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公开(公告)号:US08210039B2
公开(公告)日:2012-07-03
申请号:US12398457
申请日:2009-03-05
Applicant: Felix Rudolf , Roberto Frosio , Pascal Zwahlen , Bertrand Dutoit
Inventor: Felix Rudolf , Roberto Frosio , Pascal Zwahlen , Bertrand Dutoit
IPC: G01C19/56
CPC classification number: G01C19/5642 , G01C19/56
Abstract: A vibrating gyroscope includes a proof mass (1); a spring suspension system (5, 6, 7, 8; 9) for suspending the proof mass; an electrical drive mechanism for vibrating the proof mass along a drive axis (x); and electrodes (2, 3) for building together with at least a part of the proof mass (1) a capacitance system for detecting moves of the proof mass along a sense axis (z) perpendicular to the drive axis. The gyroscope is arranged so that quadrature forces generate displacements of the proof mass without substantially displacing the neutral point (10) of the proof mass along the sense axis (z). This may be achieved by tilting the proof mass while keeping its neutral point at a constant position along the sense axis, or by applying a constant electrostatic force.
Abstract translation: 振动陀螺仪包括检测质量块(1); 弹簧悬挂系统(5,6,7,8; 9),用于悬挂所述检验块; 电驱动机构,用于沿着驱动轴线(x)振动所述检验质量块; 以及电极(2,3),用于与至少一部分证明物质(1)一起构建用于检测沿着垂直于驱动轴的感测轴线(z)的检测物质的移动的电容系统。 陀螺仪布置成使得正交力产生检测质量的位移,而基本上不使检测质量块的中性点(10)沿着感测轴线(z)移位。 这可以通过使检测质量倾斜,同时将其中性点保持在沿着感测轴的恒定位置,或通过施加恒定的静电力来实现。
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公开(公告)号:US07170140B2
公开(公告)日:2007-01-30
申请号:US11070786
申请日:2005-03-02
Applicant: Bertrand Dutoit , Sophie Birling , Jean-Michel Stauffer , Yves Dupraz
Inventor: Bertrand Dutoit , Sophie Birling , Jean-Michel Stauffer , Yves Dupraz
IPC: H01L29/82
CPC classification number: G01P15/18 , G01P15/0802 , G01P15/125 , G01P2015/0828
Abstract: Microelectromechanical system (MEMS) comprising: an active part (5) comprising an electromechanical device (28), at least one base (6) for fastening said microsystem on a support (8), at least one fastener (21, 21′) fastening said active part (5) to said at least one base (6) and allowing a displacement of said active part (5) relatively to said at least one base (6) along an axis (Z) more or less perpendicular to the plane of said support (8) when said microsystem is fastened onto said support (8), bumper elements (27, 27′, 37′) for limiting the amplitude of the displacements of said active part (5) relatively to said at least one base (6) along said perpendicular axis (Z). The active part (5) being capable of moving relatively to the base (6) to which it is fastened, it is isolated from any mechanical constraint that could be sustained by the base (6), in particular torsion or flexion due to it being fastened onto a support (8). On the other hand, since the movements of the active part (5) are limited by the bumper elements (27, 37, 27′, 37′), it can be guaranteed thanks to the invention that the fastener or fasteners (21, 21′) will not be stretched beyond their elasticity range, thus avoiding their irreversible deformation and/or their rupture.
Abstract translation: 微机电系统(MEMS)包括:包括机电装置(28)的活动部分(5),用于将所述微系统紧固在支撑件(8)上的至少一个基座(6),至少一个紧固件(21,21'), 所述活动部分(5)到所述至少一个基座(6)并且允许所述有源部分(5)相对于所述至少一个基座(6)沿着轴线(Z)移位或多或少垂直于 当所述微系统被固定到所述支撑件(8)上时,所述支撑件(8),缓冲元件(27,27',37'),用于限制所述有效部件(5)相对于所述至少一个基座 6)沿着所述垂直轴线(Z)。 有源部分(5)能够相对于其被紧固的基座(6)移动,它与由基座(6)可以承受的任何机械约束隔离,特别是由于它是扭转或屈曲 固定在支架(8)上。 另一方面,由于活动部件(5)的运动受到保险杠元件(27,37,27',37')的限制,因此可以确保紧固件或紧固件(21,21 ')不会超出其弹性范围,从而避免其不可逆变形和/或其破裂。
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公开(公告)号:US08220328B2
公开(公告)日:2012-07-17
申请号:US12397744
申请日:2009-03-04
Applicant: Felix Rudolf , Roberto Frosio , Pascal Zwahlen , Bertrand Dutoit
Inventor: Felix Rudolf , Roberto Frosio , Pascal Zwahlen , Bertrand Dutoit
IPC: G01P15/00
CPC classification number: G01P15/14 , G01C19/5726 , G01C19/5755 , G01P15/125 , G01P15/131 , G01P2015/0828
Abstract: A method for evaluating and/or compensating the acceleration offset in a combined accelerometer and gyroscope, wherein the evaluation or compensation is based on a quadrature signal delivered by the accelerometer.
Abstract translation: 一种用于评估和/或补偿组合加速度计和陀螺仪中的加速度偏移的方法,其中评估或补偿基于由加速度计传递的正交信号。
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公开(公告)号:US20090223277A1
公开(公告)日:2009-09-10
申请号:US12398457
申请日:2009-03-05
Applicant: Felix Rudolf , Roberto Frosio , Pascal Zwahlen , Bertrand Dutoit
Inventor: Felix Rudolf , Roberto Frosio , Pascal Zwahlen , Bertrand Dutoit
CPC classification number: G01C19/5642 , G01C19/56
Abstract: A vibrating gyroscope comprising: a proof mass (1); a spring suspension system (5, 6, 7, 8; 9) for suspending the proof mass; an electrical drive mechanism for vibrating the proof mass along a drive axis (x); electrodes (2, 3) for building together with at least a part of the proof mass (1) a capacitance system for detecting moves of the proof mass along a sense axis (z) perpendicular to the drive axis. The gyroscope is arranged so that quadrature forces generate displacements of the proof mass without substantially displacing the neutral point (10) of the proof mass along the sense axis (z). This may be achieved by tilting the proof mass while keeping its neutral point at a constant position along the sense axis, or by applying a constant electrostatic force.
Abstract translation: 一种振动陀螺仪,包括:检验质量块(1); 弹簧悬挂系统(5,6,7,8; 9),用于悬挂所述检验块; 电驱动机构,用于沿着驱动轴线(x)振动所述检验质量块; 用于与至少一部分证明物质(1)一起构建电容系统的电极(2,3),用于检测沿着垂直于驱动轴的感测轴线(z)的检测质量块的移动。 陀螺仪布置成使得正交力产生检测质量的位移,而基本上不使检测质量块的中性点(10)沿着感测轴线(z)移位。 这可以通过使检测质量倾斜,同时将其中性点保持在沿着感测轴的恒定位置,或通过施加恒定的静电力来实现。
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公开(公告)号:US20050194652A1
公开(公告)日:2005-09-08
申请号:US11070786
申请日:2005-03-02
Applicant: Bertrand Dutoit , Sophie Birling , Jean-Michel Stauffer , Yves Dupraz
Inventor: Bertrand Dutoit , Sophie Birling , Jean-Michel Stauffer , Yves Dupraz
IPC: G01P1/00 , G01P15/08 , G01P15/125 , G01P15/18 , H01L29/84
CPC classification number: G01P15/18 , G01P15/0802 , G01P15/125 , G01P2015/0828
Abstract: Microelectromechanical system (MEMS) comprising: an active part (5) comprising an electromechanical device (28), at least one base (6) for fastening said microsystem on a support (8), at least one fastener (21, 21′) fastening said active part (5) to said at least one base (6) and allowing a displacement of said active part (5) relatively to said at least one base (6) along an axis (Z) more or less perpendicular to the plane of said support (8) when said microsystem is fastened onto said support (8), bumper elements (27, 27′, 37′) for limiting the amplitude of the displacements of said active part (5) relatively to said at least one base (6) along said perpendicular axis (Z). The active part (5) being capable of moving relatively to the base (6) to which it is fastened, it is isolated from any mechanical constraint that could be sustained by the base (6), in particular torsion or flexion due to it being fastened onto a support (8). On the other hand, since the movements of the active part (5) are limited by the bumper elements (27, 37, 27′, 37′), it can be guaranteed thanks to the invention that the fastener or fasteners (21, 21′) will not be stretched beyond their elasticity range, thus avoiding their irreversible deformation and/or their rupture.
Abstract translation: 微机电系统(MEMS)包括:包括机电装置(28)的活动部分(5),用于将所述微系统紧固在支撑件(8)上的至少一个基座(6),至少一个紧固件(21,21'), 所述活动部分(5)到所述至少一个基座(6)并且允许所述有源部分(5)相对于所述至少一个基座(6)沿着轴线(Z)移位或多或少垂直于 当所述微系统被固定到所述支撑件(8)上时,所述支撑件(8),缓冲元件(27,27',37'),用于限制所述有效部件(5)相对于所述至少一个基座 6)沿着所述垂直轴线(Z)。 有源部分(5)能够相对于其被紧固的基座(6)移动,它与由基座(6)可以承受的任何机械约束隔离,特别是由于它是扭转或屈曲 固定在支架(8)上。 另一方面,由于活动部件(5)的运动受到保险杠元件(27,37,27',37')的限制,因此可以确保紧固件或紧固件(21,21 ')不会超出其弹性范围,从而避免其不可逆变形和/或其破裂。
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公开(公告)号:US20090223276A1
公开(公告)日:2009-09-10
申请号:US12397744
申请日:2009-03-04
Applicant: Felix Rudolf , Roberto Frosio , Pascal Zwahlen , Bertrand Dutoit
Inventor: Felix Rudolf , Roberto Frosio , Pascal Zwahlen , Bertrand Dutoit
CPC classification number: G01P15/14 , G01C19/5726 , G01C19/5755 , G01P15/125 , G01P15/131 , G01P2015/0828
Abstract: A method for evaluating and/or compensating the acceleration offset in a combined accelerometer and gyroscope, wherein the evaluation or compensation is based on a quadrature signal delivered by the accelerometer.
Abstract translation: 一种用于评估和/或补偿组合加速度计和陀螺仪中的加速度偏移的方法,其中评估或补偿基于由加速度计传递的正交信号。
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公开(公告)号:US06484586B1
公开(公告)日:2002-11-26
申请号:US09424924
申请日:2000-02-14
Applicant: Bertrand Dutoit , Andreas Friedrich , Kurt Hug , Radivojc Popovic
Inventor: Bertrand Dutoit , Andreas Friedrich , Kurt Hug , Radivojc Popovic
IPC: G01L910
CPC classification number: G01L9/007
Abstract: A differential pressure transducer has a measurement chamber which is divided by a membrane into first and second measurement spaces which can be exposed to first and second pressures whereby differential pressure causes deflection of the membrane from its neutral position. A deflection sensor measures the deflection of the membrane and produces a deflection signal. An electromagnet arrangement produces a magnetic force which compensates for the deflection force which is caused by the differential pressure. The coil current for producing the magnetic compensation force represents a measure of the differential pressure.
Abstract translation: 压差传感器具有测量室,该测量室由膜分成第一和第二测量空间,其可暴露于第一和第二压力,由此压差导致膜从其中性位置偏转。 偏转传感器测量膜的偏转并产生偏转信号。 电磁铁装置产生补偿由压差引起的偏转力的磁力。 用于产生磁补偿力的线圈电流表示差压的量度。
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