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公开(公告)号:US5670065A
公开(公告)日:1997-09-23
申请号:US498437
申请日:1995-07-05
Applicant: Herrmann Bickmann , Klaus Nauenburg , Juergen Weichart
Inventor: Herrmann Bickmann , Klaus Nauenburg , Juergen Weichart
CPC classification number: H01J37/32743 , B01J19/08 , B01J19/12 , B01J19/20 , B01J19/28 , H01J37/32752 , H05H1/42 , B01J2219/0894 , B01J2219/182 , B01J2219/187
Abstract: "An apparatus for plasma treating fine-grained materials, having a receptacle that can be evacuated and that accepts and agitates the materials to be treated, and having an electromagnetic device that comprises an excitation device and electrodes and to activate a process gas filling the space of the receptacle means to form a plasma, wherein the receptacle has a conveyor which conveys the material from one end to another end and is configured for continuous admission and discharge of the material and admission and discharge of the process gas, but that is otherwise hermetically closed, and at which or in which the electromagnetic excitation device that effects the plasma formation within the conveyor is arranged."
Abstract translation: “一种用于等离子体处理细粒材料的装置,具有能够抽真空的容器并且接收和搅动待处理的材料,并具有包括激发装置和电极的电磁装置,并激活填充空间的工艺气体 的容器意味着形成等离子体,其中容器具有将材料从一端传送到另一端的输送机,并且被配置为连续地进入和排出材料以及进入和排出处理气体,但是否则气密地 关闭,并且布置有在输送机内实现等离子体形成的电磁激励装置。