公开(公告)号：US5841235A

公开(公告)日：1998-11-24

申请号：US866551

申请日：1997-05-30

Applicant: Vladimir Engelko ,  Harald Giese ,  Georg Muller ,  Sven Schalk ,  Christoph Schultheiss ,  Hermann Wurz

Inventor： Vladimir Engelko ,  Harald Giese ,  Georg Muller ,  Sven Schalk ,  Christoph Schultheiss ,  Hermann Wurz

IPC: H01J3/02 ,  H01J27/08 ,  H01J37/077 ,  H01J37/08 ,  H01J37/00

CPC classification number: H01J37/08 ,  H01J27/08 ,  H01J3/025 ,  H01J37/077

Abstract: In a source for the generation of large-area pulsed ion or electron beams from an anode discharge electrode which has openings receiving discharge electrodes forming a vacuum arc plasma source, the discharge is safely triggered by a load which determines the total current and which consists of a parallel circuit including an ohmic resistor and a capacitor wherein the load output is adapted to the internal resistance of the pulse voltage generator. With a dimensioning of the electrical components taking into consideration given limits, a homogeneous beam of charged particles is obtained wherein the particle composition can be all the same or a homogeneous mixture of different particles depending on the choice of electrode materials.

Abstract translation: 在用于从具有接收形成真空电弧等离子体源的放电电极的开口的阳极放电电极产生大面积脉冲离子或电子束的源中，该放电由确定总电流的负载安全地触发，并且由负载 包括欧姆电阻和电容器的并联电路，其中负载输出适合于脉冲电压发生器的内部电阻。 考虑到给定极限的电气元件的尺寸，得到均匀的带电粒子束，其中根据电极材料的选择，颗粒组成可以是全部相同的或不同颗粒的均匀混合物。