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公开(公告)号：US06951821B2
公开(公告)日：2005-10-04
申请号：US10705200
申请日：2003-11-12
IPC分类号： C23C16/44 , C25D11/02 , H01L21/00 , H01L21/677 , H01L21/302 , C23C16/00 , F27B5/14 , H01L21/461 , H01L31/0328
CPC分类号： H01L21/67748 , C23C16/4405 , C25D11/02 , C25D11/026 , H01L21/67069 , H01L21/67103 , H01L21/67109 , H01L21/67126 , H01L21/67207 , H01L21/67248 , H01L21/67253
摘要： A processing system and method for chemically treating a substrate, wherein the processing system comprises a temperature controlled chemical treatment chamber, and an independently temperature controlled substrate holder for supporting a substrate for chemical treatment. The substrate holder is thermally insulated from the chemical treatment chamber. The substrate is exposed to a gaseous chemistry, without plasma, under controlled conditions including wall temperature, surface temperature and gas pressure. The chemical treatment of the substrate chemically alters exposed surfaces on the substrate.
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公开(公告)号：US07462564B2
公开(公告)日：2008-12-09
申请号：US11337654
申请日：2006-01-24
IPC分类号： H01L21/00
CPC分类号： H01L21/67748 , C23C16/4405 , C25D11/02 , H01L21/0337 , H01L21/31116 , H01L21/67069 , H01L21/67103 , H01L21/67109 , H01L21/67126 , H01L21/6719 , H01L21/67207 , H01L21/67248 , H01L21/67253 , Y10T29/41
摘要： A processing system and method for chemical oxide removal (COR), wherein the processing system comprises a first treatment chamber and a second treatment chamber, wherein the first and second treatment chambers are coupled to one another. The first treatment chamber comprises a chemical treatment chamber that provides a temperature controlled chamber, and an independently temperature controlled substrate holder for supporting a substrate for chemical treatment. The substrate is exposed to a gaseous chemistry, such as HF/NH3, under controlled conditions including surface temperature and gas pressure. The second treatment chamber comprises a heat treatment chamber that provides a temperature controlled chamber, thermally insulated from the chemical treatment chamber. The heat treatment chamber provides a substrate holder for controlling the temperature of the substrate to thermally process the chemically treated surfaces on the substrate.
摘要翻译： 一种用于化学氧化物去除（COR）的处理系统和方法，其中所述处理系统包括第一处理室和第二处理室，其中所述第一和第二处理室彼此耦合。 第一处理室包括提供温度控制室的化学处理室和用于支撑用于化学处理的基板的独立温度控制的基板保持器。 在包括表面温度和气体压力的受控条件下，将基底暴露于气态化学物质，例如HF / NH 3。 第二处理室包括热处理室，其提供与化学处理室热绝缘的温度控制室。 热处理室提供用于控制基板的温度以热处理基板上化学处理的表面的基板保持器。
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公开(公告)号：US07079760B2
公开(公告)日：2006-07-18
申请号：US10704969
申请日：2003-11-12
IPC分类号： F26B19/00
CPC分类号： H01L21/67748 , C23C16/4405 , C25D11/02 , H01L21/67069 , H01L21/67103 , H01L21/67109 , H01L21/67126 , H01L21/67207 , H01L21/67248 , H01L21/67253
摘要： A processing system for thermally treating a substrate including a temperature controlled thermal treatment chamber and a temperature controlled substrate holder for supporting a substrate for thermal treatment. The substrate holder is thermally insulated from the thermal treatment chamber. A method for thermally treating a substrate is also provided.
摘要翻译： 一种用于热处理包括温度控制的热处理室的衬底和用于支撑用于热处理的衬底的温度受控衬底保持器的处理系统。 衬底保持器与热处理室隔热。 还提供了一种热处理基板的方法。
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公开(公告)号：US07029536B2
公开(公告)日：2006-04-18
申请号：US10705201
申请日：2003-11-12
IPC分类号： H01L21/302
CPC分类号： H01L21/67748 , C23C16/4405 , C25D11/02 , H01L21/0337 , H01L21/31116 , H01L21/67069 , H01L21/67103 , H01L21/67109 , H01L21/67126 , H01L21/6719 , H01L21/67207 , H01L21/67248 , H01L21/67253 , Y10T29/41
摘要： A processing system and method for chemical oxide removal (COR), wherein the processing system comprises a first treatment chamber and a second treatment chamber, wherein the first and second treatment chambers are coupled to one another. The first treatment chamber comprises a chemical treatment chamber that provides a temperature controlled chamber, and an independently temperature controlled substrate holder for supporting a substrate for chemical treatment. The substrate is exposed to a gaseous chemistry, such as HF/NH3, under controlled conditions including surface temperature and gas pressure. The second treatment chamber comprises a heat treatment chamber that provides a temperature controlled chamber, thermally insulated from the chemical treatment chamber. The heat treatment chamber provides a substrate holder for controlling the temperature of the substrate to thermally process the chemically treated surfaces on the substrate.
摘要翻译： 一种用于化学氧化物去除（COR）的处理系统和方法，其中所述处理系统包括第一处理室和第二处理室，其中所述第一和第二处理室彼此耦合。 第一处理室包括提供温度控制室的化学处理室和用于支撑用于化学处理的基板的独立温度控制的基板保持器。 在包括表面温度和气体压力在内的受控条件下，将基底暴露于气态化学物质，例如HF / NH 3。 第二处理室包括热处理室，其提供与化学处理室热绝缘的温度控制室。 热处理室提供用于控制基板的温度以热处理基板上化学处理的表面的基板保持器。
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公开(公告)号：US20110204029A1
公开(公告)日：2011-08-25
申请号：US13093410
申请日：2011-04-25
IPC分类号： C23F1/00
CPC分类号： H01L21/67748 , C23C16/4405 , C25D11/02 , C25D11/026 , H01L21/67069 , H01L21/67103 , H01L21/67109 , H01L21/67126 , H01L21/67207 , H01L21/67248 , H01L21/67253
摘要： A processing system and method for chemically treating a substrate, wherein the processing system comprises a temperature controlled chemical treatment chamber, and an independently temperature controlled substrate holder for supporting a substrate for chemical treatment. The substrate is exposed to a gaseous chemistry, without plasma, under controlled conditions including wall temperature, surface temperature and gas pressure. The chemical treatment of the substrate chemically alters exposed surfaces on the substrate.
摘要翻译： 一种用于化学处理衬底的处理系统和方法，其中所述处理系统包括温度控制的化学处理室和用于支撑用于化学处理的衬底的独立温度控制的衬底保持器。 在受控条件下，包括壁温，表面温度和气体压力，将基板暴露于无等离子体的气态化学品。 衬底的化学处理化学改变衬底上的暴露表面。
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