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1.发明授权公开(公告)号：US08482088B2
公开(公告)日：2013-07-09
申请号：US12678903
申请日：2008-09-18
IPC分类号： H01L29/84
CPC分类号： B81B3/0072 , B81B2201/0257 , B81B2201/0264 , B81B2203/0127 , B81B2203/019 , B81C1/00103 , B81C2201/0108 , B81C2201/0157 , H04R19/005 , H04R19/04
摘要： A MEMS device comprises a membrane layer and a back-plate layer formed over the membrane layer. The membrane layer comprises an outer portion and an inner portion raised relative to the outer portion and a sidewall for connecting the inner portion and the outer portion. The sidewall is non-orthogonal to the outer portion.
摘要翻译： MEMS器件包括膜层和形成在膜层上的背板层。 膜层包括外部部分和相对于外部部分凸起的内部部分和用于连接内部部分和外部部分的侧壁。 侧壁与外部部分不正交。
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2.发明申请公开(公告)号：US20100244162A1
公开(公告)日：2010-09-30
申请号：US12678903
申请日：2008-09-18
IPC分类号： H01L29/84 , H01L21/302
CPC分类号： B81B3/0072 , B81B2201/0257 , B81B2201/0264 , B81B2203/0127 , B81B2203/019 , B81C1/00103 , B81C2201/0108 , B81C2201/0157 , H04R19/005 , H04R19/04
摘要： A MEMS device comprises a membrane layer and a back-plate layer formed over the membrane layer. The membrane layer comprises an outer portion and an inner portion raised relative to the outer portion and a sidewall for connecting the inner portion and the outer portion. The sidewall is non-orthogonal to the outer portion.
摘要翻译： MEMS器件包括膜层和形成在膜层上的背板层。 膜层包括外部部分和相对于外部部分凸起的内部部分和用于连接内部部分和外部部分的侧壁。 侧壁与外部部分不正交。
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公开(公告)号：US08546170B2
公开(公告)日：2013-10-01
申请号：US12673925
申请日：2008-08-15
IPC分类号： H01L21/00
CPC分类号： H04R19/04 , B81B3/0021 , B81B3/0072 , B81B3/0094 , B81B2201/00 , B81B2201/0235 , B81B2201/0257 , B81B2201/0264 , H01L27/00 , H04R19/00 , H04R19/005 , H04R23/00 , H04R31/00 , H04R2499/11
摘要： A method of fabricating a micro-electrical-mechanical system (MEMS) transducer comprises the steps of forming a membrane (5) on a substrate (3), and forming a back-volume in the substrate. The step of forming a back-volume in the substrate comprises the steps of forming a first back-volume portion (7a) and a second back-volume portion (7b), the first back-volume portion (7a) being separated from the second back-volume portion (7b) by a step in a sidewall of the back-volume. The cross-sectional area of the second back-volume portion (7b) can be made greater than the cross-sectional area of the membrane (5), thereby enabling the back-volume to be increased without being constrained by the cross-sectional area of the membrane (5). The back-volume may comprise a third back-volume portion. The third back-volume portion enables the effective diameter of the membrane to be formed more accurately.
摘要翻译： 制造微机电系统（MEMS）换能器的方法包括以下步骤：在衬底（3）上形成膜（5），并在衬底中形成后体积。 在衬底中形成背部体积的步骤包括形成第一后部容积部分（7a）和第二后部体积部分（7b）的步骤，第一后部体积部分（7a）与第二后部体积部分 后体积部分（7b）通过后体积的侧壁中的台阶。 第二后部容积部分（7b）的横截面面积可以大于膜（5）的横截面面积，从而能够增加后部体积而不受横截面积的约束 的膜（5）。 背部容积可以包括第三后部体积部分。 第三后部体积部分能够更准确地形成膜的有效直径。
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公开(公告)号：US20110062535A1
公开(公告)日：2011-03-17
申请号：US12991378
申请日：2009-05-07
IPC分类号： H01L29/84 , H01L21/302
CPC分类号： B06B1/0292
摘要： A MEMS device comprises a substrate having at least a first transducer optimized for transmitting pressure waves, and at least a second transducer optimized for detecting pressure waves. The transducers can be optimised for transmitting or receiving by varying the diameter, thickness or mass of the membrane and/or electrode of each respective transducer. Various embodiments are described showing arrays of transducers, with different configurations of transmitting and receiving transducers. Embodiments are also disclosed having an array of transmitting transducers and an array of receiving transducers, wherein elements in the array of transmitting and/or receiving transducers are arranged to have different resonant frequencies. At least one of said first and second transducers may comprise an internal cavity that is sealed from the outside of the transducer.
摘要翻译： MEMS器件包括具有至少第一传感器的衬底，该第一传感器优化用于传送压力波，以及至少第二传感器，其优化用于检测压力波。 可以通过改变每个相应换能器的膜和/或电极的直径，厚度或质量来优化传感器的传播或接收。 描述了各种实施例，其示出了具有不同配置的发射和接收换能器的换能器阵列。 还公开了具有发射换能器阵列和接收换能器阵列的实施例，其中发射和/或接收换能器阵列中的元件布置成具有不同的谐振频率。 所述第一和第二换能器中的至少一个可以包括从换能器的外部密封的内部空腔。
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公开(公告)号：US20110089504A1
公开(公告)日：2011-04-21
申请号：US12673925
申请日：2008-08-15
CPC分类号： H04R19/04 , B81B3/0021 , B81B3/0072 , B81B3/0094 , B81B2201/00 , B81B2201/0235 , B81B2201/0257 , B81B2201/0264 , H01L27/00 , H04R19/00 , H04R19/005 , H04R23/00 , H04R31/00 , H04R2499/11
摘要： A method of fabricating a micro-electrical-mechanical system (MEMS) transducer comprises the steps of forming a membrane (5) on a substrate (3), and forming a back-volume in the substrate. The step of forming a back-volume in the substrate comprises the steps of forming a first back-volume portion (7a) and a second back-volume portion (7b), the first back-volume portion (7a) being separated from the second back-volume portion (7b) by a step in a sidewall of the back-volume. The cross-sectional area of the second back-volume portion (7b) can be made greater than the cross-sectional area of the membrane (5), thereby enabling the back-volume to be increased without being constrained by the cross-sectional area of the membrane (5). The back-volume may comprise a third back-volume portion. The third back-volume portion enables the effective diameter of the membrane to be formed more accurately.
摘要翻译： 制造微机电系统（MEMS）换能器的方法包括以下步骤：在衬底（3）上形成膜（5），并在衬底中形成后体积。 在衬底中形成背部体积的步骤包括形成第一后部容积部分（7a）和第二后部体积部分（7b）的步骤，第一后部体积部分（7a）与第二后部体积部分 后体积部分（7b）通过后体积的侧壁中的台阶。 第二后部容积部分（7b）的横截面面积可以大于膜（5）的横截面面积，从而能够增加后部体积而不受横截面积的约束 的膜（5）。 背部容积可以包括第三后部体积部分。 第三后部体积部分能够更准确地形成膜的有效直径。
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公开(公告)号：US08841737B2
公开(公告)日：2014-09-23
申请号：US12678884
申请日：2008-09-18
IPC分类号： H01L29/84 , H01L21/306 , B81B3/00 , H04R19/00
CPC分类号： B81B3/0072 , B81B2201/0257 , H04R19/005
摘要： A MEMS comprises a back-plate (7) having an inner portion (7a) and an outer portion (7b), the inner portion (7a) connected to the outer portion (7b) by a sidewall (7c). A raised section or anchor ring (60) is formed in the outer portion (7b) of the back-plate, in a region of the back-plate near the inner perimeter of the outer portion. The anchor ring may comprise angled sidewalls. The thickness of the back-plate may be greater than the thickness of the material supporting the anchor ring. Embodiments are also disclosed in which a membrane comprises a raised portion and an outer portion connected by an angled sidewall.
摘要翻译： MEMS包括具有内部部分（7a）和外部部分（7b）的背板（7），内部部分（7a）通过侧壁（7c）连接到外部部分（7b）。 在背板的外周部的附近的区域，在背板的外侧部分（7b）上形成有凸起部分或锚定环（60）。 锚环可以包括成角度的侧壁。 背板的厚度可以大于支撑锚环的材料的厚度。 还公开了一种实施例，其中膜包括凸起部分和通过成角度侧壁连接的外部部分。
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公开(公告)号：US08198715B2
公开(公告)日：2012-06-12
申请号：US12678922
申请日：2008-09-18
IPC分类号： H01L23/02
CPC分类号： B81B3/0072 , B81B2201/0257 , H04R19/04 , H04R2499/11
摘要： A MEMS transducer includes a substrate, a membrane layer and a back-plate layer. The membrane layer is supported by the substrate. The back-plate layer is supported by the membrane layer and includes a respective sidewall portion and a respective raised portion. One or more columns, separate from the sidewall portion of the back-plate layer, connect the back-plate layer, the membrane layer and the substrate.
摘要翻译： MEMS换能器包括基底，膜层和背板层。 膜层由衬底支撑。 背板层由膜层支撑，并且包括相应的侧壁部分和相应的凸起部分。 与背板层的侧壁部分别的一个或多个柱连接背板层，膜层和基板。
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公开(公告)号：US20100308425A1
公开(公告)日：2010-12-09
申请号：US12678884
申请日：2008-09-18
IPC分类号： H01L29/84 , H01L21/306
CPC分类号： B81B3/0072 , B81B2201/0257 , H04R19/005
摘要： A MEMS device comprises a back-plate (7) having an inner portion (7a) and an outer portion (7b), the inner portion (7a) connected to the outer portion (7b) by a sidewall (7c). A raised section or anchor ring (60) is formed in the outer portion (7b) the back-plate, in a region of the back-plate near the inner perimeter of the outer portion. The anchor ring may comprise angled sidewalls. The thickness of the back-plate may be greater than the thickness of the material supporting the anchor ring. Embodiments are also disclosed in which a membrane comprises a raised portion and an outer portion connected by an angled sidewall.
摘要翻译： MEMS器件包括具有内部部分（7a）和外部部分（7b）的背板（7），内部部分（7a）通过侧壁（7c）连接到外部部分（7b）。 在后板的外周部的内周的区域中，在背板的外侧部分（7b）上形成有凸起部分或锚定环（60）。 锚环可以包括成角度的侧壁。 背板的厚度可以大于支撑锚环的材料的厚度。 还公开了一种实施例，其中膜包括凸起部分和通过成角度侧壁连接的外部部分。
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公开(公告)号：US20110303994A1
公开(公告)日：2011-12-15
申请号：US13201093
申请日：2010-02-12
CPC分类号： B81B3/0008 , B06B1/0292 , B81B2201/0257 , B81B2203/04 , H04R19/005 , H04R19/04
摘要： A micro-electrical-mechanical system (MEMS) transducer comprises a layer of dielectric material having an electrode formed in the layer of dielectric material. A region of the layer of the dielectric material is adapted to provide a leakage path which, in use, removes unwanted charge from the layer of dielectric material.
摘要翻译： 微机电系统（MEMS）换能器包括具有在电介质材料层中形成的电极的电介质材料层。 介电材料层的区域适于提供泄漏路径，其在使用中从电介质材料层去除不想要的电荷。
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公开(公告)号：US20100237447A1
公开(公告)日：2010-09-23
申请号：US12678922
申请日：2008-09-18
CPC分类号： B81B3/0072 , B81B2201/0257 , H04R19/04 , H04R2499/11
摘要： A MEMS transducer comprises a substrate (124). A membrane layer (120) is supported by the substrate (124). A back-plate layer (110) is supported by the membrane layer (120), said back-plate layer comprising a respective sidewall portion and a respective raised portion. One or more columns (116) are provided separate from the sidewall portion of the back-plate layer, said columns (116) connecting the back-plate layer, the membrane layer and the substrate.
摘要翻译： MEMS换能器包括基底（124）。 膜层（120）由衬底（124）支撑。 背板层（110）由膜层（120）支撑，所述背板层包括相应的侧壁部分和相应的凸起部分。 一个或多个柱（116）设置成与背板层的侧壁部分分离，所述柱（116）连接背板层，膜层和基板。
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