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公开(公告)号：US08940229B2
公开(公告)日：2015-01-27
申请号：US13812870
申请日：2011-10-26
Applicant: Helmut Halfmann , Axel Hombach , Markus Roth
Inventor： Helmut Halfmann , Axel Hombach , Markus Roth
CPC classification number: A61L2/10 , A61L2202/11 , H01J5/52 , H01J61/305 , H01J65/046
Abstract: In various embodiments, a device for irradiating surfaces is provided. The device may include a radiation emitter having a radiation emitter vessel, wherein the radiation emitter vessel has at least one tunnel-like passage; and a structure configured to allow a process gas to flow through the at least one tunnel-like passage.
Abstract translation: 在各种实施例中，提供了用于照射表面的装置。 该装置可以包括具有辐射发射器容器的辐射发射器，其中辐射发射器容器具有至少一个隧道状通道; 以及构造成允许处理气体流过所述至少一个隧道状通道的结构。
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公开(公告)号：US20130216431A1
公开(公告)日：2013-08-22
申请号：US13812870
申请日：2011-10-26
Applicant: Helmut Halfmann , Axel Hombach , Markus Roth
Inventor： Helmut Halfmann , Axel Hombach , Markus Roth
IPC: A61L2/10
CPC classification number: A61L2/10 , A61L2202/11 , H01J5/52 , H01J61/305 , H01J65/046
Abstract: In various embodiments, a device for irradiating surfaces is provided. The device may include a radiation emitter having a radiation emitter vessel, wherein the radiation emitter vessel has at least one tunnel-like passage; and a structure configured to allow a process gas to flow through the at least one tunnel-like passage.
Abstract translation: 在各种实施例中，提供了用于照射表面的装置。 该装置可以包括具有辐射发射器容器的辐射发射器，其中辐射发射器容器具有至少一个隧道状通道; 以及构造成允许处理气体流过所述至少一个隧道状通道的结构。
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公开(公告)号：US08314538B2
公开(公告)日：2012-11-20
申请号：US12918979
申请日：2008-02-21
Applicant: Axel Hombach , Oliver Rosier
Inventor： Axel Hombach , Oliver Rosier
IPC: H01J1/18
CPC classification number: H01J65/046 , H01J9/247 , H01J61/30
Abstract: A dielectric barrier discharge lamp (1) with a discharge vessel, which has an outer tube (2), which surrounds a discharge space (4) filled with a discharge medium, an outer electrode (6), which is arranged on the outer side of the outer tube (2), an elongate inner electrode (7), which is arranged axially within the outer tube (2), at least one retaining disk (8) with an axial bore, through which the elongate inner electrode (7) runs, the retaining disk (8) extending substantially from the inner electrode (7) up to the inner side of the outer tube (2), as a result of which the inner electrode (7) is centered at least indirectly within the discharge vessel. The retaining disk (8) is supported on both sides loosely in the direction of the longitudinal axis by means of a supporting means (9a-9c) on the left-hand side and a supporting means (10a-10c) on the right-hand side.
Abstract translation: 一种具有放电容器的介质阻挡放电灯（1），其具有外管（2），该外管围绕填充有放电介质的放电空间（4），外电极（6）设置在外侧 （2）的轴向设置有至少一个具有轴向孔的保持盘（8）的细长内部电极（7），所述细长内部电极（7）穿过所述外部管（2） 保持盘（8）从内部电极（7）基本上延伸到外部管（2）的内侧，结果内部电极（7）至少间接地位于放电容器 。 保持盘（8）通过左侧的支撑装置（9a-9c）在右侧的支撑装置（10a-10c）上沿纵向方向松动地支撑在两侧 侧。
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4.发明申请公开(公告)号：US20110101858A1
公开(公告)日：2011-05-05
申请号：US12737405
申请日：2008-07-15
Applicant: Axel Hombach , Oliver Rosier
Inventor： Axel Hombach , Oliver Rosier
IPC: H01J61/26
CPC classification number: H01J65/046 , H01J61/26
Abstract: A dielectric barrier discharge lamp (1) configured as a coaxial double tube comprises an inner tube (3), which is disposed coaxially inside an outer tube (2). The inner tube (3) comprises an inner electrode tube (8) provided for receiving the inner electrode (7) and a getter tube (10) provided for receiving getter material (9). The inner electrode tube (8) and getter tube (10) are separated from each other in a gastight manner by a partition (11).
Abstract translation: 构造为同轴双管的电介质阻挡放电灯（1）包括同轴地设置在外管（2）内的内管（3）。 内管（3）包括设置用于容纳内电极（7）的内电极管（8）和用于接收吸气材料（9）的吸气管（10）。 内部电极管（8）和吸气管（10）通过隔板（11）以气密方式彼此分离。
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公开(公告)号：US20130119279A1
公开(公告)日：2013-05-16
申请号：US13812522
申请日：2011-10-26
Applicant: Helmut Halfmann , Axel Hombach , Markus Roth
Inventor： Helmut Halfmann , Axel Hombach , Markus Roth
IPC: A61L2/10
CPC classification number: A61L2/10 , A61L2202/23 , H01J5/48 , H01J5/56 , H01J61/305 , H01J65/046
Abstract: In various embodiments, an emitter for the irradiation of surfaces is provided. The emitter may include: an emitter vessel and an emitter base connected thereto, wherein the emitter base has at least one gas opening, which is designed for supplying a process gas into a spatial area adjacent to the emitter vessel.
Abstract translation: 在各种实施例中，提供了用于照射表面的发射器。 发射器可以包括：发射器容器和与其连接的发射极基座，其中发射极基底具有至少一个气体开口，其被设计用于将处理气体供应到与发射器容器相邻的空间区域中。
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Patent Agency Ranking
公开(公告)号：US08237364B2
公开(公告)日：2012-08-07
申请号：US12734402
申请日：2007-11-26
Applicant: Axel Hombach , Oliver Rosier , Markus Roth , Siegmar Rudakowski
Inventor： Axel Hombach , Oliver Rosier , Markus Roth , Siegmar Rudakowski
CPC classification number: H01J65/046 , H01J61/06 , H01J61/0672 , H01J61/0675
Abstract: The invention relates to a dielectric barrier discharge lamp in a coaxial double-tube arrangement, comprising an exterior electrode (6), and interior electrode (7), and an auxiliary electrode (8). The interior electrode (7) is designed as an electrically conductive layer placed inside the interior tube (3) of the double-tube arrangement. The auxiliary electrode (8) is designed, for example, as a metal tube or pipe and is also disposed inside the interior tube (3), specifically in direct contact with the layer. In this manner, the conductivity of the interior electrode (S) is improved.
Abstract translation: 本发明涉及同轴双管装置中的介质阻挡放电灯，其包括外电极（6）和内电极（7）以及辅助电极（8）。 内部电极（7）被设计为位于双管装置的内管（3）内部的导电层。 辅助电极（8）例如设计为金属管或管，并且还设置在内管（3）的内部，特别是与层直接接触。 以这种方式，内部电极（S）的导电性提高。
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7.发明申请METHOD FOR TREATING SURFACES, LAMP FOR SAID METHOD, AND IRRADIATION SYSTEM HAVING SAID LAMP 审中-公开用于处理表面的方法，用于确定方法的灯和具有所述灯的辐射系统公开(公告)号：US20110056513A1
公开(公告)日：2011-03-10
申请号：US12736741
申请日：2008-06-05
Applicant: Axel Hombach , Siegmar Rudakowski
Inventor： Axel Hombach , Siegmar Rudakowski
CPC classification number: H01J65/046 , B08B7/0057 , H01J5/56
Abstract: The invention relates to a method for treating, particularly cleaning, modifying, and/or activating surfaces, using UV/VUV irradiation of a UV/VUV lamp and additional gas discharge. A dielectric barrier discharge lamp (1) is preferably used as the UV/VUV lamp, comprising a planar window segment (7) for emitting the UV/VUV radiation. The lamp (1) extends into a process chamber (17). The additional gas discharge is generated in the region of the outer side of the window segment (7) of the lamp (1). The substrate to be treated is disposed within the process chamber (17), near the window segment (7).
Abstract translation: 本发明涉及使用UV / VUV灯的UV / VUV照射和附加气体放电来处理，特别是清洁，改性和/或激活表面的方法。 优选使用介质阻挡放电灯（1）作为UV / VUV灯，其包括用于发射UV / VUV辐射的平面窗口段（7）。 灯（1）延伸到处理室（17）中。 在灯（1）的窗口部分（7）的外侧的区域中产生附加的气体放电。 待处理的基板设置在处理室（17）内，靠近窗口段（7）。
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公开(公告)号：US20100327722A1
公开(公告)日：2010-12-30
申请号：US12819663
申请日：2010-06-21
Applicant: Helmut HALFMANN , Axel Hombach
Inventor： Helmut HALFMANN , Axel Hombach
IPC: H01J61/92
CPC classification number: H01J65/046 , H01J61/34
Abstract: Two or more separate discharge spaces (8, 9) are provided in the discharge vessel (2) of a dielectric barrier discharge lamp (1), said discharge spaces (8, 9) each being filled with a discharge medium. This provides the possibility of producing radiation with two or more wavelengths which are characteristic of the respectively used discharge media using a single lamp (1).
Abstract translation: 在介质阻挡放电灯（1）的放电容器（2）中设置两个或更多个单独的放电空间（8,9），所述放电空间（8,9）均填充有放电介质。 这提供了使用单个灯（1）产生具有两个或更多个波长的辐射的可能性，这些波长是分别使用的放电介质的特征。
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公开(公告)号：US08796640B2
公开(公告)日：2014-08-05
申请号：US13812522
申请日：2011-10-26
Applicant: Helmut Halfmann , Axel Hombach , Markus Roth
Inventor： Helmut Halfmann , Axel Hombach , Markus Roth
IPC: A61L2/10
CPC classification number: A61L2/10 , A61L2202/23 , H01J5/48 , H01J5/56 , H01J61/305 , H01J65/046
Abstract: In various embodiments, an emitter for the irradiation of surfaces is provided. The emitter may include: an emitter vessel and an emitter base connected thereto, wherein the emitter base has at least one gas opening, which is designed for supplying a process gas into a spatial area adjacent to the emitter vessel.
Abstract translation: 在各种实施例中，提供了用于照射表面的发射器。 发射器可以包括：发射器容器和与其连接的发射极基座，其中发射极基底具有至少一个气体开口，其被设计用于将处理气体供应到与发射器容器相邻的空间区域中。
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公开(公告)号：US08441189B2
公开(公告)日：2013-05-14
申请号：US12819663
申请日：2010-06-21
Applicant: Helmut Halfmann , Axel Hombach
Inventor： Helmut Halfmann , Axel Hombach
IPC: H01J17/44
CPC classification number: H01J65/046 , H01J61/34
Abstract: Two or more separate discharge spaces (8, 9) are provided in the discharge vessel (2) of a dielectric barrier discharge lamp (1), said discharge spaces (8, 9) each being filled with a discharge medium. This provides the possibility of producing radiation with two or more wavelengths which are characteristic of the respectively used discharge media using a single lamp (1).
Abstract translation: 在介质阻挡放电灯（1）的放电容器（2）中设置两个或更多个单独的放电空间（8,9），所述放电空间（8,9）均填充有放电介质。 这提供了使用单个灯（1）产生具有两个或更多个波长的辐射的可能性，这些波长是分别使用的放电介质的特征。
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