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    Film formation method and apparatus for semiconductor process
    2.
    发明申请
    Film formation method and apparatus for semiconductor process 有权
    用于半导体工艺的成膜方法和装置

    公开(公告)号：US20090181550A1

    公开(公告)日：2009-07-16

    申请号：US12318702

    申请日：2009-01-06

    Applicant: Kazuhide Hasebe ,  Nobutake Nodera ,  Eun-jo Lee

    Inventor： Kazuhide Hasebe ,  Nobutake Nodera ,  Eun-jo Lee

    IPC: H01L21/314 ,  B05C11/00

    CPC classification number: C23C16/345 ,  C23C16/45527 ,  C23C16/4554 ,  C23C16/45546 ,  H01L31/1868 ,  Y02E10/50 ,  Y02P70/521

    Abstract: A film formation process is performed to form a silicon nitride film on a target substrate within a process field configured to be selectively supplied with a first process gas containing a silane family gas and a second process gas containing a nitriding gas. The method is preset to compose the film formation process of a main stage with an auxiliary stage set at one or both of beginning and ending of the film formation process. The main stage includes an excitation period of supplying the second process gas to the process field while exciting the second process gas by an exciting mechanism. The auxiliary stage includes no excitation period of supplying the second process gas to the process field while exciting the second process gas by the exciting mechanism.

    Abstract translation: 执行成膜工艺以在被选择性地供给含有硅烷族气体的第一工艺气体和含有氮化气体的第二工艺气体的工艺区域内的目标衬底上形成氮化硅膜。 该方法被预设为构成主阶段的成膜过程，其中辅助级设置在成膜过程的开始和结束的一个或两个。 主阶段包括通过激励机构激励第二处理气体的第二处理气体向工艺场供给的激发期。 辅助级不包括通过激励机构激励第二工艺气体的第二工艺气体供给工艺场的激发周期。

    System and method of internet group management for multicast push in passive access networks
    3.
    发明授权
    System and method of internet group management for multicast push in passive access networks 失效
    被动接入网络组播推荐的互联网组管理系统和方法

    公开(公告)号：US08584170B2

    公开(公告)日：2013-11-12

    申请号：US13318851

    申请日：2009-10-22

    Applicant: Sung-Kwon Park ,  Eun-Jo Lee

    Inventor： Sung-Kwon Park ,  Eun-Jo Lee

    IPC: G06F3/00 ,  H04B3/20

    CPC classification number: H04N21/6405 ,  H04L65/4076 ,  H04L65/4084 ,  H04N21/6125

    Abstract: Disclosed is an Internet group management system of a push-type multicast in a passive access network, and a method thereof. The Internet group management system of a push-type multicast supporting Internet group management with respect to a packet stream simultaneously being transmitted to a subscriber accessing the same node via a passive access network where at least one subscriber accesses a single node, the system including an input packet classifying unit to sort a multimedia contents packet corresponding to a contents transmission packet from the packet stream, and a program managing unit to construct a broadcasting program table having information of the sorted multimedia contents packet, to determine, based on the constructed broadcasting program table, a reception condition of a requested program that is requested by a user, and to output a multimedia contents packet corresponding to the requested program.

    Abstract translation: 公开了一种无源接入网中的推送式组播的因特网组管理系统及其方法。 互联网群组管理系统，支持互联网组管理相对于分组流同时被发送到用户通过被动接入网访问同一节点的用户，其中至少一个用户访问单个节点，该系统包括 输入分组分类单元，对来自分组流的内容发送分组对应的多媒体内容分组进行分类，以及节目管理单元，构成具有分类多媒体内容分组的信息的广播节目表，基于构成的广播节目 表，用户请求的请求节目的接收条件，以及输出与所请求节目对应的多媒体内容分组。

    SYSTEM AND METHOD OF INTERNET GROUP MANAGEMENT FOR MULTICAST PUSH IN PASSIVE ACCESS NETWORKS
    4.
    发明申请
    SYSTEM AND METHOD OF INTERNET GROUP MANAGEMENT FOR MULTICAST PUSH IN PASSIVE ACCESS NETWORKS 失效
    用于无源访问网络中的多媒体推送的互联网组管理系统和方法

    公开(公告)号：US20120066720A1

    公开(公告)日：2012-03-15

    申请号：US13318851

    申请日：2009-10-22

    Applicant: Sung-Kwon Park ,  Eun-Jo Lee

    Inventor： Sung-Kwon Park ,  Eun-Jo Lee

    IPC: H04N21/482

    CPC classification number: H04N21/6405 ,  H04L65/4076 ,  H04L65/4084 ,  H04N21/6125

    Abstract: Disclosed is an Internet group management system of a push-type multicast in a passive access network, and a method thereof. The Internet group management system of a push-type multicast supporting Internet group management with respect to a packet stream simultaneously being transmitted to a subscriber accessing the same node via a passive access network where at least one subscriber accesses a single node, the system including an input packet classifying unit to sort a multimedia contents packet corresponding to an IPTV contents transmission packet from the packet stream, and a program managing unit to construct a broadcasting program table having information of the sorted multimedia contents packet, to determine, based on the constructed broadcasting program table, a reception condition of a requested program that is requested by a user, and to output a multimedia contents packet corresponding to the requested program.

    Abstract translation: 公开了一种无源接入网中的推送式组播的因特网组管理系统及其方法。 互联网群组管理系统，支持互联网组管理相对于分组流同时被发送到用户通过被动接入网访问同一节点的用户，其中至少一个用户访问单个节点，该系统包括 输入分组分类单元，对来自分组流的IPTV内容传输分组对应的多媒体内容分组进行分类，以及节目管理单元，构成具有分类多媒体内容分组的信息的广播节目表，基于构成的广播 节目表，由用户请求的请求节目的接收条件，以及输出与所请求节目对应的多媒体内容分组。

    Film formation method and apparatus for semiconductor process
    6.
    发明授权
    Film formation method and apparatus for semiconductor process 有权
    用于半导体工艺的成膜方法和装置

    公开(公告)号：US08119544B2

    公开(公告)日：2012-02-21

    申请号：US12318702

    申请日：2009-01-06

    Applicant: Kazuhide Hasebe ,  Nobutake Nodera ,  Eun-jo Lee

    Inventor： Kazuhide Hasebe ,  Nobutake Nodera ,  Eun-jo Lee

    IPC: H01L21/31 ,  H01L21/469 ,  H01L21/314

    CPC classification number: C23C16/345 ,  C23C16/45527 ,  C23C16/4554 ,  C23C16/45546 ,  H01L31/1868 ,  Y02E10/50 ,  Y02P70/521

    Abstract: A film formation process is performed to form a silicon nitride film on a target substrate within a process field configured to be selectively supplied with a first process gas containing a silane family gas and a second process gas containing a nitriding gas. The method is preset to compose the film formation process of a main stage with an auxiliary stage set at one or both of beginning and ending of the film formation process. The main stage includes an excitation period of supplying the second process gas to the process field while exciting the second process gas by an exciting mechanism. The auxiliary stage includes no excitation period of supplying the second process gas to the process field while exciting the second process gas by the exciting mechanism.

    Abstract translation: 执行成膜工艺以在被选择性地供给含有硅烷族气体的第一工艺气体和含有氮化气体的第二工艺气体的工艺区域内的目标衬底上形成氮化硅膜。 该方法被预设为构成主阶段的成膜过程，其中辅助级设置在成膜过程的开始和结束的一个或两个。 主阶段包括通过激励机构激励第二处理气体的第二处理气体向工艺场供给的激发期。 辅助级不包括通过激励机构激励第二工艺气体的第二工艺气体供给工艺场的激发周期。

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