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公开(公告)号：US08797548B2
公开(公告)日：2014-08-05
申请号：US13398333
申请日：2012-02-16
IPC分类号： G01B11/02
CPC分类号： G01V8/02
摘要： An apparatus and method for estimating a parameter of interest using values of a beam property from two or more electromagnetic beams that both pass through at least part of an optical displacement device. The apparatus may include a Fabry-Perot interferometer, a collimated light source, and a detection array. At least one mirror of the interferometer may be operably coupled to an element receiving an external stimulus, such as pressure, force, and/or acceleration. The method includes using the apparatus.
摘要翻译： 一种用于使用来自两个或更多个电磁束的光束特性的值估计感兴趣参数的装置和方法，所述两个或更多个电磁束通过光学位移装置的至少一部分。 该装置可以包括法布里 - 珀罗干涉仪，准直光源和检测阵列。 干涉仪的至少一个反射镜可以可操作地耦合到接收诸如压力，力和/或加速度的外部刺激的元件。 该方法包括使用该装置。
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公开(公告)号：US20120212745A1
公开(公告)日：2012-08-23
申请号：US13398333
申请日：2012-02-16
IPC分类号： G01B11/02
CPC分类号： G01V8/02
摘要： An apparatus and method for estimating a parameter of interest using values of a beam property from two or more electromagnetic beams that both pass through at least part of an optical displacement device. The apparatus may include a Fabry-Perot interferometer, a collimated light source, and a detection array. At least one mirror of the interferometer may be operably coupled to an element receiving an external stimulus, such as pressure, force, and/or acceleration. The method includes using the apparatus.
摘要翻译： 一种用于使用来自两个或更多个电磁束的光束特性的值估计感兴趣参数的装置和方法，所述两个或更多个电磁束通过光学位移装置的至少一部分。 该装置可以包括法布里 - 珀罗干涉仪，准直光源和检测阵列。 干涉仪的至少一个反射镜可以可操作地耦合到接收诸如压力，力和/或加速度的外部刺激的元件。 该方法包括使用该装置。
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3.发明授权公开(公告)号：US06846087B2
公开(公告)日：2005-01-25
申请号：US10208458
申请日：2002-07-30
申请人： Dustin W Carr , Christopher John Frye , Timofei Nikita Kroupenkine , Victor Alexander Lifton , Michael Patrick Schlax , Alex T Tran , Joseph J Vuillemin
发明人： Dustin W Carr , Christopher John Frye , Timofei Nikita Kroupenkine , Victor Alexander Lifton , Michael Patrick Schlax , Alex T Tran , Joseph J Vuillemin
CPC分类号： G02B5/08 , G02B5/0808 , G02B5/0816
摘要： A multilayer micromirror structure that exhibits substantially no form change as a result of a given change in temperature is disclosed. A reflective layer is disposed on a substrate layer, and a counterbalancing structure is disposed on the structure in a way such that a neutral plane is located at a predetermined position relative to the substrate layer and the reflective layer. When forces are exerted at the neutral plane of such a structure, the structure attains a predetermined geometric form. A method of manufacture is disclosed wherein a substrate is etched to define a desired structure and a conformal layer of a masking material is deposited onto the etched substrate. Further etching exposes portions of the substrate and silicon is deposited to achieve another desired structure. Excess material is etched away to free the finished structure and a reflective layer is deposited onto the surface of the structure.
摘要翻译： 公开了一种由于给定的温度变化而基本上没有形式变化的多层微镜结构。 反射层设置在基板层上，并且平衡结构以相对于基板层和反射层位于预定位置的方式设置在结构上。 当力在这种结构的中立平面上施加时，结构达到预定的几何形状。 公开了一种制造方法，其中蚀刻衬底以限定期望的结构，并且将掩蔽材料的保形层沉积在蚀刻的衬底上。 进一步的蚀刻暴露了衬底和硅的部分，以实现另一个期望的结构。 蚀刻掉多余的材料以释放完成的结构，并且将反射层沉积到结构的表面上。
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公开(公告)号：US20140022557A1
公开(公告)日：2014-01-23
申请号：US13553298
申请日：2012-07-19
申请人： Dustin W. Carr
发明人： Dustin W. Carr
IPC分类号： G01B11/14
CPC分类号： G01D5/266
摘要： An apparatus and method for estimating a parameter of interest using values of a beam property from two or more electromagnetic beams that both converge in an optical displacement device. The apparatus may include a Fabry-Perot interferometer, a light source, and a detection array. The electromagnetic beams may be converged one or more of: the interferometer and a convergence device. At least one reflective surface of the interferometer may be operably coupled to an element receiving an external stimulus, such as pressure, force, and/or acceleration. The method includes using the apparatus.
摘要翻译： 一种用于使用来自两个或更多个电磁束的光束特性的值来估计感兴趣参数的装置和方法，所述两个或更多个电磁束会聚在光学位移装置中。 该装置可以包括法布里 - 珀罗干涉仪，光源和检测阵列。 电磁波束可以会聚一个或多个干涉仪和会聚装置。 干涉仪的至少一个反射表面可以可操作地耦合到接收诸如压力，力和/或加速度的外部刺激的元件。 该方法包括使用该装置。
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公开(公告)号：US07145248B2
公开(公告)日：2006-12-05
申请号：US10185249
申请日：2002-06-28
CPC分类号： H01L25/0657 , H01L23/5387 , H01L24/45 , H01L24/48 , H01L2224/05599 , H01L2224/45124 , H01L2224/45144 , H01L2224/48091 , H01L2224/4824 , H01L2224/48465 , H01L2224/85399 , H01L2225/0651 , H01L2225/06579 , H01L2924/00014 , H01L2924/01079 , H01L2924/10253 , H01L2924/00 , H01L2924/00015 , H01L2224/45015 , H01L2924/207
摘要： The planes of chips in a flip-chip arrangement, when at least one of the chips has an insulating layer running through it, may be electrically connected together by incorporating into the top chip a flexible metalized structure which is pinned to the top layer of the bottom chip using a wire bond ball which is connected to a wire that is attached to a pad on the top layer of the upper chip. A single connection connects both layers of the top chip to the layer on the bottom chip. The flexible structure may be similar to a collapsible cup with a hole in the middle or it may be a tiltable micro mirror.
摘要翻译： 当芯片中的至少一个具有穿过其中的绝缘层时，倒装芯片布置的平面可以通过将顶部芯片结合到柔性金属化结构中而被电连接在一起，所述柔性金属化结构被固定到顶层 底部芯片使用引线接合球，其连接到连接到上部芯片的顶层上的焊盘的导线。 单个连接将顶部芯片的两个层连接到底部芯片上的层。 柔性结构可以类似于在中间具有孔的可折叠杯，或者它可以是可倾斜的微反射镜。
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公开(公告)号：US06900575B2
公开(公告)日：2005-05-31
申请号：US10034594
申请日：2001-12-28
摘要： A resonator device utilizes two small mechanical resonators that are electrostatically coupled. A first resonator receives an input signal near its resonant frequency, and the input signal and a second signal are summed and provided to a second resonator. The resonant frequency of the second resonator is approximately equal to the second signal frequency. A width of response of the amplifier is tuned by varying the pump voltage. Resonant frequencies of corresponding individual oscillators are tuned by adjusting bias voltages.
摘要翻译： 谐振器装置利用两个静电耦合的小型机械谐振器。 第一谐振器在其谐振频率附近接收输入信号，并将输入信号和第二信号相加并提供给第二谐振器。 第二谐振器的谐振频率近似等于第二信号频率。 通过改变泵浦电压来调节放大器的响应宽度。 通过调整偏置电压来调谐相应单独振荡器的谐振频率。
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公开(公告)号：US06743988B2
公开(公告)日：2004-06-01
申请号：US09864125
申请日：2001-05-23
申请人： Zhenan Bao , David John Bishop , Robert Albert Boie , Dustin W. Carr , Edwin Arthur Chandross , Peter Kian-Hoon Ho
发明人： Zhenan Bao , David John Bishop , Robert Albert Boie , Dustin W. Carr , Edwin Arthur Chandross , Peter Kian-Hoon Ho
IPC分类号： B81B702
CPC分类号： H01L51/42 , Y02E10/549 , Y10T307/773
摘要： An optically controlled switch includes first and second electrodes, a channel extending between the electrodes, and a light source positioned to illuminate the channel. The light source produces a wavelength capable of changing the material's conductivity. The channel includes a photosensitive organic material and is configured to operate as a light controlled switch.
摘要翻译： 光控开关包括第一和第二电极，在电极之间延伸的通道和定位成照亮通道的光源。 光源产生能够改变材料导电性的波长。 该通道包括光敏有机材料并被配置为作为光控开关操作。
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公开(公告)号：US06515751B1
公开(公告)日：2003-02-04
申请号：US09520984
申请日：2000-03-08
IPC分类号： G01B902
CPC分类号： H03H9/02259 , H03H3/0077 , H03H9/2405 , H03H2009/2442
摘要： Electron beam lithography is used to make very small mechanical structures in single-crystal silicon. The structure may be a mesh having beam widths of less than 30 nm and suspended in a wafer, above a substrate. An rf drive voltage applied between the suspended structure and the underlying substrate produces vibration at or near the resonant frequency of the structure, and optical interference techniques are used to detect and measure the motion of the structure. The small dimensions of the structure provides a resonant frequency above 40 MHz. In one embodiment, the structure is a mesh formed of interconnected, very narrow, high aspect ratio parallel beams spaced about 315 nm apart. This results in a nanostructure having a low mass and a large relative surface area. The mesh is illuminated by laser light having a wavelength greater than the spacing between adjacent beams in the mesh so that small amplitude oscillations can be measured, with the detected change in optical reflection being proportional to the drive amplitude. The suboptical-wavelength features of the mesh provide a high measurement sensitivity, so that small changes in the mechanical properties of the mesh, resulting in corresponding small changes in the amplitude of the vibration, can be detected. A variable DC bias voltage applied to the vibrating structure allows adjustment of the motion of the structure and tuning of its vibration.
摘要翻译： 电子束光刻用于在单晶硅中制造非常小的机械结构。 该结构可以是具有小于30nm的波束宽度并悬浮在晶片上的基板上的网格。 施加在悬挂结构和下面的衬底之间的射频驱动电压在结构的谐振频率处或附近产生振动，并且使用光学干涉技术来检测和测量结构的运动。 该结构的小尺寸提供高于40MHz的谐振频率。 在一个实施例中，该结构是由相互间隔约315nm的互连的，非常窄的高纵横比的平行光束形成的网格。 这导致具有低质量和大的相对表面积的纳米结构。 网格由波长大于网格中相邻光束之间的间距的激光照射，从而可以测量小振幅振荡，其中检测到的光反射变化与驱动振幅成比例。 网格的次光波长特征提供了高的测量灵敏度，从而可以检测到网格的机械性能的微小变化，从而导致相应的振动幅度的微小变化。 施加到振动结构的可变直流偏置电压允许调整结构的运动并调节其振动。
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公开(公告)号：US06987898B2
公开(公告)日：2006-01-17
申请号：US10625384
申请日：2003-07-23
申请人： Alex T. Tran , Dustin W. Carr
发明人： Alex T. Tran , Dustin W. Carr
IPC分类号： G02B6/00
CPC分类号： G01N33/54373 , G02B6/3502 , G02B6/3566
摘要： The invention relates to devices and methods for detecting a ligand in a liquid, based on deflection of one or more microscopic cantilevers. Each cantilever has an optical waveguide fixed thereto or integral therewith. Deflection of the cantilever is detected by assessing coupling of light between the optical waveguide on the cantilever and an optical waveguide fixed distally thereto.
摘要翻译： 本发明涉及用于检测液体中配体的装置和方法，其基于一个或多个微观悬臂的偏转。 每个悬臂具有固定到其上的或与其成一体的光波导。 通过评估悬臂梁上的光波导与远端固定的光波导之间的光耦合来检测悬臂的偏转。
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公开(公告)号：US07355720B1
公开(公告)日：2008-04-08
申请号：US11314335
申请日：2005-12-20
申请人： Dustin W. Carr
发明人： Dustin W. Carr
IPC分类号： G01B11/02
CPC分类号： H04R23/008 , G01H9/004
摘要： An optical displacement sensor is disclosed which uses a vertical-cavity surface-emitting laser (VCSEL) coupled to an optical cavity formed by a moveable membrane and an output mirror of the VCSEL. This arrangement renders the lasing characteristics of the VCSEL sensitive to any movement of the membrane produced by sound, vibrations, pressure changes, acceleration, etc. Some embodiments of the optical displacement sensor can further include a light-reflective diffractive lens located on the membrane or adjacent to the VCSEL to control the amount of lasing light coupled back into the VCSEL. A photodetector detects a portion of the lasing light from the VCSEL to provide an electrical output signal for the optical displacement sensor which varies with the movement of the membrane.
摘要翻译： 公开了一种光学位移传感器，其使用耦合到由可移动膜形成的光学腔和垂直腔表面发射激光器（VCSEL），VCSEL的VCSEL的输出镜。 这种布置使得VCSEL的激光特性对由声音，振动，压力变化，加速度等产生的膜的任何移动敏感。光学位移传感器的一些实施例还可以包括位于膜上的光反射衍射透镜或 与VCSEL相邻以控制耦合回到VCSEL中的激光的量。 光电检测器检测来自VCSEL的激光的一部分，以提供随着膜的移动而变化的光学位移传感器的电输出信号。
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