公开(公告)号：US5594751A

公开(公告)日：1997-01-14

申请号：US494823

申请日：1995-06-26

申请人： Jeffrey W. Scott

发明人： Jeffrey W. Scott

IPC分类号： H01S5/00 ,  H01S5/042 ,  H01S5/183 ,  H01S5/22 ,  H01S3/19

CPC分类号： H01S5/18333 ,  H01S2301/166 ,  H01S5/18311 ,  H01S5/18316 ,  H01S5/1833 ,  H01S5/18358

摘要： A vertical-cavity surface-emitting laser (VCSEL) has an active region, first and second mirror stacks forming a resonant cavity with a radial variation in index forming a transverse optical mode, and a thin insulating slot within the cavity to constrict the current to a diameter less than the beam waist of the optical mode thereby improving device efficiency and preferentially supporting single mode operation. In one embodiment, an insulating slot is formed by etching or selectively oxidizing a thin aluminum-containing semiconductor layer in towards the center of a cylindrical mesa. The slot thickness is sufficiently thin that the large index discontinuity has little effect on the transverse optical-mode pattern. The slot may be placed near an axial standing-wave null to minimize the perturbation of the index discontinuity and allow the use of thicker slots. In a preferred embodiment, the current constriction, formed by the insulating slot, is located on the p-type side of the active region and has a diameter significantly less than the beam waist of the optical mode, thus minimizing outward diffusion of carriers and ensuring single transverse-mode operation of the laser by suppressing spatial hole burning.

摘要翻译： 垂直腔表面发射激光器（VCSEL）具有有源区域，形成谐振腔的第一和第二反射镜叠层具有形成横向光学模式的折射率的径向变化，以及腔内的薄绝缘槽，以将电流收缩 直径小于光学模式的光束腰部，从而提高器件效率并优先支持单模操作。 在一个实施例中，通过蚀刻或选择性地将薄的含铝半导体层朝向圆柱形台面的中心形成绝缘槽。 狭缝厚度足够薄，使得大的折射率不连续性对横向光学模式图案几乎没有影响。 槽可以放置在轴向驻波零点附近，以最小化指数不连续性的扰动，并允许使用较厚的槽。 在优选实施例中，由绝缘槽形成的电流收缩部位于有源区域的p型侧，并且具有明显小于光学模式的光束腰部的直径，从而最小化载体的向外扩散并确保 通过抑制空穴燃烧，激光的单横模操作。

公开(公告)号：US5513204A

公开(公告)日：1996-04-30

申请号：US422486

申请日：1995-04-12

申请人： Vijaysekhar Jayaraman

发明人： Vijaysekhar Jayaraman

IPC分类号： H01S5/00 ,  H01S3/0941 ,  H01S5/02 ,  H01S5/026 ,  H01S5/04 ,  H01S5/183 ,  H01S5/32 ,  H01S5/40 ,  H01S5/42 ,  H01S3/19 ,  H01S3/094

CPC分类号： H01S5/426 ,  B82Y20/00 ,  H01S5/0216 ,  H01S5/041 ,  H01S5/1017 ,  H01S5/18305 ,  H01S5/18369 ,  H01S5/1838 ,  H01S5/18383 ,  H01S5/18388 ,  H01S5/34306 ,  H01S5/423

摘要： A long wavelength VCSEL according to the present invention is optically coupled to and optically pumped by a shorter wavelength, electrically pumped VCSEL. Short wavelength radiation emitted from the top surface of the underlying VCSEL is transmitted through the lower mirror of the long wavelength VCSEL. Long wavelength radiation is preferably emitted from the top surface of the long wavelength VCSEL. The two VCSELs are preferably joined together using a transparent optical adhesive, a wafer-fusing process, or a metal to metal bond.

摘要翻译： 根据本发明的长波长VCSEL通过较短波长的电泵浦VCSEL光耦合到光泵浦。 从底层VCSEL的顶表面发射的短波长辐射通过长波长VCSEL的下反射镜传输。 长波长辐射优选地从长波长VCSEL的顶表面发射。 两个VCSEL优选使用透明光学粘合剂，晶片熔合工艺或金属 - 金属键连接在一起。

公开(公告)号：US5343487A

公开(公告)日：1994-08-30

申请号：US955562

申请日：1992-10-01

申请人： Jeffery W. Scott ,  Larry A. Coldren

发明人： Jeffery W. Scott ,  Larry A. Coldren

IPC分类号： H01S5/042 ,  H01S5/183 ,  H01S5/22 ,  H01S3/19

CPC分类号： H01S5/18333 ,  H01S2301/166 ,  H01S5/18308 ,  H01S5/18341 ,  H01S5/2059 ,  H01S5/2227

摘要： In a vertical-cavity surface-emitting laser (VCSEL) with an active region, and first and second mirror stacks forming a resonant cavity, the VCSEL having a radial electrode configuration with a first electrode disposed around the base of the first mirror stack near one side of the active region, a second electrode on the other side of the active region with a first contacting region and a second contacting region on each side of the active region in contact with the respective electrodes, each of the contacting regions providing a current path for distributed current through the active region, the improvement wherein there is a nonlinear grading of resistivity in at least one of the contacting regions between at least one of the electrodes and the active region. Specifically, in one embodiment, the first contacting region has a first layered section abutting the first electrode which is highly conductive to radial current flow and at least a second layered section between the first layered section and the active region which is more resistive to axial current flow than to radial current flow in the first layered section. In a further embodiment, one of the two contacting regions includes a layered section which is radially graded in resistivity so as to restrict the current injection to a radius less than that of the resonant cavity, thereby improving device efficiency and preferentially supporting single mode operation.

摘要翻译： 在具有有源区的垂直腔表面发射激光器（VCSEL）以及形成谐振腔的第一和第二反射镜叠层中，VCSEL具有径向电极结构，其中第一电极围绕第一反射镜叠层的基底设置在一个 所述有源区的另一侧的第二电极与所述有源区的与所述各电极接触的每一侧具有第一接触区和第二接触区，所述接触区中的每一个提供电流路径 对于通过有源区域的分布电流的改进，其中在至少一个电极和有源区域之间的至少一个接触区域中存在电阻率的非线性分级。 具体而言，在一个实施例中，第一接触区域具有与第一电极邻接的第一层状部分，其与径向电流流动具有高导电性，并且在第一层状部分和有源区域之间的至少第二层状部分具有更大的抵抗轴向电流 流动而不是在第一分层部分中的径向电流流动。 在另一实施例中，两个接触区域中的一个包括层状部分，其以电阻率径向分级，以将电流注入限制到小于谐振腔的半径，从而提高器件效率并优先支持单模操作。

公开(公告)号：US5879961A

公开(公告)日：1999-03-09

申请号：US673704

申请日：1996-06-25

申请人： Jeffrey W. Scott

发明人： Jeffrey W. Scott

IPC分类号： H01S5/00 ,  H01S5/042 ,  H01S5/183 ,  H01S5/22 ,  H01L21/20

CPC分类号： H01S5/18333 ,  H01S2301/166 ,  H01S5/18311 ,  H01S5/18316 ,  H01S5/1833 ,  H01S5/18358

摘要： A vertical-cavity surface-emitting laser (VCSEL) has an active region, first and second mirror stacks forming a resonant cavity with a radial variation in index forming a transverse optical mode, and a thin insulating slot within the cavity to constrict the current to a diameter less than the beam waist of the optical mode thereby improving device efficiency and preferentially supporting single mode operation. In one embodiment, an insulating slot is formed by etching or selectively oxidizing a thin aluminum-containing semiconductor layer in towards the center of a cylindrical mesa. The slot thickness is sufficiently thin that the large index discontinuity has little effect on the transverse optical-mode pattern. The slot may be placed near an axial standing-wave null to minimize the perturbation of the index discontinuity and allow the use of thicker slots. In a preferred embodiment, the current constriction, formed by the insulating slot, is located on the p-type side of the active region and has a diameter significantly less than the beam waist of the optical mode, thus minimizing outward diffusion of carriers and ensuring single transverse-mode operation of the laser by suppressing spatial hole burning.

摘要翻译： 垂直腔表面发射激光器（VCSEL）具有有源区域，形成谐振腔的第一和第二反射镜叠层具有形成横向光学模式的折射率的径向变化，以及腔内的薄绝缘槽，以将电流收缩 直径小于光学模式的光束腰部，从而提高器件效率并优先支持单模操作。 在一个实施例中，通过蚀刻或选择性地将薄的含铝半导体层朝向圆柱形台面的中心形成绝缘槽。 狭缝厚度足够薄，使得大的折射率不连续性对横向光学模式图案几乎没有影响。 槽可以放置在轴向驻波零点附近，以最小化指数不连续性的扰动，并允许使用较厚的槽。 在优选实施例中，由绝缘槽形成的电流收缩部位于有源区域的p型侧，并且具有明显小于光学模式的光束腰部的直径，从而最小化载体的向外扩散并确保 通过抑制空穴燃烧，激光的单横模操作。