摘要:
Laser systems for laser scribing are provided. The systems include a remote module coupled to a laser module through a cable. The remote module includes a controller and a chiller. The laser module has at least a laser source and a cooling plate. The laser module is operable to remove material from at least a portion of a workpiece. The systems also include a plurality of termination modules coupled to the laser module through a plurality of optical fibers. Each of the termination modules includes a mechanical interface. The mechanical interface is coupled to a respective optical fiber. The systems further include a plurality of scanning devices operable to control a position of the output from the laser. Each of the scanning devices is coupled to a respective mechanical interface.
摘要:
The present invention provides systems, methods, and apparatus for monitoring and controlling a slew rate of a voltage signal provided to a PZT capacitor of a print head. The system includes a digital driver circuit adapted to generate a signal indicating a nominal slew rate, a probe circuit for measuring a firing pulse voltage signal provided to the capacitor, a comparator coupled to the digital driver and the probe circuit comparing a measured slew rate with the nominal slew rate generating a signal indicating a difference between the measured slew rate and the nominal slew rate, an analog driver circuit coupled to the comparator adapted to adjust the slew rate of the voltage signal in response to the difference signal, and an analog/digital converter adapted to sample the voltage signal output from the probe circuit and to provide an output for diagnostic purposes. Numerous other features and aspects are disclosed.
摘要:
A method and apparatus for sputter depositing a film on a substrate is disclosed. By providing a superimposed RF bias over a DC bias, plasma ionization is increased. In order to increase the resistive load across the substrate, an impedance circuit is provided between the substrate and the susceptor. The impedance circuit allows an insulating substrate to effectively function as an anode and connect to ground.
摘要:
Targeted temperature compensation for use with a chemical vapor deposition (CVD) apparatus. A localized temperature monitoring system is configured to provide localized temperature information representing surface temperatures of portions of the one or more wafers on a wafer carrier while the wafer carrier is rotating in a CVD process. A temperature profiling system is configured to generate a temperature profile that is indicative of localized cold spots on a surface of the one or more wafers. The temperature profile is based on the localized temperature information. A targeted heating system is configured to selectively apply localized heat to the localized cold spots dynamically based on the temperature profile such that a thermal distribution of the surface of the one or more wafers is made more uniform while a CVD process is carried out on the CVD apparatus.
摘要:
Methods and systems for laser-scribing lines within a controlled separation from previously-formed lines are provided. A laser-scribing method includes providing a workpiece having a plurality of previously-scribed lines, forming a first adjacent scribed line adjacent to a first previously-scribed line, using an imaging device to measure a position of a previously-scribed line, using the imaging device to measure a position of the first adjacent scribed line, and using the measured positions to control the formation of a second adjacent scribed line adjacent to a second previously-scribed line.
摘要:
Systems, methods and apparatus are provided for reliability testing an inkjet printing system. The invention includes a testing interface, a print head coupled to the testing interface, printer control electronics coupled to the testing interface and coupled to the print head via the testing interface, the printer control electronics adapted to transmit a firing voltage signal through the testing interface to the print head, and a measurement apparatus coupled to the testing interface. The testing interface includes an input path for receiving the firing voltage signal from the printer control electronics, the input path splitting into a first path coupled to the print head and a second path coupled to the measurement apparatus. Numerous other aspects are disclosed.
摘要:
The invention provides methods, systems, and drivers for controlling an inkjet printing system. The driver may include logic including a processor, memory coupled to the logic, and a fire pulse generator circuit coupled to the logic. The fire pulse generator may include a connector to facilitate coupling the driver to a print head. The fire pulse generator circuit may also include a fixed current source circuit adapted to generate a fire pulse with a constant slew rate that facilitates easy adjustment of ink drop size. The logic is adapted to receive an image and to convert the image to an image data file. The image data file is adapted to be used by the driver to trigger the print head to deposit ink into pixel wells on a substrate as the substrate is moved in a print direction. Numerous other aspects are disclosed.
摘要:
Methods and apparatus for inkjet inkjet drop positioning are provided. A first method includes determining an intended deposition location of an ink drop on a substrate, depositing the ink drop on the substrate using an inkjet printing system, detecting a deposited location of the deposited ink drop on the substrate, comparing the deposited location to the intended location, determining a difference between the deposited location and the intended location, and compensating for the difference between the deposited location and the intended location by adjusting a parameter of an inkjet printing system. Numerous other aspects are provided.
摘要:
The present invention provides systems, methods, and apparatus for monitoring and controlling a slew rate of a voltage signal provided to a PZT capacitor of a print head. The system includes a digital driver circuit adapted to generate a signal indicating a nominal slew rate, a probe circuit for measuring a firing pulse voltage signal provided to the capacitor, a comparator coupled to the digital driver and the probe circuit comparing a measured slew rate with the nominal slew rate generating a signal indicating a difference between the measured slew rate and the nominal slew rate, an analog driver circuit coupled to the comparator adapted to adjust the slew rate of the voltage signal in response to the difference signal, and an analog/digital converter adapted to sample the voltage signal output from the probe circuit and to provide an output for diagnostic purposes. Numerous other features and aspects are disclosed.
摘要:
A continuity test system adapted for testing individual contact pins within a flat panel test system is disclosed. The method and apparatus is designed to test continuity of individual contact pins via connection of a contact test pad assembly to a plurality of pins within a user defined pin arrangement. The contact test pad assembly has a plurality of contact points mounted thereon adapted to be in communication with individual contact pins within the defined pin arrangement. The system uses a test circuit in communication with the contact test pad assembly that is in communication with a power source and a controller that receives continuity information from the circuit and provides results to a user.