公开(公告)号：US20140239771A1

公开(公告)日：2014-08-28

申请号：US14236732

申请日：2012-08-01

申请人： Reinhard Hübner ,  Harry Marth

发明人： Reinhard Hübner ,  Harry Marth

IPC分类号： H02N2/12

CPC分类号： H02N2/123 ,  H02N2/101

摘要： A piezoelectric rotary drive for a shaft, is disclosed which can include a piezoelectric actuator and a coupling portion for driving the shaft as a stick-slip drive. To transmit greater contact forces between the frame and the shaft, at least one piezoelectric actuator and an adjustable and/or deformable frame with at least one coupling portion can be coupled to the shaft in a force-locked manner so as to accomplish a stick-slip drive, wherein the frame translates a piezoelectric deformation of the actuator mechanically such that the coupling portion rotates about the axis of the shaft over at least a part of the circumference of the shaft.

摘要翻译： 公开了一种用于轴的压电旋转驱动器，其可以包括压电致动器和用于作为粘滑驱动器驱动轴的联接部分。 为了在框架和轴之间传递更大的接触力，至少一个压电致动器和具有至少一个联接部分的可调节和/或可变形框架可以以锁定的方式联接到轴上， 滑动驱动器，其中框架机械地平移致动器的压电变形，使得联接部分围绕轴的轴线在轴的圆周的至少一部分上旋转。

公开(公告)号：US4835434A

公开(公告)日：1989-05-30

申请号：US97886

申请日：1987-09-17

申请人： Harry Marth

发明人： Harry Marth

IPC分类号： G01B3/18 ,  G12B5/00 ,  H01L41/09 ,  H02N2/04

CPC分类号： H02N2/043 ,  G01B3/18 ,  G12B5/00

摘要： The invention relates to a piezoelectric positioning element having a micrometer screw, which is combined with a piezotranslator via an intermediate part that is adjustable in length. The stationary portion and the piezoelectrically adjustable portion of the intermediate part are joined to one another by means of a parallel spring guide. The translator may also be made of an electrostrictive or magnetostrictive material.

摘要翻译： 本发明涉及一种具有千分尺螺丝的压电定位元件，其经由可调节长度的中间部分与压电传感器组合。 中间部分的固定部分和压电可调节部分通过平行的弹簧引导件彼此接合。 翻译器也可以由电致伸缩或磁致伸缩材料制成。

公开(公告)号：US09557518B2

公开(公告)日：2017-01-31

申请号：US14233186

申请日：2012-07-05

申请人： Harry Marth

发明人： Harry Marth

IPC分类号： G02B7/04 ,  G02B21/24

CPC分类号： G02B7/04 ,  G02B21/242 ,  G02B21/244

摘要： The invention relates to a method and to an arrangement for operating a dynamic nano focusing system for use thereof in the field of microscopy, interferometry or similar applications, wherein the nano focusing system comprises a lever-transmission piezo actuator and a frictionless guide based on a resiliently deformable solid body joint which is connected to a mounting unit, in particular for a lens, in order to implement the desired adjustment paths for the focusing. According to the invention, in order to increase the dynamics during the focusing process, a secondary fine adjustment movement is superimposed on the primary adjustment movement, said secondary fine adjustment movement having a smaller adjustment path but higher frequency than the primary adjustment movement, wherein, when the fine adjustment is carried out, a determination is made as to whether the focusing result changes, in order to specify according thereto the amount and/or the direction of the primary adjustment movement.

摘要翻译： 本发明涉及一种用于操作在显微镜，干涉测量或类似应用领域中使用的动态纳米聚焦系统的方法和装置，其中纳米聚焦系统包括杠杆传输压电致动器和基于 可弹性变形的实体接头，其连接到安装单元，特别是用于透镜，以便实现用于聚焦的期望的调节路径。 根据本发明，为了在聚焦过程中增加动态，二次微调运动叠加在主调节运动上，所述二次微调运动具有比主调节运动更小的调节路径但频率更高的频率，其中， 当执行微调时，确定聚焦结果是否改变，以便根据其指定一次调节运动的量和/或方向。

公开(公告)号：US20140198381A1

公开(公告)日：2014-07-17

申请号：US14233186

申请日：2012-07-05

申请人： Harry Marth

发明人： Harry Marth

IPC分类号： G02B7/04

CPC分类号： G02B7/04 ,  G02B21/242 ,  G02B21/244

摘要： The invention relates to a method and to an arrangement for operating a dynamic nano focusing system for use thereof in the field of microscopy, interferometry or similar applications, wherein the nano focusing system comprises a lever-transmission piezo actuator and a frictionless guide based on a resiliently deformable solid body joint which is connected to a mounting unit, in particular for a lens, in order to implement the desired adjustment paths for the focusing. According to the invention, in order to increase the dynamics during the focusing process, a secondary fine adjustment movement is superimposed on the primary adjustment movement, said secondary fine adjustment movement having a smaller adjustment path but higher frequency than the primary adjustment movement, wherein, when the fine adjustment is carried out, a determination is made as to whether the focusing result changes, in order to specify according thereto the amount and/or the direction of the primary adjustment movement.

摘要翻译： 本发明涉及一种用于操作在显微镜，干涉测量或类似应用领域中使用的动态纳米聚焦系统的方法和装置，其中纳米聚焦系统包括杠杆传输压电致动器和基于 可弹性变形的实体接头，其连接到安装单元，特别是用于透镜，以便实现用于聚焦的期望的调节路径。 根据本发明，为了在聚焦过程中增加动态，二次微调运动叠加在主调节运动上，所述二次微调运动具有比主调节运动更小的调节路径但频率更高的频率，其中， 当执行微调时，确定聚焦结果是否改变，以便根据其指定一次调节运动的量和/或方向。

公开(公告)号：US20100013354A1

公开(公告)日：2010-01-21

申请号：US12309990

申请日：2007-08-13

申请人： Harry Marth ,  Rong Liang ,  Patrick Pertsch

发明人： Harry Marth ,  Rong Liang ,  Patrick Pertsch

IPC分类号： H01L41/09 ,  H02N2/04

CPC分类号： H02N2/062 ,  H02N2/028

摘要： The invention relates to an adjusting device with high position resolution, even in the nano- or subnanometer range and a regulating distance of a few micrometers up to several hundred millimeters, wherein PZT-solid state actuators in a closed-loop control circuit are used for the main control direction, the positions thereof being determined by high resolution sensors and the PZT-solid state actuators are in connection with a platform (2) via joints. For the compensation of position errors occurring perpendicular to the individual position, additional actuators (5) on the basis of piezoelectric single crystals are intended according to the invention. The single crystals are actuated according to stored values in an error table, wherein the respective control value results as a function of the main control axis, however with reversed gradient signs, and the additional actuators are connected to the adjusting device platform by a correcting plate (4).

摘要翻译： 本发明涉及具有高定位分辨率的调节装置，即使在纳米级或亚微米范围内，调节距离为几微米至几百毫米，其中闭环控制电路中的PZT-固态致动器用于 主控制方向，其位置由高分辨率传感器和PZT固态致动器确定，通过接头与平台（2）连接。 对于垂直于单独位置发生的位置误差的补偿，根据本发明意图是基于压电单晶的附加致动器（5）。 根据误差表中的存储值来激活单晶体，其中相应的控制值作为主控制轴的函数，然而具有反向梯度符号，并且附加致动器通过校正板连接到调节装置平台 （4）。

公开(公告)号：US06534760B2

公开(公告)日：2003-03-18

申请号：US09880014

申请日：2001-06-14

申请人： Klaus-Dieter Mueller ,  Harry Marth

发明人： Klaus-Dieter Mueller ,  Harry Marth

IPC分类号： H01J516

CPC分类号： F16F1/027 ,  F16F2230/34 ,  G02B7/008 ,  G02B7/023 ,  G02B7/028

摘要： An arrangement for a temperature-compensated multi-dimensional micropositioning of mutually position-defined optical components including a guide unit for housing the optical components and a plurality of piezo actors. The guide unit includes two spaced plates or rings. Also included is three equally spaced solid joints arranged or integrated between the rings or plates, and stack-type piezo actors secured in a neighbouring relationship with the solid joints in such a manner that actuation forces act on the rings or plates. Further, at least the surfaces of the rings or plates accommodating the optical components are coated with a material corresponding to that of the optical components, the guide unit and the optical components are made from materials with essentially the same temperature coefficients, and one stack-type piezo actor is arranged between two solid joints.

摘要翻译： 用于相互定位的光学部件的温度补偿多维微定位的装置，包括用于容纳光学部件的引导单元和多个压电致动器。 引导单元包括两个间隔开的板或环。 还包括在环或板之间布置或集成的三个相等间隔的实心接头，以及以致动力作用在环或板上的方式固定在与实心接头相邻的关系中的堆叠式压电作用体。 此外，容纳光学部件的环或板的至少表面涂覆有与光学部件相对应的材料，引导单元和光学部件由具有基本上相同温度系数的材料制成， 型压电驱动器布置在两个实心接头之间。

公开(公告)号：US09106158B2

公开(公告)日：2015-08-11

申请号：US14236732

申请日：2012-08-01

申请人： Reinhard Hübner ,  Harry Marth

发明人： Reinhard Hübner ,  Harry Marth

IPC分类号： H01L41/09 ,  H02N2/00 ,  H02N2/12 ,  H02N2/10

CPC分类号： H02N2/123 ,  H02N2/101

摘要： A piezoelectric rotary drive for a shaft, is disclosed which can include a piezoelectric actuator and a coupling portion for driving the shaft as a stick-slip drive. To transmit greater contact forces between the frame and the shaft, at least one piezoelectric actuator and an adjustable and/or deformable frame with at least one coupling portion can be coupled to the shaft in a force-locked manner so as to accomplish a stick-slip drive, wherein the frame translates a piezoelectric deformation of the actuator mechanically such that the coupling portion rotates about the axis of the shaft over at least a part of the circumference of the shaft.

摘要翻译： 公开了一种用于轴的压电旋转驱动器，其可以包括压电致动器和用于作为粘滑驱动器驱动轴的联接部分。 为了在框架和轴之间传递更大的接触力，至少一个压电致动器和具有至少一个联接部分的可调节和/或可变形框架可以以锁定的方式联接到轴上， 滑动驱动器，其中框架机械地平移致动器的压电变形，使得联接部分围绕轴的轴线在轴的圆周的至少一部分上旋转。

公开(公告)号：US06800984B2

公开(公告)日：2004-10-05

申请号：US10166660

申请日：2002-06-12

申请人： Harry Marth

发明人： Harry Marth

IPC分类号： H01L4108

CPC分类号： H02N2/06 ,  H01L41/083 ,  H01L41/0913 ,  H02N2/021

摘要： A piezo linear drive including a group of piezo actuator stacks configured to drive a moving member located in a guidance device, and located on a joint substrate in a hybrid arrangement; wherein within a stack extending from the substrate a first stack part is configured as a longitudinal actuator and a second stack part is configured as a shearing actuator, the second stack part is equipped with a wear-resistant end plate which is in at least one of a clamping contact and shearing contact with the moving member, and at least two identical motors are located adjacent to each other in order to perform alternating clamping and advancing movements during a stepping operation.

摘要翻译： 一种压电线性驱动器，包括一组压电致动器堆叠，其构造成驱动位于引导装置中的移动构件，并且位于混合布置中的接合基板上; 其中在从所述基板延伸的堆叠内，第一堆叠部分被构造为纵向致动器，并且第二堆叠部分被构造为剪切致动器，所述第二堆叠部分配备有耐磨端板，所述耐磨端板处于至少一个 与移动构件的夹紧接触和剪切接触，并且至少两个相同的电动机彼此相邻地定位，以便在步进操作期间执行交替的夹紧和前进运动。

公开(公告)号：US5424597A

公开(公告)日：1995-06-13

申请号：US208152

申请日：1994-03-08

申请人： Rainer Gloss ,  Harry Marth

发明人： Rainer Gloss ,  Harry Marth

IPC分类号： H01L41/09 ,  H02N2/04

CPC分类号： H02N2/021

摘要： An adjusting device with a piezo drive is provided with two piezo translators which are brought into functional connection with a driven element by means of a spring element. A transmission of motion occurs corresponding to the change in length of the piezo translators, while resetting of the piezo translators occurs by removing the functional connection through their associated control links. Because of the continuous biasing of the spring element, a secure engagement of the driven element is guaranteed. As a result, the high precision requirements on the control links and their positioning displacements, which would otherwise be necessary for engagement, can be displaced with.

摘要翻译： 具有压电驱动器的调节装置设置有两个压电转换器，其通过弹簧元件与被驱动元件功能连接。 当压电转换器的长度变化对应于运动的传播时，通过通过其相关联的控制链路去除功能连接而发生压电转换器的复位。 由于弹簧元件的连续偏置，所以可以保证被驱动元件的牢固接合。 因此，对于控制链路及其定位位移的高精度要求（否则对于接合来说是必要的）可以随之移动。