公开(公告)号：US08946835B2

公开(公告)日：2015-02-03

申请号：US13618691

申请日：2012-09-14

Applicant: Yuan Xu ,  Wei Hu ,  Justin Jia-Jen Hwu ,  Gene Gauzner ,  Koichi Wago ,  David Shiao-Min Kuo

Inventor： Yuan Xu ,  Wei Hu ,  Justin Jia-Jen Hwu ,  Gene Gauzner ,  Koichi Wago ,  David Shiao-Min Kuo

IPC: H01L29/82

CPC classification number: G11B5/743 ,  B44D3/18

Abstract: A planarization process may planarize a media disk that has data trenches between data features and larger servo trenches between servo features. A filler material layer is deposited on the media disk and provides step coverage of the trenches. The filler material has data recesses over the data trenches and servo recesses over the servo trenches that must be removed to produce a planar media surface. A first planarization process is used to remove the data recesses and a second planarization process is used to remove the servo recesses.

Abstract translation: 平坦化处理可以平坦化在伺服特征之间具有数据特征和较大伺服沟槽之间的数据沟槽的介质盘。 填充材料层沉积在介质盘上并提供沟槽的台阶覆盖。 填充材料在伺服沟槽上的数据沟槽和伺服凹槽上具有必须被移除以产生平面介质表面的数据凹槽。 使用第一平面化处理来去除数据凹槽，并且使用第二平面化处理来去除伺服凹部。

公开(公告)号：US06987627B1

公开(公告)日：2006-01-17

申请号：US10417220

申请日：2003-04-17

Applicant: Gennady Gauzner ,  David Shiao-Min Kuo

Inventor： Gennady Gauzner ,  David Shiao-Min Kuo

IPC: G11B5/86

CPC classification number: G11B11/10582 ,  G11B5/865 ,  G11B11/10578

Abstract: A device for use in performing simultaneous contact printing of magnetic patterns in opposing surfaces of a dual-sided magnetic or magneto-optical (MO) recording medium, comprising: (a) a fixedly mounted first magnetic pole having a first end surface; (b) an axially movable second magnetic pole in axial alignment with the first magnetic pole, the second magnetic pole having a second end surface opposite to and facing the first end surface of the first magnetic pole; (c) a first portion of a centering insert fixture mounted on the first end surface of the first magnetic pole; and (d) a second portion of a centering insert fixture mounted on the second end surface of the second magnetic pole.

Abstract translation: 一种用于在双面磁或磁光（MO）记录介质的相对表面中同时进行磁图案的接触印刷的装置，包括：（a）固定安装的第一磁极，其具有第一端面; （b）与所述第一磁极轴向对准的可轴向移动的第二磁极，所述第二磁极具有与所述第一磁极的第一端面相对并面对所述第一磁极的第二端面; （c）安装在第一磁极的第一端面上的定心插入夹具的第一部分; 和（d）安装在第二磁极的第二端面上的定心插入夹具的第二部分。

公开(公告)号：US06949199B1

公开(公告)日：2005-09-27

申请号：US10087846

申请日：2002-03-05

Applicant: Gennady Gauzner ,  Koichi Wago ,  David Shiao-Min Kuo

Inventor： Gennady Gauzner ,  Koichi Wago ,  David Shiao-Min Kuo

IPC: B29C59/00 ,  B81C1/00 ,  B82B3/00 ,  G03F7/00 ,  G11B5/596 ,  G11B5/82

CPC classification number: G03F7/0002 ,  B82Y10/00 ,  B82Y40/00 ,  G11B5/59633 ,  G11B5/743 ,  G11B5/82 ,  Y10S977/887

Abstract: A method of performing thermal imprint lithography of a surface of a thermoplastic layer-coated workpiece for forming a pattern therein comprises pre-heating the workpiece to a pre-selected high temperature prior to inserting the workpiece in a stamping/imprinting tool maintained at a predetermined lower temperature, whereby the interval for thermal cycling of the stamping/imprinting tool between higher and lower temperatures is eliminated or at least reduced. Applications of the method include forming servo patterns in disk-shaped substrates for hard disk recording media.

Abstract translation: 对在其中形成图案的热塑性层涂覆的工件的表面进行热压印光刻的方法包括在将工件插入保持在预定的压印/压印工具之前将工件预加热到预选的高温 较低的温度，从而消除或至少减少了冲压/压印工具在较高和较低温度之间的热循环间隔。 该方法的应用包括在用于硬盘记录介质的盘形基底中形成伺服图案。

公开(公告)号：US06519114B1

公开(公告)日：2003-02-11

申请号：US09272786

申请日：1999-03-19

Applicant: Li-Ping Wang ,  David Shiao-Min Kuo ,  Wei Hsin Yao

Inventor： Li-Ping Wang ,  David Shiao-Min Kuo ,  Wei Hsin Yao

IPC: G11B584

CPC classification number: G11B5/855 ,  G11B5/6005

Abstract: A storage medium is provided that includes a texture zone having a plurality of protrusions. Each of the protrusions is separated by a short circumferential pitch. Alternatively, the texture zone includes a plurality of protrusions with a circumferential pitch less than the diameter of any protrusion. The resonance excitation between the magnetic head and the storage medium in the data storage system is reduced by forming the texture zone with the protrusions that cause the excitation frequencies of the data storage system to shift away from its resonance frequencies.

Abstract translation: 提供一种存储介质，其包括具有多个突起的纹理区域。 每个突起被短的圆周间距分开。 或者，纹理区域包括具有小于任何突起的直径的周向间距的多个突起。 数据存储系统中的磁头和存储介质之间的共振激励通过用引起数据存储系统的激发频率偏离谐振频率的突起形成纹理区而减小。

公开(公告)号：US06405449B1

公开(公告)日：2002-06-18

申请号：US09779220

申请日：2001-02-07

Applicant: Ramesh Sundaram ,  Wei Yao ,  Li-Ping Wang ,  David Shiao-Min Kuo

Inventor： Ramesh Sundaram ,  Wei Yao ,  Li-Ping Wang ,  David Shiao-Min Kuo

IPC: B65G4722

CPC classification number: G11B5/012 ,  G11B5/5582 ,  G11B17/038 ,  G11B19/04 ,  G11B33/08 ,  G11B33/10 ,  Y10S414/135

Abstract: A method and apparatus for data disks adapted to compensate for effects of shock loads imparted to a disk drive which are of sufficient magnitude to cause disk shifts. A series of topographical features are formed on the disk surface or edge to cause signal fluctuation in a sensor during read-back mode operation. An initial signal profile is stored as a map indicative of track or disk alignment with respect to the actuator assembly. Selectively, such as after a known shock event, the topographical features are re-profiled. A comparison of the profiles provides a measure of any track distortion which must be compensated for in future read-write operations by adjustments to data track servo follower algorithms.

Abstract translation: 一种用于数据盘的方法和装置，适用于补偿赋予磁盘驱动器的冲击载荷的影响，磁盘驱动器具有足够大的幅度以引起磁盘移位。 在磁盘表面或边缘上形成一系列地形特征，以在回读模式操作期间引起传感器中的信号波动。 初始信号轮廓被存储为指示相对于致动器组件的轨道或盘对准的映射。 选择性地，例如在已知的冲击事件之后，地形特征被重新分类。 配置文件的比较可以提供任何跟踪失真的量度，通过调整数据轨道伺服跟随器算法，必须在将来的读写操作中对其进行补偿。

公开(公告)号：US20120080402A1

公开(公告)日：2012-04-05

申请号：US12895630

申请日：2010-09-30

Applicant: Yuan Xu ,  Wei Hu ,  Justin Jia-Jen Hwu ,  Gene Gauzner ,  Koichi Wago ,  David Shiao-Min Kuo

Inventor： Yuan Xu ,  Wei Hu ,  Justin Jia-Jen Hwu ,  Gene Gauzner ,  Koichi Wago ,  David Shiao-Min Kuo

IPC: B44C1/22

CPC classification number: G11B5/743 ,  B44D3/18

Abstract: A planarization process may planarize a media disk that has data trenches between data features and larger servo trenches between servo features. A filler material layer is deposited on the media disk and provides step coverage of the trenches. The filler material has data recesses over the data trenches and servo recesses over the servo trenches that must be removed to produce a planar media surface. A first planarization process is used to remove the data recesses and a second planarization process is used to remove the servo recesses.

Abstract translation: 平坦化处理可以平坦化在伺服特征之间具有数据特征和较大伺服沟槽之间的数据沟槽的介质盘。 填充材料层沉积在介质盘上并提供沟槽的台阶覆盖。 填充材料在伺服沟槽上的数据沟槽和伺服凹槽上具有必须被移除以产生平面介质表面的数据凹槽。 使用第一平面化处理来去除数据凹槽，并且使用第二平面化处理来去除伺服凹部。

公开(公告)号：US07298678B2

公开(公告)日：2007-11-20

申请号：US10921276

申请日：2004-08-19

Applicant: Lawrence M. Bryant ,  Sundeep Chauhan ,  David Shiao-Min Kuo

Inventor： Lawrence M. Bryant ,  Sundeep Chauhan ,  David Shiao-Min Kuo

IPC: G11B5/09

CPC classification number: G11B5/59633 ,  G11B5/82 ,  G11B5/865 ,  G11B9/10 ,  G11B21/106

Abstract: A rotating recording device, such as an electron beam recorder, is provided with a dual encoder arrangement. A first encoder is employed as a spindle motor controller and located at a first end of a spindle. A second encoder is mounted at a turntable adjacent to a recording surface and used as a position, velocity or clock source for recording the pattern on the substrate. Eccentricity of the mounting of the second encoder is measured against the more accurately mounted spindle control encoder and compensated by a digital clock generating system using a digital phase locked loop.

Abstract translation: 诸如电子束记录器的旋转记录装置设有双编码器装置。 第一编码器用作主轴电机控制器并且位于主轴的第一端。 第二编码器安装在与记录表面相邻的转台上，并用作用于将图案记录在基板上的位置，速度或时钟源。 第二编码器的安装偏心度是针对更准确地安装的主轴控制编码器进行测量的，并由使用数字锁相环的数字时钟发生系统补偿。

公开(公告)号：US07038225B2

公开(公告)日：2006-05-02

申请号：US10875629

申请日：2004-06-23

Applicant: David Shiao-Min Kuo ,  Christopher Joseph Formato ,  Neil Deeman ,  Sundeep Chauhan ,  Lawrence Matthias Bryant

Inventor： David Shiao-Min Kuo ,  Christopher Joseph Formato ,  Neil Deeman ,  Sundeep Chauhan ,  Lawrence Matthias Bryant

IPC: H01J37/00 ,  G11B5/596

CPC classification number: H01L21/67259 ,  G11B7/261 ,  H01J2237/2025 ,  H01J2237/304 ,  H01L21/67253 ,  H01L21/681

Abstract: Embodiments of the invention generally provide an electron beam substrate processing system. In one embodiment, the present invention provides an electron beam substrate processing system where a spindle shaft used to rotate substrates during processing includes two encoder wheels. One encoder wheel is configured to provide a rotational speed data signal to a rotational speed control system. Another encoder wheel is configured to provide a pattern generator clock signal at a higher frequency than the rotational speed data signal to a pattern generator. In one embodiment of the present invention, at least one of the encoder wheels is positioned adjacent the substrate to minimize torsional and differential movements between the at least one encoder wheel and the substrate.

Abstract translation: 本发明的实施例通常提供电子束基板处理系统。 在一个实施例中，本发明提供一种电子束基板处理系统，其中用于在加工过程中旋转基板的主轴用于包括两个编码轮。 一个编码轮构造成向转速控制系统提供转速数据信号。 另一个编码器轮被配置为向图案发生器提供比转速数据信号更高的频率的模式发生器时钟信号。 在本发明的一个实施例中，编码器轮中的至少一个定位成与基板相邻，以最小化编码轮和基板之间的扭转和差速运动。

公开(公告)号：US06580572B1

公开(公告)日：2003-06-17

申请号：US09737388

申请日：2000-12-14

Applicant: Wei Hsin Yao ,  Ramesh Sundaram ,  David Shiao-Min Kuo

Inventor： Wei Hsin Yao ,  Ramesh Sundaram ,  David Shiao-Min Kuo

IPC: G11B502

CPC classification number: G11B5/6005 ,  G11B5/3169 ,  G11B5/455 ,  G11B27/36 ,  G11B2220/20

Abstract: A combination glide test/burnishing head can be utilized in a glide test/burnishing system. The combination glide test/burnishing head includes two piezo-electric elements, which can be utilized in a passive mode as sensors for detecting contacts between the glide test/burnishing head and asperities on the surface of a magnetic recording disc. Contact between the glide test/burnishing head and disc asperities results in generation of a defect detection signal, which can be utilized by associated test logic to define the location of the detected asperities on the disc surface. The piezo-electric elements of the glide test/burnishing head can also be utilized in an active mode to cause yaw variation in the flight attitude of the glide test/burnishing head, in turn causing a burnishing pad on the glide test/burnishing head to be moved radially into contact with a detected disc asperity. Once an active, burnishing operation has been performed, the piezo-electric elements of the glide test/burnishing head are returned to passive mode, to determine if the burnishing operation was successful in removing the asperity on the disc surface. Combining the glide test and burnishing functions in a common head assembly allows the glide test and burnishing functions to be performed using a single actuator for the glide test/burnishing head, simplifying and reducing the cost of a glide test/burnishing system.

Abstract translation: 组合滑行试验/抛光头可用于滑移试验/抛光系统。 组合滑行测试/抛光头包括两个压电元件，其可以被动模式用作用于检测滑动测试/抛光头与磁记录盘表面上的凹凸之间的接触的传感器。 滑动测试/抛光头和盘形凹凸之间的接触导致产生缺陷检测信号，该缺陷检测信号可由相关联的测试逻辑用来定义检测到的凹凸在盘表面上的位置。 滑行试验/抛光头的压电元件也可以以主动模式使用，以使滑行试验/抛光头的飞行姿态产生偏航变化，从而在滑动试验/抛光头上造成抛光垫 径向移动以与检测到的圆盘凹凸接触。 一旦执行了主动的抛光操作，滑动测试/抛光头的压电元件返回到被动模式，以确定抛光操作是否成功地去除了盘表面上的凹凸。 将滑动试验和抛光功能结合在共同的头部组件中，允许使用用于滑动试验/抛光头的单个致动器来执行滑行试验和抛光功能，从而简化和降低滑动试验/抛光系统的成本。

公开(公告)号：US6142006A

公开(公告)日：2000-11-07

申请号：US121595

申请日：1998-07-24

Applicant: Bruno Jean Marchon ,  David Shiao-Min Kuo ,  Wei Hsin Yao ,  Chiao-Ping Ku

Inventor： Bruno Jean Marchon ,  David Shiao-Min Kuo ,  Wei Hsin Yao ,  Chiao-Ping Ku

IPC: G01N29/24 ,  G11B21/21 ,  G11B33/10 ,  G01B7/34 ,  G01B11/30

CPC classification number: G01N29/2418 ,  G11B21/21 ,  G11B33/10 ,  G01N2291/014

Abstract: A method and apparatus for calibrating a glide head and detector system performs a pre-screening to ensure the quality of the glide head and the piezoelectric sensor in the detection system. The glide head and the piezoelectric sensor detect a signal when the glide head makes contact with the disk, such as a magnetic recording disk. Calibration of the detection system utilizes a specially made bump disk that has asperities of desired height and size that protrude out of a flat disk surface. The glide head is flown over the bump disk, and by gradually reducing the disk spinning velocity, the head is brought closer to the disk and eventually into contact with the asperity. The onset of contact, as detected by the piezoelectric sensor, defines a disk spinning velocity for the head to fly at the desired height. In order to decouple the glide head flying characteristics and the piezoelectric quality and transfer function from other factors that affect the calibration of the detection system, laser pulses are directed at the glide head. Head vibrations are introduced in the glide head and detected by the piezoelectric sensor. The head excitations are recorded as a spectrogram in which the resonance frequencies are observed. From the amplitude and frequency readings, head resonance frequencies are identified and the piezoelectric sensor response is characterized. This allows the pre-screening of the head/sensor system and the decoupling of the glide head flying characteristics and the piezoelectric sensor quality from the asperity integrity effects on the calibration of the detection system.

Abstract translation: 用于校准滑行头和检测器系统的方法和装置进行预筛选以确保检测系统中的滑动头和压电传感器的质量。 滑动头和压电传感器在滑动头与磁盘（例如磁记录盘）接触时检测信号。 检测系统的校准使用特别制造的凸起盘，其具有从平坦盘表面突出的期望的高度和尺寸的粗糙度。 滑动头在凸块上方飞行，通过逐渐减小磁盘旋转速度，磁头更接近磁盘并最终与凹凸接触。 由压电传感器检测到的接触开始限定了磁头旋转速度以使头部以期望的高度飞行。 为了从其他影响检测系统校准的因素中去除滑行头的飞行特性和压电质量和传递函数，激光脉冲指向滑行头。 头部振动被引入到滑动头中并由压电传感器检测。 磁头激励被记录为其中观察到共振频率的频谱图。 从振幅和频率读数，识别头部谐振频率，并表征压电传感器响应。 这允许头部/传感器系统的预筛选和滑翔头飞行特性和压电传感器质量的去耦从对检测系统的校准的粗糙度完整性影响。