System and method for haze control in semiconductor processes
    1.
    发明授权
    System and method for haze control in semiconductor processes 有权
    半导体工艺中雾度控制的系统和方法

    公开(公告)号:US07486391B2

    公开(公告)日:2009-02-03

    申请号:US11520538

    申请日:2006-09-13

    IPC分类号: G01N21/00

    CPC分类号: G03F1/84 G03F1/82 Y02P80/30

    摘要: A method for haze control on a semiconductor reticle, the method including performing a reticle inspection of a semiconductor reticle to detect haze formation on a periodic basis, performing a wafer inspection to detect haze defects, forecasting haze formation, and cleaning the semiconductor reticle. Also included is a haze forecasting method for haze control on a semiconductor reticle, including scanning a plurality of semiconductor wafers, identifying repeating defects in the semiconductor wafers, storing the repeating defects in a database as known repeating defects, and identifying an additional repeating defect that is not a known repeating defect, the additional repeating defect caused by semiconductor reticle haze.

    摘要翻译: 一种半导体掩模版上的雾度控制方法,该方法包括对半导体掩模版进行掩模版检查以周期性地检测雾度形成,执行晶片检查以检测雾度缺陷,预测雾度形成和清洁半导体掩模版。 还包括用于半导体掩模版上的雾度控制的雾度预测方法,包括扫描多个半导体晶片,识别半导体晶片中的重复缺陷,将重复缺陷存储在数据库中作为已知的重复缺陷,以及识别附加的重复缺陷, 不是已知的重复缺陷,由半导体掩模版雾度引起的附加重复缺陷。

    System and method for haze control in semiconductor processes
    2.
    发明申请
    System and method for haze control in semiconductor processes 有权
    半导体工艺中雾度控制的系统和方法

    公开(公告)号:US20080062414A1

    公开(公告)日:2008-03-13

    申请号:US11520538

    申请日:2006-09-13

    IPC分类号: G01N21/00

    CPC分类号: G03F1/84 G03F1/82 Y02P80/30

    摘要: A method for haze control on a semiconductor reticle, the method including performing a reticle inspection of a semiconductor reticle to detect haze formation on a periodic basis, performing a wafer inspection to detect haze defects, forecasting haze formation, and cleaning the semiconductor reticle. Also included is a haze forecasting method for haze control on a semiconductor reticle, including scanning a plurality of semiconductor wafers, identifying repeating defects in the semiconductor wafers, storing the repeating defects in a database as known repeating defects, and identifying an additional repeating defect that is not a known repeating defect, the additional repeating defect caused by semiconductor reticle haze.

    摘要翻译: 一种半导体掩模版上的雾度控制方法,该方法包括对半导体掩模版进行掩模版检查以周期性地检测雾度形成,执行晶片检查以检测雾度缺陷,预测雾度形成和清洁半导体掩模版。 还包括用于半导体掩模版上的雾度控制的雾度预测方法,包括扫描多个半导体晶片,识别半导体晶片中的重复缺陷,将重复缺陷存储在数据库中作为已知的重复缺陷,以及识别附加的重复缺陷, 不是已知的重复缺陷,由半导体掩模版雾度引起的附加重复缺陷。

    Method for post removal including concrete footing removal
    3.
    发明授权
    Method for post removal including concrete footing removal 有权
    拆除方法,包括混凝土底脚移除

    公开(公告)号:US08250787B1

    公开(公告)日:2012-08-28

    申请号:US12714469

    申请日:2010-02-27

    申请人: Daniel Sawyer

    发明人: Daniel Sawyer

    IPC分类号: E02F1/00

    CPC分类号: E04H17/265

    摘要: One embodiment of an improved method for removing a post from the ground, the method including inserting a spike tool into the ground around the perimeter of the base of the post, reducing the lifting force required by creating a layer of reduced friction mud surrounding the base of the post, supplying of pressurized fluid through the spike tool to the base of the post within the ground, and neutralizing the suction force created when the post is lifted from the ground.

    摘要翻译: 一种用于从地面移除柱的改进方法的一个实施例,该方法包括将尖钉工具插入围绕柱的基部的周边的地面中,从而减少了通过产生围绕基部的减少的摩擦泥浆所需的提升力 的柱,通过尖钉工具将加压流体供给到地面中的柱的基部,并且中和当柱从地面提升时产生的吸力。

    Multi-layered sports playing field with a water draining, padding layer
    4.
    发明申请
    Multi-layered sports playing field with a water draining, padding layer 有权
    多层体育运动场,带有排水,衬垫层

    公开(公告)号:US20050042394A1

    公开(公告)日:2005-02-24

    申请号:US10645719

    申请日:2003-08-20

    IPC分类号: E01C13/08 A41G1/00

    摘要: A multi-layered sports playing field including a top layer made of substantially artificial material simulating a natural playing surface such as grass and a padding layer positioned between the top layer and the base or dirt layer. The padding layer is made of a plurality of discrete beads of substantially elastic, resilient material (e.g., foam) with portions of adjacent beads abutting one another and other portions being spaced from each other. Substantially all of the adjacent beads are preferably integrally joined (e.g., glued, fused) together at their abutting portions. The padding layer is very porous and breathable and preferably includes feet members supporting the main body of the padding layer above the base or dirt layer to create a water channel of interconnected portions to enhance water drainage to the sides of the field.

    摘要翻译: 一种多层体育运动场,包括由模拟诸如草的自然游戏表面的基本上人造材料制成的顶层和位于顶层和底层或污物层之间的衬垫层。 衬垫层由多个具有弹性的弹性材料(例如,泡沫)的离散的珠制成,其中相邻珠的部分彼此邻接并且其它部分彼此间隔开。 基本上所有相邻的珠子优选地在其邻接部分​​处一体地连接(例如,胶合,熔合)在一起。 衬垫层是非常多孔和透气的,并且优选地包括支撑基部或污垢层上方的衬垫层的主体的脚部构件,以形成互连部分的水通道,以增强到场的侧面的排水。

    Multi-layered sports playing field with a water draining, padding layer
    5.
    发明申请
    Multi-layered sports playing field with a water draining, padding layer 有权
    多层体育运动场,带有排水,衬垫层

    公开(公告)号:US20080075896A1

    公开(公告)日:2008-03-27

    申请号:US11879486

    申请日:2007-07-17

    IPC分类号: A41G1/00

    摘要: A multi-layered sports playing field including a top layer made of substantially artificial material simulating a natural playing surface such as grass and a padding layer positioned between the top layer and the base or dirt layer. The padding layer is made of a plurality of discrete beads of substantially elastic, resilient material (e.g., foam) with portions of adjacent beads abutting one another and other portions being spaced from each other. Substantially all of the adjacent beads are preferably integrally joined (e.g., glued, fused) together at their abutting portions. The padding layer is very porous and breathable and preferably includes feet members supporting the main body of the padding layer above the base or dirt layer to create a water channel of interconnected portions to enhance water drainage to the sides of the field.

    摘要翻译: 一种多层体育运动场,包括由模拟诸如草的自然游戏表面的基本上人造材料制成的顶层和位于顶层和底层或污物层之间的衬垫层。 衬垫层由多个具有弹性的弹性材料(例如,泡沫)的离散的珠制成,其中相邻珠的部分彼此邻接并且其它部分彼此间隔开。 基本上所有相邻的珠子优选地在其邻接部分​​处一体地连接(例如,胶合,熔合)在一起。 衬垫层是非常多孔和透气的,并且优选地包括支撑基部或污垢层上方的衬垫层的主体的脚部构件,以形成互连部分的水通道,以增强到场的侧面的排水。