公开(公告)号：US12034020B2

公开(公告)日：2024-07-09

申请号：US16969572

申请日：2020-05-15

Applicant: HANGZHOU MDK OPTO ELECTRONICS CO., LTD

Inventor： Wenzhi Ge ,  Yiwei Wang ,  Gang Wang ,  Kevin Weng ,  Hirokazu Yajima ,  Junnan Jiang

IPC: C23C16/40 ,  C23C16/02 ,  C23C16/455 ,  H01L27/146 ,  H04N23/54

CPC classification number: H01L27/14618 ,  C23C16/0227 ,  C23C16/402 ,  C23C16/403 ,  C23C16/405 ,  C23C16/45536 ,  C23C16/45553 ,  C23C16/45555 ,  H01L27/14625 ,  H01L27/14643 ,  H01L27/14685 ,  H04N23/54 ,  H01L27/14689

Abstract: A CVD preparation method for minimizing camera module dot defects includes: performing ultrasonic cleaning and drying on a base substrate to obtain a pre-treated base substrate; placing the pre-treated base substrate into a reaction chamber, evacuating, and introducing nitrogen or inert gas to slightly positive pressure; simultaneously introducing precursor I and precursor II at a temperature of 500-700° C. to deposit a low-refractive-index L layer on the base substrate; halting introduction of the precursor I and the precursor II, and purging the reaction chamber with nitrogen or the inert gas; introducing raw gas precursor III and precursor IV at a temperature of 600-800° C. to deposit a high-refractive-index H layer on the low-refractive-index L layer; and halting introduction of the precursor III and precursor IV, and purging the reaction chamber with nitrogen or inert gas; and cooling to room temperature to obtain an optical element with coating films having different refractive indices.

公开(公告)号：US20200264338A1

公开(公告)日：2020-08-20

申请号：US16736784

申请日：2020-01-07

Applicant: HANGZHOU MDK OPTO ELECTRONICS CO.,LTD ,  Corporation N*W

Inventor： Wenzhi Ge ,  Ryuji Kimura

IPC: G02B1/11 ,  G02B5/02

Abstract: An antireflection film is arranged on a surface of a substrate layer. The antireflection film includes a multilayer film arranged on the surface of the substrate layer and a protective film arranged outside the multilayer film. The multilayer film is formed by stacking two or three low-reflection layers. Two protective films are successively arranged outside the multilayer film of the antireflection film. An optical component includes the antireflection film arranged on both sides or one side of an optical filter of the optical component. The high-performance antireflection film can be obtained with respect to a broadband wavelength ranging from 400 nm to 800 nm, and the antireflection film can reduce the occurrence of ghosts or flare when used in an optical system.

公开(公告)号：US11804501B2

公开(公告)日：2023-10-31

申请号：US16969573

申请日：2020-05-18

Applicant: HANGZHOU MDK OPTO ELECTRONICS CO., LTD

Inventor： Wenzhi Ge ,  Yiwei Wang ,  Gang Wang ,  Kevin Weng ,  Hirokazu Yajima ,  Junnan Jiang

IPC: C23C16/02 ,  C23C16/40 ,  C23C16/455 ,  H04N23/54 ,  H01L27/146

CPC classification number: H01L27/14618 ,  C23C16/0227 ,  C23C16/402 ,  C23C16/403 ,  C23C16/405 ,  C23C16/45536 ,  C23C16/45553 ,  C23C16/45555 ,  H01L27/14625 ,  H01L27/14643 ,  H01L27/14685 ,  H04N23/54 ,  H01L27/14689

Abstract: An ALD preparation method for eliminating camera module dot defects includes: placing a base substrate in a reaction chamber, and heating to 100-400° C.; introducing a first reaction precursor into the reaction chamber to chemically adsorb the first reaction precursor on the base substrate to form a first film layer; removing the excess first reaction precursor, and purging with inert gas; introducing a second reaction precursor into the reaction chamber to create a reaction between the second reaction precursor and the first reaction precursor to form a first refractive index layer; removing the excess second reaction precursor and a by-product of the reaction, and purging with inert gas; introducing a third reaction precursor into the reaction chamber to chemically adsorb the third reaction precursor on a surface of the first refractive index layer to form a second film layer; and removing the excess third reaction precursor, and purging with inert gas.

公开(公告)号：US20220302193A1

公开(公告)日：2022-09-22

申请号：US16969572

申请日：2020-05-15

Applicant: HANGZHOU MDK OPTO ELECTRONICS CO.,LTD

Inventor： Wenzhi GE ,  Yiwei WANG ,  Gang WANG ,  Kevin WENG ,  Hirokazu YAJIMA ,  Junnan JIANG

IPC: H01L27/146 ,  H04N5/225 ,  C23C16/02 ,  C23C16/40 ,  C23C16/455

Abstract: A CVD preparation method for minimizing camera module dot defects includes: performing ultrasonic cleaning and drying on a base substrate to obtain a pre-treated base substrate; placing the pre-treated base substrate into a reaction chamber, evacuating, and introducing nitrogen or inert gas to slightly positive pressure; simultaneously introducing precursor I and precursor II at a temperature of 500-700° C. to deposit a low-refractive-index L layer on the base substrate; halting introduction of the precursor I and the precursor II, and purging the reaction chamber with nitrogen or the inert gas; introducing raw gas precursor III and precursor IV at a temperature of 600-800° C. to deposit a high-refractive-index H layer on the low-refractive-index L layer; and halting introduction of the precursor III and precursor IV, and purging the reaction chamber with nitrogen or inert gas; and cooling to room temperature to obtain an optical element with coating films having different refractive indices.

公开(公告)号：US11204446B2

公开(公告)日：2021-12-21

申请号：US16736784

申请日：2020-01-07

Applicant: HANGZHOU MDK OPTO ELECTRONICS CO.,LTD ,  Corporation NW

Inventor： Wenzhi Ge ,  Ryuji Kimura

IPC: G02B1/11 ,  G02B5/02 ,  G02B1/111 ,  G02B1/14

Abstract: An antireflection film is arranged on a surface of a substrate layer. The antireflection film includes a multilayer film arranged on the surface of the substrate layer and a protective film arranged outside the multilayer film. The multilayer film is formed by stacking two or three low-reflection layers. Two protective films are successively arranged outside the multilayer film of the antireflection film. An optical component includes the antireflection film arranged on both sides or one side of an optical filter of the optical component. The high-performance antireflection film can be obtained with respect to a broadband wavelength ranging from 400 nm to 800 nm, and the antireflection film can reduce the occurrence of ghosts or flare when used in an optical system.

公开(公告)号：US20220302200A1

公开(公告)日：2022-09-22

申请号：US16969573

申请日：2020-05-18

Applicant: HANGZHOU MDK OPTO ELECTRONICS CO.,LTD

Inventor： Wenzhi GE ,  Yiwei WANG ,  Gang WANG ,  Kevin WENG ,  Hirokazu YAJIMA ,  Junnan JIANG

IPC: H01L27/146 ,  C23C16/455 ,  C23C16/40

Abstract: An ALD preparation method for eliminating camera module dot defects includes: placing a base substrate in a reaction chamber, and heating to 100-400° C.; introducing a first reaction precursor into the reaction chamber to chemically adsorb the first reaction precursor on the base substrate to form a first film layer; removing the excess first reaction precursor, and purging with inert gas; introducing a second reaction precursor into the reaction chamber to create a reaction between the second reaction precursor and the first reaction precursor to form a first refractive index layer; removing the excess second reaction precursor and a by-product of the reaction, and purging with inert gas; introducing a third reaction precursor into the reaction chamber to chemically adsorb the third reaction precursor on a surface of the first refractive index layer to form a second film layer; and removing the excess third reaction precursor, and purging with inert gas.