MEMS relay and method of forming the MEMS relay
    3.
    发明授权
    MEMS relay and method of forming the MEMS relay 有权
    MEMS继电器和形成MEMS继电器的方法

    公开(公告)号:US08378766B2

    公开(公告)日:2013-02-19

    申请号:US13020052

    申请日:2011-02-03

    IPC分类号: H01H51/22

    摘要: A micro-electromechanical systems (MEMS) relay includes a switch with a first contact region and a second contact region that are vertically separated from each other by a gap. The MEMS relay requires a small vertical movement to close the gap and therefore is mechanically robust. In addition, the MEMS relay has a small footprint and, therefore, can be formed on top of small integrated circuits.

    摘要翻译: 微机电系统(MEMS)继电器包括具有通过间隙彼此垂直分离的第一接触区域和第二接触区域的开关。 MEMS继电器需要小的垂直运动来封闭间隙,因此机械稳健。 此外,MEMS继电器占地面积小,因此可以形成在小型集成电路之上。