公开(公告)号：US20090165815A1

公开(公告)日：2009-07-02

申请号：US12326908

申请日：2008-12-03

Applicant: Debbie Tuerca ALCALA ,  Hendri Yanto KWEE ,  Michael TI-IN ,  Kian Teng ENG ,  Rodel MANALAC ,  Jimmy SIAT

Inventor： Debbie Tuerca ALCALA ,  Hendri Yanto KWEE ,  Michael TI-IN ,  Kian Teng ENG ,  Rodel MANALAC ,  Jimmy SIAT

IPC: H05H1/00 ,  B08B7/00

CPC classification number: H01L24/97 ,  B08B7/0035 ,  H01L21/67028 ,  H01L24/48 ,  H01L24/49 ,  H01L24/85 ,  H01L2224/05554 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/48247 ,  H01L2224/48465 ,  H01L2224/49175 ,  H01L2224/85013 ,  H01L2224/85913 ,  H01L2224/97 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01033 ,  H01L2924/01082 ,  H01L2924/14 ,  H01L2924/3025 ,  H01L2224/78 ,  H01L2924/00 ,  H01L2224/85 ,  H01L2224/45099 ,  H01L2224/05599

Abstract: A plasma clean tool that includes a cleaning chamber for cleaning an article by plasma cleaning and a charge shield for surrounding an article to be cleaned is presented. The charge shield prevents charged components of plasma from passing therethrough to charge the article during plasma cleaning of the article.

Abstract translation: 提供了一种等离子体清洁工具，其包括用于通过等离子体清洁来清洁物品的清洁室和用于包围待清洁物品的电荷屏蔽物。 电荷屏蔽防止等离子体的带电组分通过其中，以在物品的等离子体清洁期间对物品充电。