公开(公告)号：US20100060878A1

公开(公告)日：2010-03-11

申请号：US12539281

申请日：2009-08-11

申请人： RYOUJI NEMOTO ,  TOMOAKI HAYASHI ,  SATOSHI UEHARA ,  MITSUYOSHI KOIZUMI ,  HIDETSUGU YUKI

发明人： RYOUJI NEMOTO ,  TOMOAKI HAYASHI ,  SATOSHI UEHARA ,  MITSUYOSHI KOIZUMI ,  HIDETSUGU YUKI

IPC分类号： G03B27/58 ,  G01B11/14 ,  G03B27/32

CPC分类号： G01B11/03 ,  G03B27/32 ,  G03F7/70291 ,  G03F7/70508 ,  G03F7/70525 ,  G03F7/70775

摘要： A chuck 10 which supports a substrate 1 is moved by using an X-direction stage 5, and a position of the chuck 10 is detected at the same time. A traveling error of the X-direction stage 5 is detected according to a detecting result of position of the chuck 10. Then, a coordinate of drawing data supplied to a driving circuit 27 of a light beam irradiation device 20 is modified according to a detecting result of the traveling error of the X-direction stage 5, and the patterned data having the modified coordinate is supplied to the driving circuit 27 of the light beam irradiation device 20. Even if the traveling error such as shifting or yawing occurs in the X-direction stage 5, patterns can still be precisely drawn.

摘要翻译： 通过使用X方向台5移动支撑基板1的卡盘10，同时检测卡盘10的位置。 根据卡盘10的位置的检测结果来检测X方向台5的移动误差。然后，根据检测到的光束照射装置20的提供给驱动电路27的绘图数据的坐标被修改 X方向平台5的行进误差的结果，具有改变的坐标的图案化数据被提供给光束照射装置20的驱动电路27.即使在X方向上发生诸如偏移的行驶错误 方向阶段5，仍然可以精确绘制图案。

公开(公告)号：US5093751A

公开(公告)日：1992-03-03

申请号：US496594

申请日：1990-03-21

申请人： Hidetsugu Yuki ,  Kiyomi Yamaguchi

发明人： Hidetsugu Yuki ,  Kiyomi Yamaguchi

IPC分类号： G11B5/012 ,  G11B20/18

CPC分类号： G11B20/1816 ,  G11B5/012

摘要： The present invention comprises a variable frequency converter, a band-pass filter having a constant center frequency and a predetermined band-width, an effective value detection circuit and a control signal generator for generating a control signal for varying a conversion frequency of the variable frequency converter. A test signal readout from a magnetic recording medium is frequency-converted by the variable frequency converter and the band-pass filter derives a constant frequency signal from frequencies frequency-converted by the variable frequency-converter to derive a predetermined frequency component of the carry noise. The effective value detector detects effective value of the derived frequency component, in which the control signal generator sequentially changes the frequency converted by the variable frequency converter to sequentially change the predetermined frequency component of the derived carry noise signal to thereby obtain equivalent effective values for respective frequency components in the frequency spectrum of the carry noise signal. With the effective values of the respective frequency components of the carry noise signal obtained in this manner, the detected carry noise energy can be easily calculated and by subtracting the base noise energy thereform, the original carry noise energy can be obtained.

摘要翻译： 本发明包括可变频率转换器，具有恒定的中心频率和预定带宽的带通滤波器，有效值检测电路和控制信号发生器，用于产生用于改变可变频率的转换频率的控制信号 转换器。 从磁记录介质读出的测试信号由可变频率转换器进行频率转换，带通滤波器从由可变频率转换器频率转换的频率得到恒定频率信号，以导出进位噪声的预定频率分量 。 有效值检测器检测导出的频率分量的有效值，其中控制信号发生器顺序地改变由可变频率转换器转换的频率，以顺序地改变导出的进位噪声信号的预定频率分量，从而获得相应的有效值 进位噪声信号的频谱中的频率分量。 利用以这种方式获得的进位噪声信号的各个频率分量的有效值，可以容易地计算检测到的进位噪声能量，并且通过减去基本噪声能量，可以获得原始进位噪声能量。

公开(公告)号：US5812560A

公开(公告)日：1998-09-22

申请号：US896427

申请日：1997-07-17

申请人： Hidetsugu Yuki

发明人： Hidetsugu Yuki

IPC分类号： G06F11/267 ,  G11B5/012 ,  G11B20/18 ,  G06F11/00

CPC分类号： G06F11/2221 ,  G11B20/182 ,  G11B5/012

摘要： A magnetic disk certifier according to the present invention is featured by comprising a write circuit for writing a test data having a period which is 1/n of a bit period of the test data, error of which is to be detected, in a magnetic disk, where n is an integer equal to or larger than 2, a read-out circuit for reading out the test data written in the magnetic disk, a comparator circuit for producing a detection signal by comparing a read-out signal read out from the read-out circuit with a predetermined signal or a predetermined reference level and an error detector circuit for detecting an error by receiving the detection signal from the comparator circuit with a period which is n times the bit period of the test data written in the magnetic disk, a bit data of an error detected by the error detector circuit being used as an error signal by converting each bit of the bit data into n bits.

摘要翻译： 根据本发明的磁盘验证器的特征在于包括写入电路，用于将具有要检测的误差的测试数据的1 / n的周期的测试数据写入磁盘 ，其中n是等于或大于2的整数，用于读出写入磁盘的测试数据的读出电路，用于通过比较从读取的读出读出的读出信号来产生检测信号的比较器电路 具有预定信号或预定参考电平的输出电路和误差检测器电路，用于通过以写入磁盘的测试数据的比特周期的n倍的周期从比较器电路接收检测信号来检测误差， 通过将比特数据的每个比特转换成n比特，由误差检测器电路检测的误差的位数据被用作误差信号。