公开(公告)号：US07902503B2

公开(公告)日：2011-03-08

申请号：US12188398

申请日：2008-08-08

Applicant: Alan T. Teruya ,  John W. Elmer ,  Todd A. Palmer

Inventor： Alan T. Teruya ,  John W. Elmer ,  Todd A. Palmer

IPC: H01J47/00

CPC classification number: H01J37/244 ,  H01J2237/24405

Abstract: A diagnostic system for characterization of an electron beam or an ion beam includes an electrical conducting disk of refractory material having a circumference, a center, and a Faraday cup assembly positioned to receive the electron beam or ion beam. At least one slit in the disk provides diagnostic characterization of the electron beam or ion beam. The at least one slit is located between the circumference and the center of the disk and includes a radial portion that is in radial alignment with the center and a portion that deviates from radial alignment with the center. The electron beam or ion beam is directed onto the disk and translated to the at least one slit wherein the electron beam or ion beam enters the at least one slit for providing diagnostic characterization of the electron beam or ion beam.

Abstract translation: 用于表征电子束或离子束的诊断系统包括耐火材料的导电盘，其具有圆周，中心和法拉第杯组件，其定位成接收电子束或离子束。 盘中的至少一个狭缝提供电子束或离子束的诊断特征。 所述至少一个狭缝位于圆盘的圆周和中心之间，并包括与中心径向对准的径向部分和偏离与中心的径向对准的部分。 电子束或离子束被引导到盘上并平移到至少一个狭缝，其中电子束或离子束进入至少一个狭缝，用于提供电子束或离子束的诊断特性。

公开(公告)号：US20100032562A1

公开(公告)日：2010-02-11

申请号：US12188398

申请日：2008-08-08

Applicant: Alan T. Teruya ,  John W. Elmer ,  Todd A. Palmer

Inventor： Alan T. Teruya ,  John W. Elmer ,  Todd A. Palmer

IPC: H01J47/00 ,  H01J3/14

CPC classification number: H01J37/244 ,  H01J2237/24405

Abstract: A diagnostic system for characterization of an electron beam or an ion beam includes an electrical conducting disk of refractory material having a circumference, a center, and a Faraday cup assembly positioned to receive the electron beam or ion beam. At least one slit in the disk provides diagnostic characterization of the electron beam or ion beam. The at least one slit is located between the circumference and the center of the disk and includes a radial portion that is in radial alignment with the center and a portion that deviates from radial alignment with the center. The electron beam or ion beam is directed onto the disk and translated to the at least one slit wherein the electron beam or ion beam enters the at least one slit for providing diagnostic characterization of the electron beam or ion beam.

Abstract translation: 用于表征电子束或离子束的诊断系统包括耐火材料的导电盘，其具有圆周，中心和法拉第杯组件，其定位成接收电子束或离子束。 盘中的至少一个狭缝提供电子束或离子束的诊断特征。 所述至少一个狭缝位于圆盘的圆周和中心之间，并包括与中心径向对准的径向部分和偏离与中心的径向对准的部分。 电子束或离子束被引导到盘上并平移到至少一个狭缝，其中电子束或离子束进入至少一个狭缝，用于提供电子束或离子束的诊断特性。

公开(公告)号：US20080088295A1

公开(公告)日：2008-04-17

申请号：US11166716

申请日：2005-06-23

Applicant: Alan T. Teruya ,  John W. Elmer ,  Todd A. Palmer ,  Chris C. Walton

Inventor： Alan T. Teruya ,  John W. Elmer ,  Todd A. Palmer ,  Chris C. Walton

IPC: G01N27/00

CPC classification number: H01J37/244 ,  G01R19/0061 ,  H01J2237/24405 ,  H01J2237/24507 ,  H01J2237/24514 ,  H01J2237/24542 ,  H01J2237/30472

Abstract: A micro beam Faraday cup assembly includes a refractory metal layer with an odd number of thin, radially positioned traces in this refractory metal layer. Some of the radially positioned traces are located at the edge of the micro modified Faraday cup body and some of the radially positioned traces are located in the central portion of the micro modified Faraday cup body. Each set of traces is connected to a separate data acquisition channel to form multiple independent diagnostic networks. The data obtained from the two diagnostic networks are combined and inputed into a computed tomography algorithm to reconstruct the beam shape, size, and power density distribution.

Abstract translation: 微型法拉第杯组件包括难熔金属层，该难熔金属层在该难熔金属层中具有奇数个薄的径向定位的迹线。 一些径向定位的迹线位于微改进的法拉第杯体的边缘，并且一些径向定位的迹线位于微改进的法拉第杯体的中心部分。 每组轨迹连接到单独的数据采集通道，形成多个独立的诊断网络。 将从两个诊断网络获得的数据组合并输入到计算机断层摄影算法中以重建波束形状，大小和功率密度分布。

公开(公告)号：US08791426B2

公开(公告)日：2014-07-29

申请号：US12917028

申请日：2010-11-01

Applicant: John W. Elmer ,  Alan T. Teruya

Inventor： John W. Elmer ,  Alan T. Teruya

IPC: H01J37/244 ,  G01T1/29

CPC classification number: H01J37/244 ,  G01T1/2914 ,  H01J37/315 ,  H01J2237/24405 ,  H01J2237/24542 ,  H01J2237/28 ,  H01J2237/30472

Abstract: A system for analyzing an electron beam including a circular electron beam diagnostic sensor adapted to receive the electron beam, the circular electron beam diagnostic sensor having a central axis; an annular sensor structure operatively connected to the circular electron beam diagnostic sensor, wherein the sensor structure receives the electron beam; a system for sweeping the electron beam radially outward from the central axis of the circular electron beam diagnostic sensor to the annular sensor structure wherein the electron beam is intercepted by the annular sensor structure; and a device for measuring the electron beam that is intercepted by the annular sensor structure.

Abstract translation: 一种用于分析包括适于接收电子束的圆形电子束诊断传感器的电子束的系统，所述圆形电子束诊断传感器具有中心轴线; 环形传感器结构可操作地连接到圆形电子束诊断传感器，其中传感器结构接收电子束; 用于将电子束从圆形电子束诊断传感器的中心轴径向向外扫描到环形传感器结构的系统，其中电子束被环形传感器结构拦截; 以及用于测量被环形传感器结构拦截的电子束的装置。

公开(公告)号：US5554926A

公开(公告)日：1996-09-10

申请号：US509552

申请日：1995-07-31

Applicant: John W. Elmer ,  Alan T. Teruya ,  Dennis W. O'Brien

Inventor： John W. Elmer ,  Alan T. Teruya ,  Dennis W. O'Brien

IPC: G01R19/00 ,  G01R13/00

CPC classification number: G01R19/0061

Abstract: A tomographic technique for measuring the current density distribution in electron beams using electron beam profile data acquired from a modified Faraday cup to create an image of the current density in high and low power beams. The modified Faraday cup includes a narrow slit and is rotated by a stepper motor and can be moved in the x, y and z directions. The beam is swept across the slit perpendicular thereto and controlled by deflection coils, and the slit rotated such that waveforms are taken every few degrees form 0.degree. to 360.degree. and the waveforms are recorded by a digitizing storage oscilloscope. Two-din-tensional and three-dimensional images of the current density distribution in the beam can be reconstructed by computer tomography from this information, providing quantitative information about the beam focus and alignment.

Abstract translation: 一种用于使用从修改的法拉第杯获得的电子束轮廓数据来测量电子束中的电流密度分布以在高功率和低功率光束中产生电流密度的图像的断层摄影技术。 修改后的法拉第杯包括狭窄的狭缝，并由步进电机旋转，并可在x，y和z方向上移动。 光束扫过与其垂直的狭缝并由偏转线圈控制，狭缝旋转，使得波形从0°至360°每隔几度进行，波形由数字化存储示波器记录。 可以通过计算机断层扫描从该信息重建光束中的电流密度分布的二维和三维图像，提供关于束聚焦和对准的定量信息。

公开(公告)号：US5468966A

公开(公告)日：1995-11-21

申请号：US283438

申请日：1994-08-01

Applicant: John W. Elmer ,  Alan T. Teruya ,  Dennis W. O'Brien

Inventor： John W. Elmer ,  Alan T. Teruya ,  Dennis W. O'Brien

IPC: G01R19/00 ,  H01J37/26 ,  G01R13/00

CPC classification number: G01R19/0061 ,  H01J37/265 ,  H01J2237/24405 ,  H01J2237/282

Abstract: A tomographic technique for measuring the current density distribution in electron beams using electron beam profile data acquired from a modified Faraday cup to create an image of the current density in high and low power beams. The modified Faraday cup includes a narrow slit and is rotated by a stepper motor and can be moved in the x, y and z directions. The beam is swept across the slit perpendicular thereto and controlled by deflection coils, and the slit rotated such that waveforms are taken every few degrees form 0.degree. to 360.degree. and the waveforms are recorded by a digitizing storage oscilloscope. Two-dimensional and three-dimensional images of the current density distribution in the beam can be reconstructed by computer tomography from this information, providing quantitative information about the beam focus and alignment.

公开(公告)号：US5382895A

公开(公告)日：1995-01-17

申请号：US996892

申请日：1992-12-28

Applicant: John W. Elmer ,  Alan T. Teruya ,  Dennis W. O'Brien

Inventor： John W. Elmer ,  Alan T. Teruya ,  Dennis W. O'Brien

IPC: G01R19/00 ,  H01J37/26 ,  G01R13/00 ,  G01T1/29

CPC classification number: G01R19/0061 ,  H01J37/265 ,  H01J2237/24405 ,  H01J2237/282

Abstract: A tomographic technique for measuring the current density distribution in electron beams using electron beam profile data acquired from a modified Faraday cup to create an image of the current density in high and low power beams. The modified Faraday cup includes a narrow slit and is rotated by a stepper motor and can be moved in the x, y and z directions. The beam is swept across the slit perpendicular thereto and controlled by deflection coils, and the slit rotated such that waveforms are taken every few degrees form 0.degree. to 360.degree. and the waveforms are recorded by a digitizing storage oscilloscope. Two-dimensional and three-dimensional images of the current density distribution in the beam can be reconstructed by computer tomography from this information, providing quantitative information about the beam focus and alignment.

Abstract translation: 一种用于使用从修改的法拉第杯获得的电子束轮廓数据来测量电子束中的电流密度分布以在高功率和低功率光束中产生电流密度的图像的断层摄影技术。 修改后的法拉第杯包括狭窄的狭缝，并由步进电机旋转，并可在x，y和z方向上移动。 光束扫过与其垂直的狭缝并由偏转线圈控制，狭缝旋转，使得波形从0°至360°每隔几度进行，波形由数字化存储示波器记录。 可以通过计算机断层摄影从该信息重建光束中的电流密度分布的二维和三维图像，提供关于束聚焦和对准的定量信息。

公开(公告)号：US07378830B2

公开(公告)日：2008-05-27

申请号：US11166716

申请日：2005-06-23

Applicant: Alan T. Teruya ,  John W. Elmer ,  Todd A. Palmer ,  Chris C. Walton

Inventor： Alan T. Teruya ,  John W. Elmer ,  Todd A. Palmer ,  Chris C. Walton

IPC: G01N27/00

CPC classification number: H01J37/244 ,  G01R19/0061 ,  H01J2237/24405 ,  H01J2237/24507 ,  H01J2237/24514 ,  H01J2237/24542 ,  H01J2237/30472

Abstract: A micro beam Faraday cup assembly includes a refractory metal layer with an odd number of thin, radially positioned traces in this refractory metal layer. Some of the radially positioned traces are located at the edge of the micro modified Faraday cup body and some of the radially positioned traces are located in the central portion of the micro modified Faraday cup body. Each set of traces is connected to a separate data acquisition channel to form multiple independent diagnostic networks. The data obtained from the two diagnostic networks are combined and inputted into a computed tomography algorithm to reconstruct the beam shape, size, and power density distribution.

Abstract translation: 微型法拉第杯组件包括难熔金属层，该难熔金属层在该难熔金属层中具有奇数个薄的径向定位的迹线。 一些径向定位的迹线位于微改进的法拉第杯体的边缘，并且一些径向定位的迹线位于微改进的法拉第杯体的中心部分。 每组轨迹连接到单独的数据采集通道，形成多个独立的诊断网络。 将从两个诊断网络获得的数据组合并输入到计算机断层摄影算法中以重建波束形状，大小和功率密度分布。

公开(公告)号：US07244950B2

公开(公告)日：2007-07-17

申请号：US11158481

申请日：2005-06-21

Applicant: John W. Elmer ,  Todd A. Palmer ,  Alan T. Teruya

Inventor： John W. Elmer ,  Todd A. Palmer ,  Alan T. Teruya

IPC: G01N27/00

CPC classification number: H01J37/244 ,  B23K15/0026 ,  H01J2237/24405 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/24507 ,  H01J2237/3104 ,  H01J2237/3175

Abstract: The present invention relates to a probe for determining the orientation of electron beams being profiled. To accurately time the location of an electron beam, the probe is designed to accept electrons from only a narrowly defined area. The signal produced from the probe is then used as a timing or triggering fiducial for an operably coupled data acquisition system. Such an arrangement eliminates changes in slit geometry, an additional signal feedthrough in the wall of a welding chamber and a second timing or triggering channel on a data acquisition system. As a result, the present invention improves the accuracy of the resulting data by minimizing the adverse effects of current slit triggering methods so as to accurately reconstruct electron or ion beams.

Abstract translation: 本发明涉及一种用于确定异型电子束取向的探针。 为了精确地计时电子束的位置，探针被设计成仅从狭窄的区域接受电子。 然后将由探头产生的信号用作可操作耦合的数据采集系统的定时或触发基准。 这种布置消除了狭缝几何形状的变化，焊接室壁中的附加信号馈通和数据采集系统上的第二定时或触发通道。 结果，本发明通过最小化当前狭缝触发方法的不利影响，从而精确地重建电子或离子束来提高所得数据的精度。

公开(公告)号：US5583427A

公开(公告)日：1996-12-10

申请号：US545070

申请日：1995-10-19

Applicant: Alan T. Teruya ,  John W. Elmer

Inventor： Alan T. Teruya ,  John W. Elmer

IPC: G01R19/00 ,  H01J37/26 ,  G01N27/00

CPC classification number: G01R19/0061 ,  H01J37/265 ,  H01J2237/24405 ,  H01J2237/282

Abstract: A tomographic technique for determining the power distribution of an electron beam using electron beam profile data acquired from a modified Faraday cup to create an image of the current density in high and low power beams. A refractory metal disk with a number of radially extending slits is placed above a Faraday cup. The beam is swept in a circular pattern so that its path crosses each slit in a perpendicular manner, thus acquiring all the data needed for a reconstruction in one circular sweep. Also, a single computer is used to generate the signals actuating the sweep, to acquire that data, and to do the reconstruction, thus reducing the time and equipment necessary to complete the process.

Abstract translation: 一种断层摄影技术，用于使用从修改的法拉第杯获得的电子束轮廓数据确定电子束的功率分布，以在高功率和低功率光束中产生电流密度的图像。 具有多个径向延伸狭缝的难熔金属盘被放置在法拉第杯的上方。 光束被扫描成圆形图案，使得其路径以垂直方式穿过每个狭缝，从而获得在一个循环扫描中重建所需的所有数据。 此外，单个计算机用于产生致动扫描的信号，以获取该数据，并进行重建，从而减少完成该过程所需的时间和设备。