中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

7 records (took 0.014 seconds)

    MEMS device and process
    1.
    发明授权
    MEMS device and process 有权
    MEMS器件和工艺

    公开(公告)号：US08841737B2

    公开(公告)日：2014-09-23

    申请号：US12678884

    申请日：2008-09-18

    Applicant: Richard Ian Laming ,  Colin Robert Jenkins

    Inventor： Richard Ian Laming ,  Colin Robert Jenkins

    IPC: H01L29/84 ,  H01L21/306 ,  B81B3/00 ,  H04R19/00

    CPC classification number: B81B3/0072 ,  B81B2201/0257 ,  H04R19/005

    Abstract: A MEMS comprises a back-plate (7) having an inner portion (7a) and an outer portion (7b), the inner portion (7a) connected to the outer portion (7b) by a sidewall (7c). A raised section or anchor ring (60) is formed in the outer portion (7b) of the back-plate, in a region of the back-plate near the inner perimeter of the outer portion. The anchor ring may comprise angled sidewalls. The thickness of the back-plate may be greater than the thickness of the material supporting the anchor ring. Embodiments are also disclosed in which a membrane comprises a raised portion and an outer portion connected by an angled sidewall.

    Abstract translation: MEMS包括具有内部部分（7a）和外部部分（7b）的背板（7），内部部分（7a）通过侧壁（7c）连接到外部部分（7b）。 在背板的外周部的附近的区域，在背板的外侧部分（7b）上形成有凸起部分或锚定环（60）。 锚环可以包括成角度的侧壁。 背板的厚度可以大于支撑锚环的材料的厚度。 还公开了一种实施例，其中膜包括凸起部分和通过成角度侧壁连接的外部部分。

    MEMS device and process
    2.
    发明授权
    MEMS device and process 有权
    MEMS器件和工艺

    公开(公告)号：US08198715B2

    公开(公告)日：2012-06-12

    申请号：US12678922

    申请日：2008-09-18

    Applicant: Richard Ian Laming ,  Colin Robert Jenkins

    Inventor： Richard Ian Laming ,  Colin Robert Jenkins

    IPC: H01L23/02

    CPC classification number: B81B3/0072 ,  B81B2201/0257 ,  H04R19/04 ,  H04R2499/11

    Abstract: A MEMS transducer includes a substrate, a membrane layer and a back-plate layer. The membrane layer is supported by the substrate. The back-plate layer is supported by the membrane layer and includes a respective sidewall portion and a respective raised portion. One or more columns, separate from the sidewall portion of the back-plate layer, connect the back-plate layer, the membrane layer and the substrate.

    Abstract translation: MEMS换能器包括基底，膜层和背板层。 膜层由衬底支撑。 背板层由膜层支撑，并且包括相应的侧壁部分和相应的凸起部分。 与背板层的侧壁部分别的一个或多个柱连接背板层，膜层和基板。

    MEMS DEVICE AND PROCESS
    3.
    发明申请
    MEMS DEVICE AND PROCESS 有权
    MEMS器件和工艺

    公开(公告)号：US20100308425A1

    公开(公告)日：2010-12-09

    申请号：US12678884

    申请日：2008-09-18

    Applicant: Richard Ian Laming ,  Colin Robert Jenkins

    Inventor： Richard Ian Laming ,  Colin Robert Jenkins

    IPC: H01L29/84 ,  H01L21/306

    CPC classification number: B81B3/0072 ,  B81B2201/0257 ,  H04R19/005

    Abstract: A MEMS device comprises a back-plate (7) having an inner portion (7a) and an outer portion (7b), the inner portion (7a) connected to the outer portion (7b) by a sidewall (7c). A raised section or anchor ring (60) is formed in the outer portion (7b) the back-plate, in a region of the back-plate near the inner perimeter of the outer portion. The anchor ring may comprise angled sidewalls. The thickness of the back-plate may be greater than the thickness of the material supporting the anchor ring. Embodiments are also disclosed in which a membrane comprises a raised portion and an outer portion connected by an angled sidewall.

    Abstract translation: MEMS器件包括具有内部部分（7a）和外部部分（7b）的背板（7），内部部分（7a）通过侧壁（7c）连接到外部部分（7b）。 在后板的外周部的内周的区域中，在背板的外侧部分（7b）上形成有凸起部分或锚定环（60）。 锚环可以包括成角度的侧壁。 背板的厚度可以大于支撑锚环的材料的厚度。 还公开了一种实施例，其中膜包括凸起部分和通过成角度侧壁连接的外部部分。

    MEMS DEVICE AND PROCESS
    7.
    发明申请
    MEMS DEVICE AND PROCESS 有权
    MEMS器件和工艺

    公开(公告)号：US20100237447A1

    公开(公告)日：2010-09-23

    申请号：US12678922

    申请日：2008-09-18

    Applicant: Richard Ian Laming ,  Colin Robert Jenkins

    Inventor： Richard Ian Laming ,  Colin Robert Jenkins

    IPC: H01L29/84 ,  H01L21/30

    CPC classification number: B81B3/0072 ,  B81B2201/0257 ,  H04R19/04 ,  H04R2499/11

    Abstract: A MEMS transducer comprises a substrate (124). A membrane layer (120) is supported by the substrate (124). A back-plate layer (110) is supported by the membrane layer (120), said back-plate layer comprising a respective sidewall portion and a respective raised portion. One or more columns (116) are provided separate from the sidewall portion of the back-plate layer, said columns (116) connecting the back-plate layer, the membrane layer and the substrate.

    Abstract translation: MEMS换能器包括基底（124）。 膜层（120）由衬底（124）支撑。 背板层（110）由膜层（120）支撑，所述背板层包括相应的侧壁部分和相应的凸起部分。 一个或多个柱（116）设置成与背板层的侧壁部分分离，所述柱（116）连接背板层，膜层和基板。

Patent Agency Ranking