公开(公告)号：US06217427B1

公开(公告)日：2001-04-17

申请号：US09286430

申请日：1999-04-06

申请人： Christopher J. Case ,  Carlye B. Case

发明人： Christopher J. Case ,  Carlye B. Case

IPC分类号： B24B2100

CPC分类号： B24B37/04 ,  B24B21/04 ,  B24B49/04

摘要： A tool for the linear polishing of substrates includes an endless belt of continuous strength wrapped substantially as a helix of predetermined length and width with a 180 degree twist along the length to increase by a factor of 2× the time interval between which belt changes need to be made because of wear-and-tear, significantly reducing the costs associated with the polishing because of reduced down time. In a preferred embodiment for the chemical-mechanical polishing of silicon wafer substrates used in fabricating integrated circuits, the endless belt is constructed as a Mobius strip of a rubberized, urethane composition to be flexible, but yet strong enough to withstand the applied pressure between the polishing belt and the substrate.

摘要翻译： 用于基材的线性抛光的工具包括连续强度的环形带，其基本上以预定长度和宽度的螺旋缠绕，沿着长度以180度扭转，以增加皮带变化所需的时间间隔的2倍 由于磨损而造成的，由于减少了停机时间，显着降低了与抛光相关的成本。 在用于制造集成电路的硅晶片衬底的化学机械抛光的优选实施例中，环形带被构造为橡胶化的聚氨酯组合物的莫比乌斯带，其是柔性的，但是足够坚固以承受施加的压力 抛光带和基板。

公开(公告)号：US5008217A

公开(公告)日：1991-04-16

申请号：US534772

申请日：1990-06-08

申请人： Christopher J. Case ,  Kin P. Cheung ,  Ruichen Liu ,  Ronald J. Schutz ,  Richard S. Wagner

发明人： Christopher J. Case ,  Kin P. Cheung ,  Ruichen Liu ,  Ronald J. Schutz ,  Richard S. Wagner

IPC分类号： H01L21/28 ,  H01L21/285

CPC分类号： H01L21/28556

摘要： Direct contact to shallow junctions in integrated circuits and interconnection between these contacts is achievable by utilizing a specific aluminum CVD process. In this process the aluminum is deposited utilizing a triisobutyl aluminum precursor onto a substrate having a nucleation layer, e.g. a titanium nitride layer. By appropriate choice of this nucleation layer to control the nucleation of the depositing aluminum, suitable contact is made while avoiding void defects present in the absence of such layer.

公开(公告)号：US06470961B1

公开(公告)日：2002-10-29

申请号：US10041203

申请日：2002-01-08

申请人： Christopher J. Case

发明人： Christopher J. Case

IPC分类号： F28F900

CPC分类号： F28F9/002 ,  B60K11/04 ,  F01P2005/025 ,  F01P2070/52 ,  F28D1/0435 ,  F28D2021/0084 ,  F28D2021/0094

摘要： A condenser, radiator and fan assembly module for providing modular installation and simplified individual servicing of the components thereof. The module includes a condenser, a radiator, a fan assembly, and a module frame having a set of channels for respectively receiving therein each of the condenser, radiator and fan assembly. Each of the condenser, the radiator and the fan assembly are slidably received into its respective channel. A floor of the module frame may be disassembled to facilitate individual sliding removal of any of the condenser, radiator or fan assembly. To facilitate sliding installation and removal of the radiator, the coolant inlet fitting and the coolant outlet fitting are each threadably engaged into a respective threaded opening in the tank of the radiator.

摘要翻译： 冷凝器，散热器和风扇组件模块，用于提供其组件的模块化安装和简化的单独维修。 模块包括冷凝器，散热器，风扇组件和具有一组通道的模块框架，用于分别容纳冷凝器，散热器和风扇组件中的每一个。 冷凝器，散热器和风扇组件中的每一个可滑动地容纳在其相应的通道中。 可以拆卸模块框架的底板以便于任何冷凝器，散热器或风扇组件的单独滑动移除。 为了便于散热器的滑动安装和拆卸，冷却剂入口配件和冷却剂出口配件各自螺纹地接合到散热器的槽中的相应的螺纹开口中。