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公开(公告)号：US20230224646A1
公开(公告)日：2023-07-13
申请号：US18010870
申请日：2020-06-30
发明人： Quanbo Zou , Maoqiang Dang , Dexin Wang
CPC分类号： H04R19/04 , H04R7/06 , H04R1/245 , H04R1/04 , H04R1/028 , H04R2201/003 , H04R2499/11 , H04R3/00
摘要： Disclosed in embodiments of the present disclosure are a capacitive MEMS microphone, a microphone unit and an electronic device. The capacitive MEMS microphone includes: a back electrode plate; a diaphragm; and a spacer for separating the back electrode plate from the diaphragm, wherein in a state where an operating bias is applied, a ratio of a static effective displacement of the diaphragm relative to a flat position to a thickness of the diaphragm is greater than or equal to 0.5.
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公开(公告)号：US20230353951A1
公开(公告)日：2023-11-02
申请号：US18010907
申请日：2020-06-30
发明人： Quanbo Zou , Maoqiang Dang , Dexin Wang
CPC分类号： H04R19/04 , H04R1/04 , H04R2201/003
摘要： Disclosed in embodiments of the present disclosure are a capacitive MEMS microphone, a microphone unit and an electronic device. The capacitive MEMS microphone includes: a back electrode plate; a diaphragm; and a spacer for separating the back electrode plate from the diaphragm, wherein in a state where no operating bias is applied, at least a portion of the diaphragm is pre-deviated in a direction away from the back electrode plate relative to a flat position.
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