing a liquid from a liquid source. The liquid and gas are conjoined in either a coaxial flow relationship or a radial flow relationship or an angular relationship between radial and coaxial flow wherein the gas engages the liquid to form droplets suitable for vaporization and subsequent thin film deposition on a substrate.
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公开(公告)号：US08465791B2
公开(公告)日：2013-06-18
申请号：US12872697
申请日：2010-08-31
IPC分类号： C23C16/52
CPC分类号： B05C11/00 , G01N15/065
摘要： A method for detecting particles in a gas by saturating the gas with vapor and causing the gas to flow through a chamber with walls that are at a temperature different than the temperature of the entering gas creating a gas turbulence within the chamber resulting in the gas becoming super-saturated with vapor and causing said super-saturated vapor to condense on said particles and form droplets, which are then detected and counted by an optical light-scattering detector.
摘要翻译： 一种通过用气体饱和气体并使气体流过室的气体中的颗粒的方法，其中壁的温度不同于进入气体的温度，在室内产生气体湍流，导致气体变成 用蒸汽过饱和并使所述超饱和蒸汽冷凝在所述颗粒上并形成液滴，然后通过光学散射检测器检测并计数。
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公开(公告)号：US08393599B2
公开(公告)日：2013-03-12
申请号：US13364854
申请日：2012-02-02
申请人： Benjamin Y. H. Liu
发明人： Benjamin Y. H. Liu
IPC分类号： B01F3/04
CPC分类号： B05B7/168 , B05B7/0475 , B05B7/066 , B05B7/1686 , Y10S261/65
摘要： An apparatus for atomizing a precursor liquid for vapor generation and thin film deposition on a substrate. The precursor liquid is atomized by a carrier gas to form a droplet aerosol composed of small precursor liquid droplets suspended in the carrier gas. The droplet aerosol is then heated to form vapor, producing a gas/vapor mixture that can be introduced into a deposition chamber to form thin films on a substrate. The liquid is introduced into the atomizing apparatus in such a manner as to avoid excessive heating that can occur or lead to the formation of undesirable by-products due to material degradation as result of thermal decomposition. The apparatus is particularly suited for vaporizing high molecular weight substances with a low vapor pressure that requires a high vaporization temperature for the liquid to vaporize. The apparatus can also be used to vaporize solid precursors dissolved in a solvent for vaporization.
摘要翻译： 一种用于在衬底上雾化用于蒸气产生和薄膜沉积的前体液体的装置。 前体液体被载气雾化以形成由悬浮在载气中的小前体液滴组成的液滴气溶胶。 然后将液滴气雾剂加热以形成蒸气，产生气体/蒸气混合物，其可以引入沉积室以在基底上形成薄膜。 以这样的方式将液体引入雾化装置中，以避免可能发生的过度加热或导致由于热分解导致的材料劣化而形成不期望的副产物。 该装置特别适用于蒸发具有低蒸气压的高分子量物质，其需要高的汽化温度以使液体蒸发。 该装置也可用于蒸发溶解在溶剂中的固体前体进行蒸发。
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公开(公告)号：US20120132723A1
公开(公告)日：2012-05-31
申请号：US13364854
申请日：2012-02-02
申请人： Benjamin Y.H. Liu
发明人： Benjamin Y.H. Liu
IPC分类号： C23C16/00
CPC分类号： B05B7/168 , B05B7/0475 , B05B7/066 , B05B7/1686 , Y10S261/65
摘要： An apparatus for atomizing a precursor liquid for vapor generation and thin film deposition on a substrate. The precursor liquid is atomized by a carrier gas to form a droplet aerosol comprised of small precursor liquid droplets suspended in the carrier gas. The droplet aerosol is then heated to form vapor, producing a gas/vapor mixture that can be introduced into a deposition chamber to form thin films on a substrate. The liquid is introduced into the atomizing apparatus in such a manner as to avoid excessive heating that can occur or lead to the formation of undesirable by-products due to material degradation as result of thermal decomposition. The apparatus is particularly suited for vaporizing high molecular weight substances with a low vapor pressure that requires a high vaporization temperature for the liquid to vaporize. The apparatus can also be used to vaporize solid precursors dissolved in a solvent for vaporization.
摘要翻译： 一种用于在衬底上雾化用于蒸气产生和薄膜沉积的前体液体的装置。 前体液体被载气雾化以形成由悬浮在载气中的小前体液滴组成的液滴气溶胶。 然后将液滴气雾剂加热以形成蒸气，产生气体/蒸气混合物，其可以引入沉积室以在基底上形成薄膜。 以这样的方式将液体引入雾化装置中，以避免可能发生的过度加热或导致由于热分解导致的材料劣化而形成不期望的副产物。 该装置特别适用于蒸发具有低蒸气压的高分子量物质，其需要高的汽化温度以使液体蒸发。 该装置也可用于蒸发溶解在溶剂中的固体前体进行蒸发。
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公开(公告)号：US20110232588A1
公开(公告)日：2011-09-29
申请号：US13070967
申请日：2011-03-24
申请人： Benjamin Y.H. Liu , Yamin Ma , Thuc Dinh
发明人： Benjamin Y.H. Liu , Yamin Ma , Thuc Dinh
CPC分类号： F01K17/04 , Y10T137/0318 , Y10T137/0379 , Y10T137/7761 , Y10T137/8593
摘要： An apparatus and method for generating vapor from a liquid precursor for a thin film deposition on a substrate includes an inlet section in fluid communication with a downstream vaporization chamber section. The inlet section comprises a gas inlet for receiving gas from a gas source through a gas flow sensor and a gas flow control valve and a liquid inlet for receiving liquid from a liquid source through a liquid flow sensor and a liquid flow control valve. An electronic controller controls the gas and liquid flow control valves thereby controlling the rates of gas and liquid flow into the inlet section to generate vapor in the downstream vaporization chamber section for thin film deposition on the substrate.
摘要翻译： 用于从液体前体产生蒸气的设备和方法用于薄膜沉积在基底上，包括与下游蒸发室部分流体连通的入口部分。 入口部分包括用于从气体源通过气体流量传感器和气体流量控制阀接收气体的气体入口和用于通过液体流量传感器和液体流量控制阀从液体源接收液体的液体入口。 电子控制器控制气体和液体流量控制阀，从而控制进入入口部分的气体和液体流量的速率，以在下游蒸发室部分中产生蒸汽，用于在基板上进行薄膜沉积。
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公开(公告)号：US07363828B2
公开(公告)日：2008-04-29
申请号：US11211376
申请日：2005-08-25
申请人： Benjamin Y. H. Liu
发明人： Benjamin Y. H. Liu
IPC分类号： G01N1/00
CPC分类号： G01N15/065 , G01N1/2252 , G01N2001/2223 , G01N2001/2264
摘要： The present invention includes an apparatus for aerosol measurement having a high concentration of particles the apparatus comprising a diluter for diluting the concentration of particles in a sample aerosol stream to form a diluted aerosol stream, and a sensor for detecting the particles in the diluted aerosol stream by vapor condensation, droplet growth and optical detection. Such apparatus may be housed in a common housing along with the electronics for operating the apparatus and components such as pumps and filters that may be necessary. The diluter includes an input for an aerosol stream having an initial particle concentration, and a dilution stream. The aerosol stream and the dilution stream flow through a restriction which is sized such that turbulent flow is created so that the dilution stream and the aerosol stream are mixed to produce a diluted aerosol stream. The dilution stream is formed by drawing a portion from the diluted aerosol stream, filtering the portion to produce clean air that is mixed with the aerosol stream upstream from the restriction.
摘要翻译： 本发明包括一种具有高浓度颗粒的气溶胶测量装置，该装置包括用于稀释样品气溶胶流中的颗粒浓度以形成稀释气溶胶流的稀释器，以及用于检测稀释气溶胶流中的颗粒的传感器 通过蒸气冷凝，液滴生长和光学检测。 这种装置可以与用于操作装置的电子装置和诸如可能需要的泵和过滤器的部件一起容纳在公共壳体中。 稀释器包括具有初始颗粒浓度的气溶胶流和稀释流的输入。 气溶胶流和稀释流流过限制，其尺寸使得产生湍流，使得稀释流和气溶胶流混合以产生稀释的气溶胶流。 通过从稀释的气溶胶流中抽出一部分来形成稀释流，过滤该部分以产生与限制物上游的气溶胶流混合的清洁空气。
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公开(公告)号：US07082811B2
公开(公告)日：2006-08-01
申请号：US10910999
申请日：2004-08-04
CPC分类号： G01N15/0255 , G01N1/2208 , G01N2015/0261
摘要： A cascade impactor apparatus has a series of vertically stacked impactor housing sections. Each of the impactor housing sections has an upper portion that supports a motor for driving an impactor plate that is positioned below a nozzle through which flow passes. Each housing section also has an outlet passageway leading to a lower impactor chamber for the next in a series of impactor chambers, except the last outlet passageway is coming through a filter to exhaust. The impactor chambers are defined by a skirt that seals on the neck of the next downstream housing section. The impactor plates are each driven by a separate motor, and held onto a hub on the motor output shaft with a magnetic coupling so the plates can be removed when the housings are separated.
摘要翻译： 级联冲击器装置具有一系列垂直堆叠的冲击器容纳部分。 每个冲击器容纳部分具有上部，该上部支撑用于驱动冲击器的马达，所述冲击器位于流经所述喷嘴的下方。 除了最后一个出口通道通过过滤器排气之外，每个壳体部分还具有通向一系列冲击器腔室中的下冲击器腔室的出口通道。 冲击器室由在下一个下游壳体部分的颈部上密封的裙部限定。 冲击器板分别由单独的马达驱动，并且通过磁耦合器保持在电动机输出轴上的轮毂上，以便当壳体分离时可以移除板。
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