公开(公告)号：US20150136583A1

公开(公告)日：2015-05-21

申请号：US14404365

申请日：2013-06-11

Applicant: NOIVION S.R.L.

Inventor： Libuse Skocdopolova

IPC: H01J37/32 ,  C23C14/34

CPC classification number: H01J37/3244 ,  C23C14/34 ,  H01J37/077 ,  H01J37/18 ,  H01J37/301 ,  H01J37/3053 ,  H01J37/315 ,  H01J37/34 ,  H01J2237/3137

Abstract: A device (2; 2I; 2II; 2IV; 2V; 2VI; 2VII; 2VIII) for generating plasma and for directing an electron beam towards a target (3); the device (2; 2I; 2II; 2IV; 2V; 2VI; 2VII; 2VIII) comprises a hollow element (5); an activation group (21), which is designed to impose a difference in potential between the hollow element (5) and another element which is separate from it, in such a way as to direct the electron beam towards said separate element; and a de Laval nozzle (23), having at least one tapered portion (13), which is tapered towards the separate element and is designed to accelerate a gas flow towards the separate element.

Abstract translation: 用于产生等离子体并用于将电子束引向目标（3）的装置（2; 2I; 2II; 2IV; 2V; 2VI; 2VII; 2VIII） 所述装置（2; 2I; 2II; 2IV; 2V; 2VI; 2VII; 2VIII）包括中空元件（5）; 激活组（21），其被设计成在中空元件（5）和与其分离的另一元件之间施加电位差，以将电子束引向所述分离元件; 和脱拉瓦尔喷嘴（23），其具有至少一个渐缩部分（13），该渐缩部分（13）朝着分离的元件逐渐变细，并且被设计成加速朝着分离元件的气流。

公开(公告)号：US08748773B2

公开(公告)日：2014-06-10

申请号：US12546785

申请日：2009-08-25

Applicant: Robin M. Forbes Jones

Inventor： Robin M. Forbes Jones

IPC: H01J37/077 ,  H01J37/305 ,  B22D11/11 ,  C22B9/04

CPC classification number: C22B4/005 ,  B22D11/11 ,  C22B9/04 ,  C22B9/226 ,  C22B9/228 ,  F27B3/08 ,  F27B3/20 ,  F27B5/04 ,  F27D99/0006 ,  H01J37/077 ,  H01J37/305 ,  H01J2237/15 ,  H01J2237/3128

Abstract: An apparatus for melting an electrically conductive metallic material comprises an auxiliary ion plasma electron emitter configured to produce a focused electron field including a cross-sectional profile having a first shape. The apparatus further comprises a steering system configured to direct the focused electron field to impinge the focused electron field on at least a portion of the electrically conductive metallic material to at least one of melt or heat any solidified portions of the electrically conductive metallic material, any solid condensate within the electrically conductive metallic material, and/or regions of a solidifying ingot.

Abstract translation: 用于熔化导电金属材料的装置包括配置成产生聚焦电子场的辅助离子等离子体电子发射体，其包括具有第一形状的横截面轮廓。 该装置还包括转向系统，其被配置为引导聚焦的电子场，将聚焦的电子场撞击在导电金属材料的至少一部分上，以将至少一个熔融或加热导电金属材料的任何固化部分，任何 在导电金属材料内的固体冷凝物，和/或固化锭的区域。

公开(公告)号：US20130162134A1

公开(公告)日：2013-06-27

申请号：US13821887

申请日：2011-09-08

Applicant: Goesta Mattausch ,  Peter Feinaeugle ,  Volker Kirchhoff ,  Dieter Weiske ,  Henrik Flaske ,  Rainer Zeibe

Inventor： Goesta Mattausch ,  Peter Feinaeugle ,  Volker Kirchhoff ,  Dieter Weiske ,  Henrik Flaske ,  Rainer Zeibe

IPC: H01J29/56 ,  H01J29/00

CPC classification number: H01J37/075 ,  H01J3/025 ,  H01J37/077 ,  H01J2237/3104 ,  H01J2237/3128 ,  H01J2237/3132

Abstract: The invention relates to a device for producing an electron beam, comprising a housing (12), which delimits a space (13) that can be evacuated and has an electron beam outlet opening; an inlet (16) for feeding a process gas into the space (13) that can be evacuated; a planar cathode (14) and an anode (15), which are arranged in the space (13) that can be evacuated and between which a glow-discharge plasma can be produced by means of an applied electrical voltage, wherein ions can be accelerated from the glow-discharge plasma onto the surface of the cathode (14). The cathode has a first part (14a) made of a first material, which forms a centrally arranged first surface region of the cathode (14), and a second part (14b) made of a second material, which forms a second surface region of the cathode (14) that encloses the first surface region. The first material can be heated by the impingement with accelerated ions to a temperature at which electrons escape the first material predominantly due to thermionic emission.

Abstract translation: 本发明涉及一种用于制造电子束的装置，包括：外壳（12），其限定可抽真空并具有电子束出口的空间（13）; 用于将处理气体进料到可以抽空的空间（13）中的入口（16）; 平面阴极（14）和阳极（15），其布置在可以抽真空的空间（13）中，并且可以通过施加的电压产生辉光放电等离子体，其中可以加速离子 从辉光放电等离子体到阴极（14）的表面。 阴极具有由第一材料制成的第一部分（14a），其形成阴极（14）的居中布置的第一表面区域和由第二材料制成的第二部分（14b），第二部分形成第二表面区域 封闭第一表面区域的阴极（14）。 主要由于热离子发射，第一种材料可以通过加速离子的冲击加热至电子逸出第一种材料的温度。

公开(公告)号：US20050184257A1

公开(公告)日：2005-08-25

申请号：US10784315

申请日：2004-02-20

Applicant: Khaled Elsheref ,  Alexandros Demos ,  Hichem M'saad

Inventor： Khaled Elsheref ,  Alexandros Demos ,  Hichem M'saad

IPC: H01J37/304

CPC classification number: H01J37/077 ,  H01J37/304 ,  H01J2237/06366 ,  H01J2237/30433

Abstract: One embodiment of the present invention is a method for characterizing an electron beam treatment apparatus that includes: (a) e-beam treating one or more of a predetermined type of wafer or substrate utilizing one or more sets of electron beam treatment parameters; (b) making post-electron beam treatment measurements of intensity of a probe beam reflected from the surface of the one or more wafers in which thermal and/or plasma waves have been induced; and (c) developing data from the post-electron beam treatment measurements that provide insight into performance of the electron beam treatment apparatus.

Abstract translation: 本发明的一个实施例是一种用于表征电子束处理装置的方法，其包括：（a）利用一组或多组电子束处理参数电子束处理预定类型的晶片或衬底中的一种或多种; （b）进行电子束处理测量从已经引起热和/或等离子体波的一个或多个晶片的表面反射的探针光束的强度; 和（c）从后期电子束处理测量中开发数据，其提供对电子束处理设备的性能的洞察。

公开(公告)号：US20020101159A1

公开(公告)日：2002-08-01

申请号：US09988818

申请日：2001-11-20

Inventor： Martin Closs ,  Johann Muller

IPC: H01J011/00

CPC classification number: H01J37/077 ,  H01J3/025 ,  H01J2237/0041

Abstract: An inductively coupled high-frequency electron source is disclosed having a plasma chamber, which is open at least at a first end, the total surface of the open regions of the plasma chamber defined by Ao, and having a gas inlet for a gas to be ionized, as well as a high-frequency coil. The interior wall of the plasma chamber is formed at least partially by conductive regions which are connected with a current source, the total surface of the conductive regions defined by Ac, and the ratio of the surface amounts Ao to Ac not exceeding a defined maximal value.

Abstract translation: 公开了一种电感耦合高频电子源，其具有等离子体室，该等离子体室至少在第一端开放由Ao限定的等离子体室的开口区域的总表面，并具有用于气体的气体入口 电离，以及高频线圈。 等离子体室的内壁至少部分地由与电流源连接的导电区域，由Ac限定的导电区域的总表面，以及表面量Ao与Ac的比值不超过规定的最大值 。

公开(公告)号：US5049784A

公开(公告)日：1991-09-17

申请号：US527946

申请日：1990-05-24

Applicant: Masahiko Matsudo

Inventor： Masahiko Matsudo

IPC: H01J27/08 ,  H01J27/20 ,  H01J37/077 ,  H01J37/08 ,  H01L21/265

CPC classification number: H01J27/08 ,  H01J37/077

Abstract: An electron generating apparatus for an ion source for example, which is capable of prolonging service life and facilitating the exchange of its filament has been proposed. The electron generating apparatus includes an electron generating chamber having a discharging gas supply hole and electron extracting hole, a pair of conductive filament support members mounted in the chamber through an insulating plate, and a filament detachably fixed on the filament support members. At least one of the filament support members is provided with an overhang to cover at least part of a region between the lower ends of the filament.

Abstract translation: 已经提出了例如能够延长使用寿命并促进其灯丝交换的用于离子源的电子发生装置。 电子发生装置包括具有放电气体供给孔和电子提取孔的电子发生室，通过绝缘板安装在室中的一对导电细丝支撑构件和可拆卸地固定在灯丝支撑构件上的灯丝。 长丝支撑构件中的至少一个设置有突出部，以覆盖长丝的下端之间的区域的至少一部分。

公开(公告)号：US4335314A

公开(公告)日：1982-06-15

申请号：US175833

申请日：1980-08-05

Applicant: Jochen Geerk ,  Fritz Ratzel

Inventor： Jochen Geerk ,  Fritz Ratzel

IPC: H01J37/077 ,  H01J37/317 ,  H01L21/263 ,  H01J3/00

CPC classification number: H01J37/077

Abstract: A generator for pulsed electron beams of the type including a vacuum chamber for performing high voltage discharges, cathode and anode electrodes, for irradiating a sample with accelerated charge carriers, provided in the vacuum chamber, and a first high voltage capacitor connected between the cathode and anode electrodes to serve as the voltage source for the high voltage discharge between the electrodes. The generator is further provided with an arrangement for generating an auxiliary discharge which initiates the discharge process between the cathode and the anode electrodes, which arrangement includes a trigger electrode and a second high voltage capacitor which can be connected between the cathode electrode and the trigger electrode as an energy source for the auxiliary discharge; the distance between the cathode electrode and the trigger electrode being such that when the second or trigger capacitor is conductively connected between the trigger and cathode electrodes, a sparkover is produced therebetween, causing a trigger plasma to be formed which initiates the high voltage discharge. Moreover, the cathode electrode is provided with a central bore through which the trigger plasma can exit into the discharge chamber formed between the cathode and anode electrodes; and the anode is a metal network or net which is highly transparent to electrons and through which fly the electrons accelerated by the electric field existing between the cathode and anode electrodes due to the voltage of the first or main capacitor. Preferably the sample carrier, which is disposed on the side of the anode electrode facing away from the cathode electrode, is mounted so that it is adjustable along the axis of the electrode system.

Abstract translation: 一种用于脉冲电子束的发生器，包括用于进行高压放电的真空室，阴极和阳极电极，用于照射设置在真空室中的加速电荷载体的样品，以及第一高压电容器，其连接在阴极和 阳极用作电极之间的高电压放电的电压源。 该发生器还设置有用于产生辅助放电的装置，其启动阴极和阳极电极之间的放电过程，该布置包括触发电极和可连接在阴极和触发电极之间的第二高压电容器 作为辅助放电的能源; 阴极电极和触发电极之间的距离使得当第二触发电容器或触发电容器导电连接在触发电极和阴极电极之间时，在其间产生火花放电，导致形成触发等离子体，其启动高电压放电。 此外，阴极电极设置有中心孔，触发器等离子体可以通过该中心孔离开形成在阴极和阳极之间的放电室; 并且阳极是对电子高度透明的金属网络或网络，并且由于第一或主电容器的电压，通过电子飞行由存在于阴极和阳极电极之间的电场加速的电子。 优选地，设置在阳极电极背离阴极的一侧的样品载体被安装成使得其可以沿电极系统的轴线调节。

公开(公告)号：US4163889A

公开(公告)日：1979-08-07

申请号：US751488

申请日：1976-12-17

Applicant: Theodorus M. B. Schoenmakers

Inventor： Theodorus M. B. Schoenmakers

IPC: H01J37/077 ,  B23K15/00

CPC classification number: H01J37/077

Abstract: A device for the simultaneous operation of a number of gas discharge electron guns in which electron beams produced by the guns have different intensities due to different diameters of discharge spaces and/or due to a different anode-cathode distance.

Abstract translation: 用于同时操作多个气体放电电子枪的装置，其中由喷枪产生的电子束由于放电空间的直径和/或由于不同的阳极 - 阴极距离而具有不同的强度。

公开(公告)号：US3377506A

公开(公告)日：1968-04-09

申请号：US53886266

申请日：1966-03-30

Applicant: UNITED AIRCRAFT CORP

Inventor： BANAS CONRAD M ,  BROWN CLYDE O ,  POWERS DONALD E

IPC: H01J1/13 ,  H01J27/02 ,  H01J37/04 ,  H01J37/077 ,  H01J37/24 ,  H01J37/304

CPC classification number: H01J1/135 ,  H01J27/02 ,  H01J37/04 ,  H01J37/077 ,  H01J37/24 ,  H01J37/304

公开(公告)号：US3337676A

公开(公告)日：1967-08-22

申请号：US35685364

申请日：1964-04-02

Applicant: WAH CHANG CORP

Inventor： YIH STEPHEN W H ,  DIMICK ROYAL H

IPC: H01J37/077 ,  H01J37/30 ,  H01J37/305

CPC classification number: H01J37/305 ,  H01J37/077 ,  H01J37/3007