Chromatic confocal sensor
    5.
    发明授权
    Chromatic confocal sensor 有权
    色共聚焦传感器

    公开(公告)号:US08451457B2

    公开(公告)日:2013-05-28

    申请号:US12681926

    申请日:2008-10-03

    IPC分类号: G01B11/14 H01L21/027

    CPC分类号: G02B27/0075 G02B21/0064

    摘要: A system comprising a substrate having thereon a multiphoton curable photoreactive composition, a light source that emits a light beam comprising a plurality of wavelengths onto at least one region of the composition on the substrate, and a detector that detects a portion of light reflected from the composition to obtain a location signal with respect to the substrate, wherein the location signal is based at least on a wavelength of the reflected light.

    摘要翻译: 一种系统,包括其上具有多光子可固化光反应性组合物的基底,将包含多个波长的光束发射到所述基底上的所述组合物的至少一个区域上的光源,以及检测器, 以获得相对于衬底的位置信号,其中所述位置信号至少基于所述反射光的波长。

    CHROMATIC CONFOCAL SENSOR
    6.
    发明申请
    CHROMATIC CONFOCAL SENSOR 有权
    CHROMATIC CONFOCAL传感器

    公开(公告)号:US20100296106A1

    公开(公告)日:2010-11-25

    申请号:US12681926

    申请日:2008-10-03

    IPC分类号: G01B11/14

    CPC分类号: G02B27/0075 G02B21/0064

    摘要: A system comprising a substrate having thereon a multiphoton curable photoreactive composition, a light source that emits a light beam comprising a plurality of wavelengths onto at least one region of the composition on the substrate, and a detector that detects a portion of light reflected from the composition to obtain a location signal with respect to the substrate, wherein the location signal is based at least on a wavelength of the reflected light.

    摘要翻译: 一种系统,包括其上具有多光子可固化光反应性组合物的基底,将包含多个波长的光束发射到所述基底上的所述组合物的至少一个区域上的光源,以及检测器, 以获得相对于衬底的位置信号,其中所述位置信号至少基于所述反射光的波长。