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    Step and flash imprint lithography
    1.
    发明申请
    Step and flash imprint lithography 审中-公开
    步进和闪光刻印光刻

    公开(公告)号：US20050236739A1

    公开(公告)日：2005-10-27

    申请号：US11062420

    申请日：2005-02-22

    申请人： Carlton Willson ,  Matthew Colburn

    发明人： Carlton Willson ,  Matthew Colburn

    IPC分类号： G03F7/038 ,  B29C31/00 ,  B81C1/00 ,  G03F7/00 ,  H01L21/027 ,  H01L21/30 ,  H01L21/302 ,  H01L21/3065 ,  H05K3/06

    CPC分类号： B82Y10/00 ,  B29C43/003 ,  B29C43/021 ,  B29C2043/025 ,  B82Y40/00 ,  G03F7/0002 ,  H05K3/061 ,  Y10S977/887 ,  Y10S977/897

    摘要： A method of forming a relief image in a structure comprising a substrate and a transfer layer formed thereon comprises covering the transfer layer with a polymerizable fluid composition, and then contacting the polymerizable fluid composition with a mold having a relief structure formed therein such that the polymerizable fluid composition fills the relief structure in the mold. The polymerizable fluid composition is subjected to conditions to polymerize polymerizable fluid composition and form a solidified polymeric material therefrom on the transfer layer. The mold is then separated from the solid polymeric material such that a replica of the relief structure in the mold is formed in the solidified polymeric material; and the transfer layer and the solidified polymeric material are subjected to an environment to selectively etch the transfer layer relative to the solidified polymeric material such that a relief image is formed in the transfer layer.

    摘要翻译： 在包括基板和形成在其上的转印层的结构中形成浮雕图像的方法包括用可聚合流体组合物覆盖转印层，然后使可聚合流体组合物与其中形成有浮雕结构的模具接触，使得可聚合的 流体组合物填充模具中的浮雕结构。 可聚合流体组合物经受聚合可聚合流体组合物并在转移层上形成固化的聚合物材料的条件。 然后将模具与固体聚合物材料分离，使得在固化的聚合物材料中形成模具中的浮雕结构的复制品; 并且转印层和固化的聚合物材料经受环境以相对于固化的聚合物材料选择性地蚀刻转印层，使得在转印层中形成浮雕图像。