利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

4 条记录 (耗时 0.03 秒)

    Modified reaction chamber and improved gas flushing method in rapid thermal processing apparatus
    2.
    发明授权
    Modified reaction chamber and improved gas flushing method in rapid thermal processing apparatus 失效
    快速热处理设备改良反应室和改进气体冲洗方法

    公开(公告)号：US5580830A

    公开(公告)日：1996-12-03

    申请号：US387220

    申请日：1995-02-13

    申请人： Zsolt Nenyei ,  Helmut Merkle ,  Andreas Tillmann

    发明人： Zsolt Nenyei ,  Helmut Merkle ,  Andreas Tillmann

    IPC分类号： C23C16/44 ,  H01L71/324

    CPC分类号： C23C16/4408 ,  C23C16/4401 ,  Y10S438/935

    摘要： A reaction chamber for a Rapid Thermal Processing (RTP) system contains an aperture to allow introduction and removal of the object to be processed. The cross sectional area of the aperture is significantly less than the cross sectional area of the reaction chamber. A method of flushing the reaction chamber, using a short time laminar flow of the flush gas, is used in combination with the aperture to increase the throughput of the RTP system.

    摘要翻译： 用于快速热处理（RTP）系统的反应室包含允许引入和去除被处理物体的孔。 孔的横截面积显着小于反应室的横截面面积。 使用冲洗气体的短时间层流冲洗反应室的方法与孔径结合使用以增加RTP系统的生产量。

    Mobile current consumer device
    3.
    发明授权
    Mobile current consumer device 失效
    移动当前消费者设备

    公开(公告)号：US4079262A

    公开(公告)日：1978-03-14

    申请号：US741977

    申请日：1976-11-15

    申请人： Helmut Merkle

    发明人： Helmut Merkle

    IPC分类号： F41G3/00 ,  F01P1/02 ,  F01P5/06 ,  F02B63/04 ,  H02P9/04

    CPC分类号： F01P1/02 ,  F02B63/04 ,  F02B2063/045

    摘要： A mobile current consumer device, especially a fire control device for artillery- and/or rocket weapons, comprising a current generator unit insertable into a receiving compartment thereof. In the installed condition of the current generator unit, at least two spatially separated cooling air currents can be delivered to the current generator unit, and removed in the form of heated air currents spatially separated from one another. The one cooling air current can be delivered to an internal combustion engine of the current consumer device provided with a blower by means of an air infeed channel having a suction opening facing in the direction of travel. Such air current is then removable as heated air from the cooling casing surrounding the engine through the floor of the current generator unit which is extensively open at the region of the engine and by means of at least one opening provided in the floor of the receiving compartment. The other cooling air current entering by way of a suction opening facing such direction of travel can be withdrawn by at least one blower arranged at a side opposite the rear wall of the current generator unit, through a diffuser equipped with a radial fan. This cooling air current is deliverable by the radial fan to an inner compartment of the current generator unit and is removable as heated air through the extensively open rear wall.

    摘要翻译： 一种移动电流消费装置，尤其是用于火炮和/或火箭武器的消防装置，包括可插入其接收舱的当前发电机单元。 在当前发电机组的安装状态下，可以将至少两个空间分离的冷却气流输送到电流发电机单元，并以空间上彼此分离的加热空气流的形式去除。 一个冷却气流可以通过具有面向行进方向的吸入口的进气通道输送到设置有鼓风机的当前消费者装置的内燃机。 然后，这种空气流可以作为来自围绕发动机的冷却壳体的热空气被移除通过当前发电机单元的地板，其在发动机的区域处被广泛地打开，并且借助于设置在接收隔室的地板中的至少一个开口 。 通过面向这种行进方向的吸入口进入的另一个冷却气流可以通过配备有径向风扇的扩散器通过布置在当前发电机单元后壁的一侧的至少一个鼓风机排出。 该冷却气流可由径向风扇输送到电流发生器单元的内部隔室，并可通过大开口的后壁作为加热空气移动。