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公开(公告)号：US06187653B1
公开(公告)日：2001-02-13
申请号：US09465884
申请日：1999-12-17
IPC分类号： H01L2130
CPC分类号： H01L31/1075 , H01L21/187 , Y10S438/938
摘要： A process for device fabrication is disclosed in which two substrates having different crystal lattices are bound together. In the process the substrate surfaces are placed in physical contact with each other. A flexible membrane is placed in physical contact with a surface of one of the substrates. Pneumatic force is applied to the flexible membrane. The duration of the contact and the pressure of the contact are selected to facilitate a bond between the two substrate surfaces that results from attractive Van der Waals' forces between the two surfaces. The bulk of one of the substrates is then typically removed. Thereafter, the bonded surfaces are heated to a high temperature to effect a permanent bond.
摘要翻译： 公开了一种用于器件制造的方法，其中具有不同晶格的两个衬底结合在一起。 在该过程中，衬底表面彼此物理接触。 将柔性膜放置成与其中一个基板的表面物理接触。 气动力被施加到柔性膜上。 选择接触的持续时间和接触压力，以便于由两个表面之间的有吸引力的范德华力引起的两个基板表面之间的接合。 然后通常去除其中一个底物的大部分。 然后，将接合面加热至高温，进行永久接合。
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公开(公告)号：US6136667A
公开(公告)日：2000-10-24
申请号：US369682
申请日：1999-08-05
CPC分类号： H01L21/187 , H01L31/18 , Y10S438/977
摘要： A process for device fabrication is disclosed in which two substrates having different crystal lattices are bound together. In the process the substrate surfaces are thoroughly cleaned and placed in physical contact with each other. The duration of the contact and the pressure of the contact are selected to facilitate a bond between the two substrate surfaces that results from attractive Van der Waals' forces between the two surfaces. The bonded substrates are heated to a moderate temperature to effect escape of gases which may be entrapped by the substrates. The bulk of one of the substrates is then typically removed. The substrates can be heated again to a moderate temperature to effect removal of any gases remaining entrapped on the substrates. Thereafter, the bonded surfaces are heated to a high temperature to effect a permanent bond.
摘要翻译： 公开了一种用于器件制造的方法，其中具有不同晶格的两个衬底结合在一起。 在此过程中，基材表面被彻底清洁并相互物理接触。 选择接触的持续时间和接触压力，以便于由两个表面之间的有吸引力的范德华力引起的两个基板表面之间的接合。 将粘合的基材加热到适度的温度以实现可被基底捕获的气体逸出。 然后通常去除其中一个底物的大部分。 可以将衬底再次加热到适度的温度，以除去残留在衬底上的任何气体。 然后，将接合面加热至高温，进行永久接合。
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3.发明授权
公开(公告)号：US6002113A
公开(公告)日：1999-12-14
申请号：US80430
申请日：1998-05-18
CPC分类号： H01L21/67248
摘要： Apparatus for processing a silicon workpiece uses reflected UV light to measure and control the workpiece temperature. A linearly polarized beam including UV light is directed onto a silicon surface to produce a reflected beam. The reflected beam is cross-polarized to null out much of the light, and the resulting residual reflectivity spectrum is determined. The temperature is determined from the characteristics of this spectrum. A workpiece heating station uses this measuring technique to accurately control the temperature of a silicon workpiece and temperature-dependent processing over a wide range of processing temperatures, including temperatures below 500.degree. C.
摘要翻译： 用于处理硅工件的设备使用反射的UV光来测量和控制工件温度。 包括UV光的线偏振光束被引导到硅表面上以产生反射光束。 反射光束被交叉极化以消除大部分光，并且确定所得残留反射率光谱。 温度根据该光谱的特性确定。 工件加热站采用这种测量技术来精确控制硅工件的温度，并在宽温度范围内（包括温度低于500℃）的温度依赖性处理。
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公开(公告)号：US3935472A
公开(公告)日：1976-01-27
申请号：US558424
申请日：1975-03-14
CPC分类号： G02F1/377 , G02F2001/3546
摘要： An optically nonlinear liquid thin film in a thin film optical waveguide is utilized in order to produce optical parametric interactions such as second harmonic generation. Optimization (tuning) of parametric output by "phase matching" is achieved by means of an electric field which is set up in the liquid film, the field having a spatial periodicity along the propagation direction of the optical waves in the thin film. Alternative or further optimization of parametric output is achieved by varying the thickness of the liquid film in situ.
摘要翻译： 利用薄膜光波导中的光学非线性液体薄膜来产生诸如二次谐波产生之类的光学参数相互作用。 通过在液膜中设置的电场实现“相位匹配”的参数输出的优化（调谐），该场具有沿着薄膜中的光波传播方向的空间周期性。 参数输出的替代或进一步优化是通过原位改变液膜的厚度来实现的。
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公开(公告)号：US06498873B1
公开(公告)日：2002-12-24
申请号：US09693787
申请日：2000-10-20
申请人： Sethumadhavan Chandrasekhar , Andrew Gomperz Dentai , Barry Franklin Levine , Thomas Gordon Beck Mason , Ola Sjolund
发明人： Sethumadhavan Chandrasekhar , Andrew Gomperz Dentai , Barry Franklin Levine , Thomas Gordon Beck Mason , Ola Sjolund
IPC分类号： G02B642
CPC分类号： G02B6/4204 , G02B6/12004 , G02B6/1228 , G02B6/305
摘要： An optical device for coupling an optical signal to an optical detector is disclosed. The optical device includes a mode compression section disposed between an optical input source and a photodetector, which enables efficient coupling between the optical input source and the photodetector.
摘要翻译： 公开了一种用于将光学信号耦合到光学检测器的光学装置。 光学装置包括设置在光学输入源和光电检测器之间的模式压缩部分，其能够在光学输入源和光电检测器之间有效耦合。
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6.发明授权公开(公告)号：US06294414B1
公开(公告)日：2001-09-25
申请号：US09564769
申请日：2000-05-04
IPC分类号： H01L21338
CPC分类号： H01L31/03046 , H01L21/2233 , H01L29/205 , H01L31/0368 , H01L31/103 , Y02E10/544
摘要： This invention is predicated upon applicants'discovery that the quality of high performance heterointerface devices having diffused junction depends significantly on the rate of cooling after diffusing the junctions. Use of the method to fabricate a high performance photodiode is described.
摘要翻译： 本发明基于申请人的发现，具有扩散结的高性能异质界面装置的质量在扩散结之后显着地取决于冷却速率。 描述了制造高性能光电二极管的方法的使用。
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7.发明授权
公开(公告)号：US5966622A
公开(公告)日：1999-10-12
申请号：US947175
申请日：1997-10-08
IPC分类号： H01L31/04 , H01L21/18 , H01L21/20 , H01L31/18 , H01L21/762
CPC分类号： H01L31/18 , H01L21/187 , Y10S438/977
摘要： A process for device fabrication is disclosed in which two substrates having different crystal lattices are bound together. In the process a layer of material that has a crystal lattice similar to the crystal lattices of the first substrate is formed on the surface of the second substrate. The thickness of the layer is about 1 nm to about 2 nm. The layer of material is then bound to the surface of the first substrate.
摘要翻译： 公开了一种用于器件制造的方法，其中具有不同晶格的两个衬底结合在一起。 在该过程中，在第二基板的表面上形成具有与第一基板的晶格类似的晶格的材料层。 该层的厚度为约1nm至约2nm。 然后将该层材料结合到第一基底的表面。
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