公开(公告)号：US07297966B2

公开(公告)日：2007-11-20

申请号：US11205782

申请日：2005-08-16

申请人： David T. Wei ,  Axel Scherer

发明人： David T. Wei ,  Axel Scherer

IPC分类号： G01J3/45 ,  G01N13/00

CPC分类号： G01N21/658 ,  G01B11/303 ,  G01N21/553 ,  G01N2021/1719 ,  H01L49/00

摘要： A method for monitoring the surface roughness of a metal, comprises impinging a laser beam onto the surface of a metal layer to induce the formation of a plasmon therein, and monitoring a current of decay electrons emitted by the plasmon.

摘要翻译： 一种用于监测金属的表面粗糙度的方法，包括将激光束照射到金属层的表面上以在其中诱导等离子体激元的形成，并监测由等离子体激发的衰变电子的电流。

公开(公告)号：USRE32849E

公开(公告)日：1989-01-31

申请号：US751218

申请日：1985-07-02

申请人： David T. Wei ,  Anthony W. Louderback

发明人： David T. Wei ,  Anthony W. Louderback

IPC分类号： C23C14/46 ,  G02B5/28

CPC分类号： C23C14/46 ,  G02B5/285

摘要： A method for fabricating multiple layer interference optical films by ion beam sputtering, said films being used for mirrors in a ring laser apparatus. An ion beam strikes a target material obliquely, dislodging molecules of the target so that they can be deposited on a surface serving as a base for a multiple layer interference coating. The thickness of the coating is monitored so that the proper thickness of a given layer can be optimized to obtain the type of reflectance desired for a given light wave length. The surface to be coated is rotated during the deposition of the layer of target material. A stack of layers of alternating indices of refraction comprises the optical interference film. The coating process occurs inside of a vacuum chamber where the partial pressures of the gases are carefully controlled to insure the proper ion beam intensity and optimum stoichiometry of the deposited optical films. Prior to beginning the deposition of optical films, the ceramic substrate comprising the mirror base is bombarded by the ion beam at an oblique angle to remove surface anomalies and clean it.

公开(公告)号：US07495230B2

公开(公告)日：2009-02-24

申请号：US11205781

申请日：2005-08-16

申请人： David T. Wei ,  Axel Scherer

发明人： David T. Wei ,  Axel Scherer

IPC分类号： G01K1/08

CPC分类号： G01N21/658 ,  G01B11/303 ,  G01N21/553 ,  G01N2021/1719 ,  H01L49/00

摘要： An integrated plasmon detector includes a top layer of material adapted to generate a plasmon when excited by a beam of light incident onto a surface of the top layer, an interface layer joined to the top layer opposite from the surface of the top layer and adapted to slow polarons emitted by the plasmon to thermal electrons, and a collector layer joined to the interface layer opposite from the top layer and adapted to collect the thermal electrons from the interface layer.

摘要翻译： 集成等离子体激元检测器包括适于在入射到顶层的表面上的光束激发时产生等离子体激元的顶层材料，与顶层表面相对的顶层连接的界面层， 由等离子体激发器发射的快速极化子到热电子，以及与顶层相对的界面层连接并适于从界面层收集热电子的集电极层。

公开(公告)号：US4142958A

公开(公告)日：1979-03-06

申请号：US896133

申请日：1978-04-13

申请人： David T. Wei ,  Anthony W. Louderback

发明人： David T. Wei ,  Anthony W. Louderback

IPC分类号： C04B41/87 ,  C23C14/06 ,  C23C14/08 ,  C23C14/46 ,  G02B5/08 ,  G02B5/26 ,  H01J37/305 ,  C23C15/00

CPC分类号： C23C14/46 ,  H01J37/3053

摘要： A method for fabricating multiple layer interference optical films by ion beam sputtering, said films being used for mirrors in a ring laser apparatus. An ion beam strikes a target material obliquely, dislodging molecules of the target so that they can be deposited on a surface serving as a base for a multiple layer interference coating. The thickness of the coating is monitored so that the proper thickness of a given layer can be optimized to obtain the type of reflectance desired for a given light wave length. The surface to be coated is rotated during the deposition of the layer of target material. A stack of layers of alternating indices of refraction comprises the optical interference film. The coating process occurs inside of a vacuum chamber where the partial pressures of the gases are carefully controlled to insure the proper ion beam intensity and optimum stoichiometry of the deposited optical films. Prior to beginning the deposition of optical films, the ceramic substrate comprising the mirror base is bombarded by the ion beam at an oblique angle to remove surface anomalies and clean it.

公开(公告)号：US06190511B1

公开(公告)日：2001-02-20

申请号：US09020195

申请日：1998-02-06

申请人： David T. Wei

发明人： David T. Wei

IPC分类号： C23C1434

CPC分类号： C23C14/0036 ,  C23C14/083 ,  C23C14/46 ,  C23C16/405 ,  C23C16/4488 ,  G02B5/289

摘要： A technique for ion beam sputter deposition of optical coatings. The technique includes the following features (i) an assist chemical emitted towards the sputter target to oppose the tendency of film growth on the target; (ii) a discriminate baffle to capture ions or assist chemicals reflected from the target; (iii) a screen chemical to protect the coating area from the assist chemical; (iv) compartmentalized of the coating chamber to reduce crossing effects between the different chemicals (D.W.) (C.L.); (v) a compartmentalized assist ion beam to modify the coating and to reduce microstructure, defects and impurities in the coating (D.W.) (C.L.); and (vi) to combine the above features or multiply use one of the above features to further advantage or to increase throughput.

摘要翻译： 一种用于离子束溅射沉积光学涂层的技术。 该技术包括以下特征（i）朝向溅射靶发射的辅助化学物质以抵抗靶上的膜生长趋势; （ii）捕捉离子或辅助从目标反射的化学物质的鉴别挡板; （iii）屏蔽化学品以保护涂层区域免于辅助化学品; （iv）分隔涂层室以减少不同化学物质（C.W.）（C.L.）之间的交叉效应; （v）分隔的辅助离子束来改变涂层并减少涂层（D.W.）（C.L.）中的微观结构，缺陷和杂质; 和（vi）组合上述特征或乘以上述特征之一进一步利用或增加产量。