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公开(公告)号：US08737001B2
公开(公告)日：2014-05-27
申请号：US12882773
申请日：2010-09-15
CPC分类号： G11B5/59655 , B82Y10/00 , G11B5/746 , G11B5/82
摘要： A magnetic storage medium comprises a plurality of discrete magnetic elements and first and second adjoining servo sectors. Each of the servo sectors comprises first and second rows of the discrete magnetic elements extending in a track direction. The second row of the discrete magnetic elements are stacked relative to the discrete magnetic elements of the first row in a cross-track direction that is perpendicular to the track direction. The discrete magnetic elements of the first servo sector are staggered in the cross-track direction relative to the discrete magnetic elements of the second servo sector.
摘要翻译： 磁存储介质包括多个分立的磁性元件和第一和第二相邻的伺服扇区。 每个伺服扇区包括在轨道方向上延伸的离散磁性元件的第一和第二行。 离散磁性元件的第二排相对于垂直于磁道方向的交叉磁道方向相对于第一行的离散磁性元件堆叠。 第一伺服扇区的离散磁性元件相对于第二伺服扇区的离散磁性元件在交叉磁道方向交错。
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公开(公告)号：US20120273999A1
公开(公告)日：2012-11-01
申请号：US13097841
申请日：2011-04-29
申请人： Sundeep Chauhan , Alexander Kantorov , Kim Yang Lee , David Kuo , René Johannes Marinus Van de Veerdonk , Barmeshwar Vikramaditya
发明人： Sundeep Chauhan , Alexander Kantorov , Kim Yang Lee , David Kuo , René Johannes Marinus Van de Veerdonk , Barmeshwar Vikramaditya
IPC分类号： B29C59/02
CPC分类号： G11B5/865 , G03F7/0041 , G11B5/59638 , G11B5/746 , G11B5/855 , G11B11/03
摘要： The embodiments disclose a method for patterning a stack, including embedding servo patterns within a final template and creating positions of plural cross-tracked shifted position error signal (PES) fields incrementally from the embedded servo patterns on the final template.
摘要翻译： 这些实施例公开了一种用于图案化堆叠的方法，包括在最终模板内嵌入伺服模式并且从最终模板上的嵌入式伺服模式增量地创建多个交叉跟踪的移位位置误差信号（PES）字段的位置。
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公开(公告)号：US20120063027A1
公开(公告)日：2012-03-15
申请号：US12882773
申请日：2010-09-15
CPC分类号： G11B5/59655 , B82Y10/00 , G11B5/746 , G11B5/82
摘要： A magnetic storage medium comprises a plurality of discrete magnetic elements and first and second adjoining servo sectors. Each of the servo sectors comprises first and second rows of the discrete magnetic elements extending in a track direction. The second row of the discrete magnetic elements are stacked relative to the discrete magnetic elements of the first row in a cross-track direction that is perpendicular to the track direction. The discrete magnetic elements of the first servo sector are staggered in the cross-track direction relative to the discrete magnetic elements of the second servo sector.
摘要翻译： 磁存储介质包括多个分立的磁性元件和第一和第二相邻的伺服扇区。 每个伺服扇区包括在轨道方向上延伸的离散磁性元件的第一和第二行。 离散磁性元件的第二排相对于垂直于磁道方向的交叉磁道方向相对于第一行的离散磁性元件堆叠。 第一伺服扇区的离散磁性元件相对于第二伺服扇区的离散磁性元件在交叉磁道方向交错。
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4.发明申请EXTRACTION OF TRANSDUCER POSITION INFORMATION FROM BIT PATTERNED MAGNETIC MEDIA 有权从位图形磁介质中提取传感器位置信息公开(公告)号：US20090195916A1
公开(公告)日：2009-08-06
申请号：US12025222
申请日：2008-02-04
IPC分类号： G11B5/596
CPC分类号： B82Y10/00 , G11B5/5547 , G11B5/59611 , G11B5/746 , G11B2005/0005
摘要： Extracting transducer position information from bit patterned magnetic media includes providing a magnetic storage medium having at least one data array with multiple discrete and separated recording bits and providing the transducer adjacent the data array. A readback signal dependent upon the multiple recording bits is generated with the transducer. Determining the transducer position information further includes generating at least a first position signal and a second position signal from the readback signal.
摘要翻译： 从位图案磁介质提取换能器位置信息包括提供具有至少一个具有多个离散和分离的记录位的数据阵列的磁存储介质，并将该换能器提供在数据阵列附近。 使用换能器产生取决于多个记录位的回读信号。 确定换能器位置信息还包括从回读信号产生至少第一位置信号和第二位置信号。
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5.发明授权Method and apparatus for constant linear velocity electron beam substrate processing 有权恒定线速度电子束衬底加工的方法和装置公开(公告)号：US07382711B2
公开(公告)日：2008-06-03
申请号：US10783263
申请日：2004-02-19
IPC分类号： G11B9/10
CPC分类号： G11B7/26 , G11B5/8404 , G11B9/10 , H01J37/3023 , H01J2237/31735
摘要： Embodiments of the invention generally provide an electron beam substrate processing system. In one embodiment, the present invention provides an electron beam substrate processing system where a spindle shaft used to rotate substrates during processing includes at least one optical encoder wheel assembly. The optical encoder wheel assembly is configured to provide rotational speed data signal to a rotational speed control system and a pattern generation clock circuit configured to a provide an angular pattern generator clock signal and to a pattern generator circuit. The pattern generation circuit is configured to control modulation of an electron beam used for substrate processing. In one aspect of the present invention, while the spindle shaft is rotated at a constant linear velocity, the pattern generation circuit controls the modulation of an electron beam such that written mark lengths are sized to be about constant in angular dimension.
摘要翻译： 本发明的实施例通常提供电子束基板处理系统。 在一个实施例中，本发明提供一种电子束基板处理系统，其中用于在加工过程中旋转基板的主轴用于至少一个光学编码器轮组件。 光学编码器轮组件被配置为向旋转速度控制系统和图案生成时钟电路提供转速数据信号，其被配置为提供角度图形发生器时钟信号和模式发生器电路。 图案生成电路被配置为控制用于基板处理的电子束的调制。 在本发明的一个方面，当主轴以恒定的线速度旋转时，图案产生电路控制电子束的调制，使得书写标记长度的尺寸在角度尺寸上约为恒定。
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6.发明授权Rotating recorder with dual encoder arrangement having eccentricity compensation 失效具有双重编码器布置的旋转记录器具有偏心补偿公开(公告)号：US07298678B2
公开(公告)日：2007-11-20
申请号：US10921276
申请日：2004-08-19
IPC分类号： G11B5/09
CPC分类号： G11B5/59633 , G11B5/82 , G11B5/865 , G11B9/10 , G11B21/106
摘要： A rotating recording device, such as an electron beam recorder, is provided with a dual encoder arrangement. A first encoder is employed as a spindle motor controller and located at a first end of a spindle. A second encoder is mounted at a turntable adjacent to a recording surface and used as a position, velocity or clock source for recording the pattern on the substrate. Eccentricity of the mounting of the second encoder is measured against the more accurately mounted spindle control encoder and compensated by a digital clock generating system using a digital phase locked loop.
摘要翻译： 诸如电子束记录器的旋转记录装置设有双编码器装置。 第一编码器用作主轴电机控制器并且位于主轴的第一端。 第二编码器安装在与记录表面相邻的转台上，并用作用于将图案记录在基板上的位置，速度或时钟源。 第二编码器的安装偏心度是针对更准确地安装的主轴控制编码器进行测量的，并由使用数字锁相环的数字时钟发生系统补偿。
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公开(公告)号：US07038225B2
公开(公告)日：2006-05-02
申请号：US10875629
申请日：2004-06-23
申请人： David Shiao-Min Kuo , Christopher Joseph Formato , Neil Deeman , Sundeep Chauhan , Lawrence Matthias Bryant
发明人： David Shiao-Min Kuo , Christopher Joseph Formato , Neil Deeman , Sundeep Chauhan , Lawrence Matthias Bryant
CPC分类号： H01L21/67259 , G11B7/261 , H01J2237/2025 , H01J2237/304 , H01L21/67253 , H01L21/681
摘要： Embodiments of the invention generally provide an electron beam substrate processing system. In one embodiment, the present invention provides an electron beam substrate processing system where a spindle shaft used to rotate substrates during processing includes two encoder wheels. One encoder wheel is configured to provide a rotational speed data signal to a rotational speed control system. Another encoder wheel is configured to provide a pattern generator clock signal at a higher frequency than the rotational speed data signal to a pattern generator. In one embodiment of the present invention, at least one of the encoder wheels is positioned adjacent the substrate to minimize torsional and differential movements between the at least one encoder wheel and the substrate.
摘要翻译： 本发明的实施例通常提供电子束基板处理系统。 在一个实施例中，本发明提供一种电子束基板处理系统，其中用于在加工过程中旋转基板的主轴用于包括两个编码轮。 一个编码轮构造成向转速控制系统提供转速数据信号。 另一个编码器轮被配置为向图案发生器提供比转速数据信号更高的频率的模式发生器时钟信号。 在本发明的一个实施例中，编码器轮中的至少一个定位成与基板相邻，以最小化编码轮和基板之间的扭转和差速运动。
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8.发明申请Rotating recorder with dual encoder arrangement having eccentricity compensation 失效具有双重编码器布置的旋转记录器具有偏心补偿公开(公告)号：US20060039264A1
公开(公告)日：2006-02-23
申请号：US10921276
申请日：2004-08-19
申请人： Lawrence Bryant , Sundeep Chauhan , David Kuo
发明人： Lawrence Bryant , Sundeep Chauhan , David Kuo
CPC分类号： G11B5/59633 , G11B5/82 , G11B5/865 , G11B9/10 , G11B21/106
摘要： A rotating recording device, such as an electron beam recorder, is provided with a dual encoder arrangement. A first encoder is employed as a spindle motor controller and located at a first end of a spindle. A second encoder is mounted at a turntable adjacent to a recording surface and used as a position, velocity or clock source for recording the pattern on the substrate. Eccentricity of the mounting of the second encoder is measured against the more accurately mounted spindle control encoder and compensated by a digital clock generating system using a digital phase locked loop.
摘要翻译： 诸如电子束记录器的旋转记录装置设有双编码器装置。 第一编码器用作主轴电机控制器并且位于主轴的第一端。 第二编码器安装在与记录表面相邻的转台上，并用作用于将图案记录在基板上的位置，速度或时钟源。 第二编码器的安装偏心度是针对更准确地安装的主轴控制编码器进行测量的，并由使用数字锁相环的数字时钟发生系统补偿。
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公开(公告)号：US20050184256A1
公开(公告)日：2005-08-25
申请号：US10783584
申请日：2004-02-19
IPC分类号： G11B5/596 , H01J37/00 , H01J37/304
CPC分类号： H01J37/302 , H01J37/3053
摘要： Embodiments of the invention generally provide an electron beam substrate processing system. In one embodiment, the present invention provides an electron beam substrate processing system where a spindle shaft used to rotate substrates during processing includes at least one optical encoder wheel assembly. The optical encoder wheel assembly is configured to provide rotational speed data signal to a rotational speed control system and a pattern generation clock circuit configured to a provide a corrected pattern generator clock signal to a pattern generator circuit. The pattern generation circuit is used to control modulation of an electron beam used for substrate processing. In one aspect of the present invention, repeatable deviations of the rotational speed are measured and processed during substrate processing to correct for such repeatable deviations to increase substrate pattern writing accuracy.
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公开(公告)号：US20120274371A1
公开(公告)日：2012-11-01
申请号：US13098281
申请日：2011-04-29
申请人： Koichi Wago , Sundeep Chauhan , David M. Tung
发明人： Koichi Wago , Sundeep Chauhan , David M. Tung
IPC分类号： H03L7/06
CPC分类号： H03L7/06 , H01J37/3174 , H03B21/00 , H03L7/08
摘要： The embodiments disclose a method for encoder frequency-shift compensation, including, determining frequency values of an input encoder signal, analyzing an encoder index clock signal and the input encoder signal to determine values of frequency-shifts and compensating for the values of the frequency-shifts to generate a frequency-shift compensated clock.
摘要翻译： 实施例公开了一种用于编码器频移补偿的方法，包括：确定输入编码器信号的频率值，分析编码器索引时钟信号和输入编码器信号，以确定频移的值并补偿频率 - 移位以产生频移补偿时钟。
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