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公开(公告)号：US08841737B2
公开(公告)日：2014-09-23
申请号：US12678884
申请日：2008-09-18
IPC分类号： H01L29/84 , H01L21/306 , B81B3/00 , H04R19/00
CPC分类号： B81B3/0072 , B81B2201/0257 , H04R19/005
摘要： A MEMS comprises a back-plate (7) having an inner portion (7a) and an outer portion (7b), the inner portion (7a) connected to the outer portion (7b) by a sidewall (7c). A raised section or anchor ring (60) is formed in the outer portion (7b) of the back-plate, in a region of the back-plate near the inner perimeter of the outer portion. The anchor ring may comprise angled sidewalls. The thickness of the back-plate may be greater than the thickness of the material supporting the anchor ring. Embodiments are also disclosed in which a membrane comprises a raised portion and an outer portion connected by an angled sidewall.
摘要翻译： MEMS包括具有内部部分（7a）和外部部分（7b）的背板（7），内部部分（7a）通过侧壁（7c）连接到外部部分（7b）。 在背板的外周部的附近的区域，在背板的外侧部分（7b）上形成有凸起部分或锚定环（60）。 锚环可以包括成角度的侧壁。 背板的厚度可以大于支撑锚环的材料的厚度。 还公开了一种实施例，其中膜包括凸起部分和通过成角度侧壁连接的外部部分。
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公开(公告)号：US08198715B2
公开(公告)日：2012-06-12
申请号：US12678922
申请日：2008-09-18
IPC分类号： H01L23/02
CPC分类号： B81B3/0072 , B81B2201/0257 , H04R19/04 , H04R2499/11
摘要： A MEMS transducer includes a substrate, a membrane layer and a back-plate layer. The membrane layer is supported by the substrate. The back-plate layer is supported by the membrane layer and includes a respective sidewall portion and a respective raised portion. One or more columns, separate from the sidewall portion of the back-plate layer, connect the back-plate layer, the membrane layer and the substrate.
摘要翻译： MEMS换能器包括基底，膜层和背板层。 膜层由衬底支撑。 背板层由膜层支撑，并且包括相应的侧壁部分和相应的凸起部分。 与背板层的侧壁部分别的一个或多个柱连接背板层，膜层和基板。
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公开(公告)号：US20100308425A1
公开(公告)日：2010-12-09
申请号：US12678884
申请日：2008-09-18
IPC分类号： H01L29/84 , H01L21/306
CPC分类号： B81B3/0072 , B81B2201/0257 , H04R19/005
摘要： A MEMS device comprises a back-plate (7) having an inner portion (7a) and an outer portion (7b), the inner portion (7a) connected to the outer portion (7b) by a sidewall (7c). A raised section or anchor ring (60) is formed in the outer portion (7b) the back-plate, in a region of the back-plate near the inner perimeter of the outer portion. The anchor ring may comprise angled sidewalls. The thickness of the back-plate may be greater than the thickness of the material supporting the anchor ring. Embodiments are also disclosed in which a membrane comprises a raised portion and an outer portion connected by an angled sidewall.
摘要翻译： MEMS器件包括具有内部部分（7a）和外部部分（7b）的背板（7），内部部分（7a）通过侧壁（7c）连接到外部部分（7b）。 在后板的外周部的内周的区域中，在背板的外侧部分（7b）上形成有凸起部分或锚定环（60）。 锚环可以包括成角度的侧壁。 背板的厚度可以大于支撑锚环的材料的厚度。 还公开了一种实施例，其中膜包括凸起部分和通过成角度侧壁连接的外部部分。
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4.发明申请公开(公告)号：US20100244162A1
公开(公告)日：2010-09-30
申请号：US12678903
申请日：2008-09-18
IPC分类号： H01L29/84 , H01L21/302
CPC分类号： B81B3/0072 , B81B2201/0257 , B81B2201/0264 , B81B2203/0127 , B81B2203/019 , B81C1/00103 , B81C2201/0108 , B81C2201/0157 , H04R19/005 , H04R19/04
摘要： A MEMS device comprises a membrane layer and a back-plate layer formed over the membrane layer. The membrane layer comprises an outer portion and an inner portion raised relative to the outer portion and a sidewall for connecting the inner portion and the outer portion. The sidewall is non-orthogonal to the outer portion.
摘要翻译： MEMS器件包括膜层和形成在膜层上的背板层。 膜层包括外部部分和相对于外部部分凸起的内部部分和用于连接内部部分和外部部分的侧壁。 侧壁与外部部分不正交。
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5.发明授权公开(公告)号：US08482088B2
公开(公告)日：2013-07-09
申请号：US12678903
申请日：2008-09-18
IPC分类号： H01L29/84
CPC分类号： B81B3/0072 , B81B2201/0257 , B81B2201/0264 , B81B2203/0127 , B81B2203/019 , B81C1/00103 , B81C2201/0108 , B81C2201/0157 , H04R19/005 , H04R19/04
摘要： A MEMS device comprises a membrane layer and a back-plate layer formed over the membrane layer. The membrane layer comprises an outer portion and an inner portion raised relative to the outer portion and a sidewall for connecting the inner portion and the outer portion. The sidewall is non-orthogonal to the outer portion.
摘要翻译： MEMS器件包括膜层和形成在膜层上的背板层。 膜层包括外部部分和相对于外部部分凸起的内部部分和用于连接内部部分和外部部分的侧壁。 侧壁与外部部分不正交。
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公开(公告)号：US20110303994A1
公开(公告)日：2011-12-15
申请号：US13201093
申请日：2010-02-12
CPC分类号： B81B3/0008 , B06B1/0292 , B81B2201/0257 , B81B2203/04 , H04R19/005 , H04R19/04
摘要： A micro-electrical-mechanical system (MEMS) transducer comprises a layer of dielectric material having an electrode formed in the layer of dielectric material. A region of the layer of the dielectric material is adapted to provide a leakage path which, in use, removes unwanted charge from the layer of dielectric material.
摘要翻译： 微机电系统（MEMS）换能器包括具有在电介质材料层中形成的电极的电介质材料层。 介电材料层的区域适于提供泄漏路径，其在使用中从电介质材料层去除不想要的电荷。
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公开(公告)号：US20100237447A1
公开(公告)日：2010-09-23
申请号：US12678922
申请日：2008-09-18
CPC分类号： B81B3/0072 , B81B2201/0257 , H04R19/04 , H04R2499/11
摘要： A MEMS transducer comprises a substrate (124). A membrane layer (120) is supported by the substrate (124). A back-plate layer (110) is supported by the membrane layer (120), said back-plate layer comprising a respective sidewall portion and a respective raised portion. One or more columns (116) are provided separate from the sidewall portion of the back-plate layer, said columns (116) connecting the back-plate layer, the membrane layer and the substrate.
摘要翻译： MEMS换能器包括基底（124）。 膜层（120）由衬底（124）支撑。 背板层（110）由膜层（120）支撑，所述背板层包括相应的侧壁部分和相应的凸起部分。 一个或多个柱（116）设置成与背板层的侧壁部分分离，所述柱（116）连接背板层，膜层和基板。
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公开(公告)号：US08546170B2
公开(公告)日：2013-10-01
申请号：US12673925
申请日：2008-08-15
IPC分类号： H01L21/00
CPC分类号： H04R19/04 , B81B3/0021 , B81B3/0072 , B81B3/0094 , B81B2201/00 , B81B2201/0235 , B81B2201/0257 , B81B2201/0264 , H01L27/00 , H04R19/00 , H04R19/005 , H04R23/00 , H04R31/00 , H04R2499/11
摘要： A method of fabricating a micro-electrical-mechanical system (MEMS) transducer comprises the steps of forming a membrane (5) on a substrate (3), and forming a back-volume in the substrate. The step of forming a back-volume in the substrate comprises the steps of forming a first back-volume portion (7a) and a second back-volume portion (7b), the first back-volume portion (7a) being separated from the second back-volume portion (7b) by a step in a sidewall of the back-volume. The cross-sectional area of the second back-volume portion (7b) can be made greater than the cross-sectional area of the membrane (5), thereby enabling the back-volume to be increased without being constrained by the cross-sectional area of the membrane (5). The back-volume may comprise a third back-volume portion. The third back-volume portion enables the effective diameter of the membrane to be formed more accurately.
摘要翻译： 制造微机电系统（MEMS）换能器的方法包括以下步骤：在衬底（3）上形成膜（5），并在衬底中形成后体积。 在衬底中形成背部体积的步骤包括形成第一后部容积部分（7a）和第二后部体积部分（7b）的步骤，第一后部体积部分（7a）与第二后部体积部分 后体积部分（7b）通过后体积的侧壁中的台阶。 第二后部容积部分（7b）的横截面面积可以大于膜（5）的横截面面积，从而能够增加后部体积而不受横截面积的约束 的膜（5）。 背部容积可以包括第三后部体积部分。 第三后部体积部分能够更准确地形成膜的有效直径。
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公开(公告)号：US08497149B2
公开(公告)日：2013-07-30
申请号：US12280669
申请日：2007-02-23
IPC分类号： H01L21/00
CPC分类号： B81C1/00158 , B81B3/0027 , B81B2201/0257 , B81C1/00246 , B81C1/00904 , B81C2201/056 , G01L9/0073 , H04R3/005 , H04R19/005 , H04R19/04
摘要： A method of fabricating a micro-electrical-mechanical system (MEMS) apparatus on a substrate (10) comprises the steps of processing the substrate (10) so as to fabricate an electronic circuit (11); depositing a first electrode (15) that is operably coupled with the electronic circuit (11); depositing a membrane (16) so that it is mechanically coupled to the first electrode (15); applying a sacrificial layer (50); depositing a structural layer (18) and a second electrode (17) that is operably coupled with the electronic circuit (11) so that the sacrificial layer (50) is disposed between the membrane (16) and the structural layer (18) so as to form a preliminary structure; singulating the substrate (10); and removing the sacrificial layer (50) so as to form a MEMS structure, in which the step of singulating the substrate (10) is carried out before the step of removing the sacrificial layer (50).
摘要翻译： 在基板（10）上制造微机电系统（MEMS）装置的方法包括以下步骤：处理基板（10）以制造电子电路（11）; 沉积与电子电路（11）可操作地耦合的第一电极（15）; 沉积膜（16），使得其机械耦合到第一电极（15）; 施加牺牲层（50）; 沉积与电子电路（11）可操作地耦合的结构层（18）和第二电极（17），使得牺牲层（50）设置在膜（16）和结构层（18）之间，以便 形成初步结构; 分离衬底（10）; 以及去除所述牺牲层以形成MEMS结构，其中在去除所述牺牲层（50）的步骤之前执行对所述衬底（10）进行单分割的步骤。
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10.发明授权Arrayed waveguide grating with increased uniformity of a performance parameter 有权阵列波导光栅具有更高的性能参数均匀性公开(公告)号：US07174071B2
公开(公告)日：2007-02-06
申请号：US11231094
申请日：2005-09-20
CPC分类号： G02B6/12016 , G02B2006/12195
摘要： An arrayed waveguide grating (AWG) device comprising a substrate having a first array of waveguides optically coupled between first and second slab couplers and a second array of input-output waveguides optically coupled at first ends thereof to an input/output side of the second slab-coupler. The input/output waveguide are tapered at first end portions thereof so as to increase in width towards the second slap coupler, and the width (W) of the first ends of the input/output waveguides varies across the second array in a manner so as to increase uniformity of at least on performance parameter, for example adjacent crosstalk (AXT). In the described embodiment, the width (W) of the tapered waveguide ends increases from one side to the array of input/output waveguides to the other, so as to keep the separation(s) between the input/output waveguides.
摘要翻译： 一种阵列波导光栅（AWG）器件，包括具有光学耦合在第一和第二板状耦合器之间的第一波导阵列的衬底和在其第一端处光耦合到第二板的输入/输出侧的输入 - 输出波导的第二阵列 。。。 输入/输出波导在其第一端部处是锥形的，以便朝向第二拍子耦合器的宽度增加，并且输入/输出波导的第一端的宽度（W）在第二阵列上以如下方式变化： 以增加至少对性能参数的均匀性，例如相邻串扰（AXT）。 在所描述的实施例中，锥形波导端的宽度（W）从输入/输出波导的一侧到阵列之间增加，从而保持输入/输出波导之间的间隔。
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