公开(公告)号：US07134222B2

公开(公告)日：2006-11-14

申请号：US10863099

申请日：2004-06-07

Applicant: Geun-Soo An ,  Gi-Cheon Yoon

Inventor： Geun-Soo An ,  Gi-Cheon Yoon

IPC: F26B7/00

CPC classification number: H01L21/67784 ,  F26B15/12 ,  F26B25/004

Abstract: A transfer apparatus is provided for the transport of transfer objects such as glass substrates or semiconductor devices in which cleanliness and secure transport are of major concern. A plurality of air nozzles inject air through the plurality of air nozzles to hold a transfer object in place above or below the plurality of air nozzles without the plurality of air nozzles making contact with the transfer object. The plurality of air nozzles are positioned perpendicular to the transfer object to stop and/or engage the transfer object in a rest position. The plurality of air nozzles are inclined to a specified angle to move the transferred object in a desired direction. Advantageously, because the transfer object is moved without physical contact between the structure of the air nozzles and the transfer object, the transfer is secure, clean, and efficient.

Abstract translation: 提供了一种传送装置，用于传送诸如玻璃基板或半导体装置的转印物体，其中清洁和安全的运输是主要关注的。 多个空气喷嘴通过多个空气喷嘴喷射空气，以将传送物体保持在多个空气喷嘴的上方或下方，而不会使多个空气喷嘴与转印体接触。 多个空气喷嘴垂直于转印体定位，以在静止位置上停止和/或接合转印体。 多个空气喷嘴倾斜到特定的角度，以使所转移的物体沿期望的方向移动。 有利地，由于转印体在空气喷嘴的结构和转印体之间没有物理接触的情况下移动，所以转印是牢固，清洁和有效的。

公开(公告)号：US20050050752A1

公开(公告)日：2005-03-10

申请号：US10863099

申请日：2004-06-07

Applicant: Geun-Soo An ,  Gi-Cheon Yoon

Inventor： Geun-Soo An ,  Gi-Cheon Yoon

IPC: G02F1/13 ,  B65G49/06 ,  B65G51/03 ,  B65G53/02 ,  F26B15/12 ,  F26B25/00 ,  H01L21/677 ,  F26B19/00

CPC classification number: H01L21/67784 ,  F26B15/12 ,  F26B25/004

Abstract: A transfer apparatus is provided for the transport of transfer objects such as glass substrates or semiconductor devices in which cleanliness and secure transport are of major concern. A plurality of air nozzles inject air through the plurality of air nozzles to hold a transfer object in place above or below the plurality of air nozzles without the plurality of air nozzles making contact with the transfer object. The plurality of air nozzles are positioned perpendicular to the transfer object to stop and/or engage the transfer object in a rest position. The plurality of air nozzles are inclined to a specified angle to move the transferred object in a desired direction. Advantageously, because the transfer object is moved without physical contact between the structure of the air nozzles and the transfer object, the transfer is secure, clean, and efficient.

Abstract translation: 提供了一种传送装置，用于传送诸如玻璃基板或半导体装置的转印物体，其中清洁和安全的运输是主要关注的。 多个空气喷嘴通过多个空气喷嘴喷射空气，以将传送物体保持在多个空气喷嘴的上方或下方，而不会使多个空气喷嘴与转印体接触。 多个空气喷嘴垂直于转印体定位，以在静止位置上停止和/或接合转印体。 多个空气喷嘴倾斜到特定的角度，以使所转移的物体沿期望的方向移动。 有利地，由于转印体在空气喷嘴的结构和转印体之间没有物理接触的情况下移动，所以转印是牢固，清洁和有效的。

公开(公告)号：US20100253877A1

公开(公告)日：2010-10-07

申请号：US12662080

申请日：2010-03-30

Applicant: Sung Jin Lee ,  Jun Ho Lee ,  Gi Cheon Yoon

Inventor： Sung Jin Lee ,  Jun Ho Lee ,  Gi Cheon Yoon

IPC: G02F1/13357 ,  H01J9/50 ,  G02F1/13

CPC classification number: G02F1/1309

Abstract: When a defective pixel causing light leakage is detected in a flat display panel, an optical modulation region is formed in a substrate by emitting a laser beam such that a virtual image is displayed at a position corresponding to the defective pixel. Accordingly, quality of the flat display panel may be improved thereby increasing manufacturing process yield.

Abstract translation: 当在平面显示面板中检测到导致漏光的缺陷像素时，通过发射激光束在基板中形成光学调制区域，使得在与缺陷像素对应的位置处显示虚像。 因此，可以提高平板显示面板的质量，从而提高制造工艺的成品率。

公开(公告)号：US20060271216A1

公开(公告)日：2006-11-30

申请号：US11445093

申请日：2006-05-31

Applicant: In-Shik Shim ,  Min-Woo Yang ,  Gi-Cheon Yoon

Inventor： In-Shik Shim ,  Min-Woo Yang ,  Gi-Cheon Yoon

IPC: G06F19/00

CPC classification number: G05B23/0267 ,  G05B2219/25186 ,  G05B2219/31433 ,  G05B2219/31448 ,  G05B2219/45031 ,  H04W8/02 ,  H04W84/12

Abstract: In a production line for automatically conducting a process of manufacturing semiconductors or TFT-LCDs, short-range wireless (SRW) terminals are given to the workers arranged at the respective facilities to effect a signal transmission in accordance with a SRW communication protocol, and SRW access points are arranged at predetermined locations in the production line. The respective SRW terminals are connected to a central control server through the SRW access points at the relevant areas, and the call switching with respect to a plurality of other terminals is given thereto through the central control server. When a facility abnormality is detected, the occurrence of the abnormality is notified to the SRW terminal of the person in charge to speedily cope with the abnormality. A handover is selectively made between the SRW access points such that the worker continuously holds the communication using the SRW terminal even while moving. Accordingly, with the production line for automatically performing the process of manufacturing semiconductors or TFT-LCDs, the reciprocal communication and work cooperation between the workers are fluently made using the local area SRW communication technology.

Abstract translation: 在自动进行制造半导体或TFT-LCD的工艺的生产线中，短距离无线（SRW）终端被给予布置在各个设施处的工作人员以根据SRW通信协议进行信号传输，并且SRW 接入点被布置在生产线中的预定位置处。 相应的SRW终端通过相关区域的SRW接入点连接到中央控制服务器，并且通过中央控制服务器给予相对于多个其他终端的呼叫切换。 当检测到设备异常时，通知负责人的SRW端子，以便迅速应对异常。 选择性地在SRW接入点之间进行切换，使得即使在移动时，该工作者也使用SRW终端连续地保持通信。 因此，利用自动执行半导体或TFT-LCD制造工艺的生产线，使用局域SRW通信技术，流畅地进行了工作人员之间的相互交流和工作合作。

公开(公告)号：US20060078408A1

公开(公告)日：2006-04-13

申请号：US11246360

申请日：2005-10-07

Applicant: Won-Kie Chang ,  Gi-Cheon Yoon ,  Geun-Soo An ,  Young-Min Kee

Inventor： Won-Kie Chang ,  Gi-Cheon Yoon ,  Geun-Soo An ,  Young-Min Kee

IPC: B65G1/04

CPC classification number: H01J9/46 ,  H01L21/67017 ,  H01L21/67769 ,  H01L51/56

Abstract: An air current generated at a movement road does not flow into a shelf while a crane moves along the movement road since a system for manufacturing a flat display panel includes: a shelf positioned to both sides of a movement road, and accommodating a cassette; and a crane, moving along the movement road, transferring the cassette to the shelf and extracting the cassette therefrom; and a blocking pate mounted to both side portions of the crane so as to prevent air current from flowing into the crane.

Abstract translation: 由于用于制造平板显示面板的系统包括：位于移动道路两侧的架子，并且容纳盒子，在起重机沿着移动道路移动时，在运动道路处产生的气流不流入搁板。 以及起重机，其沿着所述移动道路移动，将所述盒子传送到所述架子并从其中提取所述盒; 以及安装在起重机的两侧的挡板，以防止气流流入起重机。

公开(公告)号：US08384844B2

公开(公告)日：2013-02-26

申请号：US12662080

申请日：2010-03-30

Applicant: Sung Jin Lee ,  Jun Ho Lee ,  Gi Cheon Yoon

Inventor： Sung Jin Lee ,  Jun Ho Lee ,  Gi Cheon Yoon

IPC: G02F1/1335

CPC classification number: G02F1/1309

Abstract: When a defective pixel causing light leakage is detected in a flat display panel, an optical modulation region is formed in a substrate by emitting a laser beam such that a virtual image is displayed at a position corresponding to the defective pixel. Accordingly, quality of the flat display panel may be improved thereby increasing manufacturing process yield.

Abstract translation: 当在平面显示面板中检测到导致漏光的缺陷像素时，通过发射激光束在基板中形成光学调制区域，使得在与缺陷像素对应的位置处显示虚像。 因此，可以提高平板显示面板的质量，从而提高制造工艺的成品率。

公开(公告)号：US07447559B2

公开(公告)日：2008-11-04

申请号：US10960192

申请日：2004-10-06

Applicant: Gi-Cheon Yoon ,  Geun-Soo An

Inventor： Gi-Cheon Yoon ,  Geun-Soo An

IPC: G03D3/00

CPC classification number: G03F7/30 ,  G03F7/3028

Abstract: In an apparatus and a method of forming a photoresist pattern, a photoresist-coating section coats a substrate with a photoresist composition to form a photoresist film. A light is irradiated onto the photoresist film by using an exposure section, and a developing section develops the photoresist film. A residue-sensing section senses a residue of the developed photoresist film to generate information of the residue corresponding to the sensed residue. A residue-removing section sprays a solvent in a region of the residue corresponding to the information of the residue to dissolve the residue, and the residue-removing section absorbs the residue dissolved by the solvent. Therefore, the residue is effectively removed by spraying the solvent in the region of the residue and absorbing the residue dissolved by the solvent.

Abstract translation: 在形成光致抗蚀剂图案的装置和方法中，光致抗蚀剂涂覆部分用光致抗蚀剂组合物涂覆基板以形成光致抗蚀剂膜。 通过使用曝光部分将光照射到光致抗蚀剂膜上，并且显影部分显影光致抗蚀剂膜。 残留物感测部分感测显影的光致抗蚀剂膜的残余物以产生对应于感测到的残余物的残余物的信息。 残留物除去部分在与残留物信息相对应的残留区域中喷射溶剂以溶解残余物，残渣除去部分吸收由溶剂溶解的残余物。 因此，通过在残留物的区域中喷洒溶剂并吸收由溶剂溶解的残留物来有效地除去残余物。

公开(公告)号：US07042553B2

公开(公告)日：2006-05-09

申请号：US10861006

申请日：2004-06-04

Applicant: Geun-soo An ,  Gi-cheon Yoon

Inventor： Geun-soo An ,  Gi-cheon Yoon

IPC: G03B27/58 ,  G03D5/00 ,  B65H1/00 ,  B65G49/07

CPC classification number: G03B27/58 ,  Y10S414/137 ,  Y10S414/14

Abstract: Disclosed herein is an apparatus for conveying substrates, which is capable of efficiently conveying large substrates and has a function to temporarily store the substrate in a buffer unit. The apparatus includes a substrate support unit, a conveying unit, and the buffer unit. The substrate support unit supports the substrate thereon. The conveying unit sequentially conveys the substrate support unit to a plurality of processing units. The buffer unit is provided at a predetermined portion of the conveying unit to move the substrate support unit upward away from the conveying unit in a vertical direction, thus temporarily storing the substrate support unit therein while spacing the substrate support unit apart from the conveying unit. The substrate conveying apparatus thus efficiently conveys the substrates, regardless of sizes of the substrates, while temporarily storing the substrates to buffer a difference in the processing time.

Abstract translation: 本文公开了一种用于输送基板的装置，其能够有效地输送大的基板，并且具有将基板临时存储在缓冲单元中的功能。 该装置包括基板支撑单元，输送单元和缓冲单元。 基板支撑单元在其上支撑基板。 传送单元将基板支撑单元顺序地传送到多个处理单元。 缓冲单元设置在输送单元的预定部分处，以使基板支撑单元沿垂直方向向上移动远离输送单元，从而将基板支撑单元临时存储在其中，同时将基板支撑单元与输送单元隔开。 因此，基板输送装置无论基板的尺寸如何有效地传送基板，同时临时存储基板以缓冲处理时间的差异。

公开(公告)号：US20050105992A1

公开(公告)日：2005-05-19

申请号：US10960869

申请日：2004-10-07

Applicant: Geun-Soo An ,  Gi-Cheon Yoon

Inventor： Geun-Soo An ,  Gi-Cheon Yoon

IPC: B65G49/06 ,  B65G1/00 ,  H01L21/673 ,  H01L21/677

CPC classification number: H01L21/6734 ,  H01L21/67769

Abstract: A substrate stocking apparatus is provided, which includes: a plurality of stockers, each stocker including a plurality of shelf plates that includes a plurality of supporting pins supporting the substrate and a plurality of vertical frames fixing and connecting the shelf plates; and an indexer taking a substrate into and out of the stockers.

Abstract translation: 本发明提供一种基板放置装置，其特征在于，包括：多个储料器，每个储料器包括多个搁板，所述多个搁板包括支撑所述基板的多个支撑销和固定并连接所述搁板的多个垂直框架; 以及将基材取入和离开储料器的分度器。

公开(公告)号：US07393159B2

公开(公告)日：2008-07-01

申请号：US10863064

申请日：2004-06-07

Applicant: Won-Kie Chang ,  Gi-Cheon Yoon ,  Geun-Soo An

Inventor： Won-Kie Chang ,  Gi-Cheon Yoon ,  Geun-Soo An

IPC: B65G51/00

CPC classification number: B65G49/065 ,  B65G2207/06 ,  B65G2249/02 ,  B65G2249/04 ,  H01L21/67784

Abstract: An inline transfer system and method are provided for the secure transport and efficient processing of substrates such as glass substrates or semiconductor devices. A rotary conveyor is provided that includes a plurality of air nozzles which inject air to move a substrate above the plurality of air nozzles without the plurality of air nozzles making contact with the substrate. At least two independent processing units are operably coupled to the rotary conveyor. Advantageously, because a plurality of substrates may be processed in parallel, greater efficiency and flexibility are provided. Because the substrate can be moved without physical contact between the structure of the air nozzles and the substrate, the transfer is secure, clean, and efficient.

Abstract translation: 提供了一种在线传输系统和方法，用于安全传输和有效处理诸如玻璃基板或半导体器件的基板。 提供一种旋转输送机，其包括多个空气喷嘴，其喷射空气以在多个空气喷嘴上方移动基板，而不会使多个空气喷嘴与基板接触。 至少两个独立的处理单元可操作地联接到旋转输送机。 有利地，由于可以并行处理多个基板，因此提供更高的效率和灵活性。 因为基板可以在空气喷嘴的结构和基板之间没有物理接触的情况下移动，所以转印是牢固，清洁和高效的。