公开(公告)号：US09067234B2

公开(公告)日：2015-06-30

申请号：US13519212

申请日：2010-06-03

申请人： Masaaki Tanabe ,  Hideo Hirata ,  Mitsunori Oda

发明人： Masaaki Tanabe ,  Hideo Hirata ,  Mitsunori Oda

IPC分类号： B05B1/02 ,  B05C13/02 ,  H01L21/67 ,  H01L21/677 ,  B05C5/02

CPC分类号： B05C13/02 ,  B05C5/0208 ,  B05C5/0216 ,  B05C5/0254 ,  B05C5/0283 ,  H01L21/6715 ,  H01L21/6776

摘要： A substrate coating device (10) includes a precision stage (7), a nozzle (8), and conveyors (3 to 6 and 21). The precision stage (7) has a horizontal placement surface for placing a substrate W thereon and is configured to be reciprocable between an upstream end and a downstream end in a conveying direction. The conveyors (3 to 6 and 21) are configured to convey the substrate W in the conveying direction via the placement surface of the precision stage (7) in such manner that a surface of the substrate W is positioned in a horizontal plane. The intermediate conveyor (21) is liftable between a conveying position where a conveying surface of the intermediate conveyor is coincident with the placement surface of the stage and a non-conveying position where the conveying surface is positioned below the placement surface of the stage.

摘要翻译： 衬底涂覆装置（10）包括精密工作台（7），喷嘴（8）和输送机（3至6和21）。 精密工作台（7）具有用于将衬底W放置在其上的水平放置表面，并且构造成可沿输送方向在上游端和下游端之间往复运动。 输送机（3〜6,21）构成为，以使基板W的表面位于水平面的方式，经由精密台（7）的配置面在输送方向上输送基板W. 中间输送器（21）可以在输送位置与中间输送机的输送表面与载物台的放置表面重合的输送位置和输送表面位于载物台的放置表面下方的非输送位置之间提升。

公开(公告)号：US20120288635A1

公开(公告)日：2012-11-15

申请号：US13519212

申请日：2010-06-03

申请人： Masaaki Tanabe ,  Hideo Hirata ,  Mitsunori Oda

发明人： Masaaki Tanabe ,  Hideo Hirata ,  Mitsunori Oda

IPC分类号： B05B1/02 ,  B05D1/02

CPC分类号： B05C13/02 ,  B05C5/0208 ,  B05C5/0216 ,  B05C5/0254 ,  B05C5/0283 ,  H01L21/6715 ,  H01L21/6776

摘要： A substrate coating device (10) includes a precision stage (7), a nozzle (8), and conveyors (3 to 6 and 21). The precision stage (7) has a horizontal placement surface for placing a substrate W thereon and is configured to be reciprocable between an upstream end and a downstream end in a conveying direction. The conveyors (3 to 6 and 21) are configured to convey the substrate W in the conveying direction via the placement surface of the precision stage (7) in such manner that a surface of the substrate W is positioned in a horizontal plane. The intermediate conveyor (21) is liftable between a conveying position where a conveying surface of the intermediate conveyor is coincident with the placement surface of the stage and a non-conveying position where the conveying surface is positioned below the placement surface of the stage.

摘要翻译： 衬底涂覆装置（10）包括精密工作台（7），喷嘴（8）和输送机（3至6和21）。 精密工作台（7）具有用于将衬底W放置在其上的水平放置表面，并且构造成可沿输送方向在上游端和下游端之间往复运动。 输送机（3〜6,21）构成为，以使基板W的表面位于水平面的方式，经由精密台（7）的配置面在输送方向上输送基板W. 中间输送器（21）可以在输送位置与中间输送机的输送表面与载物台的放置表面重合的输送位置和输送表面位于载物台的放置表面下方的非输送位置之间提升。

公开(公告)号：US08435955B2

公开(公告)日：2013-05-07

申请号：US12584577

申请日：2009-09-08

申请人： Yoshiharu Masui ,  Atsuko Tomida ,  Hideo Hirata ,  Koichi Otsuki

发明人： Yoshiharu Masui ,  Atsuko Tomida ,  Hideo Hirata ,  Koichi Otsuki

IPC分类号： C07K5/062

CPC分类号： A61L9/01

摘要： By selecting one or more deodorizing agents from among glycine, cysteine and glycylglycine, and incorporating the selected deodorizing agent(s) and a surfactant, the toxicity of the surfactant to men and beasts is controlled without inhibiting the antibacterial actions that the surfactant has inherently. Glycine, cysteine, and glycylglycine each have a strong deodorizing action. The invention causes antibacterial deodorants to further have a deodorizing action by using such deodorizing agents. Moreover, the invention increases the permeating ability, thereby enhancing both the antibacterial action and the deodorizing action by subjecting water to treatment for fragmenting a cluster of the water and then adding the resulting active water as a diluent, or by preparing the diluent by incorporating alcohol with the active water.

摘要翻译： 通过从甘氨酸，半胱氨酸和甘氨酰甘氨酸中选择一种或多种除臭剂，并掺入所选择的除臭剂和表面活性剂，可以控制表面活性剂对男性和野兽的毒性，而不会抑制表面活性剂固有的抗菌作用。 甘氨酸，半胱氨酸和甘氨酰甘氨酸各自具有强烈的除臭作用。 本发明通过使用这种除臭剂使抗菌除臭剂进一步具有除臭作用。 此外，本发明增加了渗透能力，从而通过对水进行处理来提高抗菌作用和除臭作用，将水分散，然后加入作为稀释剂的所得活性水，或通过加入醇制备稀释剂 与活跃的水。

公开(公告)号：US09016235B2

公开(公告)日：2015-04-28

申请号：US13256562

申请日：2010-03-12

申请人： Yoshinori Ikagawa ,  Mitsunori Oda ,  Minoru Yamamoto ,  Takashi Kawaguchi ,  Masaaki Tanabe ,  Hideo Hirata

发明人： Yoshinori Ikagawa ,  Mitsunori Oda ,  Minoru Yamamoto ,  Takashi Kawaguchi ,  Masaaki Tanabe ,  Hideo Hirata

IPC分类号： B05C11/00 ,  B05C5/00 ,  B05C11/10 ,  B05C5/02 ,  B05D1/30 ,  B05D1/02 ,  B05B12/08

CPC分类号： B05C11/1007 ,  B05B12/082 ,  B05C5/0258 ,  B05C11/1005

摘要： The substrate coating device (10) includes a slit nozzle (1), a first camera (3), a second camera (4), a control section (5), a pump (8), and a pressure control chamber (9). The control section (5) controls the supply of the coating liquid from the pump (8) to the slit nozzle (1) in accordance with the result of comparison between a bead shape imaged by the first camera (3) and a reference shape. The control section (5) also controls the air pressure on the upstream side of the slit nozzle (1) by the pressure control chamber (9) in accordance with the result of comparison between a distance measured from an image taken by the second camera (4) and a reference distance.

摘要翻译： 基板涂布装置（10）包括狭缝喷嘴（1），第一相机（3），第二相机（4），控制部分（5），泵（8）和压力控制室（9） 。 控制部（5）根据由第一照相机（3）成像的珠粒形状与基准形状的比较结果，控制从泵（8）到狭缝喷嘴（1）的涂布液的供给。 控制部（5）还根据从由第二照相机拍摄的图像测得的距离的比较来控制压力控制室（9）在狭缝喷嘴（1）的上游侧的空气压力 4）和参考距离。

公开(公告)号：US20100160242A1

公开(公告)日：2010-06-24

申请号：US12584577

申请日：2009-09-08

申请人： Yoshiharu Masui ,  Atsuko Tomida ,  Hideo Hirata ,  Koichi Otsuki

发明人： Yoshiharu Masui ,  Atsuko Tomida ,  Hideo Hirata ,  Koichi Otsuki

IPC分类号： A01N33/04 ,  A01N37/44 ,  A01N37/12 ,  A01P1/00

CPC分类号： A61L9/01

摘要： By selecting one or more deodorizing agents from among glycine, cysteine and glycylglycine, and incorporating the selected deodorizing agent(s) and a surfactant, the toxicity of the surfactant to men and beasts is controlled without inhibiting the antibacterial actions that the surfactant has inherently. Glycine, cysteine, and glycylglycine each have a strong deodorizing action. The invention causes antibacterial deodorants to further have a deodorizing action by using such deodorizing agents. Moreover, the invention increases the permeating ability, thereby enhancing both the antibacterial action and the deodorizing action by subjecting water to treatment for fragmenting a cluster of the water and then adding the resulting active water as a diluent, or by preparing the diluent by incorporating alcohol to the active water.

摘要翻译： 通过从甘氨酸，半胱氨酸和甘氨酰甘氨酸中选择一种或多种除臭剂，并掺入所选择的除臭剂和表面活性剂，可以控制表面活性剂对男性和野兽的毒性，而不会抑制表面活性剂固有的抗菌作用。 甘氨酸，半胱氨酸和甘氨酰甘氨酸各自具有强烈的除臭作用。 本发明通过使用这种除臭剂使抗菌除臭剂进一步具有除臭作用。 此外，本发明增加了渗透能力，从而通过对水进行处理来提高抗菌作用和除臭作用，将水分散，然后加入作为稀释剂的所得活性水，或通过加入醇制备稀释剂 活跃的水。

公开(公告)号：US08770141B2

公开(公告)日：2014-07-08

申请号：US13377606

申请日：2010-04-19

申请人： Yoshinori Ikagawa ,  Mitsunori Oda ,  Minoru Yamamoto ,  Takashi Kawaguchi ,  Hideo Hirata ,  Masaaki Tanabe

发明人： Yoshinori Ikagawa ,  Mitsunori Oda ,  Minoru Yamamoto ,  Takashi Kawaguchi ,  Hideo Hirata ,  Masaaki Tanabe

IPC分类号： B05C11/00 ,  C23C16/52 ,  B05D1/02

CPC分类号： B05C5/0262 ,  B05C5/0258 ,  B05C11/1013 ,  B05C11/1015 ,  B05C11/1023

摘要： A substrate coating device is provided which is capable of reducing non-uniform film thickness areas that take place in a coating start portion and a coating end portion during coating using a slit nozzle coater.The substrate coating device (10) includes at least a slider driving motor (4), a pump (8), a delivery state quantity measuring section (82), and a control section (5). The slider driving motor (4) scans a slit nozzle (1) over a substrate (100) at an established velocity relative to the substrate (100). The pump (8) controls the supply of the coating liquid to the slit nozzle (1). The delivery state quantity measuring section (82) is configured to measure a state quantity indicative of a delivery state of the coating liquid from the tip of the slit nozzle (1). The control section (5) corrects control information to be fed to the slider driving motor (4) in such a manner as to cancel out a difference between control information fed to the pump (8) and measurement information fed from the delivery state quantity measuring section (82) based on difference information indicative of the difference.

摘要翻译： 提供一种基板涂布装置，其能够在使用狭缝喷嘴涂布机的涂布期间减少在涂层起始部分和涂覆端部发生的不均匀的膜厚度区域。 基板涂布装置（10）至少包括滑块驱动电机（4），泵（8），输送状态量测量部（82）和控制部（5）。 滑块驱动电机（4）以相对于基板（100）的建立速度在基板（100）上扫描狭缝喷嘴（1）。 泵（8）控制向狭缝喷嘴（1）供给涂布液。 输送状态量测量部（82）被配置为从狭缝喷嘴（1）的前端测量表示涂布液的输送状态的状态量。 所述控制部（5）以与所述输送状态量计量供给的所述测量信息和从所述输送状态量计量得到的测量信息之间的差异来取消供给到所述滑块驱动电动机（4）的控制信息， （82）基于指示差异的差异信息。

公开(公告)号：US20120085282A1

公开(公告)日：2012-04-12

申请号：US13377606

申请日：2010-04-19

申请人： Yoshinori Ikagawa ,  Mitsunori Oda ,  Minoru Yamamoto ,  Takashi Kawaguchi ,  Hideo Hirata ,  Masaaki Tanabe

发明人： Yoshinori Ikagawa ,  Mitsunori Oda ,  Minoru Yamamoto ,  Takashi Kawaguchi ,  Hideo Hirata ,  Masaaki Tanabe

IPC分类号： B05C5/00

CPC分类号： B05C5/0262 ,  B05C5/0258 ,  B05C11/1013 ,  B05C11/1015 ,  B05C11/1023

摘要： A substrate coating device is provided which is capable of reducing non-uniform film thickness areas that take place in a coating start portion and a coating end portion during coating using a slit nozzle coater.The substrate coating device (10) includes at least a slider driving motor (4), a pump (8), a delivery state quantity measuring section (82), and a control section (5). The slider driving motor (4) scans a slit nozzle (1) over a substrate (100) at an established velocity relative to the substrate (100). The pump (8) controls the supply of the coating liquid to the slit nozzle (1). The delivery state quantity measuring section (82) is configured to measure a state quantity indicative of a delivery state of the coating liquid from the tip of the slit nozzle (1). The control section (5) corrects control information to be fed to the slider driving motor (4) in such a manner as to cancel out a difference between control information fed to the pump (8) and measurement information fed from the delivery state quantity measuring section (82) based on difference information indicative of the difference.

摘要翻译： 提供一种基板涂布装置，其能够在使用狭缝喷嘴涂布机的涂布期间减少在涂层起始部分和涂覆端部发生的不均匀的膜厚度区域。 基板涂布装置（10）至少包括滑块驱动电机（4），泵（8），输送状态量测量部（82）和控制部（5）。 滑块驱动电机（4）以相对于基板（100）的建立速度在基板（100）上扫描狭缝喷嘴（1）。 泵（8）控制向狭缝喷嘴（1）供给涂布液。 输送状态量测量部（82）被配置为从狭缝喷嘴（1）的前端测量表示涂布液的输送状态的状态量。 所述控制部（5）以与所述输送状态量计量供给的测量信息和从所述输送状态量计量得到的测量信息之间的差异来校正供给到所述滑块驱动电动机（4）的控制信息， （82）基于指示差异的差异信息。

公开(公告)号：US20120000420A1

公开(公告)日：2012-01-05

申请号：US13256562

申请日：2010-03-12

申请人： Yoshinori Ikagawa ,  Mitsunori Oda ,  Minoru Yamamoto ,  Takashi Kawaguchi ,  Masaaki Tanabe ,  Hideo Hirata

发明人： Yoshinori Ikagawa ,  Mitsunori Oda ,  Minoru Yamamoto ,  Takashi Kawaguchi ,  Masaaki Tanabe ,  Hideo Hirata

IPC分类号： B05C11/10

CPC分类号： B05C11/1007 ,  B05B12/082 ,  B05C5/0258 ,  B05C11/1005

摘要： The substrate coating device (10) includes a slit nozzle (1), a first camera (3), a second camera (4), a control section (5), a pump (8), and a pressure control chamber (9). The control section (5) controls the supply of the coating liquid from the pump (8) to the slit nozzle (1) in accordance with the result of comparison between a bead shape imaged by the first camera (3) and a reference shape. The control section (5) also controls the air pressure on the upstream side of the slit nozzle (1) by the pressure control chamber (9) in accordance with the result of comparison between a distance measured from an image taken by the second camera (4) and a reference distance.

摘要翻译： 基板涂布装置（10）包括狭缝喷嘴（1），第一相机（3），第二相机（4），控制部分（5），泵（8）和压力控制室（9） 。 控制部（5）根据由第一照相机（3）成像的珠粒形状与基准形状的比较结果，控制从泵（8）到狭缝喷嘴（1）的涂布液的供给。 控制部（5）还根据从由第二照相机拍摄的图像测得的距离的比较来控制压力控制室（9）在狭缝喷嘴（1）的上游侧的空气压力 4）和参考距离。