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1.发明申请X-ray diffraction wafer mapping method for rhombohedral super-hetero-epitaxy 有权用于菱面体超异质外延的X射线衍射晶片测绘方法公开(公告)号：US20100027746A1
公开(公告)日：2010-02-04
申请号：US12288380
申请日：2008-10-20
IPC分类号： G01N23/207 , G01N23/20
CPC分类号： G01N23/207
摘要： A new X-ray diffraction (XRD) method is provided to acquire XY mapping of the distribution of single crystals, poly-crystals, and twin defects across an entire wafer of rhombohedral super-hetero-epitaxial semiconductor material. In one embodiment, the method is performed with a point or line X-ray source with an X-ray incidence angle approximating a normal angle close to 90°, and in which the beam mask is preferably replaced with a crossed slit. While the wafer moves in the X and Y direction, a narrowly defined X-ray source illuminates the sample and the diffracted X-ray beam is monitored by the detector at a predefined angle. Preferably, the untilted, asymmetric scans are of {440} peaks, for twin defect characterization.
摘要翻译： 提供了一种新的X射线衍射（XRD）方法，以获得在整个菱面体超异质外延半导体材料晶圆上单晶，多晶和双缺陷分布的XY映射。 在一个实施例中，该方法用具有接近90°的法线角的X射线入射角的点或线X射线源进行，其中光束掩模优选地被交叉的狭缝代替。 当晶片在X和Y方向上移动时，狭窄定义的X射线源照射样品，并且由检测器以预定角度监测衍射的X射线束。 优选地，对于双缺陷表征，直到不对称扫描为{440}峰。
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公开(公告)号：US20120200696A1
公开(公告)日：2012-08-09
申请号：US13020194
申请日：2011-02-03
IPC分类号： H04N7/18
摘要： A lock-in imaging system is configured for detecting a disturbance in air. The system includes an airplane, an interferometer, and a telescopic imaging camera. The airplane includes a fuselage and a pair of wings. The airplane is configured for flight in air. The interferometer is operatively disposed on the airplane and configured for producing an interference pattern by splitting a beam of light into two beams along two paths and recombining the two beams at a junction point in a front flight path of the airplane during flight. The telescopic imaging camera is configured for capturing an image of the beams at the junction point. The telescopic imaging camera is configured for detecting the disturbance in air in an optical path, based on an index of refraction of the image, as detected at the junction point.
摘要翻译： 锁定成像系统被配置为检测空气中的干扰。 该系统包括飞机，干涉仪和伸缩成像相机。 飞机包括机身和一对机翼。 飞机配置为在空中飞行。 干涉仪可操作地设置在飞机上并且被配置用于通过沿着两条路径将光束分成两束而产生干涉图案，并且在飞行中在飞机的前飞行路径中的接合点处重新组合两个波束。 伸缩成像照相机被配置为在接合点捕获光束的图像。 所述伸缩成像照相机被配置为基于在所述连接点检测到的所述图像的折射率来检测光路中的空气中的干扰。
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公开(公告)号：US08913124B2
公开(公告)日：2014-12-16
申请号：US13020194
申请日：2011-02-03
摘要： A lock-in imaging system is configured for detecting a disturbance in air. The system includes an airplane, an interferometer, and a telescopic imaging camera. The airplane includes a fuselage and a pair of wings. The airplane is configured for flight in air. The interferometer is operatively disposed on the airplane and configured for producing an interference pattern by splitting a beam of light into two beams along two paths and recombining the two beams at a junction point in a front flight path of the airplane during flight. The telescopic imaging camera is configured for capturing an image of the beams at the junction point. The telescopic imaging camera is configured for detecting the disturbance in air in an optical path, based on an index of refraction of the image, as detected at the junction point.
摘要翻译： 锁定成像系统被配置为检测空气中的干扰。 该系统包括飞机，干涉仪和伸缩成像相机。 飞机包括机身和一对机翼。 飞机配置为在空中飞行。 干涉仪可操作地设置在飞机上并且被配置用于通过沿着两条路径将光束分成两束而产生干涉图案，并且在飞行中在飞机的前飞行路径中的接合点处重新组合两个波束。 伸缩成像照相机被配置为在接合点捕获光束的图像。 所述伸缩成像照相机被配置为基于在所述连接点检测到的所述图像的折射率来检测光路中的空气中的干扰。
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公开(公告)号：US07769135B2
公开(公告)日：2010-08-03
申请号：US12288380
申请日：2008-10-20
IPC分类号： G01N23/20
CPC分类号： G01N23/207
摘要： A new X-ray diffraction (XRD) method is provided to acquire XY mapping of the distribution of single crystals, poly-crystals, and twin defects across an entire wafer of rhombohedral super-hetero-epitaxial semiconductor material. In one embodiment, the method is performed with a point or line X-ray source with an X-ray incidence angle approximating a normal angle close to 90°, and in which the beam mask is preferably replaced with a crossed slit. While the wafer moves in the X and Y direction, a narrowly defined X-ray source illuminates the sample and the diffracted X-ray beam is monitored by the detector at a predefined angle. Preferably, the untilted, asymmetric scans are of {440} peaks, for twin defect characterization.
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