PYROELECTRIC INFRARED SENSOR
    3.
    发明申请
    PYROELECTRIC INFRARED SENSOR 审中-公开
    微电子红外传感器

    公开(公告)号:US20090072143A1

    公开(公告)日:2009-03-19

    申请号:US12282552

    申请日:2007-03-19

    IPC分类号: G01J5/00

    CPC分类号: G01J5/34 H01L37/025

    摘要: There is provided a pyroelectric infrared sensor being capable of changing its shape and having high sensitivity. The sensor comprises the substrate 11 made of a polymer material such as polyimide or polyethylene terephthalate and having flexibility, the layer 13 comprising vinylidene fluoride (VDF), and the flexible electrodes 12 and 14 comprising an Al-deposited film and provided on and under the VDF oligomer layer 13. The pyroelectric infrared sensor of the present invention has flexibility as a whole due to flexibility of each component elements and can be formed into desired shapes. In addition, since a substrate made of a polymer material has heat capacity and heat conductivity lower than those of Si substrates used on conventional pyroelectric infrared sensors, sensitivity of the sensor can be increased.

    摘要翻译: 提供了能够改变其形状并具有高灵敏度的热释电红外传感器。 该传感器包括由诸如聚酰亚胺或聚对苯二甲酸乙二醇酯的聚合物材料制成并具有柔性的衬底11,包含偏二氟乙烯(VDF)的层13以及包含Al沉积膜的柔性电极12和14, VDF低聚物层13.本发明的热电型红外线传感器由于各构成要素的柔软性而具有整体的柔软性,可以形成为所希望的形状。 此外,由于由聚合物材料制成的基板具有比常规热电型红外线传感器所使用的Si基板的热容量和导热率低的传热装置,所以能够提高传感器的灵敏度。