公开(公告)号：US08309205B2

公开(公告)日：2012-11-13

申请号：US11995067

申请日：2006-07-07

申请人： Wilhelmus Gerarda Maria Nelissen ,  Herman Philip Godfried ,  Evert Pieter Houwman ,  Paulus Adrianus Cornelis Kriele ,  Johannes Cornelis Lamers ,  Gerrit Jan Pels ,  Bartholomeus Mathias Van Oerle ,  Paulus Geradus Hendricus Maria Spaay ,  Mark Robin McClymont ,  Christopher John Howard Wort ,  Geoffrey Alan Scarsbrook

发明人： Wilhelmus Gerarda Maria Nelissen ,  Herman Philip Godfried ,  Evert Pieter Houwman ,  Paulus Adrianus Cornelis Kriele ,  Johannes Cornelis Lamers ,  Gerrit Jan Pels ,  Bartholomeus Mathias Van Oerle ,  Paulus Geradus Hendricus Maria Spaay ,  Mark Robin McClymont ,  Christopher John Howard Wort ,  Geoffrey Alan Scarsbrook

IPC分类号： B32B3/00

CPC分类号： G02B1/02 ,  B23K26/0006 ,  B23K26/3576 ,  B23K26/361 ,  B23K26/40 ,  B23K2103/50 ,  G02B3/00 ,  Y10T428/24355 ,  Y10T428/24479 ,  Y10T428/24612 ,  Y10T428/24628

摘要： A single crystal diamond element having a convex surface is disclosed, the convex surface including a spherical segment for which the maximum peak to valley deviation from a perfect spherical surface is less than about 5 μm. Alternatively or in addition, the RMS deviation from a perfect spherical surface may be less than about 500 nm, or the RMS roughness less than about 30 nm. A single crystal diamond element with a radius of curvature less than about 20 mm is also disclosed. In one aspect a single crystal diamond element having a conical half-angle greater than about 10° is described. The invention also provides a method for forming a rotationally symmetrical surface on a single crystal diamond element, comprising rotating the element about a first axis, applying a laser beam to the element in a direction perpendicular to the first axis, and translating the laser beam in two dimensions in a plane perpendicular to the direction of the beam. If the two-dimensional path follows the arc of a circle a spherical surface may be formed. The invention also provides improving a spherical surface on a single crystal diamond element by pressing a rapidly rotating cup onto a slowly rotating element. The element may be a lens, in particular a solid immersion lens.

摘要翻译： 公开了具有凸面的单晶金刚石元件，该凸面包括与完美球面的最大峰谷偏差小于约5μm的球形段。 或者或另外，与完美球形表面的RMS偏差可以小于约500nm，或RMS粗糙度小于约30nm。 还公开了具有小于约20mm的曲率半径的单晶金刚石元件。 在一个方面，描述了具有大于约10°的锥形半角的单晶金刚石元件。 本发明还提供了一种用于在单晶金刚石元件上形成旋转对称表面的方法，包括围绕第一轴线旋转元件，在垂直于第一轴线的方向上向元件施加激光束，并将激光束 在垂直于光束方向的平面内的两个尺寸。 如果二维路径遵循圆弧，则可以形成球面。 本发明还通过将快速旋转的杯按压到缓慢旋转的元件上来改善单晶金刚石元件上的球形表面。 元件可以是透镜，特别是固体浸没透镜。

公开(公告)号：US20090022951A1

公开(公告)日：2009-01-22

申请号：US11995067

申请日：2006-07-07

申请人： Wilhelmus Gerarda Maria Nelissen ,  Herman Philip Godfried ,  Evert Pieter Houwman ,  Paulus Adrianus Cornelis Kriele ,  Johannes Cornelis Lamers ,  Gerrit Jan Pels ,  Bartholomeus Mathias Van Oerle ,  Paulus Gerardus Hendricus Maria Spaay ,  Mark Robin McClymont ,  Christopher John Howard Wort ,  Geoffrey Alan Scarsbrook

发明人： Wilhelmus Gerarda Maria Nelissen ,  Herman Philip Godfried ,  Evert Pieter Houwman ,  Paulus Adrianus Cornelis Kriele ,  Johannes Cornelis Lamers ,  Gerrit Jan Pels ,  Bartholomeus Mathias Van Oerle ,  Paulus Gerardus Hendricus Maria Spaay ,  Mark Robin McClymont ,  Christopher John Howard Wort ,  Geoffrey Alan Scarsbrook

IPC分类号： G02B1/02 ,  C01B31/06 ,  B23K26/38 ,  B24B1/00 ,  G11B7/00

CPC分类号： G02B1/02 ,  B23K26/0006 ,  B23K26/3576 ,  B23K26/361 ,  B23K26/40 ,  B23K2103/50 ,  G02B3/00 ,  Y10T428/24355 ,  Y10T428/24479 ,  Y10T428/24612 ,  Y10T428/24628

摘要： A single crystal diamond element having a convex surface is disclosed, the convex surface including a spherical segment for which the maximum peak to valley deviation from a perfect spherical surface is less than about 5 μm. Alternatively or in addition, the RMS deviation from a perfect spherical surface may be less than about 500 nm, or the RMS roughness less than about 30 nm. A single crystal diamond element with a radius of curvature less than about 20 mm is also disclosed. In one aspect a single crystal diamond element having a conical half-angle greater than about 10° is described. The invention also provides a method for forming a rotationally symmetrical surface on a single crystal diamond element, comprising rotating the element about a first axis, applying a laser beam to the element in a direction perpendicular to the first axis, and translating the laser beam in two dimensions in a plane perpendicular to the direction of the beam. If the two-dimensional path follows the arc of a circle a spherical surface may be formed. The invention also provides improving a spherical surface on a single crystal diamond element by pressing a rapidly rotating cup onto a slowly rotating element. The element may be a lens, in particular a solid immersion lens.

摘要翻译： 公开了具有凸面的单晶金刚石元件，所述凸面包括与完美球面的最大峰谷偏差小于约5μm的球形段。 或者或另外，与完美球形表面的RMS偏差可以小于约500nm，或RMS粗糙度小于约30nm。 还公开了具有小于约20mm的曲率半径的单晶金刚石元件。 在一个方面，描述了具有大于约10°的锥形半角的单晶金刚石元件。 本发明还提供了一种用于在单晶金刚石元件上形成旋转对称表面的方法，包括围绕第一轴线旋转元件，在垂直于第一轴线的方向上向元件施加激光束，并将激光束 在垂直于光束方向的平面内的两个尺寸。 如果二维路径遵循圆弧，则可以形成球面。 本发明还通过将快速旋转的杯按压到缓慢旋转的元件上来改善单晶金刚石元件上的球形表面。 元件可以是透镜，特别是固体浸没透镜。

公开(公告)号：US08462314B2

公开(公告)日：2013-06-11

申请号：US12222123

申请日：2008-08-01

申请人： Marcel Beckers ,  Marcus Adrianus Van De Kerkhof ,  Siebe Landheer ,  Wouterus Johannes Petrus Maria Maas ,  Jeroen Peter Johannes Bruijstens ,  Ivo Adam Johannes Thomas ,  Franciscus Johannes Joseph Janssen ,  Bartholomeus Mathias Van Oerle

发明人： Marcel Beckers ,  Marcus Adrianus Van De Kerkhof ,  Siebe Landheer ,  Wouterus Johannes Petrus Maria Maas ,  Jeroen Peter Johannes Bruijstens ,  Ivo Adam Johannes Thomas ,  Franciscus Johannes Joseph Janssen ,  Bartholomeus Mathias Van Oerle

IPC分类号： G03B27/52 ,  G03B27/42 ,  G03F7/20

CPC分类号： G03F7/70341 ,  G03F7/70808 ,  G03F7/70958

摘要： A lithographic apparatus includes a projection system configured to project a patterned radiation beam onto a target portion of a substrate. The apparatus also includes a barrier member, surrounding a space between the projection system and, in use, the substrate, to define in part with the projection system a reservoir for liquid. A radially outer surface of the barrier member facing a portion of projection system and a radially outer surface of the portion of the projection system facing the barrier member each have a liquidphobic outer surface. The liquidphobic outer surface of the barrier member and/or the liquidphobic outer surface of the portion of the projection system has an inner edge that defines in part the reservoir.

公开(公告)号：US20090059192A1

公开(公告)日：2009-03-05

申请号：US12222123

申请日：2008-08-01

申请人： Marcel Beckers ,  Marcus Adrianus Van De Kerkhof ,  Siebe Landheer ,  Wouterus Johannes Petrus Maas ,  Jeroen Peter Johannes Bruijstens ,  Ivo Adam Johannes Thomas ,  Franciscus Johannes Joseph Janssen ,  Bartholomeus Mathias Van Oerle

发明人： Marcel Beckers ,  Marcus Adrianus Van De Kerkhof ,  Siebe Landheer ,  Wouterus Johannes Petrus Maas ,  Jeroen Peter Johannes Bruijstens ,  Ivo Adam Johannes Thomas ,  Franciscus Johannes Joseph Janssen ,  Bartholomeus Mathias Van Oerle

IPC分类号： G03B27/52

CPC分类号： G03F7/70341 ,  G03F7/70808 ,  G03F7/70958

摘要： A lithographic apparatus includes a projection system configured to project a patterned radiation beam onto a target portion of a substrate. The apparatus also includes a barrier member, surrounding a space between the projection system and, in use, the substrate, to define in part with the projection system a reservoir for liquid. A radially outer surface of the barrier member facing a portion of projection system and a radially outer surface of the portion of the projection system facing the barrier member each have a liquidphobic outer surface. The liquidphobic outer surface of the barrier member and/or the liquidphobic outer surface of the portion of the projection system has an inner edge that defines in part the reservoir.

摘要翻译： 光刻设备包括被配置为将图案化的辐射束投影到基板的目标部分上的投影系统。 该装置还包括阻挡构件，围绕投影系统之间的空间，并且在使用中围绕基板，以部分地与投影系统限定用于液体的储存器。 面向突出系统的一部分的阻挡构件的径向外表面和面向阻挡构件的突出系统的部分的径向外表面各自具有液面外表面。 屏障部件和/或投影系统部分的液面外表面的液面外表面具有限定部分储存器的内边缘。