公开(公告)号：US20140218814A1

公开(公告)日：2014-08-07

申请号：US14123003

申请日：2012-07-05

申请人： Eiji Matsukawa

发明人： Eiji Matsukawa

IPC分类号： G02B7/04

CPC分类号： G02B7/04 ,  G02B7/023 ,  G02B7/08 ,  H01L41/0913 ,  H02N2/004 ,  H02N2/0075 ,  H02N2/0095

摘要： A driving apparatus includes a first axial member that is arranged so as to extend in a predetermined direction, where the predetermined direction is the axial direction of the first axial member, and a driving unit that is configured to generate a first driving force in the axial direction and a second driving force in a direction intersecting the axial direction, where the first and second driving forces are to be applied to the first axial member.

摘要翻译： 驱动装置包括：第一轴向构件，其被布置成沿预定方向延伸，其中预定方向是第一轴向构件的轴向;以及驱动单元，其构造成在轴向上产生第一驱动力 方向和与轴向相交的方向的第二驱动力，其中第一和第二驱动力被施加到第一轴向构件。

公开(公告)号：US08344591B2

公开(公告)日：2013-01-01

申请号：US12659494

申请日：2010-03-10

申请人： Yoshihiko Suzuki ,  Eiji Matsukawa ,  Kazuyasu Oone ,  Masaaki Tanabe

发明人： Yoshihiko Suzuki ,  Eiji Matsukawa ,  Kazuyasu Oone ,  Masaaki Tanabe

IPC分类号： H02N2/12

CPC分类号： H02N2/105 ,  G02B7/08

摘要： Provided is a vibration actuator comprising an elastic body; an electromechanical transducer that causes the elastic body to vibrate; and a rotating body that rotates in response to a drive force received from contact with the elastic body at a vibrational antinode thereof, wherein the rotating body contacts the elastic body at a prescribed position along a direction in which an axis of the rotation extends. In the vibration actuator, the elastic body includes an elastic body contact member that is arranged in a region that includes the vibrational antinode of the elastic body, the rotating body includes a rotating body contact member that receives a drive force by contacting the elastic body contact member, and one of the elastic body contact member and the rotating body contact member has a contact surface that is oriented diagonally to the axis of rotation and contacts the other of the elastic body contact member and the rotating body contact member.

摘要翻译： 提供一种振动致动器，包括弹性体; 导致弹性体振动的机电换能器; 以及旋转体，其响应于在其振动波腹处与弹性体接触而产生的驱动力而旋转，其中旋转体沿着旋转轴线延伸的方向在规定位置处接触弹性体。 在振动促动器中，弹性体包括弹性体接触构件，该弹性体接触构件布置在包括弹性体的振动波腹的区域中，旋转体包括旋转体接触构件，该旋转体接触构件通过使弹性体接触 所述弹性体接触构件和所述旋转体接触构件中的一个具有与所述旋转轴线对角定向并且与所述弹性体接触构件和所述旋转体接触构件中的另一个接触的接触面。

公开(公告)号：US20110017906A1

公开(公告)日：2011-01-27

申请号：US12801401

申请日：2010-06-07

申请人： Eiji Matsukawa ,  Kazuyasu Oone

发明人： Eiji Matsukawa ,  Kazuyasu Oone

IPC分类号： H01L31/0232 ,  H02N2/16 ,  G02B7/04

CPC分类号： G02B27/646 ,  G02B7/08 ,  G02B7/102 ,  G03B3/10 ,  G03B19/12 ,  H01L41/0906 ,  H04N5/23287 ,  H04N2101/00

摘要： Provided is a vibration actuator comprising a drive unit that generates a drive force; a vibrating component that vibrates according to the drive force from the drive unit; a rotating body that receives the vibration of the vibrating component to rotate; and a converting section that changes a contact force between the vibrating component and the rotating body according to size of a load acting on the rotating body.

摘要翻译： 提供了一种振动致动器，其包括产生驱动力的驱动单元; 振动部件，其根据来自所述驱动单元的驱动力而振动; 接收所述振动部件的振动以旋转的旋转体; 以及转换部，其根据作用在所述旋转体上的负载的尺寸来改变所述振动部件与所述旋转体的接触力。

公开(公告)号：US09513459B2

公开(公告)日：2016-12-06

申请号：US14123003

申请日：2012-07-05

申请人： Eiji Matsukawa

发明人： Eiji Matsukawa

IPC分类号： G02B7/02 ,  G02B15/14 ,  G02B7/04 ,  H02N2/00 ,  G02B7/08 ,  H01L41/09

CPC分类号： G02B7/04 ,  G02B7/023 ,  G02B7/08 ,  H01L41/0913 ,  H02N2/004 ,  H02N2/0075 ,  H02N2/0095

摘要： A driving apparatus includes a first axial member that is arranged so as to extend in a predetermined direction, where the predetermined direction is the axial direction of the first axial member, and a driving unit that is configured to generate a first driving force in the axial direction and a second driving force in a direction intersecting the axial direction, where the first and second driving forces are to be applied to the first axial member.

摘要翻译： 驱动装置包括：第一轴向构件，其被布置成沿预定方向延伸，其中预定方向是第一轴向构件的轴向;以及驱动单元，其构造成在轴向上产生第一驱动力 方向和与轴向相交的方向的第二驱动力，其中第一和第二驱动力被施加到第一轴向构件。

公开(公告)号：US08445837B2

公开(公告)日：2013-05-21

申请号：US12801401

申请日：2010-06-07

申请人： Eiji Matsukawa ,  Kazuyasu Oone

发明人： Eiji Matsukawa ,  Kazuyasu Oone

IPC分类号： H01J5/02 ,  H02N2/00

CPC分类号： G02B27/646 ,  G02B7/08 ,  G02B7/102 ,  G03B3/10 ,  G03B19/12 ,  H01L41/0906 ,  H04N5/23287 ,  H04N2101/00

摘要： Provided is a vibration actuator comprising a drive unit that generates a drive force; a vibrating component that vibrates according to the drive force from the drive unit; a rotating body that receives the vibration of the vibrating component to rotate; and a converting section that changes a contact force between the vibrating component and the rotating body according to size of a load acting on the rotating body.

摘要翻译： 提供了一种振动致动器，其包括产生驱动力的驱动单元; 振动部件，其根据来自所述驱动单元的驱动力而振动; 接收所述振动部件的振动以旋转的旋转体; 以及转换部，其根据作用在所述旋转体上的负载的尺寸来改变所述振动部件与所述旋转体的接触力。

公开(公告)号：US20120087022A1

公开(公告)日：2012-04-12

申请号：US13331413

申请日：2011-12-20

申请人： Toshihisa TANAKA ,  Eiji MATSUKAWA

发明人： Toshihisa TANAKA ,  Eiji MATSUKAWA

IPC分类号： H02K41/035 ,  G02B7/09

CPC分类号： G02B7/08 ,  G03B3/10 ,  G03B17/14 ,  G03B19/12 ,  H02K11/21 ,  H02K41/03

摘要： Provided is a linear motor comprising a magnet including a first region polarized to have a magnetic pattern for driving and a second region polarized to have a magnetic pattern for position detection, the first and second regions being arranged linearly in a direction of the driving; a drive coil that is provided opposite the first region and generates a drive force exerted on the magnet in the direction of the driving; a magnetic sensor arranged opposite the second region; and a base member that supports the magnet, the drive coil, and the magnetic sensor such that the magnet can be moved relative to the drive coil and the magnetic sensor in the driving direction.

摘要翻译： 本发明提供一种线性电动机，其特征在于，包括：磁体，其包括偏振地具有用于驱动的​​磁性图案的第一区域和偏振地具有用于位置检测的磁图案的第二区域，所述第一和第二区域沿所述驱动方向线性排列; 驱动线圈，其设置成与所述第一区域相对，并且在所述驱动方向上产生施加在所述磁体上的驱动力; 与第二区域相对布置的磁传感器; 以及支撑磁体，驱动线圈和磁性传感器的基部构件，使得磁体可以相对于驱动线圈和磁性传感器沿驱动方向移动。

公开(公告)号：US07481945B2

公开(公告)日：2009-01-27

申请号：US10433395

申请日：2001-11-07

申请人： Eiji Matsukawa

发明人： Eiji Matsukawa

IPC分类号： C23C15/00 ,  H01L21/00

CPC分类号： B24B37/04 ,  B24B37/013 ,  B24B37/042 ,  B24B49/04 ,  B24B49/12 ,  H01L21/30625 ,  H01L21/3212

摘要： During the polishing of a wafer 2, the wafer 2 is illuminated with measuring light emitted from a light source 21, and the spectroscopic intensity of the reflected light is detected by a linear sensor 31. The signal processing part 11 monitors the polishing state of the wafer 2 on the basis of detection signals from the sensor 31, and detects the polishing endpoint of the wafer 2. The shutter mechanism control part 14 controls the motor 13b of the shutter mechanism 13 in response to the polishing endpoint detection signal from the signal processing part 11, and causes a light blocking member 13a to advance into the light path of the measuring light, so that the measuring light is blocked with respect to the wafer 2. As a result, the effect of the measuring light used for the monitoring of the polishing state on the object of polishing can be reduced.

摘要翻译： 在晶片2的抛光期间，用从光源21发射的测量光照射晶片2，并且通过线性传感器31检测反射光的分光强度。信号处理部11监视晶片2的抛光状态 基于来自传感器31的检测信号，并检测晶片2的抛光端点。快门机构控制部分14响应于来自信号处理的抛光端点检测信号来控制快门机构13的电动机13b 部分11，并使遮光构件13a进入测量光的光路，使得测量光相对于晶片2被阻挡。结果，用于监测测量光的测量光的效果 可以减少抛光对象物的抛光状态。

公开(公告)号：US06489624B1

公开(公告)日：2002-12-03

申请号：US09119162

申请日：1998-07-20

申请人： Yoshijiro Ushio ,  Takehiko Ueda ,  Eiji Matsukawa ,  Motoo Koyama

发明人： Yoshijiro Ushio ,  Takehiko Ueda ,  Eiji Matsukawa ,  Motoo Koyama

IPC分类号： G01N2186

CPC分类号： G01B11/0683

摘要： Apparatus and methods are disclosed that measure the thickness of a layer on a workpiece such as a semiconductor wafer, especially as the layer is undergoing a process such as polishing to achieve planarization of the layer. The apparatus comprises a probe light optical system that directs a beam of probe light to be incident on a surface of the layer, and produce a signal light from reflection of the probe light from or transmission of the probe light through the layer. A light detector retrieves and detects sufficient wavelengths of the signal light to produce a corresponding electronic signal encoding data regarding the intensity at various wavelengths of the signal light. At least one of the following is monitored: appearance or disappearance of maxima or minima in a spectrum of intensity or transmittance of the signal light, a change in wavelength at which a maximum or minimum is located in the spectrum, and change in intensity at a particular wavelength at which a maximum or minimum is located in the spectrum. The apparatus can be included with a polishing apparatus.

摘要翻译： 公开了测量诸如半导体晶片的工件上的层的厚度的装置和方法，特别是当该层经历诸如抛光的工艺以实现该层的平坦化时。 该装置包括探针光学系统，其将探测光束引导入入层的表面，并产生来自探测光的反射的信号光或探测光透过该层的透射。 光检测器检索并检测信号光的足够的波长，以产生相应的电子信号，该信号编码关于信号光的各种波长的强度的数据。 监视以下中的至少一个：信号光的强度或透射光谱中的最大值或最小值的出现或消失，最大或最小位于光谱中的波长变化，以及在 最大或最小位于光谱中的特定波长。 该装置可以包括在抛光装置中。

公开(公告)号：US08873172B2

公开(公告)日：2014-10-28

申请号：US13331413

申请日：2011-12-20

申请人： Toshihisa Tanaka ,  Eiji Matsukawa

发明人： Toshihisa Tanaka ,  Eiji Matsukawa

IPC分类号： G02B7/02 ,  G03B19/12 ,  G02B7/08 ,  G03B3/10 ,  H02K41/03 ,  G03B17/14 ,  H02K11/00

CPC分类号： G02B7/08 ,  G03B3/10 ,  G03B17/14 ,  G03B19/12 ,  H02K11/21 ,  H02K41/03

摘要： Provided is a linear motor comprising a magnet including a first region polarized to have a magnetic pattern for driving and a second region polarized to have a magnetic pattern for position detection, the first and second regions being arranged linearly in a direction of the driving; a drive coil that is provided opposite the first region and generates a drive force exerted on the magnet in the direction of the driving; a magnetic sensor arranged opposite the second region; and a base member that supports the magnet, the drive coil, and the magnetic sensor such that the magnet can be moved relative to the drive coil and the magnetic sensor in the driving direction.

摘要翻译： 本发明提供一种线性电动机，其特征在于，包括：磁体，其包括偏振地具有用于驱动的​​磁性图案的第一区域和偏振地具有用于位置检测的磁图案的第二区域，所述第一和第二区域沿所述驱动方向线性排列; 驱动线圈，其设置成与所述第一区域相对，并且在所述驱动方向上产生施加在所述磁体上的驱动力; 与第二区域相对布置的磁传感器; 以及支撑磁体，驱动线圈和磁性传感器的基部构件，使得磁体可以相对于驱动线圈和磁性传感器沿驱动方向移动。

公开(公告)号：US20100247087A1

公开(公告)日：2010-09-30

申请号：US12659494

申请日：2010-03-10

申请人： Yoshihiko Suzuki ,  Eiji Matsukawa ,  Kazuyasu Oone ,  Masaaki Tanabe

发明人： Yoshihiko Suzuki ,  Eiji Matsukawa ,  Kazuyasu Oone ,  Masaaki Tanabe

IPC分类号： G03B3/10 ,  H02N2/12

CPC分类号： H02N2/105 ,  G02B7/08

摘要： Provided is a vibration actuator comprising an elastic body; an electromechanical transducer that causes the elastic body to vibrate; and a rotating body that rotates in response to a drive force received from contact with the elastic body at a vibrational antinode thereof, wherein the rotating body contacts the elastic body at a prescribed position along a direction in which an axis of the rotation extends. In the vibration actuator, the elastic body includes an elastic body contact member that is arranged in a region that includes the vibrational antinode of the elastic body, the rotating body includes a rotating body contact member that receives a drive force by contacting the elastic body contact member, and one of the elastic body contact member and the rotating body contact member has a contact surface that is oriented diagonally to the axis of rotation and contacts the other of the elastic body contact member and the rotating body contact member.

摘要翻译： 提供一种振动致动器，包括弹性体; 导致弹性体振动的机电换能器; 以及旋转体，其响应于在其振动波腹处与弹性体接触而产生的驱动力而旋转，其中旋转体沿着旋转轴线延伸的方向在规定位置处接触弹性体。 在振动促动器中，弹性体包括弹性体接触构件，该弹性体接触构件布置在包括弹性体的振动波腹的区域中，旋转体包括旋转体接触构件，该旋转体接触构件通过使弹性体接触 所述弹性体接触构件和所述旋转体接触构件中的一个具有与所述旋转轴线对角定向并且与所述弹性体接触构件和所述旋转体接触构件中的另一个接触的接触面。